JPH0412602B2 - - Google Patents
Info
- Publication number
- JPH0412602B2 JPH0412602B2 JP59067672A JP6767284A JPH0412602B2 JP H0412602 B2 JPH0412602 B2 JP H0412602B2 JP 59067672 A JP59067672 A JP 59067672A JP 6767284 A JP6767284 A JP 6767284A JP H0412602 B2 JPH0412602 B2 JP H0412602B2
- Authority
- JP
- Japan
- Prior art keywords
- laser
- workpiece
- laser beam
- trimming
- section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000003287 optical effect Effects 0.000 claims description 47
- 238000009966 trimming Methods 0.000 claims description 30
- 238000005259 measurement Methods 0.000 claims description 18
- 230000010355 oscillation Effects 0.000 claims description 10
- 238000000034 method Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 230000005697 Pockels effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
Landscapes
- Apparatuses And Processes For Manufacturing Resistors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59067672A JPS60211902A (ja) | 1984-04-06 | 1984-04-06 | レ−ザトリミング装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59067672A JPS60211902A (ja) | 1984-04-06 | 1984-04-06 | レ−ザトリミング装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS60211902A JPS60211902A (ja) | 1985-10-24 |
JPH0412602B2 true JPH0412602B2 (enrdf_load_stackoverflow) | 1992-03-05 |
Family
ID=13351718
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP59067672A Granted JPS60211902A (ja) | 1984-04-06 | 1984-04-06 | レ−ザトリミング装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60211902A (enrdf_load_stackoverflow) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09239580A (ja) * | 1996-03-12 | 1997-09-16 | Matsushita Electric Ind Co Ltd | レーザ加工装置 |
JP2001358087A (ja) * | 2001-04-16 | 2001-12-26 | Nec Corp | パルスレーザ光照射装置及び照射方法 |
-
1984
- 1984-04-06 JP JP59067672A patent/JPS60211902A/ja active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09239580A (ja) * | 1996-03-12 | 1997-09-16 | Matsushita Electric Ind Co Ltd | レーザ加工装置 |
JP2001358087A (ja) * | 2001-04-16 | 2001-12-26 | Nec Corp | パルスレーザ光照射装置及び照射方法 |
Also Published As
Publication number | Publication date |
---|---|
JPS60211902A (ja) | 1985-10-24 |
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