JP2587097Y2 - Cylinder main valve actuator - Google Patents

Description

[Detailed description of the invention]

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for operating a cylinder base valve, and more particularly to an apparatus for operating a cylinder base valve having a structure in which a main valve of a cylinder can be manually opened and closed.

[0002]

2. Description of the Related Art For example, a semiconductor material gas used in a semiconductor manufacturing process is very toxic, flammable, self-combustible, flammable, or a combination thereof depending on the type of gas. There are things of nature.

[0003] The cylinder for storing these harmful gases is housed in a cylinder storage box provided with an exhaust duct, and a main valve for opening and closing the cylinder is provided above the cylinder to supply the gas inside the cylinder to the outside. Have been. And
A cylinder base valve opening / closing device for automatically opening and closing the above-described cylinder base valve by remote control has been developed.

As a cylinder valve opening / closing device of this kind, there is one proposed by the present applicant in Japanese Patent Application Laid-Open No. Sho 62-41498.

[0005] In this proposed device, an actuator is provided above the cylinder, and an operation signal from an operation device provided at a location distant from the installation site of the cylinder is supplied to the actuator. The actuator is connected to a valve-opening pipe and a valve-closing pipe for supplying compressed air to an air cylinder consisting of a piston and a cylinder. The actuator is operated by solenoid valves provided in the valve-opening and valve-closing pipes. Opening and closing the main valve of the cylinder by operating according to

[0006]

However, in the cylinder valve opening / closing device proposed above, the actuator can be driven in a valve opening or valve closing direction by remote control, and the valve attached to the cylinder can be opened / closed. Had become.

However, when replacing the cylinder, the used valve of the used cylinder is closed and replaced with a new cylinder, and then the chuck of the connecting member connected to the output shaft of the actuator is connected to the handle of the used valve. By operating the operating device again, the actuator was driven in the valve opening direction. Then, the operator has confirmed that the scale indicating the stroke of the actuator and the valve opening of the main valve match.

When opening the main valve at the time of such cylinder replacement or inspection, when the conventional main valve is rapidly opened by the driving force of the actuator, an excessive pressure is applied to the downstream pressure reducing valve. There is a risk that the pressure reducing valve may be damaged. Therefore, when a conventional device that drives the actuator in the valve opening or valve closing direction by the remote control is installed, it is desired that the original valve of the cylinder be manually opened after the installation and the valve closing operation can be performed by the remote operation. Sometimes.

Further, in the cylinder valve actuation device proposed above, if the air pipe connected to the air cylinder is cut off due to an earthquake or the like, it becomes impossible to supply compressed air to the air cylinder, so that the main valve cannot be operated. Even if an attempt is made to close the valve, there is a problem that compressed air is not supplied to the valve closing side of the air cylinder, and the main valve cannot be closed.

As a means for solving the above-mentioned problem, it is conceivable to provide a gas supply unit for supplying a gas of a liquefied gas cylinder filled with an emergency liquefied gas or the like to an air cylinder. However, such a gas supply unit requires not only the liquefied gas cylinder but also an opening mechanism for opening the liquefied gas cylinder that is hermetically closed in an emergency, which not only complicates the configuration but also requires maintenance and inspection of the gas supply unit. The problem that it is troublesome arises.

Accordingly, an object of the present invention is to provide a cylinder valve actuation device which solves the above problems.

[0012]

[0013]

According to the first aspect of the present invention,
A gas-filled cylinder, a main valve attached to the cylinder for opening or closing the cylinder, a handle provided on the main valve for manually opening the main valve, and connected to the main valve. A drive unit that drives the driven shaft by a piston that slides in the cylinder, and the pressure is accumulated in the cylinder when the main valve is opened so as to press one surface of the piston, and the drive shaft is closed in the valve closing direction. An air spring for biasing, air introduced into the cylinder so as to press the other surface of the piston, pneumatic locking means for holding the piston at a valve-open position, and air of the pneumatic locking means to the cylinder. And lock release means for releasing the lock of the piston by exhausting the air to the outside.

[0014]

[0015]

According to the present invention, when to open the main valve, the Han
Turn the dollar manually to slowly open the main valve and
To the equipment installed downstream
Effects can be mitigated. When closing the main valve,
In order to release the locking by air pressure and close the main valve of the cylinder by the pressing force of the air spring, the main valve is automatically driven to close even if the power supply or air piping is cut off due to a disaster such as an earthquake. be able to.

[0016]

1 to 3 show an embodiment of a cylinder valve actuation device according to the present invention.

In each of the figures, a cylinder 1 is filled with a semiconductor material gas, and is housed in a box-shaped cylinder housing box 2. The cylinder 1 is held vertically by a cylinder fixing bracket 3 in the cylinder storage box 2.

A main valve 4 is attached to an upper portion of the cylinder 1. The main valve 4 is opened and closed by turning the handle 4a.

Reference numeral 5 denotes an actuator box having an air cylinder (drive unit) 6 as shown in FIG. The air cylinder 6 includes a piston 9 in which a large diameter piston 7 and a small diameter piston 8 are integrated, a large diameter cylinder 10 in which the large diameter piston 7 slides, and a small diameter cylinder 11 in which the small diameter piston 8 slides.
And a cylinder body 12 having: In the present embodiment, the small-diameter cylinder 11 is supplied with compressed air when the main valve 4 is driven to open as described later, and functions as an air spring for closing the valve. Further, the large-diameter cylinder 10 functions as an air pressure locking means for holding the piston 9 at the valve opening position by internal air pressure as described later.

The pressure receiving area ratio between the large-diameter piston 7 and the small-diameter piston 8 is 2.5: 1 or more. Therefore, the valve opening torque acting on the large diameter piston 7 is 1.5 times or more the valve closing torque acting on the small diameter piston 8. This is because the valve opening torque is reduced by the main valve 4 to 1.2 to 1.3 of the valve closing torque.
In some cases, the valve opening torque is given a margin because it may need to be doubled.

A rack 9a is suspended between the large-diameter piston 7 and the small-diameter piston 8 so as to extend in the axial direction. The rack 9a is provided on the outer periphery of an output shaft 13 penetrating in the axial direction. The pinion 13a meshes. Output shaft 1
3 is rotatably supported by a pair of bearings 12a and 12b embedded in the upper and lower portions of the cylinder body 12.

The lower end of the output shaft 13 is connected to a universal joint 14, and the lower end of the universal joint 14 is connected to a chuck 15 fitted to the handle 4 a of the main valve 4.

The lower end of the output shaft 13 is connected to the upper end 14a of the universal joint 14 via a pin 47a, and a joint 49 is fitted to the lower end 14b of the universal joint 14.

The upper part of the joint 49 is the lower end 14 of the universal joint 14.
b and is connected via a pin 49a.
The lower part of the joint 49 is provided with a shaft hole 50 of the manual operation handle 50.
a and is connected via a pin 50b.

Further, the manually operated handle 50 is connected via a pin 15a to the chuck 15 chucked on the outer periphery of the handle 4a of the main valve 4. Accordingly, the driving force of the air cylinder 6 is transmitted through the transmission mechanism (composed of the rack 9a, the pinion 13a, the universal joint 14, the joint 49, the manually operated handle 50, and the chuck 15) 51 having the above-described configuration.
And the main valve 4 is closed.

Accordingly, the main valve 4 is opened and closed by rotating the handle 4a by the reciprocating motion of the piston 9. Also, the actuator box 5 is a bracket 1 in the cylinder storage box 2.
6 is fixed above the main valve 4, and a valve opening indicator 17 for displaying the valve opening of the main valve 4 is provided on the front surface thereof.

Reference numeral 18 denotes a relay box, which is provided on a side surface of the cylinder storage box 2 and supplies air to the air pipe 1 for supplying compressed air.
It is connected to the actuator box 5 via 9, 20 and the air pipe 21. Therefore, all transmissions and receptions between the relay box 18 and the actuator box 5 are performed by air signals.

Reference numeral 22 denotes a control box, which is provided at a position distant from the cylinder storage box 2 and discharges air (air of the air pressure locking means) on the large diameter piston 7 side to the outside of the air cylinder 6 as described later. It has an unlocking means for unlocking the piston 9, and controls switching of each solenoid valve in the relay box 18 by an electric signal. Further, the control box 22 is connected to a remote switch 23 provided on the front surface of the cylinder storage box 2. The control box 22 and the remote switch 23 include a valve open switch 22a, 23a, a valve close switch 22b,
23b and mounting switches 22c and 23c are provided.

Therefore, the main valve 4 can be opened and closed by operating the control box 22 provided at a place where the cylinder 1 is remote or the remote switch 23 provided at the place where the cylinder 1 is installed. In this case, the actuator box 5 provided in the cylinder storage box 2
Is supplied with an air signal, the cylinder storage box 2
Has no explosion-proof structure without using electrical signals.

As shown in FIGS. 4 and 5, the piston 9 and the output shaft 13 are provided above the actuator box 5.
An operation position detection mechanism 52 for detecting the operation position of the operation is provided. The operating position detecting mechanism 52 is provided with the air cylinder 6
A cam 53a for opening a valve, a cam 53b for manually opening a valve, a cam 53c for improper mounting, a cam 53d for closing a valve, and a cam 53d for closing a valve attached to a cam holder 53 fitted to an end of the output shaft 13 protruding from the upper surface 6a of the cam. The switch includes a valve opening limit switch 54a, a manual valve opening limit switch 54b, a mounting failure limit switch 54c, and a valve closing limit switch 54d that slide in contact with 53a to 53d and output a signal corresponding to the position.

In FIG. 3, a pressure reducing valve 24 for reducing the air pressure from the air source to a predetermined pressure, a first valve opening solenoid valve 25, and a second valve
And a valve opening solenoid valve 26 are provided. The mounting operation solenoid valve 27 is disposed on the branch pipe 20 a branched from the air pipe 20 and the exhaust pipe 44.

The relay box 18 includes a contact converter 28a for displaying a valve opening, a contact converter 28b for displaying a manual valve opening, a contact converter 28c for displaying a valve closing, and a contact converter 2 for indicating a mounting failure.
8d are provided. The valve opening solenoid valves 25, 2
6, mounting operation solenoid valve 27, each contact converter 28a-28
“d” is connected to the control box 22.

The valve opening solenoid valves 25 and 26 and the mounting operation solenoid valve 27 are three-port two-position / spring offset type solenoid valves, respectively. When the solenoid is energized, it resists the spring force. And the solenoid is demagnetized and returned to the state before the operation by the spring force.

That is, the valve opening solenoid valves 25 and 26 are switched so that the exhaust pipe 44 and the large diameter cylinder 10 communicate with each other when the solenoid is demagnetized. The diameter cylinder 10 is communicated.

The actuator box 5 includes, in addition to the air cylinder 6, a variable throttle 31 disposed in the air pipe 19 and a check valve 33 provided in a bypass pipe 32 that bypasses the upstream and downstream sides of the variable throttle 31. Have. The actuator box 5 further includes a branch pipe 34 branched from the air pipe 19, an air-operated valve 35 disposed in the branch pipe 34, a bypass pipe 36 that bypasses the upstream and downstream sides of the air-operated valve 35, It has a check valve 37 disposed in the pipe 36.

The air pipe 19 is connected to the large diameter cylinder 10 of the air cylinder 6, and the branch pipe 34 is connected to the air chamber 11a communicating with the small diameter cylinder 11.

The actuator box 5 has a valve opening indicating limit valve 3 connected to the air pipe 20 therein.
8a, manual valve open display limit valve 38b, valve closed display limit valve 38c, improper installation display limit valve 38
d. Further, each of the limit valves 38a to 38d
Are connected to the contact converters 28a to 28d of the interruption box 18 via air signal pipes 39a to 39d, respectively.

Here, the operation of the cylinder base valve operating device having the above configuration will be described.

For example, when the used cylinder 1 is to be replaced with an unused cylinder 1, the main valve 4 is closed and the cylinder fixing fitting 3 for fixing the used cylinder 1 is removed as will be described later. After taking out from the cylinder storage box 2, the unused cylinder 1 is stored in the cylinder storage box 2 and the unused cylinder 1 is fixed by the cylinder fixing bracket 3.

When closing the main valve 4 as described above, the operator turns on the valve closing switch 22b or 23b. As a result, the control box 22 operates the mounting operation solenoid valve 27 of the relay box 18 for several seconds (in this embodiment, 3 seconds).
(Approximately for about 2 seconds).

Therefore, the solenoid valve 27 is connected to the air pipes 20 and 2.
1 to communicate with the air supply valve 35 of the actuator box 5. Thereby, the air operated valve 35 is switched, and the branch pipe 34 and the small diameter cylinder 11 are communicated. At this time, the valve opening solenoid valve 26
Communicates the exhaust pipe 44 and the air pipe 19,
The air in the small-diameter cylinder 11 is supplied to the branch pipe 34, the air pipe 1
9. The air is exhausted to the outside through the exhaust pipe 44. Therefore,
The pressure in the small-diameter cylinder 11 is reduced to the atmospheric pressure.

The operator replaces the cylinder 15 with the chuck 15 on the handle 4 a of the main valve 4 provided on the unused cylinder 1.
After the is mounted, the manual operation handle 50 is turned counterclockwise. As a result, the handle 4a of the main valve 4 is
, And the main valve 4 is opened. By turning the manual operation handle 50 in the counterclockwise direction, the turning power of the manual operation handle 50 is transmitted by the transmission mechanism (the rack 9a, the pinion 13a, the universal joint 14, the joint 4).
9, manual operation handle 50, chuck 15) 5
1 to the piston 9.

[0043] Accordingly, the piston 9 slides in the X ₁ direction, as shown in FIG. The operator manually turns the valve closed indication limit valve 38c off while the piston 9 is displaced from the valve closed position to the valve open position (shown in FIG. 3), and turns on the manual valve open indication limit valve 38b. The operation handle 50 is rotated. The control box 22 receives a detection signal from the manual valve open display limit valve 38b via the manual valve open display contact converter 28b,
The valve opening of the main valve 4 is displayed on a display unit (not shown).

Therefore, the operator can confirm the opening of the main valve 4 on the spot by rotating the manual operation handle 50 while looking at the display section or the display 17 and also check the valve of the main valve 4 on the spot. The position where the opening is desired (in this embodiment,
(The position where the manual valve open indication limit valve 38b is turned on.)
Can be adjusted. Further, since the operator can turn the manual operation handle 50 relatively slowly, it is possible to prevent the gas in the cylinder 1 from being rapidly supplied to the downstream side, and to reduce the pressure supplied to the downstream pressure reducing valve. Since it gradually rises, the pressure reducing valve is prevented from being damaged.

When the manual operation handle 50 is turned counterclockwise, the piston 9 is displaced toward the small-diameter cylinder 11 (valve open position side), but the air in the air chamber 11a of the small-diameter cylinder 11 Air is exhausted by the closing operation. Therefore, the piston 9 is displaced without load from the valve closing position to the valve opening position, and there is no possibility that the operating force of the handle 50 increases.

Next, when the main valve 4, which has been manually opened as described above, is further driven in the valve opening direction, the valve open switch 22a of the controller box 22 or the valve open switch 23a of the remote switch 23 is pressed. I do.

As a result, the signal from the control box 22 is transmitted to the valve opening solenoid valves 25 and 26 of the relay box 18.
, And the valve opening solenoid valves 25 and 26 are excited. Therefore, the valve opening solenoid valves 25 and 26 communicate the air source and the large-diameter cylinder 10 of the air cylinder 6 as shown in FIG.

Therefore, the compressed air from the air source is supplied to the pressure reducing valve 2.
After the pressure is reduced to a predetermined pressure by 4, the pressure is supplied to the large-diameter cylinder 10 through the air pipe 19. In addition, large diameter cylinder 1
Since the variable throttle 31 is provided on the upstream side of 0, the pressure of the large-diameter cylinder 10 gradually increases.

As described above, the compressed air from the air source is supplied to the large-diameter cylinder 10 and also flows to the branch pipe 34 branched from the air pipe 19 on the downstream side of the valve opening solenoid valve 26. At this time, the air operated valve 35 is in a closed state, and the air that has flowed into the branch pipe 34 is supplied to the bypass pipe 36 and the check valve 3.
7 flows into the small-diameter cylinder 11.

Therefore, when the valve opening solenoid valves 25 and 26 are excited, the air from the air source flows to the large-diameter cylinder 7 and the small-diameter cylinder 11 via the air pipe 19, the branch pipe 34, and the bypass pipe 36. Supplied at the same time. Since the variable throttle 31 is provided on the upstream side of the large-diameter cylinder 7, a large amount of air initially flows into the small-diameter cylinder 11, and the small-diameter cylinder 11 is larger than the large-diameter cylinder 7. Increase pressure first.

When the large-diameter cylinder 7 is also pressurized following the small-diameter cylinder 11, the large-diameter piston 7 and the small-diameter piston 8
The piston 9 of the air cylinder 6
It is driven into the small diameter cylinder 11 side (X ₁ direction). The driving force of the piston 9 is transmitted to the chuck 15 via the output shaft 13 and the universal joint 14. Therefore, the handle 4a of the main valve 4 rotates together with the chuck 15, and the main valve 4 opens.

When the piston 9 is displaced to the small-diameter cylinder 11 side, that is, the valve open position, the inside of the small-diameter cylinder 11 is
Compressed to a pressure equal to or higher than the pressure set by. Then, the valve open display limit valve 38a is switched, and “valve open” is displayed on the display 17 of the actuator box 5 and air from the air pipe 20 is opened via the air signal pipe 41 to open the valve of the relay box 18. It is supplied to the display contact converter 28a. The converter 28a converts the air signal into an electric signal and outputs the electric signal to the control box 22.

The control box 22 includes a converter 28a.
When the signal is input from the controller, the fact that the main valve 4 has been opened is displayed on a display unit (not shown).

As described above, when the solenoid valves 25 and 26 are excited, the air pipe 19, the branch pipe 34, the bypass pipe 3
6, the compressed air can be supplied to the large-diameter cylinder 10 and the small-diameter cylinder 11 through the small-diameter cylinder 11
When the valve is closed, the piston 9 can be reliably driven in the valve closing direction by the air pressure of the small-diameter cylinder 11 without forgetting the supply of air to the valve.

When the main valve 4 is opened, compressed air is also introduced into the branch pipe 34 and the bypass pipe 36 via the air pipe 19, so that, for example, the check valve 37 or the air-operated valve is used. Even if there is an air leak at 35, the air pressure in the small-diameter cylinder 11 is prevented from dropping below the pressure set by the pressure reducing valve 24 (in other words, below the valve closing drive torque of the main valve 4).

Therefore, it is possible to prevent an accident that the small-diameter cylinder 11 becomes insufficient in pressure due to air leak and cannot be closed.

Next, the valve closing operation of the main valve 4 will be described.

When closing the main valve 4, the valve closing switch 22b of the control box 22 or the valve closing switch 23b of the remote switch 23 is pressed.

As a result, the power supply from the control box 22 is cut off, and as shown in FIG.
5 and 26 are switched to the state before the operation by the spring force.

That is, the valve opening solenoid valves 25 and 26 are switched so that the exhaust pipe 44 communicates with the downstream air pipe 19 and shut off the upstream air pipe 19. Therefore, the air in the large-diameter cylinder 10 flows through the variable throttle 31 and the check valve 33 of the bypass pipe 32 to the exhaust pipe 44 and is discharged to the outside.

Since the air pipe 19 is provided with the variable throttle 31, most of the air in the large-diameter cylinder 10 is exhausted through the check valve 33.

On the other hand, since the compressed air from the air source is accumulated in the small-diameter cylinder 11 as described above, the pressure acting on the large-diameter piston 7 is reduced together with the exhaust of the large-diameter cylinder 10, and the relatively large The difference between the pressure acting on the diameter piston 7 and the pressure acting on the small diameter piston 8 is reversed.

As a result, the piston 9 is
And the handle 4a of the main valve 4 is driven in the valve closing direction. When the piston 9 is displaced to the valve closing position, the valve closing indication limit valve 39 is switched, and an air signal is supplied to the valve closing indicating contact converter 29 via the air signal pipe 42. The converter 29 converts the air signal into an electric signal and outputs the electric signal to the control box 22. When the signal from the converter 29 is input to the control box 22, the display unit indicates that the main valve 4 has been closed.

Further, after the valve closing position is detected, the main valve 4
After the handle 4a is driven in the tightening direction for several seconds (for example, about 5 seconds) until the valve is completely closed, the control box 22 causes the mounting operation solenoid valve 27 of the relay box 18 to operate for several seconds (3 seconds in this embodiment). Energize and excite.

Therefore, the solenoid valve 27 is connected to the air pipes 20 and 2.
1 to communicate with the air supply valve 35 of the actuator box 5. Thereby, the air operated valve 35 is switched as shown in FIG. 4, and the branch pipe 34 and the small diameter cylinder 11 are communicated. At this time,
Since the valve opening solenoid valve 26 communicates the exhaust pipe 44 with the air pipe 19, the air in the small-diameter cylinder 11 is exhausted outside through the branch pipe 34, the air pipe 19, and the exhaust pipe 44.

Therefore, after the main valve 4 is completely closed, the air of the remaining driving pressure in the small-diameter cylinder 11 is exhausted, and the valve tightening torque can be released. As a result, the main valve 4
This prevents the valve seat and the packing from being damaged.

As described above, the air pipe 19 and the branch pipe 34
Is used for both air supply and air discharge to the cylinders 7 and 11, and the piping configuration is simplified.

Further, since a pair of valve opening solenoid valves 25 and 26 which communicate with the exhaust pipe 44 are provided in series with the air pipe 19, even if one of the solenoid valves does not return due to the spring force, the other valve does not return. If the solenoid valve is reset, the air pipe 19 on the downstream side is necessarily connected to the exhaust pipe 44, and the air cylinder 6 has a safety structure to surely drive the valve to close.

After the main valve 4 is closed, the large-diameter cylinder 10 and the small-diameter cylinder 11 are both open to the atmosphere as described above, so that the piston 9 can be moved manually. When performing the replacement work, the chuck 15
, Handle 4a and the coupling position can be easily adjusted.

Here, a case where a disaster such as an earthquake occurs will be described.

In FIG. 3, when the power supply is stopped due to, for example, an earthquake, the valve-opening solenoid valves 25 and 26 that have been excited up to that point return as shown in FIG. And the downstream air pipe 19 communicate with each other.

Therefore, the air in the large-diameter cylinder 10
The gas is exhausted to the outside through the exhaust pipe 44 through the check valve 33 and the variable throttle 31. As the pressure in the large-diameter cylinder 10 is reduced, the piston 9 of the air cylinder 6
Due to the internal air pressure, the main valve 4 is displaced toward the large-diameter cylinder 10 to drive the handle 4a of the main valve 4 in the valve closing direction.

In this way, even if a power failure occurs due to an earthquake, the air cylinder 6 drives the main valve 4 to close, thereby preventing gas from flowing from the cylinder 1.

The case where the air supply or the pipe connecting the air source and the actuator box 5 is damaged due to the occurrence of an earthquake and the air supply is stopped will be described.

For example, when the air pipe 19 is cut on the upstream side of the relay box 18 due to the occurrence of an earthquake, the air pipe 19 is opened to the atmosphere. Exhausted. Therefore, the piston 9 of the air cylinder 6 is displaced toward the large-diameter cylinder 10 by the air pressure of the small-diameter cylinder 11, and drives the handle 4a of the main valve 4 in the valve closing direction.

As described above, since the air cylinder 6 has a normally closed (normally closed) structure, even if the power supply is cut off or the air supply is cut off, the main valve 4 is closed as described above.
Can be driven to close the valve, so that the safety in an emergency such as an earthquake is further improved. In addition, the air cylinder 6 itself that opens and closes the main valve 4 is driven to close by the air pressure of the small-diameter cylinder 11, which is simpler than providing a liquefied gas cylinder and a cylinder opening mechanism, and can be easily maintained. .

FIG. 8 shows a modification of the present invention.

In the figure, a pressure switch 55 is provided in the small-diameter cylinder chamber 11 of the air cylinder 6. The pressure switch 55 since the air in the small-diameter cylinder chamber 11 is compressed when the piston 9 slides in the X ₁ direction, when the air pressure in the small diameter cylinder chamber 11 reaches a predetermined pressure of manual operation,
The detection signal is output to the control box 22.

Therefore, when the valve opening switch 22a of the controller box 22 or the valve opening switch 23a of the remote switch 23 is turned on, the valve opening solenoid valves 25, 2 are turned on.
6 is excited. Therefore, the valve opening solenoid valves 25 and 26 communicate the air source with the large-diameter cylinder 10 of the air cylinder 6 as shown in FIG.
9 to a large diameter cylinder 10.

As described above, the compressed air from the air source is supplied to the large-diameter cylinder 10 and also flows into the branch pipe 34 branched from the air pipe 19 on the downstream side of the valve-opening solenoid valve 26, so that the branch pipe 34 The air that has flowed into the
6. Flow into the small-diameter cylinder 11 through the check valve 37.

When the large-diameter cylinder 7 is pressurized following the small-diameter cylinder 11, the large-diameter piston 7 and the small-diameter piston 8
The piston 9 of the air cylinder 6
It is driven into the small diameter cylinder 11 side (X ₁ direction). The driving force of the piston 9 is transmitted to the chuck 15, and the main valve 4
Handle 4a rotates together with the chuck 15, and the main valve 4
Opens.

When the piston 9 is displaced toward the small-diameter cylinder 11, the air in the small-diameter cylinder 11 is compressed. And
The pressure switch 55 provided in the small-diameter cylinder chamber 11 detects that the pressure in the small-diameter cylinder 11 has reached a predetermined pressure (sufficient valve closing drive torque to close the main valve 4), and opens the valve. When the display limit valve 38a is switched, "valve open" is displayed on the display 17, and the control box 22 displays on the display unit (not shown) that the main valve 4 has been opened.

Further, as shown in FIG.
May be provided in the air pipe 19 downstream of the valve opening solenoid valve 26. In this case, the pressure switch 55 detects that the pressure of the air pipe 19 has reached a predetermined pressure (a valve closing drive torque sufficient to close the main valve 4), and the valve open indication limit valve 38a is turned off. In other words, “valve open” is displayed on the display 17 and the control box 2
Reference numeral 2 indicates that the main valve 4 has been opened on a display unit (not shown).

[0084]

In the above embodiment, the air pressure of the large-diameter cylinder 10 is used as the locking means for the piston 9. However, the present invention is not limited to this. For example, a mechanical locking mechanism may be provided.

[0086]

As described above , according to the present invention , when closing the main valve, the locking by the air pressure is released and the air spring is closed.
To close the main valve of the cylinder by pressing force,
Even if the power supply or air piping is cut due to a disaster such as an earthquake
The main valve can be automatically driven to close. And liquid
It is necessary to provide a separate drive means for valve closing such as a gas cylinder
Valve closed using an air cylinder that drives the opening and closing of the main valve
Because it can be driven, the configuration can be simplified and maintenance
Maintenance such as inspection can be easily performed.

Further, since the main valve can be manually opened by turning the handle in the valve opening direction, it is possible to check the opening of the main valve and the degree of opening of the main valve on the spot. Since the valve can be opened slowly, the supply pressure to the downstream side can be gradually increased as compared to opening the valve with an actuator. Can be prevented.

[0088]

[Brief description of the drawings]

FIG. 1 is a perspective view showing a configuration of an embodiment of a cylinder base valve operating device according to the present invention.

FIG. 2 is an enlarged longitudinal sectional view showing a main part of the present invention.

FIG. 3 is a system diagram of an air pipe for explaining a configuration of an actuator and a relay box.

FIG. 4 is a plan view of an actuator for explaining an operation position detection mechanism.

FIG. 5 is a front view of an actuator for explaining an operation position detection mechanism.

FIG. 6 is a system diagram of an air pipe for explaining an operation when the main valve is opened by an actuator.

FIG. 7 is a system diagram of an air pipe for explaining an operation when the main valve is closed by an actuator.

FIG. 8 is a system diagram for explaining a modification of the present invention.

FIG. 9 is a system diagram for explaining another modification of the present invention.

[Explanation of symbols]

 Reference Signs List 1 cylinder 2 cylinder storage box 4 main valve 5 actuator box 6 air cylinder 7 large diameter piston 8 small diameter piston 9 piston 10 large diameter cylinder 11 small diameter cylinder 13 output shaft 15 chuck 18 relay box 19, 20, 21 air pipe 22 control box 23 Remote switch 25, 26 Valve opening solenoid valve 27 Mounting operation solenoid valve 32, 36 Bypass pipe 33, 37 Check valve 38b Manual valve open indication limit valve 34 Branch pipe 35 Air operated valve 44 Exhaust pipe 50 Manual operation handle 51 Transmission Mechanism 52 Operating position detecting mechanism 53a to 53d Cam 54a to 54d Limit switch 55 Pressure switch

Claims (1)

(57) [Scope of request for utility model registration] 1. A cylinder filled with a gas, a main valve attached to the cylinder for opening or closing the cylinder, a handle provided on the main valve for manually opening the main valve, A drive unit that drives a drive shaft connected to the base valve by a piston that slides in a cylinder; and a drive shaft that is stored in the cylinder when the base valve is opened so as to press one surface of the piston, and the drive shaft An air spring for urging the piston in a valve closing direction, air pressure locking means for introducing air into the cylinder so as to press the other surface of the piston, and holding the piston at a valve open position; A cylinder release valve actuating device, comprising: a lock releasing means for releasing the air to the outside of the cylinder to release the locking of the piston.