JPH059596Y2 - - Google Patents

Description

[Detailed Description of the Invention] Industrial Application Field The present invention relates to a cylinder main valve operating device, and more particularly to a cylinder main valve operating device for closing the main valve of a cylinder storing harmful gas.

Conventional technology For example, semiconductor material gases used in semiconductor manufacturing processes may be highly toxic, flammable, self-combustible, combustible, or a combination of these, depending on the type of gas. There are some things of a similar nature. For this reason, cylinders that store these harmful gases are housed in cylinder storage boxes equipped with exhaust ducts, and a main valve is attached to the top of the cylinder to open and close the cylinder in order to supply the gas inside the cylinder to the outside. was. For this reason, a cylinder main valve operating device is being developed that automatically closes the main valve for opening and closing the cylinder as described above by remote control. The conventional cylinder main valve operating device that closes the main valve of the cylinder as described above has an actuator installed integrally with the cylinder above the main valve of the cylinder, and an operation signal is supplied to this actuator to close the main valve. It is configured to be operated. Further, the drive shaft of the actuator was provided with a coupling member having a claw portion that was coupled to the outer circumferential recess of the operating handle of the main valve.

Problems to be Solved by the Invention In the cylinder main valve actuating device configured as described above, for example, the coupling member connected to the drive shaft of the actuator is connected to the main valve so that the actuating position of the actuator corresponds to the open/close state of the main valve. It was attached to the operating handle. However, if the fastening of the coupling member to the operating handle becomes loose, the coupling member slips on the outer periphery of the operating handle, resulting in transmission loss. In such a case, for actuator operation,
If the main valve does not open and close normally, for example, if the actuator operates to the closed position even though the main valve is not closed, the closed position will be detected as if it were closed. Therefore, in order to close the main valve, it is necessary to further operate the actuator. Furthermore, if the seat of the main valve or the gasket that closes the seat is damaged, the operating handle will need to be tightened even more than under normal conditions.

Therefore, it is desired to detect and display the excessive operation of the actuator due to loosening of the connection between the connecting member and the operating handle, or damage to the main valve seat, packing, etc. It had been.

Therefore, an object of the present invention is to provide a cylinder main valve operating device that meets the above-mentioned needs.

Means and Effects for Solving the Problems The present invention consists of a cylinder filled with gas, a main valve attached to the cylinder, and a drive shaft that is rotated at a predetermined angle by the supply of an operation signal to rotate the main valve. A cylinder main valve actuating device comprising an actuator to be actuated and a coupling member connected to a drive shaft of the actuator and coupled to an operating portion of the main valve, wherein when driving the main valve to close, the actuator is activated. a detection means for detecting that the drive shaft has exceeded the proper valve-closing position of the original valve and further over-rotated in the valve-closing drive direction; and a display section for indicating malfunction due to detection by the detection means. For example, it is possible to detect the occurrence of a failure in an actuator, an operating part of a main valve, a coupling member, etc., and also to notify the occurrence of a failure so that immediate action can be taken after the failure occurs.

Embodiment FIGS. 1 and 2 show an embodiment of the cylinder valve operating device according to the present invention. In both figures, for example, a cylinder 1 is filled with a highly concentrated semiconductor material gas. The cylinders 1 are stored in a cylinder storage box 2 while being kept vertically at a predetermined distance from each other. A main valve 3 is attached to the top of the cylinder 1. The main valve 3 has an operating handle 3a on its upper part for opening and closing operations. Therefore, the opening degree of the main valve 3 is adjusted by rotating the operating handle 3a. Therefore, a flow rate of gas corresponding to the opening degree of the main valve 3 flows out of the cylinder 1 and is supplied to the outside of the cylinder storage box 2 via the pipe 4 connected to the main valve 3 in communication.

The operating angle range of the operating handle 3a from the fully open position to the fully closed position of the main valve 3 is, for example, 160°.

5 is the actuator, cylinder storage box 2
It is arranged on the upper surface of the top plate 2a of the cylinder 1, and is located at a position apart from the cylinder 1. The drive shaft 6 of the actuator 5 passes through the top plate 2a and connects to the cylinder storage box 2.
protrudes inward. In addition, the drive shaft 6 is connected to a universal joint 7.
is connected to.

Reference numeral 8 denotes a chuck (coupling member), which is coupled to the outer periphery of the operating handle 3a of the main valve 3. Further, a shaft 8a protruding from the top of the chuck 8 is connected to the universal joint 7. Therefore, the drive shaft 6 of the actuator 5 is connected to the chuck 8 via the universal joint 7. 9 is the operating device, cylinder storage box 2
It has open/close switches 9a, 9b and an emergency cutoff switch 9c, which are provided at a more distant position and supply opening/closing signals for opening and closing the main valve 3 to the actuator 5. Reference numeral 10 denotes an air pipe that supplies air pressure to the actuator 5 to rotationally drive the drive shaft 6 of the actuator 5.

As shown in FIG. 2, an elastic member 11 made of rubber or the like is provided on the inner periphery of the chuck 8. As shown in FIG. Further, as will be described later, when connecting the chuck 8 to the operation handle 3a of the main valve 3 when replacing the cylinder, the pair of flexible parts 8a are displaced inward by tightening the screws 12, and the elastic member 11 is moved to the operation handle. Insert it into the outer circumferential recess of 3a.

The upper end 6 of the drive shaft 6 is attached to the upper part of the actuator 5.
A stands out. Further, a detection mechanism 1 for detecting the rotational position of the drive shaft 6 is provided on the upper part of the actuator 5.
6 is provided. 4 at the upper end 6a of the drive shaft 6.
A number of cams 13a to 13d are provided. Additionally, four cams 13a to 1 are provided at the top of the actuator 5.
Switches 14a to 14d facing the switch 3d are provided. Each cam 13a provided on the drive shaft 6
13d closes each switch 14a to 14d in accordance with the rotational position of the drive shaft 6 to detect the open/closed state of the main valve 3 when opening or closing the main valve 3.

Therefore, the cams 13a to 13d and the switch 1
4a to 14d constitute a detection mechanism 16.

In addition, as shown in FIG. 3, each switch 14a to
14d are connected to display lamps 15a to 15d disposed in the central control room, actuator 5, etc., respectively. Therefore, as will be described later, when the switches 14a to 14d are closed, the indicator lamps 15a to
15d lights up and displays.

As shown in FIG. 4A, the switch 14a is a switch that detects the valve closing position. The cam 13a faces the switch 14a, and has a cam portion 13a ₁ that protrudes within a range of 20° from a position 160° from the fully open position. Therefore, as shown in the diagram in FIG. 5, when the drive shaft 6 rotates from the fully open position to a position of 160 to 180 degrees, the cam portion _13a1 comes into contact with the contact piece _14a1 , closing the switch 14a. .

As shown in FIG. 4B, the switch 14b is a switch that detects the proper position for attaching the chuck 8 to the operating handle 3a in the closed position. The cam 13b faces the switch 14b, and has a cam portion _13b1 that protrudes within a range of 5° from a position 165° from the fully open position. For this reason, as shown in the diagram in FIG.
When rotated to the 170° position, the cam part 13b ₁ is the contact piece 1
_4b1 and closes the switch 14b.

As shown in FIG. 4C, the switch (detection means) 1
4c is a switch that detects that the drive shaft 6 has rotated excessively beyond the proper valve closing position (in this embodiment, 170 to 175 from the valve opening position). Cam 13c
is opposite switch 14c, and from the fully open position
Cam portion 13c ₁ protruding within a range of 5° from the 175° position
have. Therefore, as shown in the diagram in FIG. 5, when the drive shaft 6 rotates to a position of 175 to 180 degrees from the fully open position, the cam portion _13c1 contacts the contact piece _14c1 and closes the switch 14c. .

As shown in FIG. 4D, the switch 14d is connected to the main valve 3.
This is a switch that detects when the switch is fully open.
The cam 13d faces the switch 14d and has a cam portion 13d ₁ that projects within a range of 5° from the fully open position. Therefore, as shown in the diagram in FIG. 5, when the drive shaft 6 rotates to a position of 0 to 5 degrees from the fully open position, the cam portion 13d ₁ comes into contact with the contact piece 14d ₁ , closing the switch 14d. do.

Here, when opening and closing the main valve 3 of the cylinder 1, first open and close the operating section 9, and then switch the valve close switches 9a and 9b.
is operated to supply an operation signal to the actuator 5. As a result, the opening and closing solenoids 5a and 5b of the electromagnetic valves connected to the air pipe 10 are activated. Then, air pressure from the air pipe 10 is introduced into the cylinder portion of the actuator 5 to displace a piston (not shown). In this way, the actuator 5 operates and the drive shaft 6 is driven. The rotational driving force of the drive shaft 6 is transmitted to the chuck 8 via the universal joint 7. That is, the operation handle 3 of the main valve 3
a is driven by the actuator 5 and rotates, and the main valve 3
Open and close.

Next, a case will be described in which the actuator 5 is operated from the open position to the closed position when the main valve 3 is fully open. When the valve closing switch 9b of the operating device 9 is operated to supply a valve closing signal to the actuator 5, the drive shaft 6 is rotationally driven in the valve closing direction. When the drive shaft 6 rotates 160 degrees from the fully open position, the main valve 3 closes and the cam 13a closes the switch 14a that detects the closed position. Closing the switch 14a lights up the valve closing position indicator lamp 15a.
After a predetermined period of time has elapsed after the switch 14a is closed, the current to the valve-closing solenoid 5b is cut off, and the actuator 5 is stopped. Further, when the actuator 5 operates to the proper position (165 to 170 degrees from the valve opening position) after closing the main valve 3, the combined proper position detection switch 14b and the valve closing position indicator lamp 15a are activated by the cam 13b. When the display lamp 15b is closed, the display lamp 15b lights up. Therefore, it can be seen that the actuator 5 has been operated to the proper position by the lighting of the indicator lamps 15a and 15b.

However, if, for example, the screw 12 that tightens the flexible portion 8a of the chuck 8 is loosened, the chuck 8 will not be sufficiently connected to the operating handle 3a. That is, the elastic member 11 slips on the outer periphery of the operating handle 3a, and the rotational driving force from the drive shaft 6 is not sufficiently transmitted to the operating handle 3a, resulting in a transmission loss.

Therefore, while the actuator 5 is being driven to close the valve by air supply, the chuck 8 slips on the outer circumference of the operating handle 3a, and even after closing the main valve 3, the valve is further closed beyond the predetermined valve closing position. drive
When the drive shaft 6 of the actuator 5 is further driven to close the valve and exceeds a position 170° from the valve open position, the indicator lamp 15b goes out and only the indicator lamp 15a lights up. Therefore, it becomes clear that the actuator 5 has operated beyond the proper position, and the user is given a warning.

Then, the actuator 5 is moved 170 degrees from the valve open position.
If the engine does not stop at a position of ~175°, both the indicator lamp 15a that indicates the proper valve closing position and the indicator lamp (display section) 15c that indicates over-rotation are lit. That is, the drive shaft 6 is moved from the valve open position.
When the cam 13c rotates to a position of 175 to 180 degrees, the switch 14c for detecting over-rotation is closed, and the indicator lamp 15c lights up to indicate this. Therefore, it can be seen that the actuator 5 is being rotated excessively by the lighting of the indicator lamp 15c.
That is, by turning on the indicator lamp 15c, the cause can be quickly determined and repaired to eliminate the failure.

In addition, if the seat part or gasket of the main valve 3 is damaged, please remove the actuator 5 in the same manner as above.
When the valve is properly closed beyond the valve closing position, the drive shaft 6 over-rotates, and the indicator lamp 15c lights up. In addition to the above, for example, if the universal joint 7 negotiates,
Or even if the actuator 5 breaks down,
It can be known from the lighting of the indicator lamp 15c that the actuator 5 has operated beyond the predetermined proper valve closing position.

That is, it can be easily known from the lighting of the indicator lamp 15c that the device is not operating normally. Therefore, even if some kind of failure occurs, it can be detected immediately and repairs can be carried out promptly.

Therefore, it is possible to know whether the main valve 3 is normally opened and closed by the operation of the actuator 5, which is advantageous in terms of safety management, and the reliability of the device can be further improved.

Effects of the invention As described above, according to the cylinder main valve actuating device of the present invention, when driving the main valve to close, the actuator detects that the main valve is further driven to close beyond the proper valve closing position. By displaying this, you can immediately know that the device is not operating properly. Also, for example, if the coupling member connected to the drive shaft slips against the operation handle of the main valve, if the seat part or gasket of the main valve is damaged, or if the actuator, universal joint, etc. is broken. Even if the actuator is driven beyond the valve closing position, the cause can be investigated and repairs can be made promptly. Therefore, it is advantageous in terms of safety management when opening and closing a cylinder filled with harmful gas, and has features such as improved reliability of the device.

[Brief explanation of the drawing]

Fig. 1 is a schematic configuration diagram for explaining an embodiment of the cylinder main valve actuation device according to the present invention, and Fig. 2 shows a detection mechanism for detecting the operating position of the actuator and a combination of the actuator and the cylinder main valve. Figure 3 is a circuit diagram of each switch and each indicator lamp, Figure 4 is a plan view of the limit switch and cam that detects the valve closing position, Figure 4B is a drive shaft of the actuator. Figure 4C is a plan view of the limit switch and cam that detects when the drive shaft is in the correct position when combined with the operating handle of the main valve. D is a plan view of the limit switch and cam for detecting the valve opening position, and FIG. 5 is a diagram for explaining the operation of each limit switch according to the rotation angle of the drive shaft. 1... cylinder, 3... main valve, 5... actuator, 6... drive shaft, 8... chuck, 9... operating device, 9a... valve open switch, 9b... valve close switch, 9c... Emergency cutoff switch, 13a-13
d...Cam, 14c...Overspeed detection switch, 1
5a to 15d...display lamp, 16...detection mechanism.

Claims (1)

[Claims for Utility Model Registration] A cylinder filled with gas, a main valve attached to the cylinder, an actuator that rotates a drive shaft at a predetermined angle by supplying an operation signal to operate the main valve; A cylinder main valve actuating device comprising a coupling member connected to a drive shaft of an actuator and coupled to an operating portion of the main valve, wherein the drive shaft of the actuator is connected to the main valve when driving the main valve to close. A cylinder main valve comprising: a detection means for detecting over-rotation in the valve-closing drive direction beyond the proper valve-closing position; and a display section for indicating malfunction based on detection by the detection means. Actuation device.