JPH0413756Y2 - - Google Patents
Info
- Publication number
- JPH0413756Y2 JPH0413756Y2 JP1988151278U JP15127888U JPH0413756Y2 JP H0413756 Y2 JPH0413756 Y2 JP H0413756Y2 JP 1988151278 U JP1988151278 U JP 1988151278U JP 15127888 U JP15127888 U JP 15127888U JP H0413756 Y2 JPH0413756 Y2 JP H0413756Y2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- detector
- fire
- alarm
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007789 gas Substances 0.000 claims description 65
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims description 19
- 229910000077 silane Inorganic materials 0.000 claims description 19
- 239000004065 semiconductor Substances 0.000 claims description 18
- 238000002485 combustion reaction Methods 0.000 claims description 16
- 238000000034 method Methods 0.000 claims description 11
- 238000004519 manufacturing process Methods 0.000 claims description 9
- 238000001514 detection method Methods 0.000 claims description 7
- 239000000779 smoke Substances 0.000 claims description 7
- 230000002265 prevention Effects 0.000 claims description 6
- 231100000331 toxic Toxicity 0.000 claims description 3
- 230000002588 toxic effect Effects 0.000 claims description 3
- 229910044991 metal oxide Inorganic materials 0.000 claims description 2
- 150000004706 metal oxides Chemical class 0.000 claims description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 5
- 150000004767 nitrides Chemical class 0.000 description 5
- 229910052760 oxygen Inorganic materials 0.000 description 5
- 239000001301 oxygen Substances 0.000 description 5
- 235000012431 wafers Nutrition 0.000 description 5
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000003860 storage Methods 0.000 description 3
- 238000001784 detoxification Methods 0.000 description 2
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 2
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910002091 carbon monoxide Inorganic materials 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Fire Alarms (AREA)
- Fire-Detection Mechanisms (AREA)
- Emergency Alarm Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988151278U JPH0413756Y2 (ko) | 1988-11-22 | 1988-11-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988151278U JPH0413756Y2 (ko) | 1988-11-22 | 1988-11-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0184187U JPH0184187U (ko) | 1989-06-05 |
| JPH0413756Y2 true JPH0413756Y2 (ko) | 1992-03-30 |
Family
ID=31425177
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988151278U Expired JPH0413756Y2 (ko) | 1988-11-22 | 1988-11-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0413756Y2 (ko) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101988361B1 (ko) * | 2017-06-15 | 2019-06-12 | 버슘머트리얼즈 유에스, 엘엘씨 | 가스 공급 시스템 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5138797U (ko) * | 1974-09-17 | 1976-03-23 | ||
| JPS5396895A (en) * | 1977-02-03 | 1978-08-24 | Nitto Electric Ind Co | Gas sensor element |
| JPS553510A (en) * | 1978-06-21 | 1980-01-11 | Yasunori Nagao | Inner cylinder for rotary incinerator |
| JPS5721350A (en) * | 1980-05-28 | 1982-02-04 | Naarden International Nv | Perfume composition and use |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0216283Y2 (ko) * | 1977-09-19 | 1990-05-02 |
-
1988
- 1988-11-22 JP JP1988151278U patent/JPH0413756Y2/ja not_active Expired
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5138797U (ko) * | 1974-09-17 | 1976-03-23 | ||
| JPS5396895A (en) * | 1977-02-03 | 1978-08-24 | Nitto Electric Ind Co | Gas sensor element |
| JPS553510A (en) * | 1978-06-21 | 1980-01-11 | Yasunori Nagao | Inner cylinder for rotary incinerator |
| JPS5721350A (en) * | 1980-05-28 | 1982-02-04 | Naarden International Nv | Perfume composition and use |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0184187U (ko) | 1989-06-05 |
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