JP2011220359A - Fluid control valve - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a fluid control valve equipped with a valve opening sensor for detecting valve opening, to improve assembling workability at a low cost.SOLUTION: A chemical valve 1 includes a sensor cover 70 having an internal space 70S formed for housing a valve opening sensor 80 through an opening arranged on a lid part of a cover 20. In the sensor cover 70, a locking part is formed which extends in thickness direction of the sensor cover 70 and the cover 20. In the cover 20, a groove is formed to engage with the locking part.

Description

  The present invention relates to a fluid control valve that controls the flow of fluid by bringing a valve body into contact with or separating from a valve seat. Specifically, the present invention relates to a fluid control valve including a valve opening degree detection sensor that detects a valve opening degree of a valve body.

Conventionally, for example, a chemical valve as described in Patent Document 1 is used in a semiconductor manufacturing apparatus, a liquid crystal panel manufacturing apparatus, or the like. The chemical liquid valve is a fluid control valve that controls the flow of the chemical liquid from the input port to the output port by contacting or separating the valve body from the valve seat between the input port and the output port. A cross-sectional view of the chemical valve described in Patent Document 1 is shown in FIG.
The chemical valve of Patent Document 1 includes a fluid control unit and a fluid pressure detection unit on the downstream channel side of the fluid control unit. The fluid control unit applies a biasing force by a spring such as a coil spring and a pressing force by pressurized operating air in a direction against the biasing force to the piston so that the diaphragm valve body acts on the valve seat. It comes into contact with or away from it.
On the other hand, the fluid pressure detection unit detects the valve open / close state of the diaphragm valve body of the fluid control unit by using the pressure of the chemical liquid flowing in the downstream flow path.

That is, in the fluid pressure detection unit, as shown in FIG. 19, the piston 150 connected to the pressure detection body 140 is formed integrally with the shaft 160 extending in the vertical direction of the pressure detection body 140, and has a two-surface width at the top of the shaft 160. The to-be-detected part 161 which has this protrudes outside from the cover 120 of a chemical | medical solution valve. The photomicrosensor 180 is held by a bracket 171 fixed to the outside of the cover 120 by tightening bolts 172.
In the chemical valve of Patent Document 1, when the pressure of the chemical liquid to be controlled changes in the downstream flow path according to the valve opening amount of the diaphragm valve body, the detected portion 161 of the shaft 160 moves up and down due to the pressure fluctuation of the chemical liquid. The photomicrosensor 180 detects on the optical axis 183 based on the movement of the detected portion 161 of the shaft 160.
The operator can confirm whether the diaphragm valve body is in an open state or a closed state in the fluid control unit based on the detection result of the photomicrosensor 180.

JP 2008-151260 A

However, the fluid control valve provided with the valve opening degree detection sensor for detecting the valve opening degree like the chemical valve of Patent Document 1 has the following two problems.
(1) Problem of high cost (2) Problem of poor workability when assembling the valve opening degree detection sensor These problems were caused for the following reasons.

(1) Problem of high cost In Patent Document 1, in order to attach the photomicrosensor 180 to the chemical valve body, a large bracket 171 is fixed to the outside of the cover 120 with bolts 172, and the photomicrosensor 180 is attached to the bracket 171. It was held. Therefore, a plurality of bolts 171 are necessary only to use the large bracket 171 or to fix the bracket 171 to the cover 120 just to fix the photomicrosensor 180 to the chemical valve body. As a result, the number of parts in the entire product increased, resulting in an increase in the cost of the product.

(2) Problem of poor workability during assembly of valve opening degree detection sensor Although not disclosed in Patent Document 1 filed by the applicant of the present application, in the chemical valve of Patent Document 1, the photomicrosensor 180 is Using a thin screw, it was fixed to the bracket 171 by screwing at a plurality of locations. Therefore, the fixing work of the photomicrosensor 180 is difficult for the operator and the workability is poor.
Also, whether the detected part blocks the optical axis when the detected part on the detected side moves on the optical axis of an optical valve opening degree detection sensor such as the photomicrosensor of Patent Document 1. If the method of detecting the state of the detected part is not determined, the range of the detected part and the position of the optical axis are not set in a relatively accurately positioned state. Cannot be detected.
Therefore, when installing the valve opening detection sensor to the fluid control valve body during the manufacture of the fluid control valve, the operator needs to accurately position the optical axis and the detected part for each fluid control valve. The work was difficult and the workability was poor.

  The present invention has been made to solve the above-described problems, and is a fluid control valve provided with a valve opening degree detection sensor for detecting the valve opening degree, and improves workability during assembly at low cost. It is an object of the present invention to provide a fluid control valve that can be used.

In order to solve the above problems, the fluid control valve of the present invention has the following configuration.
(1) A valve body that contacts or separates from the valve seat to control the flow of fluid, a piston that is connected to the valve body, an indicator that is connected to the piston, and an opening of a cylinder that houses the piston, In a fluid control valve comprising a cover having a through-hole to be inserted and a valve opening degree detection sensor for detecting the valve opening degree of the valve element via an indicator, the valve is detected from an opening disposed on the cover, and the valve opening degree is detected. A sensor cover having an internal space for holding the sensor is provided, and either the sensor cover or the cover is formed with a locking portion extending in the thickness direction of the cover and the sensor cover, and the other is a locking portion. And a groove portion to be moored is formed.
(2) In the fluid control valve described in (1), the internal space has an elastically deformable pressing portion projecting toward the opening, and the locking portion and the groove portion are moored to detect the valve opening degree. The sensor is held in a state of being pressed by the pressing portion together with the cover.
(3) In the fluid control valve described in (1) or (2), the sensor cover and the cover are both made of resin.
(4) In the fluid control valve according to any one of (1) to (3), the locking portion is provided in the sensor cover, and the locking portion anchored to the groove portion is provided on the sensor cover from the groove portion. A mooring release hole for releasing the mooring is formed.
(5) In the fluid control valve according to any one of (1) to (4), the indicator includes a shaft portion that extends in an axial direction of the fluid control valve, and a protruding portion that protrudes radially outward from the shaft portion. The piston has a locking portion that locks with the protruding portion of the indicator in the axial direction, and the indicator and the piston are connected by locking the protruding portion with the locking portion. It is characterized by that.
(6) In the fluid control valve described in any one of (1) to (5), the upper end portion of the indicator is a detected portion when the valve opening degree detection sensor detects the valve opening degree of the valve body. It is characterized by becoming.

The function and effect of the present invention having the above configuration will be described.
In the fluid control valve of the present invention,
(1) A valve body that contacts or separates from the valve seat to control the flow of fluid, a piston that is connected to the valve body, an indicator that is connected to the piston, and an opening of a cylinder that houses the piston, A fluid control valve comprising a cover having a through-hole to be inserted and a valve opening degree detection sensor for detecting the valve opening degree of the valve body via an indicator, and is accommodated from an opening disposed on the cover, and the valve opening A sensor cover in which an internal space for holding the degree detection sensor is formed, and either the sensor cover or the cover is formed with a cover and an engaging portion extending in the thickness direction of the sensor cover, and the other is an engagement. Since the groove that is moored with the stop is formed, a special large bracket for attaching the valve opening sensor or the valve opening sensor that was required in the past can be fixed to the bracket. Without requiring screws or the like, simply by anchoring the groove and the locking portion can be fixed by directly attaching the valve opening detection sensor to cover the sensor cover. Therefore, the number of parts constituting the fluid control valve can be smaller than that of the conventional fluid control valve, and the cost can be reduced.

By the way, when the valve opening degree detection sensor is a contact-type sensor that detects an object to be detected using light shielding and light reception of an optical axis, for example, a photomicrosensor, If the mounting position is not positioned with high accuracy, the valve opening degree detection sensor cannot accurately detect the state of the valve opening degree of the valve body.
On the other hand, in the fluid control valve of the present invention, the valve opening degree detection sensor is covered with the cover and the sensor cover, the locking part is moored in the groove part, and the valve opening degree detection sensor is held. The detection sensor is attached to the cover at a position where the locking portion and the groove portion are anchored. Therefore, in the installation work of the valve opening degree detection sensor, the operator simply places the valve opening degree detection sensor on the cover, covers the sensor cover on the valve opening degree detection sensor, and moores the locking part in the groove part. Thus, the valve opening degree detection sensor can be easily attached to the predetermined position.
Further, the conventional work of fixing the valve opening detection sensor to the fluid control valve main body with a thin screw is difficult for the operator and the assembly of the valve opening detection sensor is not good, but the fluid control valve of the present invention Then, it is possible to fix the valve opening degree detection sensor only by mooring the locking portion and the groove portion without using a screw, and the workability during assembly is improved.
Therefore, compared to a conventional fluid control valve provided with a valve opening detection sensor, the number of parts is reduced, so that the cost can be reduced and the mounting operation of the valve opening detection sensor can be simplified. There is an excellent effect that workability at the time of assembly can be improved.

(2) Further, in the fluid control valve of the present invention, the internal space has an elastically deformable pressing portion protruding toward the opening, and the locking portion and the groove portion are moored, so that the valve opening degree detection sensor However, the valve opening degree detection sensor can be prevented from wobbling with respect to the cover.
In addition, the valve opening detection sensor is prevented from being displaced relative to the cover due to vibrations received by the fluid control valve externally or vibrations that occur when the valve element contacts or separates from the valve seat. Have been able to. That is, even if such vibration acts on the fluid control valve, the positional relationship between the indicator set at the time of manufacture and the valve opening degree detection sensor can be maintained for a long time.

(3) Further, in the fluid control valve of the present invention, the sensor cover and the cover are both made of a resin, and therefore, among resins, for example, a fluororesin has a relatively large mechanical strength and a strong acidic liquid. In addition to having chemical resistance that can withstand alkaline liquids, it is easy to manufacture by injection molding or the like. Further, the valve opening detection sensor can be firmly fixed in a stable state by the sensor cover together with the cover.
In particular, when the locking portion is formed integrally with the sensor cover body or the cover body, when the locking portion and the groove portion are moored, the locking portion is elastically deformed and moored in the groove portion. By forming both the sensor cover and the cover with resin, the locking portion and the groove portion can be easily moored.
Specific examples of the resin material include, for example, fluorine resins such as PVDF (polyvinylidene fluoride, also known as: difluoride), PTFE (polytetrafluoroethylene, also known as: tetrafluoride), and PP (polypropylene). ) And the like.

(4) Further, in the fluid control valve of the present invention, the locking portion is provided in the sensor cover, and the sensor cover has an anchoring release hole for releasing the anchoring portion anchored from the groove portion from the groove portion. Since it is formed, at the time of maintenance of the fluid control valve, for example, by inserting a tool, jig, etc. into the mooring release hole, and simply deforming the locking part in the direction in which the mooring with the groove is released, The sensor cover can be easily removed from the cover.

(5) Moreover, in the fluid control valve of the present invention, the indicator has a shaft portion extending in the axial direction of the fluid control valve and a projecting portion projecting radially outward from the shaft portion, and the piston is in the axial direction. On the other hand, since the indicator and the piston are connected to each other by having the locking portion that locks with the protruding portion of the indicator, and locking the protruding portion to the locking portion, the shaft of the piston and the shaft portion of the indicator Even if there is some axial deviation or inclination between the two, the indicator can move following the piston. As a result, the movement of the piston connected to the valve body is transmitted to the indicator with little loss between the indicator and the valve opening degree of the valve body is detected by the valve opening degree detection sensor in an appropriate state.

(6) Further, in the fluid control valve of the present invention, the upper end of the indicator is a detected portion when the valve opening degree detection sensor detects the valve opening degree of the valve body, and is thus arranged on the cover. The valve opening degree detection sensor can detect the valve opening degree of the valve body by detecting the position state of the upper end portion of the indicator inserted through the through-hole of the cover.
That is, since the structure for detecting the valve opening of the valve body is simplified, the manufacturing cost of the fluid control valve is reduced.

It is sectional drawing which shows the chemical | medical solution valve which concerns on embodiment. It is the top view which looked at the medical fluid valve concerning an embodiment from the upper part. It is a figure which shows the cover of the chemical | medical solution valve which concerns on embodiment, (a) is the top view seen from upper direction, (b) is AA arrow sectional drawing in (a). It is the top view which looked at the piston of the medical fluid valve concerning an embodiment from the upper part. It is a side view of the piston of the chemical liquid valve concerning an embodiment. It is a side view when the piston shown in FIG. In FIG. 6, it is a BB arrow sectional drawing. It is the top view which looked at the indicator of the medical fluid valve concerning an embodiment from the upper part. It is a side view of the indicator of the medical fluid valve concerning an embodiment. FIG. 10 is a side view of the indicator shown in FIG. 9 when the phase is changed by 90 °. It is the top view which looked at the indicator shown in FIG. 10 from the downward direction. It is explanatory drawing explaining a mode that the piston and the indicator connected in the chemical | medical solution valve which concerns on embodiment. It is the top view which looked at the sensor cover of the medical fluid valve concerning an embodiment from the upper part. It is a side view of the sensor cover of the chemical | medical solution valve which concerns on embodiment. It is CC sectional view taken on the line in FIG. In FIG. 15, it is an enlarged view of the D section. It is the top view which looked at the sensor cover of the chemical | medical solution valve which concerns on embodiment from the downward direction. FIG. 18 is a cross-sectional view taken along the line EE in FIG. It is explanatory drawing explaining how to remove the sensor cover of the chemical | medical solution valve which concerns on embodiment. It is a figure which shows the sensor cover which concerns on a 1st modification, (a) is the top view seen from the downward direction, (b) is FF arrow sectional drawing in (a). It is a figure which shows the sensor cover which concerns on a 2nd modification, (a) is the top view seen from the downward direction, (b) is GG arrow sectional drawing in (a). It is a figure which shows the sensor cover which concerns on a 3rd modification, (a) is the top view seen from the downward direction, (b) is a HH arrow sectional drawing in (a). It is a figure which shows the sensor cover which concerns on a 4th modification, (a) is the top view seen from the downward | lower direction, (b) is II sectional view taken on the line in (a). It is explanatory drawing which showed the conventional chemical | medical solution valve in the cross section.

(Embodiment)
Hereinafter, embodiments of a fluid control valve according to the present invention will be described in detail with reference to the drawings.
In the embodiment, the fluid control valve is a chemical liquid valve used in, for example, a semiconductor manufacturing apparatus, a liquid crystal panel manufacturing apparatus, and the like, and the valve body comes into contact with or separates from a valve seat between the input port and the output port. Therefore, it is used for the purpose of controlling the flow of the chemical solution from the input port to the output port.
A chemical valve according to the embodiment is shown in FIGS. 1 and 2. FIG. 1 is a cross-sectional view of a chemical valve according to the present embodiment, and FIG. 2 is a plan view of the chemical valve according to the embodiment as viewed from above.
As shown in FIG. 1, the chemical valve 1 mainly includes an actuator unit 5, a body 30, a sensor cover 70, a valve opening degree detection sensor 80, a mounting plate 92, and the like. The actuator unit 5, the body 30, and the mounting plate 92 are integrally fixed by a fastening force between a bolt (not shown) inserted through them and a nut screwed into the bolt.

First, the body 30 will be described with reference to FIG.
In this embodiment, the body 30 is formed into a block shape with a fluorine-based resin such as PFA (polytetrafluoroethylene) by injection molding. As shown in FIG. 1, the body 30 is formed with a valve seat 31, an input port 32, an output port 33, and the like.

Next, the actuator unit 5 will be described with reference to FIG.
The actuator unit 5 includes a cylinder 10, a cover 20, a spring 91, a diaphragm valve body 40, a piston 50, an indicator 60, and the like.
The actuator unit 5 controls the flow of the chemical liquid by bringing the diaphragm valve body 40 into contact with or separating from the valve seat 31, and the diaphragm valve body 40 has a biasing force by the spring 91 and a direction against the biasing force. The valve seat 31 is moved up and down by applying a pressing force by the pressurized operation air AR.
That is, in this embodiment, when the pressing force by the operation air AR does not act on the piston 50, the chemical valve 1 is closed by the diaphragm valve body 40 contacting the valve seat 31 by the biasing force of the spring 91. When the pressing force by the air AR acts on the piston 50, the diaphragm valve body 40 is a normally closed type valve that opens away from the valve seat 31.

First, the cylinder 10 will be described.
In this embodiment, the cylinder 10 that accommodates the piston 50 has a substantially square outer shape excluding the operation port 17 when viewed from above, and PVDF (polyvinylidene fluoride, also known as: 2 foot) by injection molding. It is molded into a block shape with a fluorine-based resin such as (see FIG. 2).
The cylinder 10 has an operation port 17 through which the operation air AR flows on one side surface. The operation port 17 is an operation air chamber formed on the pressure receiving side of the piston 50 in the chemical solution valve 1 in the assembly completed state. It comes to communicate with.

Moreover, the cylinder 10 has the opening 11 enclosed with the cyclic | annular inner wall, as shown in FIG. On the upper side of the cylinder 10, a cylinder locking portion 15 is formed on the inner wall so as to protrude radially inward of the inner wall, and is formed in an arc shape in the circumferential direction of the inner wall. In the present embodiment, the cylinder locking portions 15 are provided at four locations in the same form, and are arranged along the side surfaces of the cylinder 10 so that any cylinder locking portion 15 is adjacent to each other. It is formed at equal intervals with the portions 15 and 15.
Note that the circumferential interval between adjacent cylinder locking portions 15 and 15 is larger than the circumferential length (arc length) of each cover protrusion 25 of the cover 20 described below.

Next, the cover 20 will be described with reference to FIGS. 1 to 3. 3A and 3B are views showing the cover, in which FIG. 3A is a plan view seen from above, and FIG. 3B is a cross-sectional view taken along line AA in FIG.
As shown in FIGS. 1 and 2, the cover 20 has a lid portion 20A that closes the opening 11 of the cylinder 10, and extends downward from the lid portion 20A. The cover 20 has an annular shape that is smaller in diameter than the opening 11 of the cylinder 10 and has a cylindrical shape. It consists of an annular part 20B.
In the present embodiment, as shown in FIG. 2, the cover 20 has a substantially square outer shape excluding the exhaust port 27 when viewed from above, and PVDF (polyvinylidene fluoride, also called alias) is formed by injection molding. : Difluoride) or the like, and is molded into a block shape. The lid portion 20A has an exhaust port 27 for discharging the operation air AR in the primary chamber in the chemical valve 1 after the assembly is completed, and the side surface shape of the lid portion 20A excluding the exhaust port 27 is the cylinder 10 It is formed in the substantially same square as the side shape.

Further, as shown in FIG. 3, the cover 20 is formed with a through hole 20H penetrating the lid portion 20A and the annular portion 20B in the axial center of the annular portion 20B, and an upper end portion 61 of an indicator 60 described later. Is inserted through the through hole 20H.
In addition, two groove portions 21 are formed in the lid portion 20A of the cover 20 at a position across the through hole 20H. The groove portion 21 is formed in the lid portion 20A in the thickness direction of the cover 20, that is, in the direction of the axis AX of the chemical valve 1, and includes a groove insertion portion 21A having a chamfered peripheral surface of the opening, and the groove insertion portion 21A. A deeper position has a groove holding portion 21B formed larger in diameter than the groove insertion portion 21A.

Moreover, the cover protrusion part 25 protrudes from the diameter part of the annular part 20B to the annular part 20B, and corresponds to the shape of the cylinder locking part 15 of the cylinder 10 in the circumferential direction of the annular part 20B. It is formed in a circular arc shape. The cover protrusions 25 are provided at four locations in the same form, and are substantially along the side surfaces of the lid 20A, so that any cover protrusion 25 is equally spaced from the adjacent cover protrusions 25 and 28. It is formed with.
The cover projecting portion 25 is inserted into the opening 11 of the cylinder 10, and when the cover 20 is placed on the cylinder 10, the cylinder 10 and the cover 20 are just aligned with each other. It is disposed at a position where it can be anchored with the cylinder locking portion 15. The annular portion 20B has a stopper (not shown) for covering the opening 11 of the cylinder 10 with the cover 20 and restricting the rotation of the cover 20 beyond the cylinder 10 after the cover 20 rotates at a predetermined angle. Is provided.
Moreover, although not shown in figure, it has the planar support surface 20a which supports the end of the spring 91 in the diameter inner side of the annular part 20B, and the outer peripheral side of the through-hole 20H.

Next, the piston 50 will be described with reference to FIGS. FIG. 4 is a plan view of the piston as viewed from above, and side views of the piston are shown in FIGS. 5 and 6. 7 is a cross-sectional view taken along the line BB in FIG.
As shown in FIGS. 5 and 6, the piston 50 includes a main body portion 57, a piston rod 51, and an indicator connection portion 52.
The piston rod 51 extends downward from the main body portion 57 along the axis AX (see FIG. 1) of the chemical valve 1, and the tip of the piston rod 51 is connected to the piston connecting portion 41A of the diaphragm valve body 40. Thus, the piston 50 and the diaphragm valve body 40 are integrated. Further, the diaphragm valve body 40 is fixed by sandwiching a peripheral edge fixing portion 41 </ b> B located at the peripheral edge between the cylinder 10 and the body 30.

The main body 57 is provided with a seal groove 58 in which an O-ring for sealing between the cylinder 10 is provided, and a spring force acting part 57A and an air pressure acting part 57B are formed across the seal groove 58. Yes. The spring force acting part 57A supports the other end of the spring 91, and a pressing force by the operation air AR acts on the air pressure acting part 57B.
As shown in FIGS. 4 to 6, the indicator connecting portion 52 is a portion that extends upward from the spring force acting portion 57 </ b> A along the axis AX of the chemical valve 1 and is connected to an indicator 60 described later.
As shown in FIGS. 4 and 7, the indicator connecting portion 52 includes an insertion portion 55 into which the shaft portion 62 of the indicator 60 is inserted and a radially outer portion of the insertion portion 55 with respect to the circumferential direction of the axis AX. , And a cutout portion 53 partially cut away. As shown in FIG. 5, in the indicator connection portion 52, the locking portion 54 formed larger in diameter than the insertion portion 55 communicates with the insertion portion 55 and the cutout portion 53 below the insertion portion 55. The locking portion 54 is a portion that locks in the axial center AX direction with a projection 63 of the indicator 60 described later.

Next, the indicator 60 will be described with reference to FIGS. FIG. 8 is a plan view of the indicator as seen from above, and FIG. 11 is a plan view of the indicator as seen from below. 9 and 10 are side views of the indicator.
The indicator 60 has, at the upper end in the axial center AX direction, an upper end portion 61 serving as a detected portion when the valve opening degree detection sensor 80 detects the valve opening degree of the diaphragm valve body 40. As shown in FIG. 8, the upper end 61 is formed by two flat curved surfaces facing each other. The indicator 60 includes a seal groove 68 in which an O-ring that seals between the inner peripheral surface of the through hole 20 </ b> H of the cover 20 is disposed, and a connecting portion 64 is provided below the seal groove 68. When the piston 50 and the indicator 60 are in a connected state, the connecting portion 64 is a portion that is disposed at a position facing the indicator connecting portion 52 of the piston 50.

  The indicator 60 includes a shaft portion 62 that extends from the coupling portion 64 to the lower end in the axis AX direction, and a protruding portion 63 that protrudes radially outward from the shaft portion 62 at the tip of the shaft portion 62. The diameter of the shaft portion 62 is slightly larger than the inner diameter of the insertion portion 55 of the piston 50. That is, when the indicator 60 is connected to the piston 50, the shaft portion 62 is inserted into the inside of the diameter from the notch 53 of the piston 50, the shaft portion 62 is elastically deformed, and the shaft portion 62 is held by the insertion portion 55. (See FIG. 12).

  The indicator 60 has a rotation restricting portion 65 that prevents the indicator 60 and the piston 50 from rotating relative to the circumferential direction of the axis AX when the indicator 60 and the piston 50 are connected. Yes. The rotation restricting portion 65 extends radially outward from the shaft portion 62 and the protruding portion 63, and has a shape corresponding to the notch portion 53 of the piston 50, and is formed in a shape that can be accommodated in the notch portion 53.

  Next, the sensor cover 70 will be described with reference to FIGS. FIG. 13 is a plan view of the sensor cover as viewed from above, and FIG. 17 is a plan view of the sensor cover as viewed from below. FIG. 14 is a side view of the sensor cover. 15 is a cross-sectional view taken along the line CC in FIG. 13, FIG. 16 is an enlarged view of a portion D in FIG. 15, and FIG. 18 is a cross-sectional view taken along the line EE in FIG.

Here, before describing the sensor cover 70, the valve opening degree detection sensor 80 covered with the sensor cover 70 will be briefly described with reference to FIGS. 1 and 2.
In the present embodiment, the valve opening degree detection sensor 80, like the photomicrosensor 180 described in Patent Document 1, moves the detected part on the detected side on the optical axis so that the detected part becomes light. This is an optical valve opening degree detection sensor that detects the state of the detected portion based on whether or not the shaft is shielded.
Specifically, as shown in FIGS. 1 and 2, the valve opening degree detection sensor 80 includes a detection unit 82 that emits light from an optical axis 83 in a plate-like main body unit 81, and is electrically connected to the detection unit 82. The lead wire 85 connected to the sensor extends from the main body 81.
In the chemical valve 1, when the diaphragm valve body 40 contacts or separates from the valve seat 31 to control the chemical liquid, the indicator 60 integrated with the diaphragm valve body 40 also corresponds to the valve opening amount of the diaphragm valve body 40. Therefore, the optical axis 83 of the valve opening degree detection sensor 80 detects the movement of the upper end portion 61 of the indicator 60.
The operator can confirm whether the diaphragm valve body 40 is in an open state or a closed state based on the detection result of the valve opening degree detection sensor 80.

Next, the sensor cover 70 will be described.
The sensor cover 70 is a member that is accommodated from an opening 71 disposed on the lid portion 20 </ b> A of the cover 20 and in which an internal space 70 </ b> S that holds the valve opening degree detection sensor 80 is formed. In the present embodiment, the sensor cover 70 is formed by injection molding a resin such as translucent PP (polypropylene).
Here, the reason why the sensor cover 70 is formed of a translucent resin will be briefly described.
That is, some valve opening degree detection sensors 80 display the operation status of the sensor by, for example, lighting or blinking with a lamp provided in the main body 81. When the chemical valve 1 is equipped with such a valve opening detection sensor 80 with a lamp display, the sensor cover 70 is formed of a translucent resin, so that an operator can use the sensor when the chemical valve 1 is used. This is because the operation status of the valve opening degree detection sensor 80 can be grasped by checking the lamp display through the cover 70.

The sensor cover 70 is formed with two covers 20 and two locking portions 72 extending in the thickness direction of the sensor cover 70 (the vertical direction in FIG. 1). The two locking portions 72 and 72 are disposed at positions corresponding to the positions of the two groove portions 21 and 21 provided on the cover 20. As shown in FIGS. 17 and 18, the locking portion 72 has a protruding piece 73 that protrudes outside the diameter by a half circumference of the locking portion 72 and is elastically deformable.
In the sensor cover 70, two anchoring holes 72 </ b> H for releasing the anchoring portion 72 anchored with the groove portion 21 from the groove portion 21 are formed at two positions where the anchoring portion 72 is located.

In the internal space 70S of the sensor cover 70, two elastically deformable pressing portions 75 protruding toward the opening 71 are formed.
The pressing portion 75 has elastically deformable pressing pieces 76 that project radially toward the outer diameter of the pressing portion 75.

Next, a method for assembling the chemical valve 1 will be described.
The chemical liquid valve 1 is assembled by combining the actuator unit 5 that has been temporarily assembled, the body 30 and the mounting plate 92 as an overall total assembly after the temporary assembly of the actuator unit 5 first. These are superposed and fixed by fastening with bolts and nuts.

In the temporary assembly of the actuator unit 5, first, the spring 91, the piston 50, the indicator 60, and the like are assembled.
Specifically, the shaft portion 62, the projecting portion 63, and the rotation restricting portion 65 of the indicator 60 are inserted inward from the notch portion 53 of the indicator connecting portion 52 of the piston 50, and the shaft portion 62 of the piston 50 is inserted. The rotation restricting portion 65 is fitted into the notch portion 53 in the insertion portion 55.
Accordingly, the protruding portion 63 and the rotation restricting portion 65 are accommodated in the notch portion 53, and the protruding portion 63 is locked to the locking portion 54 of the indicator connecting portion 52, so that the opposing surface 63 a of the protruding portion 63 of the indicator 60. And the opposed surface 52a of the indicator connecting portion 52 of the piston rod 51 face each other, and the indicator 60 and the piston 50 are firmly connected to each other without rotating.
Next, the spring 91 is inserted outside the diameter of the indicator 60, and the other end of the spring 91 is placed on the spring force acting portion 57 </ b> A of the piston 50. The drive unit in a state where the actuator unit 5 is assembled up to this stage is inserted from the opening 11 side of the cylinder 10.

Next, after attaching a seal member (not shown) to the seal groove of the cover 20, the cover 20 is opened to the opening 11 of the cylinder 10 with the side surface of the cover 20 </ b> A of the cover 20 twisted to a predetermined angle with respect to the side surface of the cylinder 10. Insert into.
Specifically, the upper end portion 61 of the indicator 60 is inserted into the through hole 20H of the cover 20, and one end of the spring 91 is brought into contact with the support surface 20a of the lid portion 20A. After the contact, the spring 91 is contracted in a state of being supported by both the support surface of the piston 50 and the support surface of the lid portion 20A, and until the lid portion 20A of the cover 20 abuts the cylinder 10, The annular portion 20 </ b> B is inserted into the opening 11 of the cylinder 10. Since the cylinder 10 and the cover 20 are relatively twisted with respect to the circumferential direction of the annular portion 20B, when the annular portion 20B is inserted into the opening 11, the cover protruding portion 25 of the cover 20 and the cylinder 10 are There is no interference with the cylinder locking portion 15.
As shown in FIG. 1, when the annular portion 20 </ b> B is inserted into the opening 11 until the lid portion 20 </ b> A of the cover 20 is placed on the cylinder 10, the seal member attached to the seal groove is inside the cylinder 10. The primary chamber and the secondary chamber of the operation air AR that are fitted into the wall surface and formed in the assembled chemical liquid valve 1 are partitioned with the piston 50 interposed therebetween.

Next, the cover 20 is rotated until the stopper of the cover 20 comes into contact with the cylinder locking portion 15 with respect to the cylinder 10, so that the side surface of the lid portion 20A and the side surface of the cylinder 10 are substantially on the same plane. Thus, the twisting of both side surfaces is eliminated, and the cylinder 10 and the cover 20 are aligned.
At this time, the annular portion 20B inserted into the opening 11 also rotates following the rotation of the lid portion 20A, and the cover protruding portion 25 of the annular portion 20B is a cylinder locking portion in the opening 11 of the cylinder 10. The cylinder 10 and the cover 20 are integrally anchored without being separated from each other.
Next, the piston connecting portion 41A of the diaphragm valve body 40 is connected to the tip of the piston rod 51, and the temporary assembly of the actuator portion 5 is completed (see FIG. 1).

Next, as an overall total assembly of the chemical valve 1, the actuator portion 5 that has been temporarily assembled, the body 30, and the mounting plate 92 are integrally overlapped, and these are fastened with bolts and nuts. After fixing, the valve opening degree detection sensor 80 and the sensor cover 70 are assembled.
Specifically, the peripheral edge fixing portion 41B of the diaphragm valve body 40 is sandwiched between the cylinder 10 and the body 30 of the actuator portion 5, and the actuator portion 5, the body 30 and the mounting plate 92 are integrally overlapped, and these are bolts. Fasten with a nut.

Next, the valve opening degree detection sensor 80 is placed on the upper surface of the lid 20 </ b> A of the cover 20, the lead wire 85 of the valve opening degree detection sensor 80 is exposed to the outside, and the main body 81 is connected to the internal space through the opening 71 of the sensor cover 70. The sensor cover 70 is covered with the valve opening degree detection sensor 80 so that the sensor cover 70 can be accommodated, and the locking portion 72 of the valve opening degree detection sensor 80 is fitted into the groove portion 21 of the cover 20. At this time, the protruding piece 73 of the locking portion 72 enters the groove holding portion 21B while being elastically deformed when passing through the groove insertion portion 21A, and the locking portion 72 and the groove portion 21 are anchored.
Since the locking portion 72 and the groove portion 21 are provided where the upper end portion 61 of the indicator 60 and the optical axis 83 of the detection portion 82 of the valve opening degree detection sensor 80 are aligned, the locking portion 72 is simply provided. The optical axis 83 of the valve opening degree detection sensor 80 can detect the position of the upper end portion 61 simply by fitting in the groove portion 21.

When the body portion 81 of the valve opening degree detection sensor 80 is covered with the sensor cover 70 together with the lid portion 20A of the cover 20 in the internal space 70S, and the locking portion 72 and the groove portion 21 are moored, the pressing portion 75 of the sensor cover 70 is pressed. The piece 76 is elastically deformed, and the main body portion 81 is pressed by the pressing portion 75 together with the cover 20.
That is, even if the cover 20, the sensor cover 70, and the main body 81 have dimensional variations due to dimensional tolerances for each product, the main body 81 is pressed by the pressing portion 75 due to elastic deformation by the pressing piece 76 of the pressing portion 75. The cover 20 and the sensor cover 70 are securely held without wobbling.
Thus, the actuator unit 5, the body 30, the sensor cover 70, the valve opening degree detection sensor 80, and the mounting plate 92 are integrally assembled, and the entire total assembly of the chemical valve 1 is completed.

Next, how to remove the sensor cover 70 will be described with reference to FIG. FIG. 19 is a process diagram of a process of removing the sensor cover using a jig.
When removing the valve opening degree detection sensor 80 or the like during the maintenance of the chemical valve 1, the sensor cover 70 is removed using, for example, a jig 94 as shown in FIG.
In this embodiment, the jig 94 is a jig in which a slide member 97 having two claws 98 is attached to a base portion 96 with an integrated grip portion 95 so as to be movable in the radial direction around the grip portion 95. It is. The claw 98 is sized to be inserted into the mooring release hole 72H of the sensor cover 70.
When removing the sensor cover 70 from the cover 20, as shown in FIG. 19A, first, the claws 98 of the slide member 97 are slid into the mooring release holes 72 </ b> H of the sensor cover 70, respectively, The locking portion 72 is deformed toward AX (the gripping portion 95 in FIG. 19) (see FIG. 19B). Thereby, the latching | locking part 72 is pressed by the nail | claw 98, the protrusion piece 73 leaves | separates from the groove holding part 21B, and the mooring of the latching | locking part 72 and the groove part 21 is cancelled | released. Thereafter, with the claw 98 inserted into the mooring release hole 72H, the jig 94 is pulled up and the sensor cover 70 is removed from the cover 20.

The effect of the chemical | medical solution valve 1 which concerns on this embodiment which has the structure mentioned above is demonstrated.
In the chemical valve 1 according to the present embodiment, a diaphragm valve body 40 that controls the flow of chemical liquid by contacting or separating from the valve seat 31, a piston 50 that is connected to the diaphragm valve body 40, and an indicator 60 that is connected to the piston 50. The opening 11 of the cylinder 10 that houses the piston 50 is blocked, and the opening degree of the diaphragm valve body 40 is detected via the cover 20 having the through hole 20H through which the upper end portion 61 of the indicator 60 is inserted, and the indicator 60. A chemical valve 1 including a valve opening degree detection sensor 80, which is accommodated from an opening 71 disposed on the cover 20A of the cover 20 and in which an internal space 70S for holding the valve opening degree detection sensor 80 is formed. The sensor cover 70 is provided with a cover 20 and a locking portion 72 extending in the thickness direction of the sensor cover 70. -20 is formed with a groove portion 21 that is anchored with the locking portion 72. Therefore, a dedicated large bracket for attaching a valve opening degree detection sensor, which has been conventionally required, or a screw for fixing the valve opening degree detection sensor to the bracket. The valve opening degree detection sensor 80 can be directly attached and fixed to the cover 20 and the sensor cover 70 only by mooring the locking portion 72 and the groove portion 21 without the need for the like.
Therefore, the number of parts constituting the chemical valve 1 can be smaller than that of the conventional chemical valve, and the cost can be reduced.

By the way, when the valve opening degree detection sensor is a contact-type sensor that detects an object to be detected using light shielding and light reception of an optical axis, for example, a photomicrosensor, If the mounting position is not positioned with high accuracy, the valve opening degree detection sensor cannot accurately detect the state of the valve opening degree of the valve body.
On the other hand, in the chemical valve 1 according to the present embodiment, the valve opening degree detection sensor 80 is covered with the cover 20 and the sensor cover 70, the locking part 72 is moored in the groove part 21, and the valve opening degree detection sensor 80 is held. Therefore, the attachment position of the valve opening degree detection sensor 80 to the cover 20 is positioned at a position where the locking portion 72 and the groove portion 21 are moored.
Therefore, in the operation of installing the valve opening degree detection sensor 80, the operator places the valve opening degree detection sensor 80 on the cover 20, covers the sensor cover 70 with the valve opening degree detection sensor 80, and engages the locking portion 72. The valve opening degree detection sensor 80 can be easily attached at a predetermined position by simply mooring the groove 21.
Conventionally, the operation of fixing the valve opening degree detection sensor to the fluid control valve main body with a thin screw is difficult for the operator, and the assembly degree of the valve opening degree detection sensor is not good. On the other hand, in the chemical valve 1 according to the present embodiment, the valve opening degree detection sensor 80 is fixed only by mooring the locking portion 72 of the sensor cover 70 and the groove portion 21 of the cover 20 without using a screw. The workability during assembly is improved.
Therefore, since the number of parts is reduced as compared with the conventional fluid control valve provided with the valve opening degree detection sensor, the cost can be reduced and the mounting operation of the valve opening degree detection sensor 80 can be simplified. There is an excellent effect that workability at the time of assembly can be improved.

Further, in the chemical valve 1 according to the present embodiment, the internal space 70S has the elastically deformable pressing portion 75 protruding toward the opening 71, and the locking portion 72 and the groove portion 21 are moored. Since the opening degree detection sensor 80 is held in a state of being pressed together with the cover 20 by the pressing piece 76 of the pressing portion 75, the valve opening degree detection sensor 80 can be prevented from wobbling with respect to the cover 20.
Further, the valve opening degree detection sensor 80 is relatively displaced from the cover 20 due to vibrations received by the chemical valve 1 externally, vibrations generated when the diaphragm valve body 40 contacts and separates from the valve seat 31, and the like. Can be prevented. That is, even if such vibration acts on the chemical valve 1, the positional relationship between the indicator 60 and the valve opening degree detection sensor 80 set at the time of manufacture can be maintained for a long time.

Further, in the chemical valve 1 according to the present embodiment, the cover 20 is made of PVDF (polyvinylidene fluoride, also known as: difluoride), which is a fluorine-based resin. Therefore, PVDF has a comparative mechanical strength among resins. In addition, it has chemical resistance that can withstand strong acidic liquids and alkaline liquids, and is easy to manufacture by injection molding or the like. On the other hand, since the sensor cover 70 is made of PP (polypropylene), it is translucent and transparent, and is inferior to PVDF, but has relatively high mechanical strength and chemical resistance. 20 and the sensor cover 70, the valve opening degree detection sensor 80 can be firmly fixed in a stable state. Further, the operator can check the state of the valve opening degree detection sensor 80 through the sensor cover 70.
In particular, since the locking portion 72 is formed integrally with the sensor cover 70 main body, when the locking portion 72 and the groove portion 21 are anchored, the locking portion 72 is elastically deformed and anchored in the groove portion 21. Therefore, both the sensor cover 70 and the cover 20 are formed of resin, so that the locking portion 72 and the groove portion 21 are easily moored.

  Further, in the chemical valve 1 according to the present embodiment, the locking portion 72 is provided in the sensor cover 70, and the locking portion 72 anchored to the groove portion 21 is released from the groove portion 21 to the sensor cover 70. Since the mooring release hole 72H is formed, a tool or jig exemplified as the jig 94 is inserted into the mooring release hole 72H during maintenance of the chemical valve 1, and the mooring with the groove portion 21 is released. The sensor cover 70 can be easily removed from the cover 20 simply by deforming the locking portion 72 in the direction.

Further, in the chemical liquid valve 1 according to the present embodiment, the indicator 60 has a shaft portion 62 extending in the axial center AX direction of the chemical liquid valve 1 and a projecting portion 63 projecting radially outward from the shaft portion 62. Has an engaging portion 54 that engages with the protruding portion 63 of the indicator 60 with respect to the axial center AX direction, and the indicator 60 and the piston 50 are connected by engaging the protruding portion 63 with the engaging portion 54. Therefore, even if there is some axial deviation or inclination between the shaft of the piston 50 and the shaft portion 62 of the indicator 60, the indicator 60 can move following the piston 50.
As a result, the movement of the piston 50 connected to the diaphragm valve body 40 is transmitted to the indicator 60 with little loss between the indicator 60 and the valve opening degree detection sensor 80 in an appropriate state as the valve opening degree of the diaphragm valve body 40. Detected.

Further, in the chemical valve 1 according to the present embodiment, the upper end portion 61 of the indicator 60 is a detected portion when the valve opening degree detection sensor 80 detects the valve opening degree of the diaphragm valve body 40, so that the cover is covered. The valve opening degree detection sensor 80 disposed on the upper part 20 detects the position state of the upper end portion 61 of the indicator 60 inserted through the through hole 20H of the cover 20 so that the valve opening degree of the diaphragm valve body 40 can be confirmed. Become.
That is, since the structure for detecting the valve opening degree of the diaphragm valve body 40 is simplified, the manufacturing cost of the chemical liquid valve 1 is reduced.

In the above, the present invention has been described with reference to the embodiments. However, the present invention is not limited to the above-described embodiments, and can be appropriately modified and applied without departing from the gist thereof.
(1) For example, in this embodiment, the cylinder 10, the cover 20, and the mounting plate 92 are all made of PVDF (polyvinylidene fluoride, also known as: difluoride), and the body 30 is made of PFA (polytetrafluoroethylene). Fluoroethylene), and the sensor cover 70 was made of PP (polypropylene) by injection molding.
However, the material of the cylinder, cover, body, and sensor cover may be other fluorine-based resin such as PTFE (polytetrafluoroethylene, also known as: tetrafluoride), or each of the cylinder, cover, body, and sensor cover. The material may be a different fluororesin. Further, the cylinder, cover, body, and sensor cover may be formed by cutting.

(2) In this embodiment, the sensor cover 70 having the locking portion 72 and the pressing portion 75 having the shapes shown in FIGS. 13 to 18 is used.
However, instead of the sensor cover 70, sensor covers according to first to fourth modifications as described below may be used.

First, a sensor cover according to a first modification will be briefly described with reference to FIG. 20A and 20B are diagrams illustrating a sensor cover according to a first modification, in which FIG. 20A is a plan view seen from below, and FIG. 20B is a cross-sectional view taken along line FF in FIG.
In the sensor cover 70A according to the first modified example, the locking portion 72A is common to the locking portion 72 according to the present embodiment in that it has a protruding piece 73A and a mooring release hole 72H. Unlike 72, as shown in FIG. 20, it forms in the form divided | segmented into multiple, such as dividing into 2 in the circumferential direction on both sides of a gap | interval.

Next, a sensor cover according to a second modification will be briefly described with reference to FIG. FIGS. 21A and 21B are views showing a sensor cover according to a second modification, in which FIG. 21A is a plan view seen from below, and FIG. 21B is a cross-sectional view taken along line GG in FIG.
In the sensor cover 70B according to the second modification, the locking portion 72B is common to the locking portion 72 according to the present embodiment in that it has a protruding piece 73 and an anchoring release hole 72H. Also, the locking portion 72A according to the first modification is common in that it has a protruding piece 73A and a mooring release hole 72HA. However, in the sensor cover 70B, as shown in FIG. 21, the locking portion 72B is formed only on one side of the locking portion 72A that is divided into two in the circumferential direction.

Next, a sensor cover according to a third modification will be briefly described with reference to FIG. 22A and 22B are diagrams showing a sensor cover according to a third modification, wherein FIG. 22A is a plan view seen from below, and FIG. 22B is a cross-sectional view taken along the line HH in FIG.
In the sensor cover 70C according to the third modification, the pressing portion 75C is common to the pressing portion 75 according to this embodiment in that two are formed in the internal space 70S, but the shape of the pressing portion 75C is the pressing portion. Different from 75.
As shown in FIG. 22, the pressing portion 75 </ b> C has a constant thickness and is formed to protrude in a mountain shape toward the opening 71, and elastically deforms the pressing protrusion 76 at the peak portion.

Next, a sensor cover according to a fourth modification will be briefly described with reference to FIG. 23A and 23B are views showing a sensor cover according to a fourth modification, wherein FIG. 23A is a plan view seen from below, and FIG. 23B is a cross-sectional view taken along the line II in FIG.
In the sensor cover 70D according to the fourth modified example, the pressing portion 75D is common to the pressing portions 75 and 75C according to the present embodiment and the third modified example in that two are formed in the internal space 70S. The shape of the portion 75D is different from the pressing portion 75C.
As shown in FIG. 23, the pressing portion 75D is formed to protrude in a columnar shape toward the opening 71, and is elastically deformed along the axial direction of the pressing portion 75D.

(3) Moreover, in this embodiment, the cylinder latching | locking part 15 is provided in four places with the same form, respectively, and it is adjacent to any cylinder latching | locking part 15 in the form which follows each side surface of the said cylinder 10 substantially. The cylinder locking portions 15 and 15 are formed at equal intervals.
However, the number of the locking portions provided in the cylinder and the position where the locking portions are disposed are not limited to this embodiment, and can be changed as appropriate.
Further, the cover protrusions 25 are also provided at four locations in the same form, and are substantially along the side surfaces of the lid 20A, and any cover protrusion 25 is equal to the adjacent cover protrusions 25, 25. Formed at intervals. Similar to the locking portion, the number of protrusions provided on the cover and the position at which the protrusions are disposed are not limited to this embodiment, and can be changed as appropriate.

(4) In this embodiment, as a fluid control valve, one end of the spring 91 is supported on the support surface of the cover portion 20A of the cover 20 and the other end is supported on the support surface of the spring force acting portion 57A of the piston 50. When the pressing force by the air AR does not act, the normally closed type liquid chemical valve 1 is configured in which the diaphragm valve body 40 comes into contact with the valve seat 31 and closes by the biasing force of the spring 91.
However, the fluid control valve is energized between one side of the piston corresponding to the pressure receiving side (in FIG. 5 and FIG. 6, the air pressure acting part 57B side) of the piston 50 of this embodiment and the bottom side of the cylinder. When the pressure is applied by operating air, the valve body is separated from the valve seat by the urging force of the urging member when the operating air is not pressed. A normally open type valve that closes in contact with the seat may be used.
In the normally open type fluid control valve, the operation port is disposed at the position of the exhaust port 27 of the chemical valve 1 of the present embodiment which is a normally closed type, and the exhaust port is disposed at the position of the operation port 17. Is done.

1 Chemical valve (fluid control valve)
DESCRIPTION OF SYMBOLS 5 Actuator part 10 Cylinder 11 Opening 20 Cover 20H Through-hole 21 Groove part 31 Valve seat 40 Diaphragm valve body (valve body)
DESCRIPTION OF SYMBOLS 50 Piston 54 Locking part 60 Indicator 61 Upper end part 62 Shaft part 63 Projection part 70 Sensor cover 70S Internal space 71 Opening 72 Locking part 72H Mooring release hole 75 Press part 80 Valve opening degree detection sensor AX Chemical liquid valve (fluid control valve) Axis of

Claims (6)

A valve body that controls flow of fluid by contacting or separating from a valve seat; a piston that is connected to the valve body; an indicator that is connected to the piston; and an opening of a cylinder that houses the piston, and the indicator In a fluid control valve comprising a cover having a through-hole through which is inserted, and a valve opening detection sensor for detecting the valve opening of the valve body through the indicator,
A sensor cover that is housed from an opening disposed on the cover and has an internal space for holding the valve opening degree detection sensor,
One of the sensor cover and the cover is formed with a locking portion extending in the thickness direction of the cover and the sensor cover, and the other is formed with a groove portion that is anchored to the locking portion. A fluid control valve characterized by. The fluid control valve according to claim 1,
The internal space has an elastically deformable pressing portion that protrudes toward the opening,
The fluid control valve, wherein the locking portion and the groove portion are moored and the valve opening degree detection sensor is held in a state of being pressed by the pressing portion together with the cover. In the fluid control valve according to claim 1 or 2,
Both of the sensor cover and the cover are made of resin. The fluid control valve according to any one of claims 1 to 3,
The locking portion is provided on the sensor cover,
The fluid control valve according to claim 1, wherein a mooring release hole is formed in the sensor cover to release the mooring portion of the locking portion moored with the groove portion from the groove portion. The fluid control valve according to any one of claims 1 to 4,
The indicator has a shaft portion extending in the axial direction of the fluid control valve, and a projecting portion projecting radially outward from the shaft portion,
The piston has a locking portion that locks with the protruding portion of the indicator with respect to the axial direction;
The fluid control valve, wherein the protrusion and the piston are connected to each other by engaging the protrusion with the engaging portion. The fluid control valve according to any one of claims 1 to 5,
The fluid control valve according to claim 1, wherein the upper end portion of the indicator is a detected portion when the valve opening degree detection sensor detects the valve opening degree of the valve body.

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