JP2009002442A - Fluid control valve - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a fluid control valve which carries out a stable seal even at the time of high-temperature fluid control. <P>SOLUTION: The fluid control valve 1 comprises a resin-made valve main body 2 including an aperture 14 communicating with an input port 11 and an output port 12, a valve seat 15 provided on the inner wall of the aperture 14, a resin-made valve upper body 3 connected to the upper face of the resin-made valve main body 2, and a resin-made diaphragm valve body 4 interposed between the resin-made valve main body 2 and the resin-made valve upper body 3, wherein the resin-made valve main body 2 is formed with an annular groove 16 outside the aperture 14, the diaphragm valve body 4 includes a circumferential part 4c provided with a wall thickness in the outer periphery and a ring body 35 annularly formed of a material harder than the diaphragm valve body 4 is attached to the circumferential part 4c. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a fluid control valve used in a semiconductor manufacturing process or the like.

  In the semiconductor manufacturing process, a highly corrosive chemical solution or the like is used. In the fluid control valve for controlling the supply of the chemical liquid, the liquid contact portion is formed of a resin such as a fluororesin in order to cope with the highly corrosive chemical liquid. Moreover, in order to shut off a chemical | medical solution and a valve operation mechanism, many resin-made diaphragm valve bodies are used.

FIG. 10 is a cross-sectional view of a conventional fluid control valve 100. FIG. 11 is a view of the fluid control valve shown in FIG. 10 as viewed from the C direction, and the deformation of the annular groove is indicated by a dotted line. However, in order to make the drawing easy to see, the outer shape of the resin valve main body 101 is simplified in FIG. 11 and only the annular groove 108 and the peripheral edge portion 103c of the diaphragm valve body 103 fitted in the annular groove 108 are shown. To do.
As shown in FIG. 10, in the fluid control valve 100, a diaphragm valve body 103 is sandwiched between a resin valve main body 101 and a resin valve upper body 102.

  As shown in FIG. 10, the resin valve main body 101 has an opening portion 106 in which the input port 104 and the output port 105 communicate with each other, and a valve seat 107 is provided in the opening portion 106. The diaphragm valve body 103 includes a valve body portion 103a that contacts or separates from a valve seat 107 provided in the resin valve main body 101, a thin film portion 103b that is annularly provided around the valve body portion 103a, and a thin film portion 103b. And a thick peripheral edge portion 103c provided along the peripheral edge. On the upper surface of the resin valve main body 101, an annular groove 108 is formed in a perfect circle shape outside the opening 106 as shown by the solid line in FIG. As shown in FIG. 10, the resin valve main body 101 has a peripheral edge 103 c of the diaphragm valve body 103 fitted into the annular groove 108, and between the inner wall of the annular groove 108 and the lower end surface of the resin valve upper body 102. The peripheral portion 103c is crushed and sealed.

  In such a fluid control valve 100, resin tubes 110 and 111 are connected to the input port 104 and the output port 105. And the fluid control valve 100 controls the chemical | medical solution supplied to the output port 105 from the input port 104 by making the diaphragm valve body 103 contact | abut or separate from the valve seat 107 (for example, refer patent document 1).

JP 2003-247650 A

  However, when the conventional fluid control valve 100 controls, for example, a high-temperature chemical solution at 140 to 150 ° C., the resin valve main body 101 and the diaphragm valve body 103 are softened with reduced hardness. Further, the resin tubes 110 and 111 connected to the resin valve main body 101 were thermally expanded, and as shown in FIGS. 10 and 11, force was applied to the resin valve main body 101 in the directions F1 and F2 in the figure. . For this reason, the resin valve main body 101 has been deformed so as to be crushed between the tubes 110 and 111, as indicated by the dotted line in FIG.

  Accordingly, in the fluid control valve 100, the annular groove 108 of the resin valve body 101 and the peripheral edge portion 103c of the diaphragm valve body 103 are changed from a perfect circle shape (see the solid line in FIG. 11) to an ellipse shape (FIG. 11). (See the middle dotted line). For this reason, the peripheral edge 103c of the diaphragm valve body 103 is not uniformly crushed in the circumferential direction between the resin valve main body 101 and the resin valve upper body 102, and the uniformity of the seal is impaired. That is, in the fluid control valve 100, the seal between the peripheral edge portion 103c of the diaphragm valve body 103 and the annular groove 108 of the resin valve body 101 becomes unstable during high-temperature chemical control, and fluid leaks from a weakly sealed portion. There was a fear.

  Particularly in recent years, in the semiconductor manufacturing process, the frequency of use of a high-temperature chemical solution is increasing in order to supply the chemical solution to a workpiece such as a wafer in an activated state. In addition, a highly permeable chemical solution is often used in the semiconductor manufacturing process. In the future, fluid control valves are considered to have more opportunities to control high temperature and high osmotic chemical solutions, and there is a demand for stable sealing even during high temperature chemical control.

  The present invention has been made to solve the above-described problems, and an object of the present invention is to provide a fluid control valve that can perform stable sealing even during high-temperature fluid control.

The fluid control valve according to the present invention has the following configuration.
(1) A resin valve body having an opening communicating with the input port and the output port, a valve seat provided on the inner wall of the opening, and a resin valve connected to the upper surface of the resin valve body A fluid control valve comprising a body, and a resin diaphragm valve body sandwiched between the resin valve main body and the resin valve upper body, wherein the resin valve main body is outside the opening. A ring body in which an annular groove is formed, the diaphragm valve body is provided with a thickness along an outer edge, includes a peripheral edge portion that fits into the annular groove, and is formed of an annular material harder than the diaphragm valve body Is mounted on the peripheral edge.

(2) In the invention described in (1), the ring body is bent in an axial sectional shape.
(3) In the invention described in (1) or (2), the ring body has a wedge shape in cross section.
(4) In the invention according to any one of (1) to (3), the ring body has a knob portion protruding toward the resin valve upper body side.

(5) In the invention described in (1) or (3), the ring body is provided integrally with the resin valve upper body.

(6) In the invention according to any one of (1) to (5), the peripheral edge portion is provided on the outer side of the annular first convex portion to which the ring body is attached and the first convex portion. An annular second convex portion, and the annular groove has a first annular groove into which the first convex portion is fitted, and the second convex portion is fitted into the second convex portion. A second annular groove that seals at the abutting surface.

(7) In the invention described in (6), the first protrusion protrudes from the second protrusion toward the resin valve main body, and the ring body is located on the resin valve at the peripheral edge. The first convex portion is mounted from the body side to a position deeper than the tip position of the second convex portion.

  In the fluid control valve of the present invention, for example, when a resin tube is connected to an input port and an output port to control a high-temperature fluid, a force is applied in a direction in which the tube expands and crushes the resin valve body. . The resin valve body applies an inward force to the peripheral edge portion of the diaphragm valve body through the inner wall of the annular groove to deform the seal surface. However, the peripheral part of the diaphragm valve body is reinforced by mounting a ring body made of a material harder than the diaphragm valve body in an annular shape. Therefore, the fluid control valve of the present invention does not deform even when the peripheral edge of the diaphragm valve body is pressed by the resin valve body. That is, the seal surface is not deformed during high-temperature fluid control, and the seal uniformity is maintained. Therefore, according to the fluid control valve of the present invention, stable sealing can be performed even during high temperature fluid control.

  In particular, in a semiconductor manufacturing process, for example, the chemical solution is heated to a high temperature in order to supply the chemical solution to a workpiece such as a wafer in an active state. Since the fluid control valve of the present invention performs stable sealing even when controlling a high-temperature chemical solution, fluid leakage can be prevented even when controlling a high-permeability chemical solution at a high temperature.

In the fluid control valve according to the present invention, since the ring body is bent to improve the rigidity, the deformation of the seal surface can be more reliably prevented.
Since the cross-sectional shape of the fluid control valve of the present invention is wedge-shaped, it is easy to attach the ring body to the peripheral portion.
The fluid control valve of the present invention has good handleability of the ring body because the ring body is fitted into the annular groove of the resin valve main body by pinching the knob protruding to the resin valve upper body side with a finger.

  In the fluid control valve of the present invention, since the ring body is provided integrally with the resin valve upper body, the ring body is not easily deformed and is not displaced. For this reason, the resin valve main body is locked to the resin valve upper body via the ring body, and the seal position is positioned. Therefore, according to the fluid control valve of the present invention, it is possible to avoid the problem that the seal position shifts laterally and causes fluid leakage.

  In the fluid control valve of the present invention, the ring body is attached to the first convex portion at the peripheral portion, the first convex portion is fitted into the first annular groove of the resin valve main body, and the second convex portion is set to the resin valve main body. Is fitted into the second annular groove. The second convex portion is in contact with the inner wall of the second annular groove for sealing. Therefore, according to the fluid control valve of the present invention, it is possible to reduce the influence of the thermal expansion or the like of the resin valve main body on the seal surface by arranging the ring body near the seal surface.

  In the fluid control valve of the present invention, the ring body is mounted on the first convex portion from the resin valve upper body side of the peripheral portion to a position deeper than the tip position of the second convex portion, and the second convex portion is the second annular groove. Supports the entire sealing surface that seals against the inner wall. The force acting inwardly on the seal surface with the deformation of the resin valve main body is dispersed throughout the first convex portion. For this reason, a 1st convex part cannot change easily with the force which acts on a sealing surface, and prevents a deformation | transformation of a sealing surface. Therefore, according to the fluid control valve of the present invention, stable sealing can be performed.

  Next, an embodiment of a fluid control valve according to the present invention will be described with reference to the drawings.

(First embodiment)
Drawing 1 is a sectional view of fluid control valve 1 concerning a 1st embodiment, and shows a valve open state.
The fluid control valve 1 of 1st Embodiment is assembled | attached to a semiconductor manufacturing apparatus similarly to a prior art, and controls supply of a chemical | medical solution. The fluid control valve 1 is a normally open type air-operated on-off valve. In the fluid control valve 1, a resin valve upper body 3 is connected to an upper surface of a resin valve main body 2, and a diaphragm valve body 4 is sandwiched between the resin valve main body 2 and the resin valve upper body 3. . The fluid control valve 1 causes the diaphragm valve body 4 to contact or separate from the valve seat 15 by sliding the piston 25 in the resin valve upper body 3. In the fluid control valve 1, an attachment plate 5 for attachment to a semiconductor manufacturing apparatus is fixed to the lower surface of the resin valve body 2.

  The resin valve body 2 is formed by molding a resin excellent in corrosion resistance and heat resistance, such as PTFE (polytetrafluoroethylene) and PFA (tetrafluoroethylene perfluoroalkyl vinyl ether copolymer).

  The resin valve body 2 has an input port 11 and an output port 12 provided on the side surface, and resin tubes 110 and 111 are screwed together. An opening 14 is formed in a cylindrical shape on the upper surface of the resin valve main body 2. The opening 14 communicates with the input port 11 and the output port 12 via the input side flow path 9 and the output side flow path 10, respectively, and a valve seat 15 is integrally formed around a portion where the input side flow path 9 opens. ing. Needless to say, the valve seat 15 may be formed of a separate component from the resin valve body 2 and fixed to the resin valve body 2 with a screw structure or an adhesive.

FIG. 2 is an enlarged view of part A shown in FIG.
On the upper surface of the resin valve body 2, an annular groove 16 is formed outside the opening 14, and the peripheral edge 4 c of the diaphragm valve body 4 is fitted. In the resin valve main body 2, the inner wall 17 constituting the inner peripheral surface of the annular groove 16 constitutes the outer peripheral surface of the annular groove 16 in order to position and hold the diaphragm valve body 4 with the resin valve upper body 3. The outer wall 18 is lower than the outer wall 18.

FIG. 3 is a view of the fluid control valve shown in FIG. 1 as viewed from the B direction. However, in order to make the drawing easy to see, the opening 14, the first and second annular grooves 16a and 16b, and the first and second convex parts 31 and 32 fitted in the first and second annular grooves 16a and 16b are used. Only listed.
The annular groove 16 includes a first annular groove 16a and a second annular groove 16b having a larger diameter than the first annular groove 16a. The first annular groove 16a and the second annular groove 16b are formed in a concentric perfect circle. Therefore, the annular wall 19 constituting the outer peripheral surface of the first annular groove 16a and the inner peripheral surface of the second annular groove 16b is provided in a perfect circle shape. As shown in FIG. 2, the annular wall 19 has a lower height than the inner wall 17 and the outer wall 18 so that the inner wall 17 and the outer wall 18 receive a sealing pressure.

  The resin valve upper body 3 shown in FIG. 1 is made of a resin having corrosion resistance and rigidity, such as PPS (polyphenylene sulfide), PFA, PP, PVDF. The resin valve upper body 3 includes a cylinder 22 and a cover 23, and forms a piston chamber 24. The resin-made piston 25 is slidably loaded in the piston chamber 24, and is always urged upward in the figure by a return spring 21 that is contracted between the piston 22 and the cylinder 22. The piston 25 moves the piston chamber 24 in the vertical direction in the figure according to the balance between the pressure of the operation air supplied from the operation port 23 a and the elastic force of the return spring 21. A piston rod 26 is integrally formed with the piston 25. The piston rod 26 is slidably passed through the cylinder 22 and is connected to the diaphragm valve body 4.

  The diaphragm valve body 4 is made of a resin having excellent corrosion resistance and heat resistance, such as PTFE (polytetrafluoroethylene), and is formed by injection molding or cutting. The diaphragm valve body 4 has a cylindrical valve body portion 4a that contacts or separates from the valve seat 15, a thin film portion 4b connected to the outer peripheral surface of the valve body portion 4a, and a thickness along the outer edge of the thin film portion 4b. It is comprised from the provided peripheral part 4c.

  The diaphragm valve body 4 has a peripheral edge 4c sandwiched between the resin valve main body 2 and the resin valve upper body to seal the inner wall of the annular groove 16, and the inner wall of the opening 14 formed in the resin valve main body 2 A valve chamber 13 is formed between the two. In the diaphragm valve body 4, the valve body portion 4 a is coupled to the piston rod 26, and contacts or separates from the valve seat 15 according to the piston 25.

  As shown in FIG. 2, the peripheral edge 4 c has an annular first convex portion 31 and an annular second convex portion 32 provided outside the first convex portion 31. An annular recess 33 is formed between the second protrusion 32.

  The width dimension W2 in the thickness direction is set to be equal to or greater than the groove width W1 of the first annular groove 16a so that the first convex portion 31 is fitted into the first annular groove 16a without a gap. In addition, the second protrusion 32 has a press-fitting allowance 32a formed on the inner peripheral surface in order to contact and seal the inner wall (inner peripheral surface) of the second annular groove 32, and the width dimension W4 in the thickness direction. Is set larger than the groove width W3 of the second annular groove 16b. The 1st convex part 31 protrudes largely from the 2nd convex part 32 to the resin-made valve main body 2 side.

  The peripheral edge 4c has a mounting groove 34 formed from the end face on the resin valve upper body 3 side into the first convex portion 31. The mounting groove 34 is formed in a perfect circle shape concentric with the first convex portion 31. The mounting groove 34 is formed to a position deeper than the tip position of the second convex portion 32. A ring body 35 that reinforces the peripheral edge 4c is attached to the mounting groove 34 in order to prevent deformation of the peripheral edge 4c.

  The ring body 35 is formed by annularly forming a material such as resin, metal, or ceramic that is harder than the diaphragm valve body 4. In the present embodiment, the ring body 35 is formed by forming stainless steel in a circular shape and applying corrosion coating. The width dimension W6 in the cross-sectional thickness direction is set to be equal to or greater than the groove width W5 of the mounting groove 34 so that the ring body 35 is fitted in the mounting groove 34 without any gap and is in contact with the inner and outer peripheral surfaces of the mounting groove 34. Has been. As for the ring body 35, the area of an inner peripheral surface and an outer peripheral surface is set larger than the area of the press-fit allowance 32a.

  The ring body 35 is inserted into the mounting groove 34 from the resin valve upper body 3 side of the peripheral edge portion 4c, and the first convex portion 31 reaches a position deeper than the tip position of the second convex portion 32, that is, the lower end position of the press-fitting allowance 32a. It is pushed in and attached. That is, when the diaphragm valve body 4 is sandwiched between the resin valve main body 2 and the resin valve upper body 3, the ring body 35 forms the second convex portion 32 with the second annular groove of the resin valve main body 2. It is arranged over the entire inside of the sealing surface that is press-fitted into 16b and crushes and seals the press-fitting allowance 32a.

<Description of operation>
As shown in FIG. 1, in the fluid control valve 1, resin tubes 110 and 111 are connected to an input port 11 and an output port 12. The fluid control valve 1 separates the diaphragm valve body 4 from the valve seat 15 when the operation air is not supplied to the operation port 23a. Therefore, the chemical solution that has flowed into the input port 11 from the tube 110 is supplied to the output port 12 via the valve seat 15 and is output from the output port 12 to the tube 111. On the other hand, when the operation air is supplied to the operation port 23a, the fluid control valve 1 lowers the piston 25 to bring the diaphragm valve element 4 into contact with the valve seat 15. Therefore, the chemical liquid that has flowed into the valve chamber 13 from the tube 110 via the input port 11 is blocked at the valve seat 15 and is not output from the output port 12 to the tube 111.

  When the chemical solution is at a high temperature of 140 to 150 degrees, for example, the resin valve main body 2 and the diaphragm valve body 4 of the fluid control valve 1 are softened by reducing the hardness due to the heat of the high-temperature chemical solution. Further, the resin tubes 110 and 111 are thermally expanded, and, as shown in FIG. 1, forces in the directions of arrows F1 and F2 in the drawing are applied to the resin valve main body 2. For this reason, the resin valve body 2 tries to deform the perfectly circular annular groove 16 into an elliptical shape (see, for example, FIG. 11). However, in the fluid control valve 1, since the peripheral edge 4 c of the diaphragm valve body 4 fitted in the annular groove 16 is reinforced by the ring body 35, deformation in the vicinity of the annular groove 16 is suppressed.

  Specifically, as shown in FIG. 2, the resin valve main body 2 presses the first convex portion 31 of the diaphragm valve body 4 inward by the force that the annular wall 19 receives from the tubes 110 and 111. The first convex portion 31 is provided with a ring body 35 that is harder than the diaphragm valve body 4 and the resin valve body 2 and is formed of an annular (perfectly circular) stainless steel that is not easily deformed even when heated. Yes. Therefore, as shown in FIG. 3, even if the first convex portion 31 receives the inward forces F1 and F2 from the annular wall 19, it generates repulsive forces R1 and R2 with respect to the inward forces F1 and F2, and is deformed. Without maintaining a perfect circle state.

  Moreover, as shown in FIGS. 2 and 3, the ring body 35 supports the entire press-fitting allowance 32a, that is, the entire sealing surface. Therefore, in the resin valve body 2, the annular wall 19 does not fall from the base end portion.

  Further, as shown in FIG. 2, the ring body 35 has the inner peripheral surface area larger than the seal surface area, and the force transmitted from the annular wall 19 to the outer peripheral surface via the first convex portion 31 is the first. Disperse widely on the convex portion 31. Therefore, the force acting on the first convex portion 31 is attenuated, and the first convex portion 31 is not easily deformed.

  Thus, even if the fluid control valve 1 is about to be deformed by the forces F1, F2 or thermal expansion that the resin valve body 2 receives from the tubes 110, 111, the first convex portion 31 reinforced by the ring body 35 is The inner side of the sealing surface is supported to prevent the annular groove 16 from being deformed. That is, the sealing surface is not deformed. Therefore, the fluid control valve 1 maintains the uniformity of the seal even during the high temperature chemical control, and does not leak.

  In the fluid control valve 1, the inner wall 17 is provided higher than the annular wall 19 to support the inner peripheral surface of the first convex portion 31, and the first convex portion 31 is pressed inward by the annular wall 19. Prevent slippage.

<Effect>
Therefore, in the fluid control valve 1 of the first embodiment, since the peripheral edge portion 4c of the diaphragm valve body 4 is reinforced by the ring body 35, as shown in FIG. Even if a force in the F1 and F2 directions is received from 110 and 111, the seal surface between the press-fitting margin 32a of the peripheral edge portion 4c and the inner peripheral surface of the second convex portion 16b is not deformed. Therefore, according to the fluid control valve 1 of the first embodiment, the uniformity of the seal is maintained even during the high temperature chemical control, and a stable seal can be performed.

  In particular, for example, in a semiconductor manufacturing process, in order to supply a chemical solution to a workpiece such as a wafer in an active state, the chemical solution is often heated. Since the fluid control valve 1 according to the first embodiment performs stable sealing even when controlling a high-temperature chemical solution, fluid leakage can be prevented even when controlling a high-permeability chemical solution at a high temperature.

  Moreover, as shown in FIGS. 1-3, the fluid control valve 1 of 1st Embodiment arrange | positions the ring body 35 near the seal surface, and the thermal expansion etc. of the resin-made valve main bodies 2 give a seal surface. The impact can be reduced. That is, the closer the ring body 35 is located to the seal surface, the more easily the seal surface is affected by the resin between the ring body 35 and the ring body 35. In this regard, the fluid control valve 1 has a ring body 35 disposed just inside the seal surface. Therefore, in the fluid control valve 1, even when the resin valve body 2 is thermally expanded, the ring body 35 directly supports the inside of the seal surface to prevent the seal surface from being deformed and to prevent a decrease in seal performance.

  Moreover, as shown in FIG. 2, the fluid control valve 1 of 1st Embodiment has the ring body 35 supporting the whole sealing surface. The force acting inward with respect to the seal surface with the deformation of the resin valve main body 2 is dispersed throughout the first convex portion 31. For this reason, the 1st convex part 31 cannot change easily with the force which acts on a sealing surface, and prevents a deformation | transformation of a sealing surface. Therefore, according to the fluid control valve 1 of the first embodiment, the first and second annular grooves 16a and 16b can be more reliably prevented from being deformed and stably sealed.

(Second Embodiment)
Then, 2nd Embodiment which concerns on the fluid control valve of this invention is described. FIG. 4 is an enlarged cross-sectional view of a seal portion between the resin valve main body 2 and the resin valve upper body 43 in the fluid control valve 41 according to the second embodiment.
The fluid control valve 41 of the second embodiment is different from the first embodiment in that the ring body 42 is integrally formed with the resin valve upper body 43, and the other points are common to the first embodiment. . Here, the difference from the first embodiment will be mainly described, and the points common to the first embodiment will be denoted by the same reference numerals as those of the first embodiment, and description thereof will be omitted as appropriate.

  In the resin valve upper body 43, the cylinder 44 presses the peripheral edge portion 4 c of the diaphragm valve body 4 against the resin valve main body 2. The resin valve upper body 43 (cylinder 44) is formed of a resin such as PPS which is harder than a resin such as PTFE constituting the resin valve main body 2 and the diaphragm valve body 4.

  A ring body 42 that is fitted into the mounting groove 34 of the peripheral edge portion 4c without a gap is integrally formed at the lower end surface in the figure where the resin valve upper body 43 (cylinder 44) contacts the resin valve main body 2. Therefore, the ring body 42 is formed of the same PPS as the resin valve upper body 43 (cylinder 44). The ring body 42 is configured in the same manner as the ring body 35 of the first embodiment, except that a resin is used as a material and is integrally formed with a resin valve upper body 43 (cylinder 44).

  In the fluid control valve 41 of the second embodiment, since the ring body 42 is integrally formed with the resin valve upper body 43 (cylinder 44), the ring body 42 is not easily deformed and is not displaced. For this reason, the resin valve body 2 is locked to the resin valve upper body 43 (cylinder 44) via the ring body 42, and the seal position is positioned. Therefore, according to the fluid control valve 41 of the second embodiment, the resin valve main body 2 is displaced laterally with respect to the resin wire valve upper body 43 as the resin valve main body 2 is deformed during the high temperature chemical control. , It is possible to prevent the seal position from being laterally displaced, and to avoid the problem of causing fluid leakage.

  Further, the fluid control valve 41 of the second embodiment can be assembled because the ring body 42 may be mounted in the mounting groove 34 of the diaphragm valve body 4 when the resin valve upper body 43 is connected to the resin valve body 2. Man-hours can be reduced. Further, the fluid control valve 41 of the second embodiment does not need to have a ring body separately. Therefore, according to the fluid control valve 41 of the second embodiment, it is possible to reduce manufacturing costs, component costs, and the like, thereby reducing costs.

(Third embodiment)
Then, 3rd Embodiment which concerns on the fluid control valve of this invention is described. FIG. 5 is an enlarged cross-sectional view of a seal portion between the resin valve main body 2 and the resin valve upper body 3 in the fluid control valve 51 according to the third embodiment of the present invention.
The fluid control valve 51 according to the third embodiment is different from the first embodiment in that the cross-sectional shape of the ring body 52 in the axial direction is bent. Therefore, here, it demonstrates centering on the point which is different from 1st Embodiment, the point which is common in 1st Embodiment attaches | subjects the same code | symbol as 1st Embodiment to drawing, and abbreviate | omits description suitably.

  The ring body 52 is formed by annularly forming a material such as resin, metal, or ceramic that is harder than the diaphragm valve body 4. The ring body 52 has a shape with a bent cross section, and includes a support main body portion 52a, a bent portion 52b, and a knob portion 52c. The support main body 52a is configured similarly to the ring body 35 of the first embodiment. The bent part 52b is provided outward from one end outer peripheral surface of the support main body part 52a. The bent portion 52b is provided in an annular shape along the outer periphery of one end surface of the support main body portion 52a. The knob 52c is bent from the outer peripheral edge of the bent portion 52b to the side opposite to the support main body 52a and protrudes toward the resin valve upper body 3 side. The knob 52c is provided in an annular shape.

  In the fluid control valve 51 of the third embodiment, the ring body 52 is fixed to the diaphragm valve body so that the knob 52c of the ring body 52 is picked and the bent portion 52b is abutted against the peripheral edge 4c of the diaphragm valve body 4. 4 is mounted in the mounting groove 34 to reinforce the first convex portion 31 of the peripheral edge portion 4c. Then, the peripheral edge 4 c of the diaphragm valve body 4 is mounted in the annular groove 16 of the resin valve main body 2 so that the knob 52 c of the ring body 52 is along the inner peripheral surface of the outer wall 18. That is, the first convex portion 31 is fitted into the first annular groove 16a, and the second convex portion 32 is press-fitted into the second annular groove 16b. Then, the resin valve upper body 3 is connected to the resin valve main body 2 so as to hold the bent portion 52b, and the knob 52c is connected between the resin valve main body 2, the resin valve upper body 3, and the diaphragm valve body 4. Position and hold with.

  Therefore, in the fluid control valve 51 of the third embodiment, the ring body 52 is bent, and the rigidity is improved as compared with the ring body 35 of the first embodiment. Therefore, in the fluid control valve 51, even if the resin valve main body 2 presses the first convex portion 31 inward, the ring body 52 is not easily deformed. Therefore, according to the fluid control valve 51 of the third embodiment, the deformation of the seal surface can be more reliably prevented.

  Moreover, in the fluid control valve 51 of the third embodiment, the ring body 52 has a knob 52c sandwiched between the outer wall 18 of the resin valve main body 2 and the outer peripheral surface of the resin valve upper body 3. Therefore, the ring body 52 is positioned with respect to the resin valve upper body 3 via the bent portion 52b and the knob portion 52c, even if an inward force is applied to the support body portion 52a. Continue to reinforce one convex portion 31. Therefore, according to the fluid control valve 51 of the third embodiment, the lateral displacement of the first convex portion 31 is prevented, and the seal position is not easily displaced.

  Moreover, since the fluid control valve 51 of the third embodiment picks the knob 52c and attaches the ring body 52 to the peripheral edge 4c of the diaphragm valve body 4, the handling of the ring body 52 is good.

(Fourth embodiment)
Then, 4th Embodiment which concerns on the fluid control valve of this invention is described. FIG. 6 is an enlarged cross-sectional view of a seal portion between the resin valve main body 2 and the resin valve upper body 3 in the fluid control valve 61 according to the fourth embodiment of the present invention.
The fluid control valve 61 of the fourth embodiment is different from the first embodiment in that the ring body 62 has a U-shaped cross section and supports the outside in addition to the inside of the seal surface. Common to one embodiment. Therefore, here, it demonstrates centering on the point which is different from 1st Embodiment, the point which is common in 1st Embodiment attaches | subjects the same code | symbol as 1st Embodiment to drawing, and abbreviate | omits description suitably.

  The ring body 62 is formed by annularly forming a material such as resin, metal, or ceramic harder than the diaphragm valve body 4. In the ring body 62, the inner support portion 62a and the outer support portion 62c are connected by a connecting portion 62b, and the cross section is bent in a U shape. The inner support part 62a is configured similarly to the ring body 35 of the first embodiment. The outer support portion 62c is provided such that the tip portion does not protrude from the tip portion of the inner support portion 62a.

  The diaphragm valve body 63 is configured similarly to the diaphragm valve body 4 of the first embodiment except for the peripheral edge portion 63c. The peripheral portion 63 c has a mounting groove 65 formed in the second convex portion 32. The mounting groove 65 opens to the end surface of the peripheral edge 63c on the resin valve upper body 3 side, and is formed shallower than the mounting groove 34 provided in the first convex portion 31. The groove width of the mounting groove 65 is set to be equal to or less than the width dimension in the thickness direction of the outer support portion 62 c of the ring body 62. That is, in the mounting groove 65, the inner peripheral surface and the outer peripheral surface of the outer support portion 62c are in contact with the inner peripheral surface and the outer peripheral surface.

  In the fluid control valve 61 according to the fourth embodiment, the inner support portion 62a and the outer support portion 62c are attached to the peripheral portion 63c until the coupling portion 62b of the ring body 62 contacts the peripheral portion 63c of the diaphragm valve body 63. Insert into grooves 34 and 65. The inner support part 62a and the outer support part 62c are fitted into the mounting grooves 34 and 65 without a gap, and reinforce the first and second convex parts 31 and 32. In the diaphragm valve body 63, the first convex portion 31 is fitted into the first annular groove 16a without any gap, and the second convex portion 32 is press-fitted into the second annular groove 16b to crush the press-fit allowance 32a. Therefore, in the fluid control valve 61, the inner support portion 62a and the outer support portion 62c of the ring body 62 are disposed on the outer side and the inner side of the seal surface that crushes and seals the press-fitting allowance 32a.

  For example, when the resin valve main body 2 is thermally expanded, the fluid control valve 61 may not know whether the annular wall 19 falls into the inner side or the outer side. Even in this case, in the fluid control valve 61, the inner support portion 62a and the outer support portion 62c of the ring body 62 reinforce the first and second convex portions 31 and 32 to prevent the annular wall 19 from falling, and the annular groove 16 The deformation of the (first and second annular grooves 16a, 16b) is prevented. That is, the sealing surface is not deformed. Therefore, according to the fluid control valve 61 of the fourth embodiment, even if the resin valve main body 2 is deformed due to thermal expansion or the like, the uniformity of the seal can be maintained and a stable seal can be performed.

  Further, in the fluid control valve 61 of the fourth embodiment, the ring body 62 is bent in a U-shape to improve the rigidity, so that the deformation of the seal surface can be more reliably prevented.

(Fifth embodiment)
Next, a fifth embodiment according to the fluid control valve of the present invention will be described. FIG. 7 is an enlarged cross-sectional view of the seal portion between the resin valve main body 72 and the resin valve upper body 3 in the fluid control valve 71 according to the fifth embodiment of the present invention.
In the fluid control valve 71 of the fifth embodiment, the diaphragm valve body 73 includes a third convex portion 74 in addition to the first and second convex portions 31 and 32, and the resin valve main body 72 has an annular shape corresponding thereto. The difference from the first embodiment is that the groove 72b includes a third annular groove 72c in addition to the first and second annular grooves 16a and 16b. Therefore, here, it demonstrates centering on a different point from 1st Embodiment, and attaches | subjects the same code | symbol as 1st Embodiment to drawing in the point which is common in 1st Embodiment, and abbreviate | omits description suitably.

  The diaphragm valve body 73 has the same configuration as the diaphragm valve body 4 of the first embodiment except for the peripheral edge portion 73c. The peripheral edge 73 c has a third protrusion 74 formed outside the second protrusion 32. The third convex portion 74 is formed in the same manner as the first convex portion 31. A mounting groove 75 for mounting the ring body 76 is formed in the third convex portion 74 in the same manner as the mounting groove 34 of the first convex portion 31.

  The resin valve main body 72 has an annular groove 72 b corresponding to the peripheral edge 73 c of the diaphragm valve body 73. The annular groove 72b is formed with a third annular groove 72c outside the second annular groove 16b. The resin valve body 72 is provided with an annular wall 72a that constitutes the outer peripheral surface of the first annular groove 16a and the inner peripheral surface of the third annular groove 72c. A second annular groove 16b is formed in the annular wall 72a.

  The ring body 76 is formed by annularly molding a material such as resin, metal, or ceramic that is harder than the diaphragm valve body 73. The ring body 76 is formed by connecting an inner support portion 76a and an outer support portion 76c, which are fitted in the mounting grooves 34 and 75 of the diaphragm valve body 73 without a gap, by a coupling portion 76b. That is, the ring body 76 is bent into a substantially U-shaped cross section. The ring body 76 is provided with knobs 76d and 76d opposite to the inner support 76a and the outer support 76c, respectively, and protrudes toward the resin valve upper body 3 side.

  Such a fluid control valve 71 may be pressed by the tubes 110 and 111 in which the resin valve main body 72 is thermally expanded, or the resin valve main body 72 itself may be thermally expanded during high-temperature chemical control. In this case, the annular wall 72a tends to fall into either the inside or the outside. However, the peripheral edge portion 73c of the diaphragm valve body 73 supports the inner side and the outer side of the annular wall 72a with the inner support portion 76a and the outer support portion 76c being reinforced by the first and third convex portions 31 and 74. Therefore, the resin valve holder 2 is not deformed because the annular groove 72b (first to third annular grooves 16a, 16b, 72c) is supported by the peripheral edge portion 73c (first and third convex portions 31, 74). , Maintain a perfect circle. That is, the sealing surface is not deformed. Therefore, according to the fluid control valve 71 of the fifth embodiment, the seal uniformity can be ensured and stable sealing can be performed even during high temperature chemical control.

  In particular, the fluid control valve 71 can prevent the deformation of the seal surface more reliably because the ring body 76 is bent to improve the rigidity.

  Further, in the fluid control valve 71 of the fifth embodiment, the third convex portion 74 is fitted in the third annular groove 72c without a gap on the outer side of the seal surface, so even if a minute leak occurs from the seal surface. , That leakage can be minimized.

Further, in the fluid control valve 71 of the fifth embodiment, since the knobs 76d and 76d are provided in the ring body 76, the handleability of the ring body 76 is good.
Moreover, in the fluid control valve 71 of the fifth embodiment, since the knobs 76d and 76d of the ring body 76 are fitted and locked in the resin valve upper body 3, the resin valve main body 2 and the diaphragm valve body 4 are engaged. Can be prevented from being displaced with respect to the resin valve upper body 3 and fluid leakage.

(Sixth embodiment)
Then, 6th Embodiment which concerns on the fluid control valve of this invention is described. FIG. 8 is an enlarged cross-sectional view of a seal portion between the resin valve main body 2 and the resin valve upper body 3 in the fluid control valve 81 according to the sixth embodiment of the present invention.
The fluid control valve 81 of the sixth embodiment is different from the ring body 35 of the first embodiment in that the cross-section of the ring body 82 is wedge-shaped, and the other points are common to the first embodiment. Therefore, here, it demonstrates centering on a different point from 1st Embodiment, and attaches | subjects the same code | symbol as 1st Embodiment to drawing in the point which is common in 1st Embodiment, and abbreviate | omits description suitably.

  The ring body 82 is formed by annularly forming a material such as resin, metal, or ceramic that is harder than the diaphragm valve body 4. The ring body 82 is provided with an outer taper 83 on the outer peripheral surface (the surface on the seal side), and has a wedge shape whose cross-sectional shape is thick from the resin valve body 2 side to the resin valve upper body 3 side. In the fluid control valve 81, after the peripheral edge 4c of the diaphragm valve body 4 is fitted into the annular groove 16 of the resin valve body 2, the ring body 82 is inserted into the mounting groove 34 of the diaphragm valve body 4 from the thin side. Push in and attach to reinforce the strength of the peripheral edge 4c. The ring body 82 pushes and widens the mounting groove 34 toward the seal surface, and crimps the outer peripheral surface of the first convex portion 31 to the outer peripheral surface of the first annular groove 16a, thereby preventing the positional deviation of the first convex portion 31.

Since such a fluid control valve 81 has a wedge shape with a tapered cross-section of the ring body 82, the ring body 82 can be easily mounted in the mounting groove 34.
Further, in the fluid control valve 81, the ring body 82 strongly presses the first convex portion 31 against the distal end portion of the annular wall 19 rather than the proximal end portion of the annular wall 19, and strongly reinforces the inner side of the distal end portion of the annular wall 19. Therefore, it is difficult for the annular wall 19 to fall down.

FIG. 9 is a modification of the ring body 82 shown in FIG.
The fluid control valve 81 </ b> A has a link body 82 </ b> A attached to the peripheral edge portion 4 c of the diaphragm valve body 4. The ring body 82A has an inner taper 84 formed on the inner peripheral surface (the surface opposite to the seal side), and the cross-sectional shape is a wedge shape in which the resin valve upper body 3 side is thicker than the resin valve body 2 side. Eggplant. Such a ring body 82 </ b> A is mounted by being pushed into the mounting groove 34 of the diaphragm valve body 4 from the end face having a small thickness. The ring body 82A spreads the mounting groove 34 to both the inner and outer sides, and presses the inner peripheral surface and outer peripheral surface of the first convex portion 31 to the inner peripheral surface and outer peripheral surface of the first annular groove 16a, thereby the first convex portion. 31 position shift is prevented.

 The ring body 82A is easier to mount in the mounting groove 34 than the ring body 82 by providing the inner taper 84 on the inner peripheral surface. In addition, the ring body 82A is stretched between the annular wall 19 and the inner wall 17, and it is easy to prevent the annular wall 19 and the inner wall 17 from falling down.

  In addition, this invention is not limited to the said embodiment, Various application is possible.

(1) For example, in the said embodiment, although the fluid control valve 1 was used for the semiconductor manufacturing process, it cannot be overemphasized that a use application is not limited to this.

(2) For example, in the above embodiment, the fluid control valve 1 is a normally open type air operated on / off valve, but may be a normally closed type air operated on / off valve. The fluid control valve 1 may be a flow rate adjustment valve, a manual valve, a solenoid valve, or the like.

(3) For example, in the said embodiment, the 1st convex part 31 and the 2nd convex part 32 are provided in the peripheral part 4c of the diaphragm valve body 4, and the cyclic | annular recessed part 33 is provided between the 1st and 2nd convex parts 31 and 32. FIG. Formed. On the other hand, for example, a ring body 35 is attached to a diaphragm valve body (for example, see FIG. 10) having a single convex shape at the peripheral edge and not provided with the annular recess 33 to reinforce the peripheral edge. May be.

(4) In the third embodiment, the knob 52c is provided in an annular shape, but the knob may be provided intermittently. In this case, a hole for inserting the knob may be formed in the resin valve upper body 3 to prevent the ring body from rotating.

(5) In the third and fifth embodiments, the ring bodies 52 and 76 are provided separately from the resin valve upper body 3, but the ring bodies 52 and 76 are insert-molded or bonded to the resin valve upper body 3. For example, the ring bodies 52 and 76 may be provided integrally with the resin valve upper body 3.

(6) In the first to third embodiments, the material of the resin valve upper body 3 is resin. However, for example, when the operation air is high to control the high-pressure control fluid, the resin valve upper body 3 is made of resin. The material of the valve upper body may be a metal.

It is sectional drawing of the fluid control valve which concerns on 1st Embodiment of this invention, Comprising: A valve open state is shown. It is an enlarged view of the A section shown in FIG. It is the figure which looked at the fluid control valve shown in FIG. 1 from the B direction. However, in order to make the drawing easy to see, only the opening, the first and second annular grooves, and the first and second convex portions of the diaphragm valve body that fits into the first and second annular grooves are described. FIG. 6 is an enlarged cross-sectional view of a seal portion between a resin valve main body and a resin valve upper body in a fluid control valve according to a second embodiment of the present invention. FIG. 9 is an enlarged cross-sectional view of a seal portion between a resin valve main body and a resin valve upper body in a fluid control valve according to a third embodiment of the present invention. FIG. 10 is an enlarged cross-sectional view of a seal portion between a resin valve main body and a resin valve upper body in a fluid control valve according to a fourth embodiment of the present invention. FIG. 10 is an enlarged cross-sectional view of a seal portion between a resin valve main body and a resin valve upper body in a fluid control valve according to a fifth embodiment of the present invention. It is an enlarged sectional view of a seal part between a resin valve body and a resin valve upper body in a fluid control valve according to a sixth embodiment of the present invention. It is a modification of the ring body shown in FIG. It is sectional drawing of the conventional fluid control valve. It is the figure which looked at the fluid control valve shown in FIG. However, in order to make the drawing easy to see, the external shape of the body is simplified in the drawing, and only the annular groove and the peripheral edge portion of the diaphragm valve body fitted in the annular groove are described.

Explanation of symbols

1, 41, 51, 61, 71, 81 Fluid control valve 2, 72 Resin valve body 3, 43 Resin valve upper body 4, 63, 73 Diaphragm valve body 4a Valve body portion 4b Thin film portions 4c, 63c, 73c Part 11 input port 12 output port 14 opening 15 valve seat 16 annular groove 16a first annular groove 16b second annular groove 31 first convex part 32 second convex part 35, 42, 52, 62, 76, 82, 82A ring Body 52c, 76d knob

Claims (7)

A resin valve body having an opening communicating with the input port and the output port; a valve seat provided on an inner wall of the opening; a resin valve upper body coupled to an upper surface of the resin valve body; In a fluid control valve comprising a resin diaphragm valve body sandwiched between the resin valve main body and the resin valve upper body,
The resin valve body has an annular groove formed outside the opening,
The diaphragm valve body is
It is provided with a thickness along the outer edge, and includes a peripheral edge that fits into the annular groove,
A fluid control valve characterized in that a ring body formed of a material harder than the diaphragm valve body in an annular shape is mounted on the peripheral edge. The fluid control valve according to claim 1,
The fluid control valve according to claim 1, wherein the ring body has a bent cross section in the axial direction. In the fluid control valve according to claim 1 or 2,
The fluid control valve according to claim 1, wherein the ring body has a wedge shape in cross section. In the fluid control valve according to any one of claims 1 to 3,
The fluid control valve according to claim 1, wherein the ring body has a knob portion protruding toward the resin valve upper body. In the fluid control valve according to claim 1 or claim 3,
The fluid control valve according to claim 1, wherein the ring body is provided integrally with the resin valve upper body. The fluid control valve according to any one of claims 1 to 5,
The peripheral portion is
An annular first convex portion to which the ring body is attached;
An annular second convex portion provided outside the first convex portion,
The annular groove is
A first annular groove into which the first convex portion is fitted;
A fluid control valve comprising: a second annular groove that fits the second convex portion and seals at a surface with which the second convex portion abuts. The fluid control valve according to claim 6,
The first convex portion protrudes from the second convex portion to the resin valve body side,
The fluid control valve according to claim 1, wherein the ring body is attached to the first convex portion from the resin valve upper body side of the peripheral portion to a position deeper than a tip position of the second convex portion.

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