JPH04111978U - Cylinder valve closing device - Google Patents

Abstract

(57) [Summary] [Purpose] The present invention relates to a cylinder main valve closing device, and its purpose is to enable the valve opening degree of the main valve to be confirmed in a storage box. [Structure] A cylinder 1 is stored in a cylinder storage box 2, and has a main valve 4 at the top. An actuator box 5 is provided on the top plate 2a of the cylinder storage box 2, and the rotational driving force of the rotary actuator in the box 5 is transmitted to the handle 4 of the main valve 4 via a universal joint 25, a chuck 28, etc.
transmitted to a. At the time of inspection, the main valve 4 can be opened and closed by turning the manual operation handle 27, and the first display part 6 provided on the top of the actuator box 5 or the second display provided in the cylinder storage box 2 is displayed. The valve opening degree can be confirmed by the part 7.

Description

[Detailed explanation of the idea]

0001

[Industrial application field]

The present invention relates to a cylinder main valve closing device, and in particular has a configuration that displays the valve opening degree of the main valve. This invention relates to a cylinder valve closing device.

0002

[Conventional technology]

For example, semiconductor material gases used in the semiconductor manufacturing process vary depending on the type of gas. Never use highly toxic, flammable, self-combustible, combustible, or There are some that have a combination of these characteristics. Cylinders storing these harmful gases should be vented. It is stored in a cylinder storage box equipped with an air duct, and there is a cylinder at the top of the cylinder. A main valve is installed that closes the valve. Then, remove the main valve of the cylinder as described above. A cylinder valve closing device has been developed that automatically closes the valve by remote operation.

0003 This type of cylinder main valve closing device is a cylinder storage box that stores cylinders. An actuator is installed on the top plate of the cylinder, and an operating device is installed at a location away from the cylinder installation site. A device configured to supply an operating signal from an operating device to an actuator is be. In addition, the actuator uses compressed air to drive the piston, cylinder, etc. A closed valve piping that supplies the valve is connected, and the actuator is installed in the closed valve piping. The main valve of the cylinder is closed by operating the solenoid valve in response to the operation signal.

0004

[Problem that the idea aims to solve]

In conventional devices, the main valve is connected to the actuator installed outside the storage box. Since a scale was provided to display the opening degree, workers could, for example, use the handle of the main valve during inspections. When the valve is manually turned to open or close the valve, it is activated when the valve is removed from the storage box. He was checking the valve opening by looking at the scale on the regulator.

[0005] Therefore, the operator must manually operate the handle of the main valve in the valve open or close direction. Unable to check the valve opening and have to go out of the storage box every time it is operated. There was a problem that it was difficult to operate.

[0006] Therefore, the present invention aims to provide a cylinder main valve closing device that solves the above problems. target

[0007]

[Means to solve the problem]

This invention consists of a cylinder filled with gas and stored in a storage box, a main valve attached to the cylinder to open or close the cylinder; a transmission mechanism having a chuck that fits into the handle of the main valve; is provided outside the storage box, and is connected to the inside of the storage box via the transmission mechanism. an actuator that transmits a driving force in a valve closing direction to the handle; a first display provided outside the storage box and displaying the valve opening degree of the main valve; Department and a second display section provided in the storage box and displaying the valve opening degree of the main valve; It becomes more.

[0008]

[Effect]

A display section that displays the valve opening degree of the main valve is provided on the outside and inside of the storage box. During inspection, check the valve opening while manually operating the main valve handle inside the storage box. I can recognize it.

[0009]

【Example】

1 to 3 show an embodiment of the cylinder main valve closing device according to the present invention.

0010 In each figure, cylinder 1 is filled with semiconductor material gas and has a box-shaped cylinder storage box. It is stored in box 2. Also, the cylinder 1 is placed inside the cylinder storage box 2. It is held vertically by cylinder fixing fittings 3.

[0011] A main valve 4 is attached to the top of the cylinder 1. This main valve 4 is a handle 4a Opens and closes by rotating.

0012 5 is an actuator box, which is installed on the top surface of the top plate 2a of the cylinder storage box 2. I'm being kicked. The valve opening degree of the main valve 4 is displayed above this actuator box 5. A first display section 6 is provided below the actuator box 5 for displaying the main valve 4. A second display section 7 that displays the valve opening degree is provided. This second display section 7 is a top plate 2a and protrudes into the cylinder storage box 2.

[0013] Therefore, the operator can check the cylinder storage box 2 by looking at the first display section 6. The valve opening degree of the main valve 4 can be confirmed from the outside. In addition, the worker must While working, the opening degree of the main valve 4 can be easily checked from the second display section 7.

[0014] The first and second display sections 6 and 7 have similar configurations, and are equipped with a rotary actuator, which will be described later. It is connected to the upper and lower ends of the output shaft 15a of the tuator 15 and has a valve opening degree scale on its outer periphery. on the rotating drums 6a, 7a, the top surface of the actuator box 5, and the bottom surface of the top plate 2a. It consists of fixed pointers 6b and 7b.

[0015] Note that the scales on the outer periphery of the rotating drums 6a and 7a are percentages, and the 100% scale is the indicated number. When the needles 6b and 7b match, it indicates that the main valve 4 is fully open, and the 0% scale indicates the indication. When the needles 6b and 7b match, it indicates that the main valve 4 is fully closed.

[0016] 20 is a control box, which is installed in a location away from cylinder storage box 2. On the front side is a valve that is operated when driving the rotary actuator 15 to close the valve. A close switch 20a and various switches are provided.

[0017] The inside of the control box 20 has a configuration as shown in FIG.

[0018] Compressed air is supplied to the control box 20 from an air source (not shown). An air pipe 8 and an exhaust pipe 9 are provided. A check valve 10 is attached to the air pipe 8. A pressure valve 11, a variable throttle 12 as a speed controller, and a solenoid valve 13 are provided. ing. Also, the piping 14 connected to the outlet side of the solenoid valve 13 is connected to the actuator box. connected to the valve-closing side air supply port 15b of the rotary actuator 15 provided in the space 5. It is.

[0019] The interior of the rotary actuator 15 is controlled by a vane 15c provided on the output shaft 15a. It is divided into a right ventricle 15d and a left ventricle 15e. The right ventricle 15d is the valve closing side air supply port 15b The left chamber 15e is connected to the exhaust pipe 14 through the exhaust port 15f. It communicates with 16.

[0020] The solenoid valve 13 is a 3-port, 2-position valve that normally connects the exhaust pipe 9 and the pipe 14. As described later, when excited, the air pipe 8 and the pipe 14 are switched to communicate with each other. . When the solenoid valve 13 is switched, compressed air from the air source is reduced to a constant pressure by the pressure reducing valve 11. The rotary actuator is The right ventricle 15d of the patient 15 is supplied with the right ventricle 15d. This causes the vane 15c to move toward the left ventricle 15e. The output shaft 15a is driven in the valve closing direction.

[0021] 17 is CO₂In the unit, CO₂has a cylinder filled with air, and pressure from an air source When compressed air cannot be supplied or in an emergency such as an earthquake, the CO in the cylinder is ₂ The gas is connected to the rotary actuator via a branch pipe 18 branched from the air pipe 8. 15.

Note that the branch pipe 18 is provided with a check valve 19 that restricts the air from the air source supplied to the air pipe 8 from flowing toward the CO ₂ unit 17 side.

[0023] The output shaft 15a of the rotary actuator 15 configured as described above is a bolt shown in FIG. It penetrates the top plate 2a of the cylinder storage box 2 and protrudes into the cylinder storage box 2. , a rotary drum 7a of the second display section 7 is fixed to the tip thereof. Also rotary A gear 21 is fitted to the output shaft 15a of the actuator 15, and the output shaft 15a The rotational driving force is transmitted to the drive gear via a gear 21 and a gear 22 that meshes with this gear 21. 23.

[0024] The drive gear 23 is rotatable between the bases 5a and 5b in the actuator box 5. It is supported vertically without wobbling. Also, drive gear 2 3 has a spline hole 23a passing through the center in the vertical direction. This spline hole A rod 24 having a spline-shaped outer periphery is slidably inserted into the rod 23a. Ru. The rod 24 has a lower end that passes through the top plate 2a and protrudes into the cylinder storage box 2. The protruding length of the rod 24 can be adjusted according to the height of the cylinder 1. Ru.

[0025] Further, the lower end of the rod 24 is connected to the upper end 25a of the universal joint 25 via a pin 24a. A joint 26 is fitted to the lower end 25b of the universal joint 25.

[0026] The upper part of the joint 26 fits into the lower end 25b of the universal joint 25, and the joint 26 is connected via a pin 26a. tied together. Also, the lower part of the joint 26 fits into the shaft hole 27a of the manual operation handle 27. They are connected via a connecting pin 27b.

[0027] Furthermore, the manual operation handle 27 is chucked to the outer periphery of the handle 4a of the main valve 4. It is connected to the attached chuck 28 via a pin 28a. Therefore, the rotary actuator The driving force of the tuator 15 is transmitted by the transmission mechanism (gears 21 to 23, rod 24, Consisting of a universal joint 25, a joint 26, a manual operation handle 27, and a chuck 28) 29 is transmitted to the handle 4a of the main valve 4 to close the main valve 4.

[0028] Normally, when closing a valve, the valve close switch 20a of the control box 20 is pressed. When the valve is lowered, the solenoid valve 13 shown in Fig. 4 is energized and switched, and the compressed air from the air source is Air flows from the air pipe 8 to the right chamber 15d of the rotary actuator 15 via the pipe 14. supplied to As a result, the output shaft 15a of the rotary actuator 15 is in the valve-closing direction. It is driven to rotate in the direction.

[0029] The driving force of this rotary actuator 15 is transmitted via the transmission mechanism 29 mentioned above. The signal is transmitted to the handle 4a of the valve 4, and the main valve 4 is closed. In this case, the cylinder storage box on the first display section 6 of the actuator box 5 provided on the top plate 2a of the box 2. This allows the valve opening degree of the main valve 4 to be confirmed from the outside.

[0030] Here, operations during inspection will be explained. When inspecting or replacing the cylinder, close the main valve 4. While the chuck 28 is attached to the handle 4a, turn the manual operation handle 27. By doing so, the main valve 4 is operated to close or open.

[0031] At that time, the worker enters the cylinder storage box 2 and turns the manual operation handle 27. I will do it. However, there is also a second display inside the cylinder storage box 2 as shown in Figure 3. 7, the rotating drum 7 can be rotated while turning the manual operation handle 27. By looking at the scale a, the valve opening degree of the main valve 4 can be confirmed on the spot. Therefore, even if the main valve 4 is opened or closed manually, the cylinder storage box 2 The valve opening degree can be determined without going outside, making inspection operations easier and maintenance easier. It's improving.

[0032] In the above embodiment, the first and second display sections 6 and 7 are connected to the rotary actuator 15. Although it is provided in the upper and lower parts, the present invention is not limited to this, and for example, the second display part 7 can be Of course, it may also be provided on the side surface of the storage box 2. In addition, display sections 6 and 7 For example, the configuration may be configured to be digitally displayed using a liquid crystal display or the like.

[0033]

[Effect of the idea]

As mentioned above, the cylinder main valve closing device according to the present invention is a valve of the main valve that opens and closes the cylinder. A display section that displays the opening degree is provided not only on the outside of the storage box but also inside it. Therefore, during inspection, you can check the valve opening on the spot while opening or closing the main valve in the storage box. You can check. Therefore, inspection work is easier than before and maintenance is improved. It has features such as the top is designed.

[Brief explanation of drawings]

FIG. 1 is a perspective view of an embodiment of a cylinder valve closing device according to the present invention.

FIG. 2 is an enlarged view for explaining an actuator box and a transmission mechanism.

FIG. 3 is an enlarged front view showing display units provided above and below the actuator box.

FIG. 4 is a diagram for explaining the internal configuration of a control box and the internal configuration of a rotary actuator.

[Explanation of symbols]

1 cylinder 2 Cylinder storage box 4 Genben 5 Actuator box 6 First display section 7 Second display section 15 Rotary actuator 20 Control box 25 Universal joint 27 Manual operation handle 28 Chuck 29 Transmission mechanism

Claims (1)

[Scope of utility model registration request] 1. A transmission mechanism comprising a cylinder filled with gas and stored in a storage box, a main valve attached to the cylinder to open or close the cylinder, and a chuck that fits into the handle of the main valve. and an actuator that is provided outside the storage box and transmits a driving force in the valve closing direction to the handle in the storage box via the transmission mechanism;
a first display section that is provided outside the storage box and displays the valve opening degree of the main valve; a second display section that is provided inside the storage box and displays the valve opening degree of the main valve; A cylinder valve closing device consisting of: