JPH04249700A - Main valve opening/closing device for cylinder - Google Patents

Abstract

PURPOSE:To automatically closing-drive a valve even if electric supply or air feed is cut off. CONSTITUTION:A chuck 15 is installed on the handle 4a of the main valve 4 of a cylinder, and the chuck 15 is connected with the output shaft 13 of an air cylinder 6 through a universal joint 14. The air cylinder 6 has a piston 9, having a large diameter piston and a small diameter piston, integrally and when the valve closing solenoid valves 25 and 26 are excited, the air supplied from an air source is supplied into a large diameter cylinder 10, passing through an air pipe 19. At the same time, air is supplied into a small diameter cylinder 11 through a branched pipe 24 and a bypass pipe 36 from an air pipe 19. The piston 9 shifts to the small diameter cylinder 11 side, and opening-drives the main valve 4. When the valve is closing-driven, the valve opening solenoid valves 25 and 26 are deenergized, and switched so that an exhaust pipe 44 and the air pipe 19 on the downstream side communicate, and the air in the large diameter cylinder 10 is exhausted outside. The piston 9 is shifted to the large diameter cylinder 10 by the air pressure of the small diameter cylinder 11, and the main valve 4 is closed.

Description

[Detailed description of the invention]

0001

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cylinder main valve opening/closing device, and more particularly to a cylinder main valve opening/closing device configured to open and close the main valve of a cylinder.

0002

[Prior Art] For example, semiconductor material gases used in semiconductor manufacturing processes may be highly toxic, flammable, self-combustible, combustible, or a combination of these gases, depending on the type of gas. There is something of a nature.

[0003] The cylinders that store these harmful gases are housed in a cylinder storage box equipped with an exhaust duct, and a main valve is attached to the top of the cylinder to open and close the cylinder in order to supply the gas inside the cylinder to the outside. It is being and,
A cylinder main valve opening/closing device for automatically opening and closing the cylinder main valve as described above by remote control has been developed.

[0004] This type of cylinder main valve opening/closing device was previously proposed by the present applicant in Japanese Patent Laid-Open No. 41498/1983.

[0005] In this proposed device, an actuator is provided above the cylinder, and an operation signal is supplied to the actuator from an operating device located at a location away from the site where the cylinder is installed. In addition, valve opening piping and valve closing piping that supply compressed air to an air cylinder consisting of a piston and cylinder are connected to the actuator, and the solenoid valves installed in the valve opening piping and valve closing piping receive operation signals. It opens and closes the main valve of the cylinder by operating according to the conditions.

[0006] The above-mentioned solenoid valve is opened to the atmosphere when not energized, and the compressed air supplied into the cylinder is exhausted.

[0007]

[Problem to be Solved by the Invention] However, with the cylinder main valve opening/closing device proposed above, if the air piping connected to the air cylinder is severed due to an earthquake or the like, compressed air cannot be supplied to the air cylinder. Therefore, even if an attempt is made to close the main valve, compressed air is not supplied to the valve-closing side of the air cylinder, resulting in a problem that the main valve cannot be closed.

[0008] As a means for solving the above problem, it is conceivable to provide a gas supply unit that supplies gas from a liquefied gas cylinder filled with liquefied gas or the like to the air cylinder in case of an emergency. However, such a gas supply unit requires not only a liquefied gas cylinder but also an opening mechanism for opening a sealed liquefied gas cylinder in an emergency, which not only complicates the configuration but also requires maintenance and maintenance of the gas supply unit.
A problem arises that inspection is troublesome.

[0009] Also, as another means for solving the above problem,
For example, Utility Model Publication No. 60-11334 proposed earlier by the present applicant.
It is also conceivable to use a stepped cylinder mechanism as disclosed in the publication.

However, this stepped cylinder mechanism has a large-diameter cylinder on the valve-opening side on which the large-diameter piston slides and a small-diameter cylinder on the valve-closing side on which the small-diameter piston slides. They work together to open and close the main valve of the cylinder, and compressed air is stored in a small cylinder on the valve-closing side, and the air pressure drives the piston toward the valve-closing side. ing.

Therefore, by switching the solenoid valve installed in the air piping from the air source, compressed air is first supplied to the small diameter cylinder on the valve closing side, and then compressed air is supplied to the large diameter cylinder on the valve opening side, so that the piston is driven in the valve opening direction. When opening the main valve, compressed air is stored in the small diameter cylinder, but since the large diameter piston has a larger pressure receiving area than the small diameter piston, it can close the main valve.

[0012] In an emergency, the air in the cylinder on the valve-opening side is exhausted by the electromagnetic valve, and the piston is thereby pressed by the pressure of the small-diameter cylinder and closes the main valve.

However, in this stepped cylinder mechanism, compressed air must be supplied to the small diameter cylinder on the valve closing side before opening the main valve. For example, compressed air must be supplied to the small diameter cylinder on the valve closing side. If the supply is forgotten, there is a problem that the main valve cannot be closed in an emergency.

SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a cylinder main valve opening/closing device that solves the above problems.

[0015]

[Means for Solving the Problems] The present invention comprises a cylinder filled with gas, a main valve attached to the cylinder to open or close the cylinder, and an output shaft connected to a handle of the main valve. an air cylinder having a large-diameter cylinder on which a large-diameter piston that drives in a valve-opening direction slides; and a small-diameter cylinder on which a small-diameter piston that is provided integrally with the large-diameter piston and drives the output shaft in a valve-closing direction slides; , an air pipe whose one end is connected to an air source that generates compressed air and whose other end is connected to the large-diameter cylinder; a solenoid valve provided in the air pipe that switches air supply to the large-diameter cylinder; It consists of a branch pipe that branches from the air pipe on the downstream side of the valve and supplies air to the small diameter cylinder, and a check valve installed in the branch pipe to prevent backflow of the air supplied to the small diameter cylinder. When the valve is not energized, the valve is switched to exhaust the air in the large diameter cylinder to the outside, and the large diameter piston and the small diameter piston are displaced toward the large diameter cylinder by the pressure of the compressed air filled in the small diameter cylinder. , drives an output shaft connected to the handle of the main valve in the valve closing direction.

[0016]

[Operation] Compressed air can be simultaneously supplied via air piping and branch piping to the large-diameter cylinder on the valve-opening side and the small-diameter cylinder on the valve-closing side of the air cylinder, which has an output shaft connected to the main valve of the cylinder. This prevents forgetting to supply air to the small diameter cylinder. Furthermore, when the power supply is cut off or the air piping is cut off, the air in the large diameter cylinder is exhausted and the air pressure in the small diameter cylinder drives the piston toward the valve closing side to close the main valve.

[0017]

Embodiment FIGS. 1 and 2 show an embodiment of the cylinder main valve opening/closing device according to the present invention.

In both figures, a cylinder 1 is filled with a semiconductor material gas and is housed in a box-shaped cylinder storage box 2. Further, the cylinder 1 is held vertically within the cylinder storage box 2 by a cylinder fixing fitting 3.

A main valve 4 is attached to the upper part of the cylinder 1. This main valve 4 is opened and closed by rotating the handle 4a.

Reference numeral 5 denotes an actuator box, which has an air cylinder 6 as shown in FIG. The air cylinder 6 is
It consists of a piston 9 that integrates a large-diameter piston 7 and a small-diameter piston 8, and a cylinder body 12 that has a large-diameter cylinder 10 on which the large-diameter piston 7 slides and a small-diameter cylinder 11 on which the small-diameter piston 8 slides.

The ratio of the pressure receiving areas of the large diameter piston 7 and the small diameter piston 8 is 2.5:1 or more. Therefore, the valve opening torque acting on the large diameter piston 7 is 1.5 times or more as the valve closing torque acting on the small diameter piston 8. This means that the opening torque of the main valve 4 is 1.2 to 1.3 of the closing torque.
Since it may be necessary to double the valve opening torque, a margin is provided for the valve opening torque.

The piston 9 is connected to an output shaft 13 located between the large diameter piston 7 and the small diameter piston 8 via a rack and pinion. The lower end of the output shaft 13 is connected to a universal joint 14, and the lower end of the universal joint 14 is connected to a chuck 15 that fits into the handle 4a of the main valve 4.

Therefore, the main valve 4 is opened and closed by the rotation of the handle 4a by the reciprocating movement of the piston 9. Also, the actuator box 5 is connected to the bracket 16 inside the cylinder storage box 2.
It is supported by and fixed above the main valve 4, and a valve opening degree indicator 17 for displaying the valve opening degree of the main valve 4 is provided on the front surface thereof.

Reference numeral 18 denotes a relay box, which is provided on the side of the cylinder storage box 2 and is connected to an air pipe 1 for supplying compressed air.
It is connected to the actuator box 5 via 9, 20 and an air pipe 21. Therefore, all communications between the relay box 18 and the actuator box 5 are performed using air signals.

Reference numeral 22 denotes a control box, which is provided at a location away from the cylinder storage box 2, and switches and controls each electromagnetic valve in the relay box 18, which will be described later, by electrical signals. Further, the control box 22 is connected to a remote switch 23 provided on the front surface of the cylinder storage box 2. The control box 22 and remote switch 23 are valve open switches 22a, 23a, valve close switches 22b, 23b, and mounting switches 22c, 23, respectively.
c is provided.

Therefore, the main valve 4 can be opened and closed by operating the control box 22 provided at a location away from the cylinder 1 or the remote switch 23 provided at the location where the cylinder 1 is installed. In that case, the actuator box 5 provided in the cylinder storage box 2
Since the air signal is supplied to the cylinder storage box 2,
does not use electrical signals and has an explosion-proof structure.

In FIG. 2, in the middle of the air pipe 19 of the relay box 18, there is a pressure reducing valve 24 for reducing the air pressure from the air source to a predetermined pressure, a first solenoid valve 25 for opening the valve, and a second solenoid valve 25 for opening the first valve.
A solenoid valve 26 for opening the valve is provided. Further, a solenoid valve 27 for installation operation is provided in the branch pipe 20a branched from the air pipe 20 and the exhaust pipe 44.

Further, the relay box 18 is provided with a contact converter 28 for indicating a valve open, a contact converter 29 for indicating a valve closed, and a contact converter 30 for indicating an installation failure. The solenoid valves 25 and 26 for valve opening, the solenoid valve 27 for installation operation, the contact converter 28 for indicating valve open, the contact converter 29 for indicating valve closing, and the contact converter 30 for indicating installation failure are connected to the control box 22. It is connected.

The solenoid valves 25 and 26 for valve opening and the solenoid valve 27 for installation operation are each a 3-port, 2-position, spring offset type solenoid valve, and when the solenoid is energized, it resists the spring force. When the solenoid is switched, the solenoid is demagnetized and the spring force returns it to its pre-operation state.

That is, when the solenoid is demagnetized, the valve opening solenoid valves 25 and 26 are switched so as to communicate the exhaust pipe 44 and the large diameter cylinder 10, and when the solenoid is energized, they are switched to communicate with the air source and the large diameter cylinder 10. It communicates with the diameter cylinder 10.

In addition to the air cylinder 6, the actuator box 5 includes a variable throttle 31 disposed in the air pipe 19, and a check valve 33 disposed in a bypass pipe 32 that bypasses the upstream and downstream sides of the variable throttle 31. have Furthermore, the actuator box 5 includes a branch pipe 34 branched from the air pipe 19, an air-operated valve 35 disposed in the branch pipe 34, a bypass pipe 36 that bypasses the upstream and downstream sides of the air-operated valve 35, and a bypass pipe 36 that bypasses the upstream and downstream sides of the air-operated valve 35. A check valve 37 is provided in the pipe 36.

Further, the air pipe 19 is connected to the large diameter cylinder 10 of the air cylinder 6, and the branch pipe 34 is connected to the small diameter cylinder 11.

The actuator box 5 also has a valve open indicator limit valve 3 connected to the air pipe 20 inside.
8. It has a valve close indication limit valve 39 and a poor installation indication limit valve 40. Furthermore, the valve open indication limit valve 38, the valve close indication limit valve 39, and the improper installation indication limit valve 40 are connected to the valve open indication contact converter 28 of the interruption box 18, and the valve closed indication via air signal piping 41, 42, 43. contact converter 29, contact converter 3 for indicating installation failure
Connected to 0.

The operation of the cylinder main valve opening/closing device having the above structure will now be explained. Handle 4a of main valve 4 of cylinder 1
After the chuck 15 is attached to the main valve 4, when opening the main valve 4, first press the valve open switch 22 of the control box 22.
a or press the valve open switch 23a of the remote switch 23.

As a result, the signal from the control box 22 is transmitted to the valve opening solenoid valves 25 and 26 of the relay box 18.
is supplied, and the valve opening solenoid valves 25 and 26 are energized. Therefore, the valve opening solenoid valves 25 and 26 communicate the air source with the large diameter cylinder 10 of the air cylinder 6, as shown in FIG.

Therefore, the compressed air from the air source passes through the pressure reducing valve 2.
After being reduced to a predetermined pressure by 4, the air is supplied to the large-diameter cylinder 10 via an air pipe 19. In addition, large diameter cylinder 1
Since the variable throttle 31 is provided on the upstream side of the cylinder 0, the pressure in the large diameter cylinder 10 gradually increases.

In this way, the compressed air from the air source is supplied to the large-diameter cylinder 10, and also flows into the branch pipe 34 branched from the air pipe 19 on the downstream side of the valve-opening solenoid valve 26. At this time, the air-operated valve 35 is in a closed state, and the air flowing into the branch pipe 34 is transferred to the bypass pipe 36 and the check valve 3.
7 into the small diameter cylinder 11.

Therefore, when the valve opening solenoid valves 25 and 26 are excited, the air from the air source flows through the air pipe 19, the branch pipe 34, and the bypass pipe 36 to the large diameter cylinder 7 and the small diameter cylinder 11. supplied at the same time. Note that since the variable throttle 31 is provided on the upstream side of the large diameter cylinder 7, more air will initially flow into the small diameter cylinder 11, and the smaller diameter cylinder 11 will have more air flow than the large diameter cylinder 7. Boost first.

When the pressure of the large diameter cylinder 7 is increased following the small diameter cylinder 11, the large diameter piston 7 and the small diameter piston 8
Due to the difference in pressure receiving area between the piston 9 of the air cylinder 6 and
is driven toward the small diameter cylinder 11 side. The driving force of this piston 9 is transmitted to the chuck 1 via an output shaft 13 and a universal joint 14.
5. Therefore, the handle 4a of the main valve 4 rotates together with the chuck 15, and the main valve 4 opens.

When the piston 9 is displaced to the small diameter cylinder 11 side, that is, to the valve open position, the pressure reducing valve 24 is closed inside the small diameter cylinder 11.
is compressed above the set pressure. Then, the valve open display limit valve 38 is switched, "Valve Open" is displayed on the display 17 of the actuator box 5, and the air from the air pipe 20 is passed through the air signal pipe 41 to open the valve of the relay box 18. The signal is supplied to the display contact converter 28. The converter 28 converts the air signal into an electrical signal and outputs it to the control box 22.

When the control box 22 receives the signal from the converter 28, it displays on a display section (not shown) that the main valve 4 is open.

As described above, when the solenoid valves 25 and 26 are excited, the air pipe 19, the branch pipe 34, and the bypass pipe 3
6, compressed air can be supplied to the large diameter cylinder 10 and the small diameter cylinder 11.
The piston 9 can be reliably driven in the valve closing direction by the air pressure of the small diameter cylinder 11 when the valve is closed.

Furthermore, when the main valve 4 is open, compressed air is also introduced into the branch pipe 34 and the bypass pipe 36 via the air pipe 19, so even if the check valve 37 or the air-operated valve Even if there is an air leak at the valve 35, the air pressure inside the small diameter cylinder 11 is prevented from dropping below the pressure set by the pressure reducing valve 24 (in other words, below the valve closing drive torque of the main valve 4).

[0044] Therefore, it is possible to prevent an accident in which the small diameter cylinder 11 becomes insufficient in pressure due to air leakage and cannot be driven to close the valve.

Next, the valve closing operation of the main valve 4 will be explained. When closing the main valve 4, the control box 22
Press the valve close switch 22b of the remote switch 23 or the valve close switch 23b of the remote switch 23.

As a result, the power from the control box 22 is cut off, and as shown in FIG.
, 26 are switched to the pre-operation state by spring force.

That is, the valve-opening solenoid valves 25 and 26 are switched to communicate the exhaust pipe 44 with the air pipe 19 on the downstream side, and cut off the air pipe 19 on the upstream side. Therefore, the air in the large diameter cylinder 10 passes through the variable throttle 31 and the check valve 33 of the bypass pipe 32, flows into the exhaust pipe 44, and is discharged to the outside.

Note that since the air pipe 19 is provided with a variable throttle 31, most of the air in the large diameter cylinder 10 is exhausted through the check valve 33.

On the other hand, since the compressed air from the air source is stored in the small diameter cylinder 11 as described above, the pressure acting on the large diameter piston 7 decreases as the large diameter cylinder 10 is exhausted, and the pressure acting on the large diameter piston 7 decreases. The difference between the pressure acting on the diameter piston 7 and the pressure acting on the small diameter piston 8 is reversed.

As a result, the piston 9 has a large diameter cylinder 10
side, and drives the handle 4a of the main valve 4 in the valve closing direction. When the piston 9 is displaced to the valve-closed position, the valve-closed indication limit valve 39 is switched, and an air signal is supplied to the valve-closed indication contact converter 29 via the air signal pipe 42. The converter 29 converts the air signal into an electrical signal and outputs it to the control box 22. When the control box 22 receives the signal from the converter 29, it displays on the display that the main valve 4 is closed.

Furthermore, after the valve close position is detected, the main valve 4
After driving the handle 4a in the tightening direction for several seconds (for example, about 5 seconds) until the valve is completely closed, the control box 22 operates the solenoid valve 27 for installation operation of the relay box 18 for several seconds (3 seconds in this example). ) energize and excite.

Therefore, the solenoid valve 27 connects the air pipes 20 and 2.
1, and supplies an air signal to the air operated valve 35 of the actuator box 5. Thereby, the air-operated valve 35 is switched as shown in FIG. 4, and the branch pipe 34 and the small diameter cylinder 11 are communicated with each other. At this time,
Since the valve opening solenoid valve 26 communicates with the exhaust pipe 44 and the air pipe 19, the air inside the small diameter cylinder 11 is exhausted to the outside via the branch pipe 34, the air pipe 19, and the exhaust pipe 44.

Therefore, after the main valve 4 is completely closed, the remaining driving pressure air in the small diameter cylinder 11 is exhausted, and the valve tightening torque can be released. By this, the main valve 4
This can prevent further damage to the valve seat and packing.

As mentioned above, the air pipe 19 and the branch pipe 34
is used for both supplying and discharging air to the cylinders 7 and 11, simplifying the piping configuration.

Furthermore, since a pair of solenoid valves 25 and 26 for opening the valve are provided in series in the air piping 19 and communicated with the exhaust piping 44, even if one solenoid valve does not return due to the spring force, the other solenoid valve will open. If the solenoid valve is restored, the air piping 19 on the downstream side will necessarily be connected to the exhaust piping 44, and the air cylinder 6 has a safe structure so that the valve is reliably driven to close.

After the main valve 4 is closed, both the large diameter cylinder 10 and the small diameter cylinder 11 are opened to the atmosphere as described above, so it is possible to move the piston 9 manually, and the cylinder 1 When replacing the chuck 15,
The coupling position with the handle 4a can be easily adjusted.

[0057] Here, the case where a disaster such as an earthquake occurs will be explained. In FIG. 2, when the power supply is stopped due to an earthquake, for example, the solenoid valves 25 and 26 for opening the valve, which have been energized as shown in FIG. The air pipe 19 communicates with the air pipe 19.

[0058] Therefore, the air inside the large diameter cylinder 10 is
It passes through the check valve 33 and the variable throttle 31 and is exhausted to the outside from the exhaust pipe 44. As the pressure inside the large diameter cylinder 10 is reduced, the piston 9 of the air cylinder 6 moves into the small diameter cylinder 11.
It is displaced toward the large diameter cylinder 10 by the air pressure inside, and drives the handle 4a of the main valve 4 in the valve closing direction.

In this manner, even if a power outage occurs due to an earthquake, the air cylinder 6 drives the main valve 4 to close, thereby preventing gas from flowing into the cylinder 1.

[0060] Also, a case will be explained in which the air supply or the piping connecting the air source and the actuator box 5 is damaged due to an earthquake and the air supply is stopped.

For example, if the air piping 19 is cut on the upstream side of the relay box 18 due to an earthquake, the air piping 19 will be opened to the atmosphere, and the air inside the large diameter cylinder 10 will be released to the outside via the air piping 19. is exhausted. Therefore, the piston 9 of the air cylinder 6 is displaced toward the large diameter cylinder 10 by the air pressure of the small diameter cylinder 11, and drives the handle 4a of the main valve 4 in the valve closing direction.

As described above, since the air cylinder 6 has a normally closed structure, even if the power supply or the air supply is cut off, the main valve 4 remains open as described above.
Since the valve can be driven closed, safety in the event of an emergency such as an earthquake is further improved. Moreover, the air cylinder 6 itself that drives the main valve 4 to open and close is driven to close by the air pressure of the small diameter cylinder 11, which is a simpler structure than providing a liquefied gas cylinder and a cylinder opening mechanism, and maintenance can be performed easily. .

[0063]

Effects of the Invention As described above, the cylinder main valve opening/closing device according to the present invention opens or closes the cylinder main valve using an air cylinder with a normally closed structure. Alternatively, even if the air pipe is disconnected, the main valve can be automatically closed. Furthermore, there is no need to provide a driving means for closing the valve such as a liquefied gas cylinder, and the valve can be closed using an air cylinder that opens and closes the main valve, which simplifies the configuration and reduces maintenance such as maintenance and inspection. It has the advantage of being easy to perform.

[Brief explanation of the drawing]

FIG. 1 is a schematic configuration diagram of an embodiment of a cylinder main valve opening/closing device according to the present invention.

FIG. 2 is a system diagram of air piping, which is the main part of the present invention.

FIG. 3 is a system diagram for explaining the operation when the valve is driven to close.

FIG. 4 is a system diagram for explaining the operation when the small-diameter cylinder is opened to the atmosphere and the valve-closing driving pressure is released after the valve is driven to close.

[Explanation of symbols]

1 Cylinder 2 Cylinder storage box 4 Genben 5 Actuator box 6 Air cylinder 7 Large diameter piston 8 Small diameter piston 9 Piston 10 Large diameter cylinder 11 Small diameter cylinder 13 Output shaft 15 Chuck 18 Relay box 19, 20, 21 Air piping 22 Control box 23 Remote switch 25, 26 Valve opening solenoid valve 27 Solenoid valve for installation operation 32, 36 Bypass piping 33, 37 Check valve 34 Branch piping 35 Air operated valve 44 Exhaust piping

Claims (1)

[Claims] Claim 1: A cylinder filled with gas, a main valve attached to the cylinder to open or close the cylinder, and a large diameter valve that drives an output shaft connected to a handle of the main valve in the valve opening direction. an air cylinder having a large-diameter cylinder on which a piston slides, a small-diameter cylinder on which a small-diameter piston that is provided integrally with the large-diameter piston and drives the output shaft in a valve closing direction slides, and one end of which generates compressed air. an air pipe connected to an air source and the other end connected to the large-diameter cylinder; a solenoid valve provided in the air pipe for switching air supply to the large-diameter cylinder; and an air pipe downstream of the solenoid valve. It consists of a branch pipe that branches and supplies air to the small-diameter cylinder, and a check valve that is installed in the branch pipe to prevent backflow of the air supplied to the small-diameter cylinder. The air in the diameter cylinder is switched to exhaust to the outside,
The large-diameter piston and the small-diameter piston are displaced toward the large-diameter cylinder by the pressure of compressed air filled in the small-diameter cylinder, and drive an output shaft connected to the handle of the main valve in the valve closing direction. Cylinder main valve opening/closing device.