JPH04121937A - Scanning microscope - Google Patents

Abstract

PURPOSE:To speed up image display by transferring read values as signal intensity, which is converted in accordance with a reference table by CPU, to an image memory and by displaying a sample image. CONSTITUTION:An AD converter 2 converts electric signal l to digital quantity m. A conversion table 4 makes such conversion as having digital quantity m as input and outputs a values TABLE m to a signal line P according to calculated values. A CPU 1 transfers the value of the signal line P to an image memory 3. By repeating a beam position indication for this scanning line P and data transfer, by one image screen quantity, a sample image is indicated in displayer 4.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] This invention relates to a scanning electron microscope and a scanning laser microscope.

[Summary of the invention]

In a scanning electron microscope that scans an electron beam to extract signals generated from a sample and displays a sample image, and in a scanning laser microscope that scans a laser beam to extract signals generated from a sample and displays a sample image. an AD converter that detects a signal generated from a sample and converts it into a digital quantity;
Equipped with a reference table that can be set from the CPU that receives the output of the D converter as input, the CPUfJ<the value converted by the reference table is read as the signal intensity, and the value is transferred to the image memory, and the sample image is displayed. It was designed so that

[Conventional technology]

Conventionally, in a scanning microscope in which a CPU captures a signal from a sample and writes it into an image memory to display a sample image, the signal from the sample is converted into a digital quantity by an AD converter, which is captured by the CPU and stored in the image memory. The data length is converted into a data range that is allowed as the gradation of the sample image, and the data is written into the image memory.

[Problem to be solved by the invention]

The image memory under the control of the CPU is also used to display measurement conditions to the device operator and to display operating menus. Therefore, a part of the data length of the image memory is used as the character display color.

On the other hand, the AD converter has a certain bit length, and even if the length is the same as the bit length of the image memory, if the data is transferred as is, the data will extend to the area of the character display color. Therefore, the CPU converts the output of the AD converter into
It is necessary to convert and write data within the data length of the image memory necessary for the sample image, which has the disadvantage of slowing down the image display speed.

[Means to solve the problem]

The means adopted by the present invention to achieve the above object is that the output of an AD converter equipped with a reference table and converting the signal from the sample into a digital quantity is connected to the input of the reference table, and the reference table is connected to the input of the reference table. The contents of the table can be written by the CPU, and the output value of the reference table is
A scanning device in which the output value of the converter is a value converted according to the reference table, and the sample image is displayed by the CPU simply transferring the output value of the reference table to the image memory. It is a type microscope.

[For production]

Equipped with an image memory, part of the data length of the image memory is
It is secured as a character display range, and the area is secured as a gray scale image or a color image of the sample image. The CPU roughly calculates a table for converting the data length of the AD converter to the data range secured as a sample image among the data length of the image memory, and uses the table to convert the data length of the AD converter to the data range secured as the sample image. Write to reference table.

scanning an electron beam or a laser beam and obtaining a digital quantity of a secondary signal generated from the sample with the AD converter;
Conversion is performed using the reference table.

The CPU can display a sample image by simply repeating the operation of transferring the output value of the reference table to the image memory for one image while scanning the beam.

〔Example〕

FIG. 1 shows an embodiment of the present invention.

The CPU first calculates a table for converting the data length of the AD converter 2 into the data range set as the sample display color within the data length of the image memory 3.

For example, the AD converter 2 has nbits and the image memory 3 has
If the sample display color range is from a to b (2"-1) (i = 0 to 2"-1), ADC: AD converter output value TABLE+: The table that is the i-th table value is calculated. be done. In addition to the above conversion examples, nonlinear conversion examples are also possible. The table calculated in this way is set in the conversion table 4 via the signal line n.

A CPU designates a beam position for a beam scanning system (not shown), and a detector (not shown) converts a secondary signal generated from a sample (not shown) into an electrical signal l.

The AD converter 2 converts the electrical signal E into a digital quantity m.

Conversion table 4 performs conversion using digital quantity m as input.
A value TABLEm is output to the signal line P according to the calculated value.

The CPUI transfers the value of the signal line P to the image memory 3.

A sample image is displayed on the display 4 by repeating the beam position specification for the scanning system and the data transfer for one screen.

[Brief explanation of drawings]

FIG. 1 is a diagram showing an embodiment of the present invention. ■・・・・CPU 2...AD converter 3... Image memory ４　・・ 5　・・ l　・　・ m・　・ P・ conversion table display ・Signal from detector AD converted signal ・Setting signal for conversion table 4 ・Conversion output signal of conversion table 4 Below Applicant: Seiko Electronics Industries Co., Ltd. Agent Patent Attorney Takayuki Hayashi Sukehaku figure

Claims (1)

[Claims] In a device for displaying a sample image by converting a signal generated from a sample into a digital quantity using a CPU in a scanning microscope, an AD converter for converting a signal generated from the sample into a digital quantity is provided. The scanning microscope is equipped with a reference table that can be set by the CPU, and is configured such that the output of the AD converter becomes an input to the reference table, and the output of the reference table is transferred to an image memory.