JP2001153261A - Air operation valve for chemicals - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an air operation valve for chemicals capable of confirming valve opening and valve closing operations through a position of a tip of an indicating member even from a distance, while securing compatibility with explosive and corrosive atmosphere. SOLUTION: Opening and closing of a valve are carried out by reciprocating motion of a piston rod 10 within a cylinder 9. An end portion of an indicator 19 moves outside a cover 13 along the motion of the piston rod 10. Therefore, a position of an end portion of an indicator 14 and operations of opening and closing of the valve have a predetermined relationship. Thus, the operations of opening and closing of the valve are confirmed by an electric signal outputted from a photosensor 16 detecting the position of the end portion of the indicator 14. At that time, the photosensor 16 and the end portion of the indicator 14 are covered with a case 17, and the inside of the case 17 is filled with an inert gas supplied through a purge port 18.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a chemical liquid air operated valve used in a production line for semiconductors, pharmaceuticals and the like.

[0002]

2. Description of the Related Art Conventionally, in a production line for semiconductors, pharmaceuticals, and the like, a chemical liquid air operated valve has been used to control a fluid such as pure water, acid, or alkali.
Therefore, here, an example of the chemical-operated air operated valve is shown in a cross-sectional view of FIG. 7 and its structure and operation will be described. 7 has a body 101, a cylinder 102, a cover 103, and the like.
These constitute a "valve body". Further, the peripheral end of the diaphragm 111 is sandwiched between the body 101 and the cylinder 102, and the center of the diaphragm 111 is screwed to the lower end of the piston rod 104 inserted into the cylinder 102.

Further, a downward force is constantly applied to the piston rod 104 by a spring 105 provided between the cylinder 102 and the cover 103. On the other hand, the operation port 10 is attached to the piston rod 104.
By causing compressed air to flow into the cylinder 102 from 6, an upward force can be exerted.
By causing the compressed air in the cylinder 102 to flow out of the operation port 106, the action of the upward force can be released.

As a result, the piston rod 104 moves up and down in the cylinder 102.
The inflow port 107 and the outflow port 10 formed in the body 101 are formed by a diaphragm 111 screwed at the lower end of the
8 can be communicated or cut off. Therefore, the chemical liquid air operated valve 100 has a so-called air operated structure in which the operation of opening and closing the valve is performed by flowing compressed air into and out of the cylinder 102. There is no structure. Therefore, the air operated valve for chemical liquid 100 can be used even when the production line for semiconductors, pharmaceuticals, and the like is in an explosive atmosphere.

Further, an air operated valve 100 for a chemical liquid is used.
In order to allow the fluid to be controlled to be applied even to an acid, an alkali, or the like, a so-called metal-free design is made in consideration of compatibility between the fluid to be controlled and a constituent material. Therefore, the chemical liquid air operated valve 100 can be used even when the production line for semiconductors, pharmaceuticals, and the like is in a corrosive atmosphere.

Further, an air operated valve 10 for a chemical solution
0, the indicator 1 is located at the upper end of the piston rod 104.
09 (corresponding to an “instruction member”), and the indicator 109 is inserted through the penetration hole 110 of the cover 103. Accordingly, when the valve opening operation is air operated and the piston rod 104 moves to the uppermost end, as shown by the two-dot chain line in FIG.
It is in a state protruding from. On the other hand, when the operation of closing the valve is air-operated and the piston rod 104 moves to the lowermost end, as shown by the solid line in FIG. That is, the distal end of the indicator 109 moves outside the cover 103 with the movement of the piston rod 104. Therefore, if the position of the distal end of the indicator 109 is visually observed, the valve opening / closing of the air-operated valve 100 for a chemical solution can be performed. The operation of closing the valve can be confirmed.

However, the air operated valve 1 for chemical liquids
The operation of opening and closing the valve of 00 is checked by controlling the control valve (explosive atmosphere of the production line for semiconductors, pharmaceuticals, etc.) that connects the inside of the cylinder 102 to the compressed air supply line or exhaust line.
It can also be performed by electrically grasping the driving state of a device installed in a place isolated from a corrosive atmosphere). However, in this method, the control valve and the cylinder 10
You have to consider the trouble that occurs between the two. Because, for example, the control valve and cylinder 102
If a leak occurs in the compressed air supply line between the cylinder 102 and the compressed air supply line, the compressed air supply line communicates with the inside of the cylinder 102 even if the control valve is driven. May not flow sufficiently and the operation of the chemical air operated valve 100 may remain closed. In such a case, the chemical air operated valve 100
Is misidentified as being in the valve opening.

On the other hand, in the method of visually observing the location of the tip portion of the indicator 109, the indicator 109 is connected to the piston rod 104 as shown in FIG.
It can be said that the piston rod 104 moves with the movement of the piston rod 104, and the movement of the piston rod 104 can be directly confirmed. Therefore, the fixed relationship between the position of the tip of the indicator 109 and the valve opening / closing is determined. There is almost no danger of occurrence of inconsistent troubles, and it is not necessary to consider such troubles.

[0009]

However, checking the opening / closing operation of the chemical air operated valve 100 by visually observing the position of the distal end portion of the indicator 109 requires the use of the chemical air operating valve. Late valve 1
Monitoring of the operation of 00 depends on the visual observation of the operator. On the other hand, in a production line for semiconductors, pharmaceuticals, and the like, entry and exit of an operator is strictly restricted in consideration of an explosive atmosphere, a corrosive atmosphere, and the like. In many cases, the position of the tip of the indicator 109 cannot be clearly identified visually. Furthermore, in recent years, the miniaturization of semiconductor manufacturing lines has been rapidly progressing,
In many cases, it is difficult to visually check the location of the tip of the indicator 109 because the devices are densely packed.

That is, the air operated valve 1 for chemical liquid
When 00 is used in a production line for semiconductors, pharmaceuticals, etc., it can be adapted to the explosive atmosphere / corrosive atmosphere of the production line for semiconductors, pharmaceuticals, etc. The environment for viewing the location was rather harsh.

Therefore, on the design side, on-site side, management side, and the like of a production line for semiconductors, pharmaceuticals, and the like, even from a place far from the chemical liquid air operated valve 100, the position of the tip of the indicator 109 can be maintained. , So that the operation of opening and closing the valve can be confirmed.
Various contrivances have been attempted for the air operated valve 100 for a chemical solution. However, since the chemical air operated valve 100 is not based on the premise that such a device is devised, the device for the chemical liquid air operated valve 100 damages the chemical liquid air operated valve 100, Eventually, it may cause a failure of the chemical air operated valve 100.

Therefore, on the design side, on-site side, management side, and the like of a manufacturing line for semiconductors, pharmaceuticals, and the like, even from a location far from the chemical liquid air operated valve 100, the position of the distal end portion of the indicator 109 can be maintained. It has been hoped that a chemical liquid air operated valve 100 capable of confirming the operation of opening and closing the valve will be newly sold and supplied.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and has been made to solve the above-mentioned problems. It is an object of the present invention to provide (sell / supply) a chemical liquid air operated valve capable of confirming a valve opening / closing operation through a position of a part.

[0014]

In order to achieve the above object, an air operated valve for chemical liquid according to the present invention is provided with a piston rod for opening or closing a valve by returning within a valve body. And a pointing member connected to the piston rod and inserted into a through hole of the valve body, and a distal end portion of the pointing member moves outside the valve body with the movement of the piston rod. A chemical liquid air operated valve, a detection switch for detecting a position of a tip of the indicating member, a case attached to the valve body while covering the detection switch and the tip of the indicating member, Wherein the case is used in a state where the inside of the case is filled with an inert gas through a purge port of the case.

Further, an air operated valve for chemical liquid according to a second aspect of the present invention includes a piston rod that opens or closes a valve by moving backward in the valve body, and a piston rod connected to the piston rod and having the valve body. An indicator member inserted into the through hole, a chemical liquid air operated valve in which a tip portion of the indicator member moves outside the valve body with the movement of the piston rod, A detection switch for detecting the position of the distal end portion, and a case that covers the detection switch and the distal end portion of the indicating member and is closely mounted to the valve main body, and the inside of the case is sealed. There is a feature.

According to a third aspect of the present invention, there is provided an air operated valve for a chemical liquid according to the first or second aspect, wherein the valve is used in a semiconductor manufacturing line. . An air operated valve for chemical liquid according to claim 4 is the air operated valve for chemical liquid according to any one of claims 1 to 3, wherein the case is transparent. I do.

According to a fifth aspect of the present invention, there is provided an air operated valve for a chemical solution according to any one of the first to fourth aspects, wherein the detection switch and the case are provided. It is characterized by being provided detachably with respect to the valve body.

According to a sixth aspect of the present invention, there is provided an air operated valve for a chemical liquid according to any one of the first to fourth aspects, wherein the case is provided on the valve body. The pointing member is detachably connected to the piston rod from the outside of the valve body.

In the air-operated valve for chemical liquid according to the present invention having the above-described structure, the piston rod is opened or closed by reciprocating in the valve body, and the instruction is performed in accordance with the movement of the piston rod. The tip of the member moves outside the valve body. Therefore, the position of the tip of the indicating member and the valve opening. The operation of closing the valve has a certain relationship. Therefore, the electric signal output from the detection switch for detecting the position of the tip of the indicating member,
Check the operation of opening and closing the valve. At this time, the detection switch and the tip of the indicating member are covered by the case, and
The interior of such a case is flooded with an inert gas supplied via a purge port, or
The case is in close contact with the valve body and is sealed.
Therefore, the detection switch and the tip of the indicating member are isolated from the explosive atmosphere and the corrosive atmosphere, and are not exposed to the explosive atmosphere or the corrosive atmosphere.

The control target of the chemical liquid air operated valve of the present invention is a fluid such as pure water, acid, and alkali.

That is, in the chemical liquid air operated valve of the present invention, the detection switch and the tip of the indicating member are covered with a case, and the inside of the case is sealed or filled with an inert gas. The valve is opened and closed by an electrical signal output from a detection switch that detects the position of the tip of the indicating member.
Since the operation of closing the valve can be confirmed, it is possible to open and close the valve through the position of the tip of the indicating member even from a distant place while ensuring compatibility with explosive atmospheres and corrosive atmospheres. It is possible to provide (sell / supply) a chemical liquid air operated valve capable of confirming the closing operation.

In the air-operated valve for chemical liquid according to the present invention, the operation of opening and closing the valve can be confirmed by an electric signal output from a detection switch for detecting the position of the tip of the indicating member. Therefore, unlike the visual inspection of the operator in the prior art, it is possible to always check the operation of opening and closing the valve, it is also possible to prevent artificial misperception, and furthermore, the present invention In a production line that uses an air operated valve for chemical liquids, the operation status can be centrally managed collectively, so that emergency safety stops such as malfunctions can be performed immediately without overlooking Become.

When the chemical-operated air operated valve of the present invention is used in a semiconductor production line, the semiconductor production line in recent years tends to be compact, and each device is densely packed, and the leading end of the indicating member is In many cases, it is difficult even for an operator to visually check the location of the portion, so that the above-described effects are further exerted.

In the case where the case covering the detection switch and the tip of the indicating member is transparent, the tip of the indicating member may be in contact with the valve body even though the end of the indicating member is covered by the case. It is possible to visually check the movement of the valve opening / closing operation by the operator as in the prior art. With the operated valve, it is possible to confirm the operation of opening and closing the valve from a nearby place (site) or a distant place.

When the detection switch and the case are provided detachably with respect to the valve main body, the detection switch is replaced from outside the valve main body without disassembling the chemical liquid air operated valve of the present invention. Therefore, in order to adapt to the characteristics of the explosive atmosphere and corrosive atmosphere in which the air-operated valve for chemical liquid of the present invention is used, it is possible to easily change the detection switch to an optimal type of detection switch, and Also, maintenance of the detection switch can be easily performed.

In the case where the case is provided detachably with respect to the valve body and the indicating member is detachably connected to the piston rod from the outside of the valve body, the air operated for chemical liquid according to the present invention is provided. Since the indicating member can be replaced from outside the valve body without disassembling the valve, the air-operated valve for chemical liquid of the present invention is adapted to the characteristics of the explosive atmosphere / corrosive atmosphere used. It is possible to easily change to an indicating member having an optimum material and shape, and it is also possible to easily perform maintenance on the indicating member.

[0027] According to a seventh aspect of the present invention, there is provided an air operated valve for a chemical solution, wherein the piston rod opens or closes by returning within the valve body, and the piston rod is connected to the piston rod and is connected to the valve body. An indicator member inserted into the through hole, a chemical liquid air operated valve in which a tip portion of the indicator member moves outside the valve body with the movement of the piston rod, A detection switch for detecting a position of the tip portion is provided.

An air operated valve for chemical liquid according to claim 8 is the air operated valve for chemical liquid according to claim 7, wherein the detection switch is detachably provided to the valve body. It is characterized by the following.

According to a ninth aspect of the present invention, there is provided an air operated valve for a chemical solution according to the seventh aspect, wherein the indicating member is provided with respect to the piston rod from outside the valve body. It is characterized by being detachably connected.

In the air operated valve for chemical liquid of the present invention having the above-described structure, the piston rod is opened or closed by reciprocating in the valve body, and the instruction is performed in accordance with the movement of the piston rod. The tip of the member moves outside the valve body. Therefore, the position of the tip of the indicating member and the valve opening. The operation of closing the valve has a certain relationship. Therefore, the electric signal output from the detection switch for detecting the position of the tip of the indicating member,
Check the operation of opening and closing the valve. However, when using in a normal atmosphere that is not an explosive atmosphere or a corrosive atmosphere, there is no problem even if the detection switch and the tip of the indicator are exposed to the surrounding atmosphere. However, it is useless in the sense of avoiding explosion and corrosion. Therefore, a case that covers the detection switch and the tip of the indicating member is omitted.

The control target of the air operated valve for chemical liquid of the present invention is a fluid such as pure water, acid and alkali.

That is, in the air operated valve for chemical liquid of the present invention, the valve is opened / closed by the electric signal output from the detection switch for detecting the position of the tip of the indicating member.
Since the operation of closing the valve can be confirmed, the air operated valve for chemical liquid can be confirmed even from a distant place via the position of the distal end portion of the indicator member. Can be provided (sold / supplied), reducing the burden on the user side (design side, on-site side, management side, etc.), and taking into account the tolerance of the surrounding atmosphere. By omitting the case that covers the tip portion, it is possible to contribute to cost reduction and number of parts on the providing (sales / supply) side.

When the detection switch is provided detachably with respect to the valve body, it is possible to replace the detection switch from the outside of the valve body without disassembling the chemical liquid air operated valve of the present invention. Since it is possible, it is possible to easily change to a different type of detection switch, and it is also possible to easily perform maintenance on the detection switch.

In the case where the indicating member is detachably connected to the piston rod from outside the valve body,
The indicator member can be replaced from the outside of the valve body without dismantling the chemical air operated valve of the present invention, so that it is possible to easily change to an indicator member of a different material / shape. Maintenance of the members can be easily performed.

[0035]

Embodiments of the present invention will be described below with reference to the drawings. First, a cross-sectional view of a chemical liquid air operated valve of the present embodiment is shown in FIG. 1 and its structure and operation will be described. The chemical air valve 1 shown in FIG. 1 is used for controlling fluids such as pure water, acid, and alkali in a production line for semiconductors, pharmaceuticals, and the like.

An air operated valve 1 for a chemical liquid shown in FIG.
It has a body 3, a cylinder 9, a cover 13, and the like, and these constitute a "valve body". Also, body 3
And the cylinder 9 sandwich the peripheral end of the diaphragm 8 and a piston rod 10 inserted into the cylinder 9.
The center of the diaphragm 8 is screwed to the lower end of the diaphragm 8.

A downward force is always applied to the piston rod 10 by a spring 12 provided between the cylinder 9 and the cover 13. On the other hand,
An upward force can be applied to the piston rod 10 by flowing compressed air into the cylinder 9 from the operation port 11, and further, by flowing compressed air in the cylinder 9 from the operation port 11, The effect of the upward force can be released.

As a result, the piston rod 10 moves up and down in the cylinder 9, and the diaphragm 8 screwed to the lower end of the piston rod 10 connects the inflow port 6 and the outflow port 4 formed in the body 3 to each other. Or it can be shut off. Therefore, the air operated valve 1 for chemical liquid
Has a so-called air operated structure in which a valve is opened and closed by flowing compressed air into and out of the cylinder 9.
There is no electrical structure except for (equivalent to a "detection switch").

In the air operated valve 1 for chemicals, a so-called metal-free valve is used in consideration of compatibility between the fluid to be controlled and the constituent materials in order to allow the fluid to be controlled to be applied even when the fluid to be controlled is an acid or an alkali. The design has been made.
Therefore, the air operated valve for chemical liquid 1 can be used even when the production line for semiconductors, pharmaceuticals and the like is in a corrosive atmosphere.

Further, in the air operated valve for chemical liquid 1, an indicator 14 is provided at the upper end of the piston rod 10.
(Corresponding to an “indicating member”) by being screwed in, the indicator 14 is attached to the cover 13.
The structure is such that a search for the through hole 19 is performed. When the operation of closing the valve is air operated and the piston rod 10 moves to the lowermost end, as shown by a solid line in FIG.
It is in a state protruding from. On the other hand, when the valve opening operation is air operated and the piston rod 10 moves to the uppermost end, as shown by the two-dot chain line in FIG. It will be in the state of having done. That is, the tip of the indicator 14 is
3, the position of the distal end portion of the indicator 14 can be visually checked to confirm the opening / closing operation of the air-operated valve for chemical solution 1.

In addition, below the penetration hole 19 of the cover 13, the peripheral surface of the upper end of the piston rod 10 is in close contact with the wall surface of the cover 13 via an O-ring. Therefore, the outside of the cover 13 and the inside of the cylinder 9 do not communicate with each other through the through hole 19 of the cover 13.

In the chemical liquid air operated valve 1, a photo sensor 16 and a case 17 are provided as shown in the top view of FIG.

The photo sensor 16 detects the position of the tip of the indicator 14. This makes it possible to detect whether the tip portion of the indicator 14 exists at the position shown by the solid line in FIG. 1 or at the position shown by the two-dot chain line in FIG. Also, the photo sensor 1
Reference numeral 6 is attached to the cover 13 with screws via a bracket 15 and is detachable.

The case 17 covers the tip of the indicator 14 and the photo sensor 16. Since the case 17 is transparent, the movement of the tip portion of the indicator 14 and the photo sensor 16 can be seen. Further, a purge port 18 is provided in the case 17, and the case 1 is connected through the purge port 18.
7 can be filled with an inert gas. The case 17 is attached to the cover 13 with screws, and is detachable.

Further, as shown in FIG.
The distal end portion 4 is in a state of protruding from the through hole 19 of the cover 13 in both cases of opening and closing the valve. In addition, the indicator 14 is in a state of being idlely sought in the through hole 19 of the cover 13 and in a state of being screwed into the upper end of the piston rod 10. Therefore, the case 17 is
If the indicator 14 can be removed from the outside of the cover 13 by pinching and rotating the tip of the indicator 14 after being removed from the cover 3, the indicator 14 can be attached from the outside of the cover 13.
That is, the indicator 14 is detachably connected to the piston rod 10 from outside the cover 13. A notch is formed at the tip of the indicator 14, and the tip of the indicator 14 has a shape that is easy to pick.

Next, the method of using the air operated valve 1 for chemical liquids will be described. First, by connecting an inert gas supply tube to the purge port 18 of the case 17, the inside of the case 17 is filled with the inert gas. Thereafter, the photo sensor 16 is activated. Thus, the tip portion of the photo sensor 16 and the indicator 14 existing inside the case 17 is isolated from the surrounding atmosphere, so that even if the atmosphere is explosive or corrosive, it can be used. .

To close the chemical liquid air operated valve 1, the compressed air in the cylinder 9 is caused to flow out of the operation port 11 to move the piston rod 10 to the lowermost end. As a result, the diaphragm 8 screwed to the lower end of the piston rod 10 shuts off the inflow port 6 and the outflow port 4 formed in the body 3, so that the chemical liquid air operated valve 1 is closed. At this time, as shown by the solid line in FIG.
The cover 13 protrudes from the through hole 19. The location of the tip portion of the indicator 14 can be known by an electrical output from the photo sensor 16 or by viewing the indicator 14.

On the other hand, when the chemical liquid air operated valve 1 is opened, compressed air flows into the cylinder 9 from the operation port 11, and the piston rod 10 is moved to the uppermost end. As a result, the diaphragm 8 screwed to the lower end of the piston rod 10 connects the inflow port 6 and the outflow port 4 formed in the body 3, so that the chemical liquid air operated valve 1 is opened. At this time, the tip portion of the indicator 14 is as shown by the two-dot chain line in FIG. 1, and the penetration hole 19 of the cover 13 is smaller than when the chemical liquid air operated valve 1 is closed (solid line in FIG. 1). From the state. The location of the tip portion of the indicator 14 can be known by an electrical output from the photo sensor 16 or by viewing the indicator 14.

The air valve 1 for chemical liquid is installed by a mounting plate 2 below the body 3 and is piped by nuts 5 and 7 on both sides of the body 3.

As described above in detail, in the air operated valve for chemical liquid 1 of the present embodiment, the piston rod 10 is opened or closed by reciprocating in the cylinder 9 and the piston rod 10 is closed. The tip of the indicator 14 moves outside the cover 13 with the movement of the indicator 10. Therefore, the position of the tip of the indicator 14 and the valve opening. The operation of closing the valve has a certain relationship. Therefore, the photo sensor 1 that detects the location of the tip portion of the indicator 14 (the position indicated by the solid line or the two-dot chain line in FIG. 1).
The operation of opening and closing the valve is confirmed by the electric signal output from 6. At this time, the front end portions of the photo sensor 16 and the indicator 14 are covered with the case 17, and
The inside of the case 17 is in a state of being overflowed with the inert gas supplied through the purge port 18.
Therefore, the tip portions of the photo sensor 16 and the indicator 14 are isolated from the explosive atmosphere / corrosive atmosphere, and are not exposed to the explosive atmosphere / corrosive atmosphere.

That is, in the chemical liquid air operated valve 1 of the present embodiment, the photosensor 16 and the tip of the indicator 14 are covered with the case 17 and the inside of the case 17 is filled with an inert gas. The state of the end of the photo sensor 16 (the position indicated by the solid line or the two-dot chain line in FIG. 1) is further detected by an electric signal output from the photo sensor 16.
Since the operation of closing the valve can be confirmed, it is possible to open and close the valve through the position of the tip portion of the indicator 14 even from a distant place while ensuring compatibility with an explosive atmosphere or a corrosive atmosphere. It is possible to provide (sell / supply) the air-operated valve 1 for a chemical solution capable of confirming the closing operation.

In the air-operated valve 1 for chemical liquid according to the present embodiment, the output is provided from the photo sensor 16 which detects the position of the tip of the indicator 14 (the position indicated by the solid line or the two-dot chain line in FIG. 1). Since the operation of opening and closing the valve can be confirmed by the electric signal, it is possible to always confirm the operation of opening and closing the valve, unlike the visual inspection of the operator in the related art. In addition, it is possible to prevent human misunderstanding, and furthermore, in the production line using the chemical liquid air operated valve 1 according to the present embodiment, the operation status can be centrally managed collectively. Therefore, it is possible to immediately perform an emergency safety stop such as a malfunction without overlooking it.

When the chemical-operated air operated valve 1 of the present embodiment is used in a semiconductor production line, the semiconductor production line in recent years tends to be compact, and the devices are densely packed and the indicator is In many cases, it is difficult for the operator to even visually check the location of the tip portion 14, so that the above-described effects are further exerted.

The photo sensor 16 and the indicator 1
Since the case 17 covering the front end portion of the indicator 4 is transparent, it is visually observed that the front end portion of the indicator 14 moves outside the cover 13 even though the front end portion of the indicator 14 is covered by the case 17. Therefore, as in the related art, since the operation of opening and closing the valve can be confirmed by the operator's visual observation, the air-operated valve for chemical liquid 1 according to the present embodiment has The operation of opening and closing the valve can be confirmed from a place (site) or a distant place.

Further, the photo sensor 16 and the case 17 are provided so as to be detachable from the cover 13, and the photo sensor 16 can be provided from the outside of the cover 13 without disassembling the chemical air-operated valve 1 of the present embodiment. 16 can be replaced, and in order to adapt to the characteristics of an explosive atmosphere or a corrosive atmosphere in which the air-operated valve for chemical liquid 1 of the present invention is used, instead of the photosensor 16, an optimal type of detection is used. A switch (for example, a proximity switch, a limit switch, a photosensor having a different material and shape, etc.) can be easily changed, and the maintenance of the photosensor 16 can be easily performed.

The case 17 is provided detachably with respect to the cover 13, and the indicator 14 is detachably connected to the piston rod 10 from the outside of the cover 13. From the outside of the cover 13 without dismantling the operating valve 1
Since the indicator 14 can be replaced, the indicator 14 is also made of an optimum material and shape in order to adapt to the characteristics of the explosive atmosphere or corrosive atmosphere in which the chemical air operated valve 1 of the present invention is used. Can be easily changed, and the maintenance of the photo sensor 16 and the indicator 14 can be easily performed.

It should be noted that the present invention is not limited to the above embodiment, and various changes can be made without departing from the gist of the present invention. For example, in the chemical liquid air operated valve 1 of the present embodiment, the interior of the case 17 is filled with an inert gas through the purge port 18, and the tip of the photosensor 16 and the indicator 14 are separated. From explosive and corrosive atmospheres. However, the case 17 without the purge port 18 is
Even if the inside of the case 17 is sealed,
The tip portions of the photo sensor 16 and the indicator 14 can be isolated from an explosive atmosphere or a corrosive atmosphere.

The air operated valve for chemical liquid 1 of this embodiment is designed for use in an explosive atmosphere or a corrosive atmosphere. However, when used in a normal atmosphere that is not an explosive atmosphere or a corrosive atmosphere, there is no problem even if the tip portions of the photosensor 16 and the indicator 14 are exposed to the surrounding atmosphere.
The case 17 covering the front end portion 4 is useless in terms of avoiding explosion and corrosion. Therefore, when using in a normal atmosphere that is not an explosive atmosphere or a corrosive atmosphere, the case 17 that covers the end portions of the photosensor 16 and the indicator 14 may be omitted.

Even in this case, since the operation of opening and closing the valve can be confirmed by the electric signal output from the photo sensor 16 for detecting the position of the tip of the indicator 14, the operation can be confirmed at a remote location. It is possible to provide (sell / supply) the chemical liquid air operated valve 1 through which the operation of opening and closing the valve can be confirmed through the location of the tip portion of the indicator 14.
Provided by reducing the burden on the user side (design side, on-site side, management side, etc.), and by omitting the case 17 that covers the photosensor 16 and the tip of the indicator 14 in consideration of the tolerance of the surrounding atmosphere. (Sales /
This can contribute to cost and parts reduction on the supply side.

At this time, the photo sensor 16 is provided so as to be detachable from the cover 13, and the photo sensor 16 can be provided from the outside of the cover 13 without disassembling the chemical liquid air operated valve 1 of the present embodiment. 16 can be exchanged, so that different types of detection switches (for example,
(E.g., a proximity switch, a limit switch, and a photosensor having a different material and shape) can be easily changed, and maintenance of the photosensor 16 can be easily performed.

Further, an indicator 14 is detachably connected to the piston rod 10 from the outside of the cover 13 so that the air-operated valve 1 for chemical liquid according to the present embodiment can be removed from the outside of the cover 13 without being disassembled. Since the indicator 14 can be exchanged, it is possible to easily change the indicator 14 to a different material and shape, and it is also possible to easily perform maintenance on the indicator 14.

In the chemical air-operated valve 1 according to the present embodiment, as shown in FIG.
The indicator 14 is detachably connected to the piston rod 10 from the outside of the cover 13 by screwing the indicator 14 into the piston rod 10. However, instead of the indicator 14 and the piston rod 10 shown in FIG. 1, the structure shown in FIGS.

In the structure shown in FIGS. 3 and 4, the indicator 22 has a T-shape,
Is provided with a groove 21 into which the protruding edge of the indicator 22 can be fitted. In addition, piston rod 2
0, a cavity 24 communicating with the groove 21 is provided, and a spring 23 is provided inside the cavity 24. Then, with the structure shown in FIG. 3 and FIG.
2 is connected to the piston rod 20 by fitting the protrusion of the indicator 22 into the groove 21 of the piston rod 20 and rotating the indicator 22 while pressing the spring 23 at the protrusion. On the other hand, in order to release the connection of the indicator 22 to the piston rod 20, the indicator 23 is rotated while pressing the spring 23 at the protruding edge thereof, and the indicator 22 is pulled out in accordance with the groove 21 of the piston rod 20. Performed by These operations are performed by the cover 13 shown in FIG.
1 can be performed from outside the cover 13 of FIG.

In the structure shown in FIGS. 5 and 6, a spherical projection is provided on a part of the indicator 32, and a flexible portion 34 capable of holding the projection of the indicator 32 is formed on the upper part of the piston rod 30 by the groove 31. Is formed by In order to connect the indicator 32 to the piston rod 30 in the structure shown in FIGS. 5 and 6, the flexible portion 34 of the piston rod 30 is pushed out by the projecting portion of the indicator 32, and the projecting portion of the indicator 32 is opened. In the flexible portion 34 of the piston rod 30. On the other hand, in order to release the connection of the indicator 32 to the piston rod 30, the flexible portion 34 of the piston rod 30 is expanded by the protrusion of the indicator 32, and the protrusion of the indicator 32 is connected to the flexible portion 34 of the piston rod 30. It is done by taking it out from the inside. These operations can be performed from the outside of the cover 13 of FIG. 1 through the through holes 19 of the cover 13 of FIG.

In the air operated valve 1 for chemical liquid according to the present embodiment, the tip of the indicator 14 is provided so as to protrude toward the upper surface of the cover 13. Even if it is provided so as to protrude to the side, the above-described effect can be obtained.

[0066]

According to the air operated valve for chemical liquid of the present invention, the detection switch and the tip of the indicating member are covered with the case, and the inside of the case is sealed or filled with an inert gas. To the explosive atmosphere and corrosive atmosphere because the operation of opening and closing the valve can be confirmed by the electric signal output from the detection switch that detects the position of the tip of the indicating member. While ensuring compatibility, even from a distant place, through the location of the tip of the pointing member,
It is possible to provide (sell / supply) an air operated valve for chemical liquid that can confirm the operation of opening and closing the valve.

In the chemical air operated valve of the present invention, the operation of opening and closing the valve can be confirmed by an electric signal output from a detection switch for detecting the position of the tip of the indicating member. Therefore, unlike the visual inspection of the operator in the prior art, it is possible to always check the operation of opening and closing the valve, it is also possible to prevent artificial misperception, and furthermore, the present invention In a production line that uses an air operated valve for chemical liquids, the operation status can be centrally managed collectively, so that emergency safety stops such as malfunctions can be performed immediately without overlooking Become.

When the chemical-operated air operated valve of the present invention is used in a semiconductor production line, the semiconductor production line in recent years tends to be compact, and the devices are densely packed and the tip of the pointing member is In many cases, it is difficult even for an operator to visually check the location of the portion, so that the above-described effects are further exerted.

When the case that covers the detection switch and the distal end of the indicating member is transparent, the distal end of the indicating member is kept in contact with the valve body even though the distal end of the indicating member is covered by the case. It is possible to visually check the movement of the valve opening / closing operation by the operator as in the prior art. With the operated valve, it is possible to confirm the operation of opening and closing the valve from a nearby place (site) or a distant place.

When the detection switch and the case are provided detachably with respect to the valve body, the detection switch is replaced from outside the valve body without disassembling the chemical-operated air operated valve of the present invention. Therefore, in order to adapt to the characteristics of the explosive atmosphere and corrosive atmosphere in which the air-operated valve for chemical liquid of the present invention is used, it is possible to easily change the detection switch to an optimal type of detection switch, and Also, maintenance of the detection switch can be easily performed.

In the case where the case is provided detachably with respect to the valve body and the indicating member is detachably connected to the piston rod from the outside of the valve body, the air-operate for chemical liquid according to the present invention is provided. Since the indicating member can be replaced from outside the valve body without disassembling the valve, the air-operated valve for chemical liquid of the present invention is adapted to the characteristics of the explosive atmosphere / corrosive atmosphere used. It is possible to easily change to an indicating member having an optimum material and shape, and it is also possible to easily perform maintenance on the indicating member.

Also, in the chemical air operated valve of the present invention, the operation of valve opening / closing can be confirmed by an electric signal output from a detection switch for detecting the position of the tip of the indicating member. From, even from far away, through the location of the tip of the pointing member,
It is possible to provide (sell / supply) chemical air operated valves that can check the operation of opening and closing the valve, reducing the burden on the user side (design side, on-site side, management side, etc.). In addition to the reduction, the case that covers the detection switch and the distal end portion of the indicating member in consideration of the tolerance of the surrounding atmosphere can be omitted, thereby contributing to cost reduction and number of parts on the providing (sales / supply) side.

When the detection switch is provided detachably to the valve main body, the detection switch can be replaced from outside the valve main body without dismantling the chemical-operated air operated valve of the present invention. Since it is possible, it is possible to easily change to a different type of detection switch, and it is also possible to easily perform maintenance on the detection switch.

In the case where the indicating member is detachably connected to the piston rod from outside the valve body,
The indicator member can be replaced from the outside of the valve body without dismantling the chemical air operated valve of the present invention, so that it is possible to easily change to an indicator member of a different material / shape. Maintenance of the members can be easily performed.

[Brief description of the drawings]

FIG. 1 is a cross-sectional view of a chemical liquid air operated valve of the present embodiment.

FIG. 2 is a top view of the air operated valve for chemical liquid of the present embodiment.

FIG. 3 is a top view showing another example of the connection structure between the piston rod and the indicator in the air operated valve for chemical liquid of the present embodiment.

FIG. 4 is a sectional view of FIG. 3;

FIG. 5 is a top view showing another example of the connection structure between the piston rod and the indicator in the air operated valve for chemical liquid of the present embodiment.

FIG. 6 is a sectional view of FIG. 5;

FIG. 7 is a cross-sectional view of a conventional air operated valve for chemical liquid.

[Explanation of symbols]

 Reference Signs List 1 Air operated valve for chemical liquid 9 Cylinder 10, 20, 30 Piston rod 13 Cover 14, 22, 32 Indicator 16 Photosensor 17 Case 18 Purge port 19 Penetration hole

Claims (9)

[Claims] 1. A piston rod that opens or closes a valve by returning within a valve body, and an indicating member connected to the piston rod and inserted into a through hole of the valve body, In a chemical liquid air operated valve in which a tip portion of the indicating member moves outside the valve body with movement of the piston rod, a detection switch for detecting a position of the tip portion of the indicating member; and the detection switch. And a case attached to the valve body while covering a tip portion of the indicating member. The case is used in a state where the inside of the case is filled with an inert gas through a purge port of the case. An air operated valve for chemical liquids, characterized in that: 2. A piston rod that opens or closes a valve by returning within a valve body, and a pointing member connected to the piston rod and inserted into a through hole of the valve body. In a chemical liquid air operated valve in which a tip portion of the indicating member moves outside the valve body with movement of the piston rod, a detection switch for detecting a position of the tip portion of the indicating member; and the detection switch. An air operated valve for a medical solution, comprising: a case that covers the distal end portion of the indicating member and a case that is densely provided in the valve body; and the inside of the case is sealed. 3. The air operated valve for chemical liquid according to claim 1, wherein the air operated valve for chemical liquid is used in a semiconductor production line. 4. The air operated valve for chemical liquid according to claim 1, wherein the case is transparent. 5. The air operated valve for chemical liquid according to claim 1, wherein the detection switch and the case are detachably provided to the valve main body. Air operated valve for chemicals. 6. The air-operated valve for chemical liquid according to claim 1, wherein the case is provided detachably with respect to the valve main body, and the indicating member is provided with the piston. An air operated valve for chemical liquid, which is detachably connected to a rod from outside the valve body. 7. A piston rod that opens or closes a valve by returning in a valve body, and a pointing member connected to the piston rod and inserted into a through hole of the valve body, In a chemical liquid air operated valve in which a tip portion of the indicating member moves outside the valve body with movement of the piston rod, a detection switch for detecting a position of the tip portion of the indicating member is provided. Characterized air operated valve for chemicals. 8. The air operated valve for chemical liquid according to claim 7, wherein the detection switch is detachably provided to the valve body. 9. The air operated valve for chemical liquid according to claim 7, wherein the indicating member is detachably connected to the piston rod from outside the valve body. Late valve.