JPH04130152U - Pressure head for surface polishing - Google Patents

Abstract

(57) [Summary] [Purpose] To automatically perform the work of removing a work holding block from a pressure head using a simple structure. [Structure] The pressure head has a push pin 12 that can freely come out and go out from the block mounting surface 2a, a pressing member 13 that presses the push pin 12, a cylinder 14 that operates as the pressure head rises, and a pressing force applied to the cylinder. A force transmitting means 8 consisting of a wire 25 is provided which transmits force to the member 13 to press the push pin 12. [Effect] At the same time as the pressure head starts to rise, the cylinder 14
is activated, and the push pin 12 is pushed down by the wire 25 via the pressing member 13.
The work holding block 4 is automatically peeled off.

Description

[Detailed explanation of the idea]

0001

[Industrial application field]

This invention is a flat surface polishing device that polishes one side of a workpiece such as a semiconductor wafer. This relates to the pressure head used to press the workpiece to be polished against the surface plate. be.

0002

[Conventional technology]

For example, a polishing machine or a lapping machine that polishes one side of a workpiece. In any surface polishing machine, a pressure head is raised and lowered by a cylinder above the surface plate. The pressure head presses the workpiece against a rotating surface plate for polishing. It is configured to

0003 The pressure head is generally attached to the lower end of the push rod connected to the cylinder. A workpiece that holds a workpiece is attached to the reference plate. The block holding block is detachably attached, and all attachment and detachment are done manually. It relied on manipulation. For example, what is disclosed in Utility Model Publication No. 60-37254 is A push rod is provided on the reference plate to separate the holding block from the mounting surface. At the same time, a lever equipped with a cam to push down the push rod is installed, and the end of machining is completed. When finished, manually rotate the lever and use the cam to push down the push rod to release the retaining block. After removing the lock from the reference plate, raise the pressure head. I'm doing it.

0004 Therefore, the lever must be rotated every time machining is completed, making it non-trivial. In addition to improving efficiency, manual operation is also an obstacle to automating processing. there was.

[0005]

[Problem that the idea aims to solve]

The problem with this invention is to simplify the work of removing the workpiece holding block from the pressure head. The objective is to configure the system so that it can be automatically performed using a suitable configuration.

[0006]

[Means to solve the problem]

In order to solve the above problems, this invention has a workpiece holding block on the block mounting surface. It is attached removably and presses the workpiece attached to the holding block against the rotating surface plate. In the pressure head that performs polishing using a pressing member that presses the push pin, and a series that operates as the pressing head rises. Acting force that transmits the acting force of the cylinder to the pressing member and presses the push pin. It is characterized by being provided with a transmission means.

[0007] In addition, in the present invention, the pressure head has a structure that can freely appear and retract from the block mounting surface. Attach a push pin and a cylinder that operates as the pressure head rises, and It is also possible to have a structure in which the piston rod of the cylinder is directly connected to the push pin.

[0008] Furthermore, in the present invention, a fluid hole is provided on the block mounting surface, and the fluid hole is pressurized. Connects to a source of pressure fluid through a valve that opens the flow path as the head rises. It can also be configured as

[0009]

[Effect]

When machining is completed, the cylinder operates at the same time as the pressure head begins to rise, and the applied force The push pin is pushed by the pushing member via the transmission means or directly by the cylinder. The work holding block is pushed by the push pin and the block mounting surface is It will be peeled off. Alternatively, the valve operates as the pressure head rises, supplying pressure fluid to the fluid hole. The work holding block is pushed by the pressure fluid and peeled off from the block mounting surface. be done.

0010

【Example】

Hereinafter, embodiments of the present invention will be described in detail based on the drawings. In the pressure head of the first embodiment shown in FIGS. 1 and 2, 1 is a push rod. The cylinder attached to the machine body of the surface polishing machine moves the surface above the surface plate. The push rod 1 is supported so that it can be raised and lowered freely. The reference plate 2 for mounting the bearing block 4 is attached to the alignment bearing 5. It is rotatably and swingably attached via the shaft.

[0011] The inside of the reference plate 2 is designed to allow cooling water to flow when polishing the workpiece 3. A second water cooling chamber 7 is formed, and this water cooling chamber 7 is divided into upper and lower parts by a baffle plate 8. are divided into small chambers 7a, 7b, and these small chambers 7a, 7b are connected to the baffle plate 8. The outer passages 7c communicate with each other, and the lower chamber 7a is connected to the push rod. The upper chamber 7b is connected to the cooling water source by the supply channel 9 in the push rod. A discharge passage 10 in the door 1 communicates with a cooling water reservoir, etc., and a small chamber 7 located below is connected to a supply passage 9. The cooling water supplied to a bypasses the baffle plate 8 and flows into the upper small chamber 7b. After that, it flows out from the discharge channel 10.

0012 The pressure head has a structure in which the workpiece holding block 4 is peeled off from the block mounting surface 2a. A push pin 12 that allows the block to be removed at the outer peripheral edge of the reference plate 2 The push pin 12 is disposed so that its tip protrudes and retracts from the attached surface 2a, and the push pin 12 is pushed. A pressing mechanism is disposed on the top of the push pin 12. A pressing member 13 provided therein, a cylinder 14 that operates as the pressing head rises, and the cylinder The action of transmitting the acting force of the connector 14 to the pressing member 13 to press the push pin 12 It consists of force transmission means 15.

[0013] The pressing member 13 includes a pressing portion 13a facing above the push pin 12, and a reference portion 13a facing above the push pin 12. It consists of an action part 13b extending in the center direction of the lens plate 2, and an inner part of both parts. It is rotatably supported on the reference plate 2 by a support shaft 16 at a position between The pressing part 13a is pushed by the coil spring 18 contracted between it and the reference plate 2. It is urged in a direction away from the spin pin 12.

[0014] Further, the cylinder 14 is mounted on a base plate 19 fixed to the push rod 1. The piston rod 14a passes through the base plate 19 and hangs down, and is pushed to its lower end. A ring 20 surrounding the rod 1 is attached. In addition, 21 in the figure is the base plate 1 This is a cover that hangs down from 9.

[0015] On the other hand, the acting force transmitting means 15 is located along the upper surface of the reference plate 2. It consists of a wire 25 inserted into a pipe 26, and one end of the wire 25 has an upper A first block 27 for rotating the pressing member 13 is connected to the other end of the wire 25. A second block 28 facing the ring 20 is connected thereto.

[0016] The first block 27 extends parallel to the action portion 13b of the pressing member 13. The horizontal part 27a and the end of the horizontal part 27a on the center side of the reference plate. It consists of a raised vertical part 27b, and at an intermediate position between both parts 27a and 27b. It is rotatably supported on the reference plate 2 by a support shaft 30. A roller 31 that comes into contact with the lower surface of the action part 13b is rotatably supported on the horizontal part 27a. On the other hand, in the vertical part 27b, one end of the wire 25 is connected to a connecting fitting whose position can be adjusted freely. 32, and the connecting fitting 32 and a support provided upright on the reference plate 2. The coil spring 34 compressed between the retaining rod 33 causes the roller 31 to move toward the action portion 13b. It is constantly biased in the direction away from the

[0017] Further, the second block 28 is attached to the side surface of the small diameter portion 2b at the base end of the reference plate. The second block 28 is rotatably supported by a support shaft 37 on a fixed support member 36. A roller 38 is attached to the other end and faces the lower surface of the ring 20.

[0018] The pressure head for surface polishing having the above configuration is used for a workpiece to which a plurality of workpieces 3 are attached. Attach the block holding block 4 to the mounting surface 2a, and supply cooling water to the water cooling chamber 7 through the supply passage 9. The workpiece 3 is polished by pressing it against a surface plate while supplying the workpiece 3.

[0019] When polishing is completed, the cylinder 14 is activated at the same time as the pressure head starts to rise, and the piston is Due to the extension of the stone rod 14a, the ring 20 is lowered and the second block 28 is lowered. In order to push down the roller 38, the other end of the second block 28 moves up and is connected to the other end. The wire 20 that has been pulled is pulled. Therefore, the second wire connected to the tip of the wire 20 1 block 27 rotates counterclockwise in the figure around the support shaft 30, and the horizontal part 27a rotates. Since the roller 31 pushes up the action portion 13b of the pressing member 13, the pressing member 13 The push pin 12 is rotated clockwise so that the pressing portion 13a presses down the push pin 12. child As a result, the push pin 12 presses the holding block 4 and the reference plate Peel it off from 2.

[0020] In this case, a ring 20 arranged to surround the push rod 1 is used to Since the roller 38 of the rack 28 is pushed down, the push rod 1 and lever The reference plate 2 is not affected by relative rotation with the reference plate 2. The ring 20 reliably operates the second block 28 no matter what rotational position the plate 2 is in. can be made.

[0021] Thus, the holding block 4 is automatically peeled off from the reference plate 2, and Only the pressure head rises.

[0022] Note that the push pin 12 is located at a centrally symmetrical position of the reference plate 2. It can be installed in multiple locations, or it can be installed in three or more locations. Even if the rollers 38 of the second block 28 corresponding to each push pin 12 are Since it is arranged to face the ring 20, the cylinder 14 and the ring 20 This allows all push pins 12 to be pushed down at the same time.

[0023] 3 and 4 show different embodiments of the present invention. In FIG. The horizontal portion 40a supports a substantially L-shaped pressing member 40 consisting of a vertical portion 40a and a vertical portion 40b. The spring 4 is arranged so as to be located closer to the center of the reference plate 2 than the shaft 41. 3, the horizontal portion 40a is urged in a direction away from the push pin 12, and The wire 25 is directly connected to the vertical part 40b, and the wire 25 is pulled. When the pressing member 40 rotates counterclockwise around the support shaft 41, the push pin 12 is It is supposed to be pushed down. In addition, in the embodiment shown in FIG. 4, the approximately U-shaped pressing portion The material 45 rotates clockwise when the wire 25 directly connected to it is pulled. Then, the pressing part 45a pivots to push down the push pin 12, and the spring 46 It is biased counterclockwise.

[0024] In the embodiment shown in FIG. 5, the force transmitting means 15 is replaced by the wire 25 of each of the embodiments described above. In addition, the link 50 is made up of one link 50. That is, the operation facing the pressing member 51 It consists of a passive part 50a and a passive part 50b facing the piston rod 52a of the cylinder 52. The link 50 is rotated to the reference plate 2 by the support shaft 53 at an intermediate position. The acting portion 50a is movably supported by a spring 54 in a direction in which it is moved away from the pressing member 51. It is something that has been strengthened.

[0025] In addition, in the embodiment shown in FIG. 6, the push pin mounting position of the reference plate 2 is Fix the cylinder 60 at the position and push the piston rod 60a of the cylinder 60. It is directly connected to pin 12. Note that the pressure fluid is supplied to the cylinder 60 by a rotary This is done via joint 61.

[0026] Furthermore, in the embodiment shown in FIG. 7, a fluid hole 70 is provided in the block mounting surface 2a to The body hole 70 is connected to the tube 71, the rotary joint 72, and the flow inside the push rod 1. It operates as the body passage hole 73, tube 74, and pressurizing head rise to open the flow path. The block 4 is connected to a pressure fluid source 76 through a valve 75, and the block 4 is controlled by fluid pressure. It is configured to be peeled off from the mounting surface 2a.

[0027]

[Effect of the idea]

As described above, according to the present invention, the workpiece holding block is moved at the same time as the pressure head starts rising. can be automatically peeled off.

[Brief explanation of drawings]

FIG. 1 is a sectional view showing a first embodiment of the present invention.

FIG. 2 is an enlarged view of the main part of FIG. 1;

FIG. 3 is a sectional view of a main part showing a second embodiment of the present invention.

FIG. 4 is a sectional view of main parts showing a third embodiment of the present invention.

FIG. 5 is a sectional view of a main part showing a fourth embodiment of the present invention.

FIG. 6 is a sectional view of a main part showing a fifth embodiment of the present invention.

FIG. 7 is a sectional view of essential parts showing a sixth embodiment of the present invention.

[Explanation of symbols]

2a Mounting surface 3 Workpiece 4 Holding block 12 Pish pins 13, 40, 51 Pressing member 14, 52, 60 Cylinder 15 Acting force transmission means 60a Piston rod 70 Fluid hole 75 Valve 76 Pressure fluid source

Claims (3)

[Scope of utility model registration request] 1. A pressure head that attaches and detaches a workpiece holding block to a block mounting surface and polishes the workpiece stuck to the holding block by pressing it against a rotating surface plate. A push pin, a pressing member that presses the push pin, a cylinder that operates as the pressure head rises, and a force transmitting means that transmits the acting force of the cylinder to the pressing member to press the push pin. Pressure head for flat surface polishing. 2. A pressurizing head that attaches and detaches a workpiece holding block to a block mounting surface and presses the workpiece attached to the holding block against a rotating surface plate for polishing, the pressurizing head having a pressure head that can freely protrude and retract from the block mounting surface. A pressure head for surface polishing, characterized in that a push pin and a cylinder that operates as the pressure head rises are attached, and a piston rod of the cylinder is directly connected to the push pin. 3. A pressurizing head that attaches a workpiece holding block to a block mounting surface in a removable manner and polishes the workpiece stuck to the holding block by pressing it against a rotating surface plate, wherein a fluid hole is formed in the block mounting surface. open the fluid hole,
A pressure head for surface polishing, characterized in that the pressure head is connected to a pressure fluid source via a valve that opens a flow path when the pressure head rises.