JP2011214713A - Fluid control valve - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a fluid control valve retaining a diaphragm valve element by stable sealing force with no increase in cost.SOLUTION: In a chemical valve, the inner seal portion 35 of a body 30 includes a body-side tapered surface 35a inclined with respect to the axis AX of the chemical valve, and the periphery fixing portion 45 of the diaphragm valve element 40 has a valve element-side tapered surface 45a inclined with respect to the axis AX of the chemical valve 1. When a projecting portion 46 is pressure-fitted in a pressure-fitting groove and the valve element-side tapered surface 45a and body-side tapered surface 35a are brought into close contact with each other, the periphery fixing portion 45 is sandwiched between an actuator portion and the body 30 with the inner seal portion 35 push-pressed outward of the diameter of the axis center AX of the chemical valve.

Description

  The present invention relates to a fluid control valve that controls the flow of fluid by bringing a diaphragm valve body made of resin into contact with or away from a valve seat, and more particularly to a seal structure that prevents external leakage of the diaphragm valve body.

Conventionally, for example, chemical valves as described in Patent Document 1 and Patent Document 2 are used in semiconductor manufacturing apparatuses, liquid crystal panel manufacturing apparatuses, and the like. The chemical valve is a fluid control valve that controls the flow of the chemical liquid from the input port to the output port by contacting or separating the diaphragm valve body with respect to the valve seat between the input port and the output port.
First, the chemical valve of Patent Document 1 will be described with reference to FIGS. 16 and 17, and then the chemical valve of Patent Document 2 will be described with reference to FIGS. 18 and 19.
16 is a cross-sectional view of the chemical valve described in Patent Document 1, and FIG. 17 shows an enlarged view of a portion E in FIG. FIG. 18 is a cross-sectional view of the chemical valve described in Patent Document 2, and FIG. 19 shows an enlarged view of a portion F in FIG.

As shown in FIGS. 16 and 17, the chemical valve 201 of Patent Document 1 includes a cylinder 210, a cover 220, a diaphragm valve body 240, an actuator unit 205 including a piston 270, a valve seat 231, an input port 232, and an output port. Body 230 having 233 and the like, and the actuator portion 205 and the body 230 are integrally fixed to the mounting plate 250.
The resin diaphragm valve body 240 is connected to the piston 270 at the central portion thereof, and the annular press-fitting portion 246 is press-fitted into the annular groove 234 of the resin-made body 230 at the peripheral fixing portion 245, thereby the peripheral fixing portion. 245 is sandwiched and fixed between the cylinder 210 and the body 230.
In Patent Document 1, the diaphragm valve body 240 has its press-fit portion 246 elastically deformed and press-fitted into the annular groove 234 of the body 230, and is brought into close contact with the inner annular seal portion 235 of the body 230. The power is secured.

In the chemical valve 301 of Patent Document 2, as shown in FIGS. 18 and 19, the resin diaphragm valve body 340 includes a U-shaped first convex portion 346 and a U-shaped first convex portion 346 in its peripheral fixing portion 345. It has the 2nd convex part 347 of the perimeter side.
In the diaphragm valve body 340, the second convex portion 347 is press-fitted into the second annular groove 335 of the body 330, and the first convex portion 346 is inserted into the first annular groove 334. A metal ring body 348 is fitted into an annular gap in the first convex portion 346, and the first convex portion 346 is brought into close contact with the inner wall 336 and the annular wall 337 of the body 330, so that the diaphragm valve body 340 and the resin body 330 are The sealing force is secured.

JP 2007-321958 A JP 2009-2442 A

However, the conventional chemical valves 201 and 301 have the following problems.
(1) The problem that the sealing force cannot be obtained in a stable state In the semiconductor manufacturing process, with the high integration of semiconductors, chemicals such as hydrofluoric acid with higher permeability have been used for semiconductor manufacturing. The sealing force between the peripheral edge fixing portion 245 of the diaphragm valve body 240 and the body 230 is required to be more stable than before.
In the chemical valve 201 of Patent Document 1, since both the body 230 and the diaphragm valve body 240 are made of resin, the inner annular seal portion is formed by press-fitting the press-fit portion 246 of the diaphragm valve body 240 into the annular groove 234 of the body 230. 235 falls toward the axis of the chemical valve 201. As a result, the press-fit portion 246 of the diaphragm valve body 240 cannot be sufficiently in close contact with the inner annular seal portion 235 of the body 230, and the sealing force between the peripheral edge fixing portion 245 of the diaphragm valve body 240 and the body 230 is stable. There was a problem that was not possible.
Further, when the high-temperature chemical liquid is controlled by the chemical liquid valve 201, the body 230 and the diaphragm valve body 240 are softened as compared with the normal temperature due to contact with the high-temperature chemical liquid, or a creep phenomenon occurs in the actuator unit 205 and the body 230. As a result, the sealing force between the peripheral edge fixing portion 245 of the diaphragm valve body 240 and the body 230 may be reduced.

(2) Problem of high cost As one of means for solving the above-mentioned problem mentioned in (1), the chemical valve 301 of Patent Document 2 is effective.
However, in the chemical valve 301, since the sealing structure between the diaphragm valve body 340 and the body 330 is complicated, it is difficult for the diaphragm valve body 340 and the body 330 to have quality control associated with molding or processing and assembling at the time of manufacture. In addition, since the ring body 348 is required, the number of parts is increased, resulting in a problem that the cost is increased.

  The present invention has been made to solve the above-described problems, and an object thereof is to provide a fluid control valve capable of holding a diaphragm valve body with a stable sealing force without increasing the cost. .

In order to solve the above problems, the fluid control valve of the present invention has the following configuration.
(1) A diaphragm valve body having a circumferentially fixed part to be sandwiched and an annular convex part extending from the peripherally fixed part, a valve seat, and an annular press-fitting groove for press-fitting the convex part, and forming a radially inner side of the press-fitted groove. A resin body having an inner seal part and an actuator part for controlling the flow of fluid by bringing a diaphragm valve body into contact with or separating from the valve seat, press-fitting the convex part into the press-fitting groove, and the peripheral fixing part as the actuator In the fluid control valve in which the diaphragm valve body is held between the body and the body, the inner seal portion has a body-side tapered surface inclined with respect to the axis of the fluid control valve, and the peripheral edge fixing portion is the fluid control valve. The valve body side taper surface inclined with respect to the valve shaft center, and the valve body side taper surface and the body side taper surface come into contact with each other when the convex portion is press-fitted into the press-fitting groove, and the inner seal portion The current system While it pressed against the radially outer side of the axis of the valve, wherein the peripheral fixing portion and the said actuator unit body is sandwiched.
(2) In the fluid control valve described in (1), the body-side tapered surface has an inclination angle θ1 with respect to the axis of the fluid control valve and is closed at an intersection intersecting the axis of the fluid control valve. The valve body side taper surface is inclined at an inclination angle θ2 with respect to the axis of the fluid control valve and intersects with the axis of the fluid control valve. Among them, it is characterized in that it is inclined in a direction intersecting with the lower intersection on the valve closing side, and the inclination angle θ2 is larger than the inclination angle θ1.
(3) In the fluid control valve described in (1) or (2), a tip press-fitted portion thicker than the width of the press-fitting groove is formed at the tip of the convex portion, and the tip press-fitted portion is elastically deformed to project the convex portion. Is press-fitted into the press-fitting groove.
(4) In the fluid control valve described in any one of (1) to (3), in the press-fitting groove, in the depth direction, the width is wider than the thickness of the convex portion, and the width A narrow part narrower than the thickness of the convex part is formed through a step at a position deeper than the enlarged part, and the convex part is elastically deformed at the narrow part and is press-fitted into the press-fitting groove. It is characterized by.
(5) In the fluid control valve described in any one of (1) to (4), the inner seal portion has an inner seal portion outer peripheral surface which is a side surface of the press-fitting groove, and the convex portion is a radially inner side thereof. In the state where the diaphragm valve body is held by the actuator portion and the body, the root portion extending from the peripheral edge fixing portion is surrounded by the convex portion inner peripheral surface and the inner seal portion outer peripheral surface. A space is formed.
(6) In the fluid control valve described in any one of (2) to (5), an angle difference between the inclination angle θ2 and the inclination angle θ1 is 10 ° or less.

The function and effect of the present invention having the above configuration will be described.
In the fluid control valve of the present invention,
(1) A diaphragm valve body having a circumferentially fixed part to be sandwiched and an annular convex part extending from the peripherally fixed part, a valve seat, and an annular press-fitting groove for press-fitting the convex part, and forming a radially inner side of the press-fitted groove. A resin body having an inner seal part and an actuator part for controlling the flow of fluid by bringing a diaphragm valve body into contact with or separating from the valve seat, press-fitting the convex part into the press-fitting groove, and the peripheral fixing part as the actuator In the fluid control valve in which the diaphragm valve body is held between the body and the body, the inner seal portion has a body-side tapered surface inclined with respect to the axis of the fluid control valve, and the peripheral edge fixing portion is the fluid control valve. The valve body side taper surface is inclined with respect to the valve shaft center, and when the convex portion is press-fitted into the press-fitting groove, the valve body side taper surface and the body side taper surface come into contact with each other, and the inner seal portion is connected to the fluid control valve. On the outer diameter of the shaft center Since the peripheral edge fixing part is sandwiched between the actuator part and the body in the pressed state, the diaphragm valve body and the body are formed of resin, and the convex part of the peripheral edge fixing part of the diaphragm valve body is press-fitted into the press-fitting groove of the body. Even if inserted, the peripheral edge fixing portion can prevent the inner seal portion from falling down toward the axis of the fluid control valve.
Therefore, even if the convex portion is press-fitted into the press-fitting groove, the inner seal portion does not fall down on the axial center side of the fluid control valve, and the sealing force between the convex portion and the press-fitting groove can be maintained. The sealing force of the diaphragm valve body with respect to is stably secured at the peripheral edge fixing portion.

In addition, when the flow control target of the fluid control valve is a high-temperature fluid, the diaphragm valve body and the body are softened compared to normal temperature due to this liquid, or a creep phenomenon occurs over time in the diaphragm valve body and the body. Sometimes.
However, in the fluid control valve of the present invention, even if the fluid control valve controls the flowing high-temperature fluid or a creep phenomenon occurs in the diaphragm valve body and the body, the peripheral edge fixing portion is connected to the inner seal portion. Since it is sandwiched between the actuator portion and the body in a state of being pressed to the outer diameter side of the shaft center of the fluid control valve, the inner seal portion does not fall toward the shaft center side of the fluid control valve. Therefore, the convex portion and the press-fitting groove are more reliably sealed, and the sealing force of the diaphragm valve body with respect to the actuator portion and the body can be stably secured at the peripheral edge fixing portion.
Further, as a structure for stably securing the sealing performance between the diaphragm valve body and the body, it is not necessary to form a portion for sealing the diaphragm valve body and the body with a complicated structure. Cost can be kept low.
Therefore, there is an excellent effect that the diaphragm valve body can be held between the actuator portion and the body with a stable sealing force without increasing the cost.

(2) Further, the body-side tapered surface intersects with the lower intersection on the valve closing side among the intersections intersecting with the axis of the fluid control valve at an inclination angle θ1 with respect to the axis of the fluid control valve. The valve body side taper surface is inclined at an inclination angle θ2 with respect to the axis of the fluid control valve, and the lower side on the valve closing side of the intersection intersecting the axis of the fluid control valve Since the inclination angle θ2 is larger than the inclination angle θ1, the convex portion is press-fitted into the press-fitting groove, and the valve body side taper surface and the body side taper surface are in close contact with each other. Mainly, the peripheral edge fixing portion is biased toward the portion away from the valve seat in the portion where the body side tapered surface and the valve body side tapered surface are in close contact with each other, corresponding to the angle difference between the inclination angle θ2 and the inclination angle θ1. And elastically deformed and crushed.
That is, the peripheral edge fixing portion that is elastically deformed and crushed in this manner causes the inner seal portion to move away from the valve seat with respect to the axial center direction of the fluid control valve. By pressing outwardly of the diameter, the inner seal portion is prevented from falling down toward the axial center of the fluid control valve.
In the fluid control valve of the present invention, the sealing force of the diaphragm valve body against the actuator portion and the body is ensured between the convex portion and the press-fitting groove. In particular, since it is elastically deformed and closely adhered to the part on the side away from the valve seat, the diaphragm valve body is also caused by the strong adhesion between the body side tapered surface and the valve body side tapered surface due to the angle difference. Seals against actuator and body.

(3) Further, a tip press-fitted portion thicker than the width of the press-fit groove is formed at the tip of the convex portion, and the convex portion is press-fitted into the press-fit groove by elastically deforming the tip press-fit portion. In the state where the convex portion of the peripheral fixing portion is press-fitted into the press-fitting groove of the body and the peripheral fixed portion is sandwiched between the actuator portion and the body and the diaphragm valve body is held, the tip press-fitting portion of the convex portion is deep in the press-fitting groove. At the position, that is, the press-fitting groove portion located on the lower side of the inner seal portion, it is elastically deformed and press-fitted to be in close contact.
By the way, near the lower side of the inner seal portion, the moment load when the inner seal portion is tilted toward the axial center side of the fluid control valve is considerably large.
However, by pressing the tip press-fitting part of the convex part at a deep position of the press-fitting groove, the pressing force acting toward the inner seal part is suppressed to be considerably smaller than the moment load described above, Even if the convex portion is press-fitted into the press-fitting groove, the inner seal portion does not fall toward the axis of the fluid control valve. Therefore, in the periphery fixing | fixed part of a diaphragm valve body, the sealing force with a body and a diaphragm valve body is stably ensured with an actuator part.

(4) Further, in the press-fitting groove, in the depth direction, the width is wider than the thickness of the convex portion, and the width is narrower than the thickness of the convex portion at a position deeper than the wide portion. The narrow part is formed through a step, and the convex part is elastically deformed at the narrow part and is press-fitted into the press-fitting groove, so that the convex part is in close contact with the narrow part of the press-fitting groove. .
For this reason, the pressing portion that presses the inner seal portion toward the shaft center of the fluid control valve is suppressed to a small extent because the convex portion is press-fitted and in close contact with the narrow portion located deep in the press-fitting groove. Even when the convex portion is press-fitted into the press-fitting groove, the inner seal portion does not fall toward the axis of the fluid control valve. Therefore, in the periphery fixing | fixed part of a diaphragm valve body, the sealing force with a body and a diaphragm valve body is stably ensured with an actuator part.

(5) Further, the inner seal portion has an inner seal portion outer peripheral surface which is a side surface of the press-fitting groove, and the convex portion has a convex inner peripheral surface on the inner diameter side thereof, and the diaphragm valve body includes the actuator portion and the body. Since the space surrounded by the inner peripheral surface of the convex portion and the outer peripheral surface of the inner seal portion is formed at the root portion where the convex portion extends from the peripheral edge fixing portion, the inner seal portion is formed by the peripheral edge fixing portion. Even if the fluid control valve is pressed to the outside of the shaft center, the inner seal portion can fall to the outside of the diameter due to the presence of the space. Thereby, the contact | adherence state of a convex part and a press-fit groove becomes stronger, and a diaphragm valve body can be hold | maintained to an actuator part and a body with the stable high sealing force for a long period of time.
(6) Since the angle difference between the inclination angle θ2 and the inclination angle θ1 is 10 ° or less, the peripheral edge of the diaphragm valve body is fixed in a state where the peripheral edge fixing part of the diaphragm valve body is sandwiched and fixed between the actuator part and the body. As a seal region where the valve body side taper surface of the fixed portion and the body side taper surface of the inner seal portion of the body are in close contact, an appropriate seal region can be secured to hold the diaphragm valve body with a stable sealing force. .

It is explanatory drawing which shows the chemical | medical solution valve which concerns on 1st Embodiment with sectional drawing. It is a disassembled perspective view of the chemical | medical solution valve shown in FIG. It is sectional drawing which expands and shows the B section in FIG. FIG. 3 is an enlarged cross-sectional view showing a C portion in FIG. 2. 1. It is sectional drawing which expands and shows the A section in FIG. 1, and is explanatory drawing explaining the state by which the peripheral edge fixing | fixed part of the diaphragm valve body was hold | maintained. It is a 1st process figure which shows the assembly process of the chemical | medical solution valve which concerns on 1st Embodiment. It is a 2nd process figure which shows the assembly process of the chemical | medical solution valve which concerns on 1st Embodiment. It is a 3rd process figure which shows the assembly process of the chemical | medical solution valve which concerns on 1st Embodiment. It is explanatory drawing which shows the chemical | medical solution valve which concerns on 2nd Embodiment with sectional drawing. It is sectional drawing which shows the inner side seal part vicinity of the body of the chemical | medical solution valve which concerns on 2nd Embodiment, and is an enlarged view of the part corresponded in B part in FIG. It is sectional drawing which shows the periphery fixing | fixed part of the diaphragm valve body of the chemical | medical solution valve which concerns on 2nd Embodiment, and is an enlarged view of the part corresponded in C part in FIG. FIG. 10 is an enlarged view of a portion D in FIG. 9. It is a 1st process figure which shows the assembly process of the chemical | medical solution valve which concerns on 2nd Embodiment. It is a 2nd process figure which shows the assembly process of the chemical | medical solution valve which concerns on 2nd Embodiment. It is a 3rd process figure which shows the assembly process of the chemical | medical solution valve which concerns on 2nd Embodiment. It is sectional drawing explaining the conventional chemical | medical solution valve described in patent document 1. FIG. It is an enlarged view of the E section in FIG. It is sectional drawing explaining the conventional chemical | medical solution valve described in patent document 2. FIG. In FIG. 18, it is an enlarged view of the F section.

(First embodiment)
Hereinafter, embodiments of a fluid control valve according to the present invention will be described in detail with reference to the drawings.
In this embodiment, the fluid control valve is, for example, a chemical valve used in a semiconductor manufacturing apparatus, a liquid crystal panel manufacturing apparatus, or the like, and the valve element comes into contact with or separates from a valve seat between the input port and the output port. Therefore, it is used for the purpose of controlling the flow of the chemical solution from the input port to the output port.
The chemical valve according to the present embodiment is shown in a sectional view in FIG. 1, and an exploded perspective view in which the actuator part side and the body side are disassembled is shown in FIG.
As shown in FIG. 1, the chemical valve 1 mainly includes an actuator unit 5, a body 30, a mounting plate 50, and the like. In the chemical valve 1, the actuator unit 5, the body 30, and the mounting plate 50 are integrally fixed by fastening bolts and nuts (not shown) that are inserted therethrough.

First, the actuator unit 5 will be described with reference to FIG.
The actuator unit 5 includes a cylinder 10, a cover 20, a diaphragm valve body 40, a piston 70, a spring 72, an indicator 73, and the like.
The cylinder 10 that accommodates the piston 70 is formed into a block shape with a fluorine-based resin such as PVDF (polyvinylidene fluoride, also known as: difluoride), for example, by injection molding. The cylinder 10 has an operation port 17 on one side surface thereof, and the operation port 17 communicates with an operation air chamber formed on the pressure receiving side of the piston 70.
The cover 20 closes the opening of the cylinder 10. Similar to the cylinder 10, the cover 20 is formed into a block shape with a fluorine-based resin such as PVDF (polyvinylidene fluoride, also known as: difluoride) by injection molding, for example, and discharges the operation air AR in the primary chamber. A port 26 is provided.

As will be described later, the actuator unit 5 controls the flow of the chemical liquid by bringing the piston coupling portion 41 of the diaphragm valve body 40 into contact with or separating from the valve seat 31 of the body 30, and the diaphragm valve body 40 is a spring. The valve seat 31 is moved up and down by applying an urging force by 72 and a pressing force by the pressurized operation air AR in a direction against the urging force.
That is, in the present embodiment, when the pressing force by the operation air AR does not act, the chemical valve 1 is closed by the diaphragm valve body 40 abutting against the valve seat 31 by the urging force of the spring 72 and the operation air AR. When a pressing force is applied, the diaphragm valve body 40 is a normally closed type valve that opens away from the valve seat 31.
In the actuator unit 5, a piston rod 71 extends in the axial direction from a piston 70 that applies a pressing force to the diaphragm valve body 40, and as shown in FIG. 1, the side opposite to the pressure receiving side of the piston 70 (reverse pressure receiving side) The indicator 73 is attached to the front end portion.

Next, the body 30 will be described with reference to FIGS. 1 to 3. FIG. 3 is an enlarged view of a portion B in FIG.
In this embodiment, the body 30 is formed by injection molding a fluorine-based resin such as PFA (polytetrafluoroethylene) into a block shape. As shown in FIGS. It has a port 32, an output port 33, a press-fit groove 34, and the like.

The press-fitting groove 34 is an annular groove that press-fits the entire convex part 46 extending from the peripheral edge fixing part 45 of the diaphragm valve body 40 described later, and as shown in FIG. It is formed in a form having no step between the outer seal portion 36 serving as an outer wall. The inner seal portion 35 has an inclination angle θ1 with respect to the axial center AX of the chemical valve 1 and is located on the lower side (lower side in FIG. 1) on the valve closing side of the intersection intersecting the axial center AX of the chemical valve 1. The body side taper surface 35a which inclines in the direction which cross | intersects.
Further, the inner seal portion 35 has an inner seal portion outer peripheral surface 35b formed in a cylindrical shape with the axis AX of the chemical valve 1 as a central axis, and the inner seal portion outer peripheral surface 35b is formed on the side surface of the press-fit groove 34. It has become.

Next, the diaphragm valve body 40 will be described with reference to FIGS. 1, 2, and 4. 4 is an enlarged cross-sectional view of a portion C in FIG.
The diaphragm valve body 40 includes a piston coupling portion 41 coupled to the piston rod 71, a thin film portion 43 extending radially outward from a piston side root 43r which is a root of the coupling portion 41, and a peripheral edge located on the radially outer side of the thin film portion 43. And a fixed portion 45.
In a state where the diaphragm valve body 40 is assembled to the chemical valve 1, the peripheral edge fixing portion 45 is a portion that is sandwiched between the body connecting portion 15 of the cylinder 10 and the body 30. As shown in FIG. 3, the peripheral edge fixing portion 45 has an annular convex portion 46 extending from the peripheral edge fixing portion 45. The convex portion 46 has a convex inner peripheral surface 46a on the inner diameter side and a convex outer peripheral surface 46b on the outer diameter side. A tip press-fit portion 48 that is thicker than the width of the press-fit groove 34 of the body 30 is formed at the tip of the convex portion 46 in a shape protruding from the convex outer peripheral surface 46b toward the convex inner peripheral surface 46a.

The peripheral edge fixing portion 45 has an inclination angle θ2 with respect to the axis AX of the chemical valve 1 and is located on the lower side (in FIG. 1, the lower side) of the intersection intersecting the axis AX of the chemical valve 1 ) Has a valve body side taper surface 45a that is inclined in a direction intersecting the intersection. The valve body-side tapered surface 45a is a surface that is disposed at a position facing the body-side tapered surface 35a of the body 30 when the convex portion 46 is pressed into the press-fit groove 34 of the body 30.
The inclination angle θ2 of the valve body side tapered surface 45a is larger than the inclination angle θ1 of the body side tapered surface 35a of the body 30, and the angle difference between the inclination angle θ2 and the inclination angle θ1 is 5 ° in this embodiment. .

  In the piston connecting portion 41, as shown in FIG. 2, the diameter of the upper portion connected to the piston rod 71 is a (0 <a), and the diameter of the lower portion contacting the valve seat 31 of the body 30 is b (a <b). And each is formed. The piston side root 43r is disposed at a position having a diameter between a and b. By providing the piston side base 43r at this position, even when the diaphragm valve body 40 abuts against the valve seat 31 and moves away from the valve seat 31, the stress is locally concentrated on the thin film portion 43 even if the movement is repeated over a long period of time. Therefore, the durability of the thin film portion 43 can be ensured.

Next, a process of holding the diaphragm valve body 40 by sandwiching the peripheral edge fixing portion 45 of the diaphragm valve body 40 together with the actuator portion 5 with the body 30 will be described with reference to FIGS. FIG. 5 is an enlarged view of portion A in FIG. 1, and FIGS. 5, 6 and 7 show the assembly process of FIG.
First, as shown in FIG. 6, the peripheral edge fixing portion 45 of the diaphragm valve body 40 is disposed on the inner seal portion 35 of the body 30 so that the tip press-fit portion 48 of the convex portion 46 is on the lower side.
Thereafter, as shown in FIG. 7, the body connecting portion 15 of the cylinder 10 is placed on the outer seal portion contact surface 45 b of the peripheral fixing portion 45, and the outer seal portion 36 of the body 30 is placed on the convex outer peripheral surface 46 b of the peripheral fixing portion 45. In the state where they are in contact with each other, the convex portion 46 is press-fitted into the press-fit groove 34 of the body 30 from the tip press-fit portion 48. Thereby, since the inlet of the press-fitting groove 34 is chamfered, the tip press-fitting portion 48 is guided to the chamfered surface while being gradually elastically deformed, and is press-fitted into the inner seal portion outer peripheral surface 35b of the inner seal portion 35. Then, the convex portion 46 is press-fitted into the press-fitting groove 34.

When the convex portion 46 is press-fitted into the press-fitting groove 34 from the state shown in FIG. 7 to the state shown in FIG. 8, the valve-side tapered surface 45a of the peripheral edge fixing portion 45 and the body-side tapered surface 35a near the top of the inner seal portion 35 The abutting portion is elastically deformed and comes into close contact with the body-side tapered surface 35a. Further, when the convex portion 46 is deeply press-fitted into the press-fit groove 34, even the portion of the valve-side tapered surface 45a on the side opposite to the vicinity of the top of the inner seal portion 35 comes into contact with the body-side tapered surface 35a and is elastically deformed. As shown in FIG. 3, the entire valve-side tapered surface 45a is in close contact with the body-side tapered surface 35a.
As shown in FIG. 5, in a state where the diaphragm valve body 40 is held by the actuator unit 5 and the body 30, the convex portion inner peripheral surface 46 a and the inner seal are provided in the vicinity of the root portion 47 where the convex portion 46 extends from the peripheral edge fixing portion 45. A space 40S surrounded by the outer peripheral surface 35b is formed.

The effect of the chemical | medical solution valve 1 which concerns on this embodiment which has the structure mentioned above is demonstrated.
In the chemical valve 1 according to the present embodiment, the inner seal portion 35 of the body 30 has a body-side tapered surface 35a that is inclined with respect to the axis AX of the chemical valve 1, and the peripheral edge fixing portion 45 of the diaphragm valve body 40. Has a valve body side taper surface 45a inclined with respect to the axis AX of the chemical valve 1, and when the convex portion 46 is press-fitted into the press-fit groove 34, the valve body side taper surface 45a and the body side taper surface 35a are Since the peripheral edge fixing portion 45 is sandwiched between the actuator portion 5 and the body 30 with the inner seal portion 35 pressed against the outer diameter of the axial center AX of the drug solution valve 1, the diaphragm valve body 40 Even if the body 30 is formed of resin and the convex portion 46 of the peripheral edge fixing portion 45 of the diaphragm valve body 40 is press-fitted into the press-fit groove 34 of the body 30, the peripheral edge fixing portion 45 is directed toward the axis AX. Of the inner seal 35 Which can suppress the lump is.
Therefore, even if the convex portion 46 is press-fitted into the press-fit groove 34, the inner seal portion 35 does not fall to the axial center AX side, and the sealing force between the convex portion 46 and the press-fit groove 34 can be maintained. The sealing force of the diaphragm valve body 40 against the body 30 can be stably secured by the peripheral edge fixing portion 45.

When the flow control target of the chemical valve 1 is a high-temperature chemical solution, the diaphragm valve body 40 and the body 30 are softened by this chemical solution as compared with the normal temperature, or a creep phenomenon occurs in the diaphragm valve body 40 and the body 30 over time. Sometimes it happens.
However, in the chemical valve 1 according to the present embodiment, even if the chemical valve 1 controls the flowing high-temperature chemical liquid or the creep phenomenon occurs in the diaphragm valve body 40 and the body 30, the peripheral edge fixing portion 45 is located on the inner side. Since the seal portion 35 is pressed between the actuator portion 5 and the body 30 in a state in which the seal portion 35 is pressed to the outside of the shaft center AX, the inner seal portion 35 does not fall to the shaft center AX side. Therefore, the convex portion 46 and the press-fit groove 34 are more reliably sealed, and the sealing force of the diaphragm valve body 40 against the actuator portion 5 and the body 30 can be stably secured by the peripheral edge fixing portion 45.
Further, as a structure for stably securing the sealing performance between the diaphragm valve body 40 and the body 30, it is not necessary to form a portion for sealing the diaphragm valve body 40 and the body 30 with a complicated structure. The manufacturing cost of the valve 1 can be kept low.
Therefore, there is an excellent effect that the diaphragm valve body 40 can be held between the actuator unit 5 and the body 30 with a stable sealing force without increasing the cost.

Further, in the chemical valve 1 according to the present embodiment, the body-side tapered surface 35a of the body 30 has an inclination angle θ1 with respect to the axis AX of the chemical valve 1 and an intersection that intersects the axis AX of the chemical valve 1. Of these, the valve body side taper surface 45a of the diaphragm valve body 40 is inclined at an inclination angle θ2 with respect to the axis AX of the chemical valve 1, and is inclined in a direction intersecting with the lower intersection on the valve closing side. Of the intersections intersecting the axis AX of the chemical valve 1, it is inclined in a direction intersecting with the lower intersection on the valve closing side, and the inclination angle θ2 is larger by an angle difference of 5 ° than the inclination angle θ1, In the state where the convex portion 46 is press-fitted into the press-fit groove 34 and the valve-side tapered surface 45a and the body-side tapered surface 35a are in close contact with each other, as shown in FIG. Body side tapered surface 35a and valve body corresponding to an angle difference of 5 ° with respect to angle θ1 Of the portion in close contact with the side taper surface 45a, the portion is distant from the valve seat 31 and is elastically deformed and crushed.
That is, when the peripheral edge fixing portion 45 is clamped by the inner seal portion 35 of the body 30 with the actuator portion 5 and the valve body side tapered surface 45a being elastically deformed in this way, the valve body side tapered surface of the peripheral edge fixing portion 45 is obtained. The pressing force from 45a toward the body-side tapered surface 35a of the inner seal portion 35 acts in a direction away from the axis AX in the vertical direction with respect to the body-side tapered surface 35a. In other words, as shown in FIG. 5, the pressing force of the horizontal component acting in the horizontal direction in this pressing force acts on the outer diameter side of the axial center AX of the drug solution valve 1 and does not act on the inner diameter side at all.
In particular, the peripheral edge fixing portion 45 that is biased toward the portion away from the valve seat 31 and elastically deformed and crushed the inner seal portion 35 at a position far away from the valve seat 31 in the axial center AX direction. Since the outer side of the shaft center AX is pressed, the inner seal portion 35 is prevented from falling down toward the shaft center AX.
In the chemical valve 1 according to the present embodiment, the sealing force of the diaphragm valve body 40 against the actuator unit 5 and the body 30 is ensured between the convex portion 46 and the press-fit groove 34. Since the taper surface 35a and the valve body side taper surface 45a are particularly elastically deformed and in close contact with the portion on the side away from the valve seat 31, the body side taper surface 35a and the valve due to an angle difference of 5 ° are provided. The diaphragm valve body 40 can be sealed with respect to the actuator part 5 and the body 30 also by strong contact | adherence with the body side taper surface 45a.

Further, in the chemical valve 1 according to the present embodiment, a tip press-fit portion 48 thicker than the width of the press-fit groove 34 is formed at the tip of the convex portion 46, and the tip press-fit portion 48 is elastically deformed to form the convex portion 46. Since it is press-fitted into the press-fitting groove 34, the convex portion 46 of the peripheral edge fixing portion 45 of the diaphragm valve body 40 is press-fitted into the press-fitting groove 34 of the body 30, and the peripheral edge fixing portion 45 is sandwiched between the body 30 and the actuator portion 5. In a state in which the valve body 40 is held, the tip press-fitting portion 48 of the convex portion 46 is elastically deformed and press-fitted at a deep position of the press-fitting groove 34, that is, a portion of the press-fitting groove 34 positioned below the inner seal portion 35. In close contact.
By the way, near the lower side of the inner seal portion 35, the moment load when the inner seal portion 35 is to be tilted toward the axial center AX side of the chemical liquid valve 1 is considerably large.
However, by pressing the tip press-fitting portion 48 of the convex portion 46 at a deep position of the press-fitting groove 34, the pressing force acting on the inner seal portion 35 is suppressed to be considerably smaller than the moment load described above. Thus, even if the convex portion 46 is press-fitted into the press-fit groove 34, the inner seal portion 35 does not fall toward the axis AX of the chemical valve 1. Therefore, in the peripheral edge fixing portion 45 of the diaphragm valve body 40, the sealing force with the body 30 and the diaphragm valve body 40 can be stably secured together with the actuator portion 5.

  Further, in the chemical valve 1 according to the present embodiment, the inner seal portion 35 has an inner seal portion outer peripheral surface 35b that is a side surface of the press-fit groove 34, and the convex portion 46 has a convex inner peripheral surface 46a on the inner diameter side. In the state where the diaphragm valve body 40 is held by the actuator portion 5 and the body 30, the convex portion inner peripheral surface 46a and the inner seal portion outer peripheral surface 35a are formed on the root portion 47 where the convex portion 46 extends from the peripheral edge fixing portion 45. Since the space 40S surrounded by is formed, even if the inner seal portion 35 is pressed to the outer diameter side of the shaft center AX by the peripheral edge fixing portion 45, the inner seal portion 35 is moved to the outer diameter side due to the presence of the space 40S. Can fall down. Thereby, the contact | adherence state of the convex part 46 and the press-fit groove | channel 34 becomes stronger, and the diaphragm valve body 40 can be hold | maintained to the actuator part 5 and the body 30 with the stable high sealing force for a long period of time.

  Further, in the chemical valve 1 according to the present embodiment, since the angle difference between the inclination angle θ2 and the inclination angle θ1 is 5 °, the peripheral edge fixing portion 45 of the diaphragm valve body 40 is sandwiched and fixed between the actuator portion 5 and the body 30. In this state, the diaphragm valve body 40 is stabilized as a seal region in which the valve body side tapered surface 45a of the peripheral edge fixing portion 45 of the diaphragm valve body 40 and the body side tapered surface 35a of the inner seal portion 35 of the body 30 are in close contact with each other. An appropriate seal area can be secured for holding with a sealing force.

(Second Embodiment)
Next, 2nd Embodiment of the chemical | medical solution valve concerning this invention is described using FIG. 9 thru | or FIG.
9 is an explanatory view showing the chemical valve according to the second embodiment in a cross-sectional view. FIG. 9 is an enlarged view of a portion corresponding to part B in FIG. 2, and FIG. FIG. 11 shows an enlarged view of a portion corresponding to the middle part C.
In the chemical valve 1 according to the first embodiment, the tip press-fitting portion 48 is formed at the tip of the convex portion 46 that extends annularly from the peripheral edge fixing portion 45 of the diaphragm valve body 40, and the tip press-fitting portion 48 is used as the press-fitting groove of the body 30. 34, it was made to contact | adhere to the inner seal part outer peripheral surface 35b without a level | step difference.
In contrast, in the chemical valve 101 according to the second embodiment, a step is provided in the press-fit groove 134 of the body 130, and the convex portion 146 that extends annularly from the peripheral edge fixing portion 145 of the diaphragm valve body 140 is provided in the press-fit groove 134. Adhere to the narrow part 134N.
However, in the chemical valve 101 of the second embodiment, the press-fit groove 134 of the body 130 and the convex portion 146 of the peripheral edge fixing portion 145 of the diaphragm valve body 140 are the same as the shapes of the press-fit groove 34 and the convex portion 46 of the first embodiment. Although different in part, the other parts are the same as in the chemical valve 1 of the first embodiment.
Therefore, the description will focus on the parts different from the first embodiment, and the same parts will be denoted by the same reference numerals as in the first embodiment, and the description will be omitted or simply performed.

First, the body 130 will be described with reference to FIGS. 9 and 10.
In the present embodiment, the body 130 is formed by injection molding a fluorine resin such as PFA (polytetrafluoroethylene) into a block shape, and includes a valve seat 131, a press-fit groove 134, and the like. The press-fitting groove 134 is an annular press-fitting groove for press-fitting the entire convex part 146 in the peripheral edge fixing part 145 of the diaphragm valve body 140, and as shown in FIG. It forms between the outer seal part 136 used as the wall of this.
In the press-fitting groove 134, in the depth direction (vertical direction in FIG. 9), the width of the convex portion 146 is wider than the thickness of the convex portion 146, and the thickness of the convex portion 146 is deeper than the widened portion 134W. A narrower portion 134N having a narrower width is formed via a tapered surface-shaped step 134M.

The inner seal portion 135 has a tilt angle θ1 with respect to the axial center AX of the chemical valve 101, and is located on the lower side (lower side in FIG. 9) on the valve closing side at the intersection that intersects the axial center AX of the chemical valve 101. The body side taper surface 135a which inclines in the direction which cross | intersects this intersection.
The inner seal portion 135 has an inner seal portion outer peripheral surface 135b formed in a cylindrical shape centering on the axis AX of the chemical valve 101, and the inner seal portion outer peripheral surface 135b has a width in the press-fit groove 134. It is the side surface of the narrow part 134N.

Next, the diaphragm valve body 140 will be described with reference to FIGS. 9 and 11.
The diaphragm valve body 40 includes a piston coupling portion 141 coupled to the piston rod, a thin film portion 143 extending radially outward from a piston side root that is a root of the coupling portion 141, and a peripheral edge fixing portion positioned on the radially outer side of the thin film portion 143. 145.
As shown in FIG. 10, the peripheral edge fixing portion 145 has an annular convex portion 146 extending from the peripheral edge fixing portion 145. The convex portion 146 is formed in a straight shape, and has a convex inner peripheral surface 146a on the inner diameter side and a convex outer peripheral surface 146b on the outer diameter side.

The peripheral edge fixing portion 145 has an inclination angle θ2 with respect to the axial center AX of the chemical valve 101 and is located on the lower side on the valve closing side at the intersection intersecting the axial center AX of the chemical valve 101 (in FIG. ) Has a valve body side taper surface 145a that is inclined in a direction intersecting the intersection point. The valve body-side tapered surface 145a is a surface that is disposed at a position facing the body-side tapered surface 135a of the body 130 when the convex portion 146 is press-fitted into the narrow portion 134N of the press-fit groove 134 of the body 130. .
The inclination angle θ2 of the valve body side tapered surface 145a is larger than the inclination angle θ1 of the body side tapered surface 135a of the body 130, and the angle difference between the inclination angle θ2 and the inclination angle θ1 is 5 ° in this embodiment. .

Next, a process of holding the diaphragm valve body 140 by sandwiching the peripheral edge fixing portion 145 of the diaphragm valve body 140 together with the actuator portion 5 with the body 30 will be described with reference to FIGS. FIG. 12 is an enlarged view of a portion D in FIG. 9, and shows the assembly process of FIG. 12 with FIGS. 13, 14, and 15.
First, as shown in FIG. 13, the peripheral edge fixing portion 145 of the diaphragm valve body 140 is disposed on the inner seal portion 135 of the body 130 so that the tip portion of the convex portion 146 is on the lower side.
Thereafter, as shown in FIG. 14, the body connecting portion 15 of the cylinder 10 is provided on the outer seal portion contact surface 145b of the peripheral fixing portion 145, and the outer seal portion 136 of the body 130 is provided on the convex outer peripheral surface 146b of the peripheral fixing portion 145. In the state where they are in contact with each other, the convex portion 146 is press-fitted into the press-fitting groove 134 of the body 130 from the tip portion.
At this time, since the width-enlarged portion 134W of the press-fit groove 134 is wider than the thickness of the convex portion 146, the convex portion 146 is inserted into the widened portion 134W with a clearance. Since the step 134M is a tapered surface, the tip of the convex portion 146 that has passed through the widened portion 134W is guided along the tapered surface while being gradually elastically deformed at the step 134M, and the narrow portion while being elastically deformed. To 134N.

When the convex portion 146 is press-fitted into the press-fitting groove 134 from the state shown in FIG. 14 to the state shown in FIG. 15, the valve-side tapered surface 145 a of the peripheral edge fixing portion 145 is changed from the body-side tapered surface 135 a near the top of the inner seal portion 135. The abutting portion is elastically deformed and comes into close contact with the body-side tapered surface 135a. Further, when the convex portion 146 is deeply press-fitted into the press-fit groove 134, the convex portion 146 is press-fitted into the press-fit groove 134 while being elastically deformed at the narrow portion 134N, and the convex inner peripheral surface 146a of the convex portion 146 and the inner seal portion 135 are pressed. The inner seal portion outer peripheral surface 135b of the inner surface closely contacts.
Also, the valve element side tapered surface 145a on the opposite side to the vicinity of the top of the inner seal portion 135 is in contact with the body side tapered surface 135a and elastically deformed, and as shown in FIG. It is in close contact with the body-side tapered surface 135a.
As shown in FIG. 12, in the state where the diaphragm valve body 140 is held by the actuator unit 5 and the body 130, the convex portion inner peripheral surface 146 a and the inner seal are located near the root portion 147 where the convex portion 146 extends from the peripheral edge fixing portion 145. A space 140S surrounded by the outer peripheral surface 135b is formed.

The effect of the chemical | medical solution valve 101 which concerns on this embodiment which has the structure mentioned above is demonstrated.
In the chemical valve 101 according to the present embodiment, the inner seal portion 135 of the body 130 has a body-side tapered surface 135a that is inclined with respect to the axis AX of the chemical valve 101, and the peripheral edge fixing portion 145 of the diaphragm valve body 140. Has a valve body side taper surface 145a inclined with respect to the axis AX of the chemical valve 101, and when the convex portion 146 is press-fitted into the press-fit groove 134, the valve body side taper surface 145a and the body side taper surface 135a are Since the peripheral edge fixing portion 145 is sandwiched between the actuator portion 5 and the body 130 in a state where the inner seal portion 135 is pressed against the outer diameter of the axial center AX of the drug solution valve 101, the diaphragm valve body 140 The body 130 is formed of resin, and the convex portion 146 of the peripheral edge fixing portion 145 of the diaphragm valve body 140 is inserted into the press-fitting groove 134 of the body 130 by press-fitting. , Peripheral fixing portion 145 has can suppress collapse of the inner sealing portion 135 toward the axis AX.
Therefore, even if the convex portion 146 is press-fitted into the press-fit groove 134, the inner seal portion 135 does not fall down toward the axial center AX, and the sealing force between the convex portion 146 and the press-fit groove 134 can be maintained. The sealing force of the diaphragm valve body 140 against the body 130 can be stably secured by the peripheral edge fixing portion 145.

When the flow control target of the chemical valve 101 is a high-temperature chemical solution, the chemical valve softens the diaphragm valve body 140 and the body 130 as compared with the normal temperature, or the creep phenomenon occurs in the diaphragm valve body 140 and the body 130 over time. Sometimes it happens.
However, in the chemical valve 101 according to the present embodiment, even if the chemical valve 101 controls the flowing high-temperature chemical liquid or the creep phenomenon occurs in the diaphragm valve body 140 and the body 130, the peripheral edge fixing portion 145 is provided on the inner side. Since the seal portion 135 is held between the actuator portion 5 and the body 130 in a state where the seal portion 135 is pressed to the outside of the shaft center AX, the inner seal portion 135 does not fall to the shaft center AX side. Therefore, the convex portion 146 and the press-fit groove 134 are more reliably sealed, and the sealing force of the diaphragm valve body 140 against the actuator portion 5 and the body 130 can be stably secured by the peripheral edge fixing portion 145.
Further, as a structure for stably securing the sealing performance between the diaphragm valve body 140 and the body 130, it is not necessary to form a portion for sealing the diaphragm valve body 140 and the body 130 with a complicated structure. The manufacturing cost of the valve 101 can be kept low.
Therefore, there is an excellent effect that the diaphragm valve body 140 can be held by the actuator unit 5 and the body 130 with a stable sealing force without increasing the cost.

  Further, when the peripheral edge fixing portion 145 of the diaphragm valve body 140 is sandwiched by the inner seal portion 135 of the body 130 together with the actuator portion 5 with the valve body side tapered surface 145a elastically deformed, the peripheral edge fixing portion 145 The pressing force from the valve element side tapered surface 145a toward the body side tapered surface 135a of the inner seal portion 135 acts in a direction away from the axis AX of the drug solution valve 101 in the vertical direction with respect to the body side tapered surface 135a. That is, the horizontal component pressing force acting in the horizontal direction in this pressing force acts on the outer diameter side of the axial center AX of the chemical valve 101 and does not act on the inner diameter side at all, as shown in FIG.

Further, in the chemical valve 101 according to the present embodiment, in the press-fitting groove 134, in the depth direction, the width is wider than the thickness of the convex portion 146, and the deeper portion than the widened portion 134W. A narrow part 134N having a width smaller than the thickness of the convex part 146 is formed through a step 134M, and the convex part 146 is elastically deformed by the narrow part 134N and press-fitted into the press-fitting groove 134. Therefore, the convex portion 146 is in close contact with the narrow portion 134N of the press-fit groove 134.
Therefore, the convex portion 146 is press-fitted at the narrow portion 134N at a deep position of the press-fitting groove 134 and is in close contact with each other, so that the inner seal portion 135 is pushed toward the axis AX of the chemical valve 101. The pressure is suppressed to a small value, and even if the convex portion 146 is press-fitted into the press-fitting groove 134, the inner seal portion 135 does not fall toward the axis AX of the chemical liquid valve 101.
Therefore, in the peripheral edge fixing portion 145 of the diaphragm valve body 140, the sealing force with the body 130 and the diaphragm valve body 140 can be stably secured together with the actuator portion 5.

In the above, the present invention has been described with reference to the first and second embodiments. However, the present invention is not limited to the first and second embodiments, and may be appropriately changed without departing from the gist thereof. Can be applied.
(1) For example, in the first and second embodiments, the cylinder 10 and the cover 20 are injection molded with PVDF (polyvinylidene fluoride, also known as: difluoride), and the bodies 30 and 130 are made with PFA (polytetrafluoroethylene). ).
However, the material of the cylinder, cover, and body is made of another fluorine-based resin such as PTFE (polytetrafluoroethylene, also known as: tetrafluoride), or the materials of the cylinder, cover, and body are different from each other. It may be a resin. Further, the cylinder, the cover, and the body may be formed by cutting.

(2) In the first and second embodiments, as a fluid control valve, one end of the spring 72 is supported on the support surface of the piston 70 and the other end is supported on the support surface of the cover 20, and the pressing force by the operation air AR is reduced. The normally closed type liquid chemical valves 1 and 101 are configured such that when the diaphragm 72 does not act, the diaphragm valve body 40 abuts against the valve seat 31 by the biasing force of the spring 72.
However, when the fluid control valve is provided with a biasing member between one side of the piston corresponding to the pressure receiving side of the piston 70 of the present embodiment and the bottom side of the cylinder, the pressing force by the operation air does not act. In addition, the valve body may be separated from the valve seat by the urging force of the urging member to open, and when a pressing force is applied by operating air, the valve body abuts against the valve seat and closes. good.
In the normally open type fluid control valve, the operation port is disposed at the position of the exhaust port 26 of the chemical valve 1 of the present embodiment which is a normally closed type, and the exhaust port is disposed at the position of the operation port 17. Is done.

1 Chemical valve (fluid control valve)
DESCRIPTION OF SYMBOLS 5 Actuator part 30 Body 31 Valve seat 34 Press-fit groove 35 Inner seal part 35a Body side taper surface 35b Inner seal part outer peripheral surface 40 Diaphragm valve body 40S Space 45 Peripheral fixed part 45a Valve body side taper surface 46 Convex part 46a Convex part inner peripheral surface 47 Root part 48 Tip press-fit part AX Axis center

Claims (6)

A diaphragm valve body having a peripheral edge fixing portion to be sandwiched and an annular convex portion extending from the peripheral edge fixing portion, a valve seat, and an annular press-fitting groove for press-fitting the convex portion, the inside of the press-fitting groove is formed. A resin body having an inner seal portion; and an actuator portion for controlling the flow of fluid by contacting or separating the diaphragm valve body from the valve seat, and press-fitting the convex portion into the press-fitting groove, In the fluid control valve that holds the diaphragm valve body by sandwiching a peripheral edge fixing portion with the actuator portion with the body,
The inner seal portion has a body-side tapered surface inclined with respect to the axis of the fluid control valve,
The peripheral edge fixing portion has a valve body side tapered surface inclined with respect to the axis of the fluid control valve,
When the convex portion is press-fitted into the press-fitting groove, the valve-side tapered surface and the body-side tapered surface are in contact with each other, and the inner seal portion is pressed to the outer diameter of the shaft center of the fluid control valve. The fluid control valve, wherein the periphery fixing portion is sandwiched between the actuator portion and the body. The fluid control valve according to claim 1,
The body-side tapered surface is inclined at an inclination angle θ1 with respect to the axis of the fluid control valve and in a direction intersecting with a lower intersection on the valve closing side among intersections intersecting with the axis of the fluid control valve. Doing things,
The valve body-side tapered surface is inclined at an inclination angle θ2 with respect to the axis of the fluid control valve and in a direction intersecting with the lower intersection on the valve closing side among the intersections intersecting the axis of the fluid control valve. Doing things,
The fluid control valve characterized in that the inclination angle θ2 is larger than the inclination angle θ1. In the fluid control valve according to claim 1 or 2,
A tip press-fit portion thicker than the width of the press-fit groove is formed at the tip of the convex portion, and the tip press-fit portion is elastically deformed to press-fit the press-fit portion into the press-fit groove. Fluid control valve. In the fluid control valve according to any one of claims 1 to 3,
In the press-fitting groove, in the depth direction, the width is wider than the thickness of the convex portion, and the width is narrower than the thickness of the convex portion at a position deeper than the wide portion. The part is formed through a step,
The fluid control valve according to claim 1, wherein the convex portion is elastically deformed at the narrow portion and is press-fitted into the press-fitting groove. The fluid control valve according to any one of claims 1 to 4,
The inner seal portion has an inner seal portion outer peripheral surface which is a side surface of the press-fit groove,
The convex portion has a convex portion inner circumferential surface on the inner diameter side thereof,
In a state where the diaphragm valve body is held by the actuator portion and the body, a space surrounded by the inner peripheral surface of the convex portion and the outer peripheral surface of the inner seal portion at the root portion where the convex portion extends from the peripheral edge fixing portion. A fluid control valve characterized by being formed. The fluid control valve according to any one of claims 2 to 5,
A fluid control valve characterized in that an angle difference between the inclination angle θ2 and the inclination angle θ1 is 10 ° or less.

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