JPS6241497A - Emergency cutting-off device for main valve of bomb - Google Patents

Abstract

PURPOSE:To reliably close a main valve, by providing a timer for continuing a closed condition of the main valve for a predetermined period of time by an actuator after closing of the main valve. CONSTITUTION:It is detected by a closing operation of a limit switch 29a that a main valve 3 has been closed, and the closed condition of the main valve is indicated by lighting up a valve closing indicator lamp 30a provided at a control center or the like. After closing of the main valve, a solenoid 17a is excited for t seconds set by a timer 27 to continue the closed condition. Accordingly, even after closing of the main valve 3, a right cylinder chamber 18c is supplied with air from an air piping 10. As a result, a piston 18b is urged in a direction of an arrow X2 continuously after closing of the main valve to continue to drive an operation handle 3a of the main valve 3 in a valve opening direction. Thus, although an operational force of the operation handle 3a just before closing of the main valve is large, the main valve 3 is continuously closed for a predetermined period of time, thereby ensuring the closed condition.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a cylinder main valve emergency shutoff device, and more particularly to a cylinder main valve emergency shutoff device for opening and closing the main valve of a cylinder storing harmful gas.

Conventional technology For example, semiconductor material gases used in the semiconductor manufacturing process may be highly toxic, flammable, self-combustible, combustible, or a combination of these depending on the type of gas. There is something like that.

The cylinders storing these harmful gases were housed in a cylinder storage box equipped with an exhaust duct, and a main valve was attached to the top of the cylinder to open and close the cylinder in order to supply the gas inside the cylinder to the outside.

For this reason, a cylinder main valve emergency shutoff device is being developed that automatically opens and closes the main valve for opening and closing the cylinder as described above by remote control. The conventional cylinder main valve emergency shutoff device that opens and closes the main valve of the cylinder has an actuator installed above the main valve of the cylinder integrally with the cylinder, and operates the main valve by supplying an operation signal to this actuator. It was said to be a composition.

That is, an open valve pipe and a closed valve pipe that supply air to operate the actuator are connected to the actuator, and by operating a solenoid valve in response to an operation signal, air is drawn from the open valve pipe or the closed valve pipe. Supplied into the cylinder of the actuator.

Therefore, the actuator is operated by the pressure of air supplied from the valve-opening piping or the valve-closing piping to open and close the main valve.

Problems to be Solved by the Invention However, in the cylinder main valve emergency shutoff device configured as described above, the actuator is operated by remote control to close the main valve, and as the main valve is closed, the main valve is closed. Since the operating force of the operating handle of the main valve is large, it is difficult to completely close the main valve if the air supply to the actuator is cut off immediately after the actuator moves to the valve open position. Therefore, it has been desired to reliably close the main valve by operating the actuator.

Therefore, an object of the present invention is to provide a cylinder main valve emergency shutoff device that meets the above-mentioned needs. Means and operation for solving the problems The present invention provides a cylinder main valve emergency shutoff device having the above-mentioned structure, which continues to supply air from the valve-closing piping even after the main valve is closed when driving the main valve to close. A timer is provided in which the actuator continues to drive the main valve to close for a predetermined period of time to ensure that the main valve is closed.

Embodiment FIG. 1 shows a main part of an embodiment of the cylinder main valve emergency shutoff device according to the present invention. Further, the configuration of the apparatus is shown in FIGS. 2 and 3. In FIGS. 2 and 3, for example, a cylinder 1 is filled with a highly concentrated semiconductor material gas. The cylinders 1 are stored in a cylinder storage box 2 while being kept vertically at a predetermined distance from each other. A main valve 3 is attached to the top of the cylinder 1. The main valve 3 has an operating handle 3a on its upper part for opening and closing operations. therefore,
The opening degree of the main valve 3 is adjusted by rotating the operating handle 3a. Therefore, a flow rate of gas corresponding to the opening degree of the main valve 3 flows out of the cylinder 1 and is supplied to the outside of the cylinder storage box 2 via the pipe 4 connected to the main valve 3 in communication. The operating angle range of the operating handle 3a from the fully open position to the fully closed position of the main valve 3 is, for example, 160°.

5 is an actuator, which is attached to the top plate 2 of the cylinder storage box 2.
It is disposed on the upper surface of the cylinder a, and is located at a distance from the cylinder 1. The output shaft 6 of the actuator 5 passes through the top plate 2a and projects into the cylinder storage box 2. Further, the output shaft 6 is connected to a universal joint 7.

Reference numeral 8 denotes a chuck, which is fitted onto the outer periphery of the operating handle 3a of the main valve 3. Also, a shaft 8a protruding from the top of the chuck 8
is connected to the universal joint 7.

Therefore, the output shaft 6 of the actuator 5 is connected to the universal joint 7
It is connected to the chuck 8 via. 9 is the operating device,
It is provided at a position away from the cylinder storage box 2, and has open and close switches 9a and 9b for supplying open and close signals for opening and closing the main valve 3 to the actuator 5, and an emergency cutoff switch 9C. Reference numeral 10 denotes an air pipe that supplies air pressure to the actuator 5 to rotationally drive the output shaft 6 of the actuator 5.

Reference numeral 12 denotes a power unit, which includes a liquefied gas container 13 filled with high-pressure gas that serves as a driving source for the actuator 5, and an unsealing mechanism 14 that opens the container 13 in response to an emergency cutoff signal from the operating device 9.

Note that the container 13 is connected to the actuator 5 via a gas pipe 15. Therefore, in an emergency, the opening mechanism 1
4 is actuated to open the container 13, high pressure gas in the container 13 is supplied into the actuator 5 through the gas pipe 15, as will be described later, and the actuator 5 is urgently operated in the valve closing direction. As a result, the main valve 3 of the cylinder 1 is connected to the air pipe 1.
It is driven by the gas pressure from the container 13, not by the air pressure from 0, and closes quickly.

Here, the configurations of the actuator 5 and the power unit 12 will be further explained. The actuator 5 is the operating device 9
It has electromagnetic valves 16 and 17 that are operated by operation signals from the . An air pipe 10 is connected to the solenoid valves 16, 17 as will be described later. When the solenoid valve 16.17 is actuated, air from the air line 10 is introduced into the cylinder part 18 via the solenoid valve 16.17. The solenoid valves 16 and 17 are spring offset solenoid switching valves, and when an open or close signal is supplied from the operator 9, the solenoid 16a,
17a is excited and switches against the springs 16b and 17b. Normally, the solenoid valves 16 and 17 are open to the atmosphere when not in operation.

The solenoid 16a of the solenoid valve 16 for closing the valve is connected to a timer 27 as shown in FIG. For this reason,
As will be described later, the timer 27 is energized for a predetermined period of time longer than the time required to close the solenoid valve 16 by supplying the valve opening signal and maintains the operating state. In other words, the solenoid valve 16 It continues to operate for a certain period of time after the valve closes.During this time,
Even after the valve is closed, air is supplied to the right cylinder chamber 18c of the cylinder section 18 via the valve closing pipe 21, and the main valve 3
Continue to drive the valve closed.

Further, the solenoid valves 16 and 17 are branch pipes 10a connected to the air pipe 10 via check valves 19, respectively.

It has boats 16C and 17G that communicate with 10b.

Note that one of the solenoid valves 16 is a switching valve for opening the valve, and the valve opening piping 2 connected to the left cylinder chamber 18a of the cylinder portion 18 is a switching valve for opening the valve.
It has a boat 16d that communicates with 0.

Further, the other solenoid valve 17 is a switching valve for closing the valve, and the valve closing pipe 2 connected to the right cylinder chamber 18C of the cylinder portion 18
It has a boat 17d that communicates with 1.

A pressure reducing valve 22 is provided in the middle of the valve-closing pipe 21. 23
is a check valve, and the branch pipe 2 branched from the valve closing pipe 21
It is located in the middle of 4. 25 is a check valve, which is provided in the gas pipe 15 from the power unit 12. Therefore, the gas pipe 15 is connected to the valve-closing pipe 21 between the solenoid valve 17 and the pressure reducing valve 22 via the check valve 25.

Note that the power unit 12 is provided with a safety valve 26 branched from the gas pipe 15. The safety valve 26 opens to the atmosphere when the pressure from the container 13 reaches a predetermined pressure during an emergency shutdown, thereby preventing the gas pipe 15 from being damaged by the high pressure of the gas from the container 13.

As shown in FIG. 4, the upper end 6a of the output shaft 6 projects from the upper part of the actuator 5. Four cams 28a to 28d are attached to the upper end 6a of the output shaft 6. Also,
At the top of the actuator 5 are four cams 28a to 28d.
Limit switches 29a to 29d facing each other are provided.

Each cam 28a to 28d provided on the output shaft 6 activates each limit switch 29a to 29(j
Close.

As shown in FIG. 5(A), the limit switch 29a is a switch that detects the valve closing position.

The cam 28a faces the limit switch 29a,
It has a cam portion 28a1 that protrudes within a range of 20 degrees from a position 160 degrees from the fully open position. For this reason, as shown in the diagram (■) in Fig. 6, the output shaft 6 is 160 to 18
When rotated to the 0° position, the cam portion 28a+ engages the contact piece 29a.
1 and closes the limit switch 29a.

As shown in FIG. 5(B), the limit switch 29b is a switch that detects the proper position for attaching the chuck 8 to the operating handle 3a in the valve-closed position. The cam 28b faces the limit switch 29b, and the cam portion 28 protrudes within a range of 5° from a position of 165° from the fully open position.
It has b1. Therefore, as shown in the diagram (■) in FIG. 6, when the output shaft 6 rotates from the fully open position to a position of 165 to 170 degrees, the cam portion 28b1 comes into contact with the contact piece 29t)+, and the limit switch 29b to open.

As shown in FIG. 5(C), the limit switch 29c is a switch that detects excessive rotation of the output shaft 6. The cam 28c faces the limit switch 29c, and has a cam portion 28C1 that protrudes within a range of 5° from a position 175° from the fully open position. For this reason, in Figure 6,
As shown in the diagram ■, the output shaft 6 is from the fully open position 115~
When the cam part 28c1 rotates to the 180° position, the contact piece 2
9c1 and closes the limit switch 29c.

As shown in FIG. 5(D), the limit switch 29d is a switch that detects that the main valve 3 is fully open. The cam 28d faces the limit switch 29d and has a cam portion 28d+ that projects within a range of 5 degrees from the fully open position. Therefore, as shown in the diagram ■v in FIG. 6, when the output shaft 6 rotates from the fully open position to a position of 0 to 5 degrees, the cam portion 28d1 comes into contact with the contact piece 29d1, closing the limit switch 29d. to be accomplished.

In addition, as shown in FIG. 1, each limit switch 29a~
29d is an indicator lamp 30 arranged in the central control room, etc.
Connected to a to 30d. Therefore, as will be described later, when the limit switches 29a to 29d are closed, the indicator lamps 30a to 30d are lit to provide an indication.

Next, the operation of the cylinder main valve emergency shutoff device having the above structure will be explained.

First, when opening the main valve 3, the valve opening switch 9a of the operating device 9 is pressed. When a valve opening signal is supplied from the operating device 9 to the actuator 5, the solenoid 16a of the solenoid valve 16 for opening the valve is energized as shown in the middle line diagram 1 in FIG. 7(A).

Therefore, the solenoid valve 16 is activated, and the air from the air pipe 10 is passed through the boat 16C916d to the left cylinder v18.
introduced into a. As a result, the piston 18b is
Displaced in one direction. The output shaft 6 is rotationally driven via a rack, a pinion, etc. by displacement of the piston 18b.

Furthermore, the rotation of the output shaft 6 is controlled by a universal joint 7. It is transmitted to the operating handle 3a via the chuck 8. Therefore, the seventh
As shown in the middle line V in Figure (A), the main valve 3 is opened by the operation of the actuator 5.

When the main valve 3 is fully opened, the cam 28d closes the limit switch 29d, as shown in the middle line (■) in FIG. 7(A), and this is detected. When the limit switch 29d is opened, the cylinder valve open indicator lamp 3°Od, which indicates that the main valve 3 of the cylinder 1 disposed in the central control room or the like is fully opened, lights up as shown in FIG. Furthermore, the power supply to the solenoid 16a of the electromagnetic valve 16 is cut off, and the operation of the actuator 5 is stopped.

Next, when opening the main valve 3, use the valve close switch 9 of the operating device 9.
Press b. When the valve opening signal is supplied to the actuator 5 from the operating device 9, the valve closing solenoid 17a is energized as shown in the middle line (■) in FIG. 7(A). For this reason,
The solenoid valve 17 is activated, and air from the air pipe 10 is introduced into the right cylinder chamber 18c via the port 17C217d. The piston 18b is pressed in the direction of the arrow x2 and displaced in the same direction, and the actuator 5 operates in the valve closing direction as shown in the middle line V in FIG. 7(A). The output shaft 6 rotates due to the displacement of the piston 18b, the operating handle 3a is driven in the valve closing direction, and the main valve 3 is closed. When the output shaft 6 rotates to a position 160 degrees from the fully open position, the main valve 3 closes and the cam 28a closes the limit switch 29a.

As shown in the middle line diagram (■) in FIG. 7(A), it is detected that the main valve 3 is closed due to the closing of the limit switch 29a, and a cylinder valve closing indicator lamp 30a disposed in the central control room etc. lights up to display this. Further, after the valve is opened, the solenoid 17a is energized for t seconds set by the timer 27, and its operating state is intermittent.

Therefore, even after closing the main valve 3, the right cylinder chamber 18C
Air is introduced from the air pipe 10 into the . Therefore, even after the valve is closed, the piston 18b is pressed in the two directions of the arrow and continues to drive the operating handle 3a of the main valve 3 in the valve-closing direction. As a result, although the operating force of the operating handle 3a becomes large just before the n-valve time, the main valve 3 is further driven to open and close at a predetermined time and is reliably closed. That is, not only does the gasket of the main valve 3 contact the valve seat, but the gasket also bites into the valve seat to completely close the valve. Therefore, the main valve 3 is the solenoid 17a.
Even after the valve becomes de-energized and air introduction to the right cylinder chamber 18c stops, the valve remains stably closed.

When driving the main valve 3 to close, the valve continues to be driven to close even after the valve is closed, so there is time to close the valve, and there is no problem even if the limit switch 29a that detects the valve closing position is not installed accurately. None. Therefore, the limit switch 29a can be easily assembled without requiring much effort when assembling it.

Next, a case will be described in which, for example, an earthquake occurs and the main valve of the cylinder 1 is urgently shut off. By operating the emergency cutoff switch 9C of the operating device 9, the opening mechanism 1 of the power unit 12 is opened.
Solenoid 4 is energized and container 13 is opened. The high pressure gas in the container 13 is connected to the gas pipe 15. It is supplied to the valve-closing piping 21 through the check valve 25.

At the same time, the solenoid 17a of the electromagnetic valve 17 is excited and operated, and the ports 17c and 17d are communicated with each other. For this reason,
The solenoid valve 17 is switched from the open state to the atmosphere, and the gas in the container 13 that has flowed into the solenoid valve 17 is not released to the atmosphere. Further, gas from the container 13 flows into the branch pipes 10a and 10b, but the check valve 19 and the solenoid valve 16 prevent further leakage.

Therefore, the gas in the container 13 that has flowed into the closed valve piping 21 is transferred to the cylinder 18 via the pressure reducing valve 22 without leaking to the outside.
is introduced into the right cylinder chamber 18c. Therefore, the main valve 3 of the cylinder 1 is immediately closed by operating in the same manner as the valve closing operation described above. As shown in diagrams ■ and ■ in Figure 7 (B), container 1
When the actuator 5 supplied with gas from the main valve 3 closes, the cam 28a closes the limit switch 29a and detects that the valve is closed. At the same time, the cylinder valve close indicator lamp 30a lights up and displays. Further, even after the valve is closed, the solenoid 17a is energized for t seconds longer than the time set by the timer 27 for closing the valve, and continues to be activated.

For this reason, the solenoid valve 1 continues to operate for a predetermined period of time even after the main valve 3 is opened in an emergency mode, and does not immediately return to the open state to the atmosphere.
The operating handle 3a continues to be driven in the valve-closing direction by being pushed in the two directions of the arrow by the gas pressure from the valve. Thereby, the main valve 3 is reliably closed.

Effects of the Invention As described above, according to the cylinder main valve immediate shutoff device of the present invention, when driving the main valve to close, the actuator continues to drive the main valve to close for a predetermined period of time after the main valve is closed. , the main valve can be closed reliably, and even if there is an error in the switch that detects the valve opening position, the main valve can be closed completely for a predetermined period of time regardless of the error. In particular, safety is high because the valve can be driven to close even if the operating force becomes large just before the valve closes. In addition, since the valve can be closed reliably even if the mounting position of the limit switch that detects the valve closing position is not accurate, there is no need to mount the switch for detecting the valve closing position with high precision, and assembly work is easy. It has characteristics.

[Brief explanation of drawings]

Fig. 1 is a circuit diagram applied to an embodiment of the cylinder main valve emergency shutoff device according to the present invention, Fig. 2 is a schematic configuration diagram of the device, and Fig. 3 is a system diagram of air piping to explain the actuator. , Fig. 4 is a diagram for explaining the mechanism for detecting the rotation angle of the output shaft of the actuator, Fig. 5 (A) is a plan view of the limit switch and cam for detecting the valve closing position, and Fig. 5 (B)
) is a plan view of the limit switch and cam that detect that the output shaft of the actuator is in the correct position when combined with the operating handle of the main valve, and M5 (C) is a plan view of the limit switch and cam that detects that the output shaft has over-rotated. Top view of limit switch and cam,
Fig. 5 (D) is a plan view of the limit switch and cam that detect the valve opening position, Fig. 6 is a diagram explaining the operation of each limit switch according to the rotation angle of the output shaft, and Fig. 7 (A> Figure 7 (B) is a diagram for explaining the operation of the limit switch and actuator that detect the opening and closing positions when opening and closing the main valve in response to an operation signal.
1 is a diagram for explaining a solenoid for opening and closing a valve that is activated by an emergency shutoff signal, a limit switch that detects the opening and closing positions, and an actuator. 1...Cylinder, 2...Cylinder storage box, 3...
・Main valve, 5... Actuator, 9... Operator, 9
a... Valve open switch, 9b... Valve close switch, 9c
...Emergency cutoff switch, 16.17...Solenoid valve, 1
5a, 17a... Solenoid, 18... Cylinder part, 20... Valve closing piping, 21... Valve closing piping, 27...
・Timer. Patent applicant: Tokiko Co., Ltd. 141 Figure 3 Figure 4

Claims (1)

[Claims] An emergency cylinder main valve consisting of a cylinder filled with gas, a main valve attached to the cylinder to open and close the cylinder, and an actuator that is supplied with air from the on-off valve piping and opens and closes the main valve in response to an operation signal. In the shutoff device, when driving the main valve to close, a timer is provided that continues supplying air from the valve-closing piping after closing the main valve and causes the actuator to continue driving the main valve to close for a predetermined period of time. A cylinder main valve emergency shutoff device characterized by: