JPH04112787U - master slave robot - Google Patents

Abstract

(57) [Summary] [Purpose] To flexibly respond to changes in the layout of a wafer manufacturing line and to ensure that wafer cassettes are installed on the line. [Configuration] In order for workers to operate the master/slave robots used in clean rooms such as wafer production lines while directly monitoring the mounting status of wafer cassettes, the master and slave parts are connected through a transparent dust seal cover. , is integrally constructed on a moving trolley.

Description

[Detailed explanation of the idea]

0001

[Industrial application field]

This invention is designed to transport wafer cassettes in a clean room, such as a semiconductor factory. Concerning the master/slave robot to be sent.

0002

[Conventional technology]

Dust is the enemy in a clean room, such as a semiconductor factory, and dust in the air The number is adjusted so that it is below a certain level. Especially when processing semiconductor wafers. Because even more severe conditions are required inside the equipment, it is difficult to load cassettes containing wafers. It is necessary to automate the process of transporting the materials to the site. However, wafer infrastructure for automation Although there are automatic transport robots that transport sets, in semiconductor factories the manufacturing process Conventional automatic transport robots It is difficult to immediately respond to layout changes in the was.

0003

[Problem that the idea aims to solve]

As mentioned above, in semiconductor factories, the layout of equipment changes due to changes in the manufacturing process. Due to frequent changes, traditional fully automated transfer robots are unable to It is difficult to respond immediately to changes in the market. Therefore, the manipulator can be operated directly by humans. However, since humans generate a large amount of dust, that dust may be applied to the product. Measures must be taken to prevent any negative impact. Therefore, in this invention, humans can It makes it possible to directly operate the set transfer robot, and also eliminates dust generated by humans. The purpose is to prevent dust from having a negative impact on the product.

0004

[Means to solve the problem]

In order to solve the above problem, the master section and slave section are covered with transparent dust seal covers. It is constructed integrally on a moving trolley across the dust seal cover, and the operator can Control the master and control the slave.

[0005]

[Effect]

By using the above method, the worker can push the mobile cart from inside the dust seal cover. This makes it possible to move the mobile cart freely. Also has a transparent dust seal cover You can operate the master on the operation panel while checking the position of the workpiece through the This allows the manipulator to be moved freely. Dust generated by workers The dust seal cover prevents the dust from flowing forward (in the direction of the wafer cassette). can be prevented.

[0006]

【Example】

A specific embodiment of the present invention will be described below with reference to FIG. First, as shown in Figure 1. As shown, the mobile trolley 1 has a frame 3 that houses the robot's drive mechanism and control device. Slave 4 is mounted on the top surface, and casters 2 are mounted on the bottom surface. The worker can move freely on the floor by pushing it. Frame 3 is on the floor Cover the caster 2, drive mechanism, and control device with a small gap between the caster 2 and the This prevents dust generated from friction with the floor from scattering around. articulated The tip of slave 4, which has a robot arm, holds a wafer or wafer cassette. The gripper 5 is attached. In addition, there is dust floating in the air inside the clean room. There is a downflow of air from the ceiling to the floor to wash away dust, so The cross-sectional shape of Reve 4 is designed as a raindrop or streamlined cross-section so as not to disturb the downflow. be. A transparent dust seal cover 8 is placed on the back of the frame 3 so that the operator can A control panel 6 is arranged to which a master 7 such as a joystick for commanding maneuvers is attached. ing. A dust seal cover 8 is placed between the mobile cart 1 and the worker. This prevents dust generated by workers from flowing toward the wafer cassette. Das Similar to the slave 4, the seal cover 8 is also vertically adjusted so as not to disturb the downflow. It is straight and arched on both sides to cover the operator.

[0007]

[Effect of the idea]

As explained above, we have created a mobile master-slave robot using this invention. Since the contractor can directly operate the robot while checking the work status, various It can also flexibly respond to changes in equipment layout and work content. In addition, by adopting a dust seal cover, dust generated by workers can be prevented from entering the equipment. It is possible to prevent the infiltration of foreign substances and improve the yield of products.

[0008]

[Brief explanation of drawings]

[Figure 1] Specific example of the present invention

[Explanation of symbols]

1 Mobile trolley 2 Casters 3 frames 4 slave 5 Gripper 6 Operation panel 7 Master 8 Dust seal cover 9 Wafer cassette

Claims (2)

[Scope of utility model registration request] [Claim 1] A master-slave robot consisting of a master to which a worker issues a control command and a slave to perform work in response to the control command, characterized in that the master part and the slave part are integrated into a movable mobile cart. master/slave robot. 2. The master-slave robot according to claim 1, further comprising a transparent dust seal cover disposed between the master and the slave.