JPH0413049U - - Google Patents
Info
- Publication number
- JPH0413049U JPH0413049U JP5009790U JP5009790U JPH0413049U JP H0413049 U JPH0413049 U JP H0413049U JP 5009790 U JP5009790 U JP 5009790U JP 5009790 U JP5009790 U JP 5009790U JP H0413049 U JPH0413049 U JP H0413049U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- axis
- rotating
- drive shaft
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims 4
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図は本考案の薄膜形成装置の１実施例の切
断正面図、第２図は従来例の切断正面図である。 ８……円筒基板、９……基板軸、１０……支持
腕、１２……駆動軸、１６……基板傘歯車、２３
……固定平歯車、２５……連動軸、２７……回転
平歯車、２８……連動傘歯車。
断正面図、第２図は従来例の切断正面図である。 ８……円筒基板、９……基板軸、１０……支持
腕、１２……駆動軸、１６……基板傘歯車、２３
……固定平歯車、２５……連動軸、２７……回転
平歯車、２８……連動傘歯車。
Claims (1)
- 回転する駆動軸の軸線に対し垂直方向に配設さ
れた円筒基板と、前記駆動軸に延設され前記基板
の基板軸を回転自在に支持した支持腕と、前記駆
動軸の回転に連動し前記基板軸を回転する回転手
段とを備えた薄膜形成装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5009790U JPH0413049U (ja) | 1990-05-14 | 1990-05-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5009790U JPH0413049U (ja) | 1990-05-14 | 1990-05-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0413049U true JPH0413049U (ja) | 1992-02-03 |
Family
ID=31568355
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5009790U Pending JPH0413049U (ja) | 1990-05-14 | 1990-05-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0413049U (ja) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60185696A (ja) * | 1984-03-02 | 1985-09-21 | Koji Ozaki | 気密防水服 |
| JPH07150351A (ja) * | 1993-11-26 | 1995-06-13 | Nippon Steel Corp | イオンプレーティング装置 |
| JP2014125667A (ja) * | 2012-12-27 | 2014-07-07 | Gunze Ltd | 表面処理装置 |
-
1990
- 1990-05-14 JP JP5009790U patent/JPH0413049U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60185696A (ja) * | 1984-03-02 | 1985-09-21 | Koji Ozaki | 気密防水服 |
| JPH07150351A (ja) * | 1993-11-26 | 1995-06-13 | Nippon Steel Corp | イオンプレーティング装置 |
| JP2014125667A (ja) * | 2012-12-27 | 2014-07-07 | Gunze Ltd | 表面処理装置 |