JPH0413681B2 - - Google Patents
Info
- Publication number
- JPH0413681B2 JPH0413681B2 JP59245238A JP24523884A JPH0413681B2 JP H0413681 B2 JPH0413681 B2 JP H0413681B2 JP 59245238 A JP59245238 A JP 59245238A JP 24523884 A JP24523884 A JP 24523884A JP H0413681 B2 JPH0413681 B2 JP H0413681B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- total reflection
- molybdenum
- reflection mirror
- tungsten
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 58
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 32
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 24
- 229910052710 silicon Inorganic materials 0.000 claims description 24
- 239000010703 silicon Substances 0.000 claims description 24
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 22
- 229910052750 molybdenum Inorganic materials 0.000 claims description 22
- 239000011733 molybdenum Substances 0.000 claims description 22
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 21
- 229910052721 tungsten Inorganic materials 0.000 claims description 21
- 239000010937 tungsten Substances 0.000 claims description 21
- 229910002092 carbon dioxide Inorganic materials 0.000 claims description 16
- 239000001569 carbon dioxide Substances 0.000 claims description 16
- 229910052751 metal Inorganic materials 0.000 claims description 14
- 239000002184 metal Substances 0.000 claims description 14
- 238000011156 evaluation Methods 0.000 description 10
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 9
- 229910052802 copper Inorganic materials 0.000 description 9
- 239000010949 copper Substances 0.000 description 9
- 239000000463 material Substances 0.000 description 8
- 238000010521 absorption reaction Methods 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 238000005498 polishing Methods 0.000 description 3
- 239000006061 abrasive grain Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N Acrylic acid Chemical compound OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 229910001096 P alloy Inorganic materials 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Optical Elements Other Than Lenses (AREA)
- Laminated Bodies (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24523884A JPS61123801A (ja) | 1984-11-20 | 1984-11-20 | 炭酸ガスレ−ザ用全反射鏡基板 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24523884A JPS61123801A (ja) | 1984-11-20 | 1984-11-20 | 炭酸ガスレ−ザ用全反射鏡基板 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61123801A JPS61123801A (ja) | 1986-06-11 |
| JPH0413681B2 true JPH0413681B2 (de) | 1992-03-10 |
Family
ID=17130711
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24523884A Granted JPS61123801A (ja) | 1984-11-20 | 1984-11-20 | 炭酸ガスレ−ザ用全反射鏡基板 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61123801A (de) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2536491B2 (ja) * | 1986-08-25 | 1996-09-18 | 三菱マテリアル株式会社 | 反射鏡用複合ろう付け部材 |
| JPS63144304A (ja) * | 1986-12-08 | 1988-06-16 | Toshiba Corp | レ−ザ用金属ミラ−及びその製造方法 |
| EP0451727B1 (de) * | 1990-04-06 | 1995-11-02 | Sony Corporation | Thermodruckkopf |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57114103A (en) * | 1981-01-06 | 1982-07-15 | Agency Of Ind Science & Technol | Manufacture of mirror for infrared laser |
| JPS5861247A (ja) * | 1981-10-07 | 1983-04-12 | Toshiba Corp | レ−ザ光反射材料及びその製造方法 |
-
1984
- 1984-11-20 JP JP24523884A patent/JPS61123801A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57114103A (en) * | 1981-01-06 | 1982-07-15 | Agency Of Ind Science & Technol | Manufacture of mirror for infrared laser |
| JPS5861247A (ja) * | 1981-10-07 | 1983-04-12 | Toshiba Corp | レ−ザ光反射材料及びその製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61123801A (ja) | 1986-06-11 |
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