JPH04110751U - Rotary table in arc ion plating equipment - Google Patents

Abstract

(57) [Summary] [Purpose] The purpose is to place objects to be coated on each revolving table so that they do not come into contact with each other during rotation, even if the objects to be coated are longer than the diameter of the revolving table. [Structure] A rotating table 50 is rotatably supported on a central axis 32, and a plurality of revolution tables 53 that are rotatable around a fixed axis 54 are provided on this rotating table 50. Each revolution table
53 is interlocked and connected by a chain 58 wound around the interlocking sprocket 56 in a zigzag pattern, and between a fixed sprocket 59 fixed to the central shaft 32 and a rotating sprocket 57 fixed to one revolution table 53. A chain 60 is wrapped around it. Therefore, adjacent revolution tables 53 rotate in opposite directions.

Description

[Detailed explanation of the idea]

0001

[Industrial application field]

The present invention relates to a rotary table in an arc ion plating apparatus.

0002

[Conventional technology]

FIG. 4 shows the basic configuration of an arc ion plating device. In Figure 4 , 1 is the vacuum vessel, and 2 is the evaporation source, which is connected to the cathode of the arc power source. 3 is rotation The table is connected to the cathode of the bias power supply and is covered on this rotary table 3. Coating material 4 is placed. 5 is the process gas inlet, 6 is the exhaust port .

0003 When arc discharge occurs in a vacuum using evaporation source 2 as a cathode, the arc will reach the surface of evaporation source 2. It forms an arc spot on top and runs around randomly on its surface. And aa The energy of the arc current concentrated in the arc spot instantly melts and evaporates the evaporation material. At the same time, they turn into metal ions and fly out into the vacuum. On the other hand, if the bias voltage is When the metal ions are It adheres closely to the surface of the coating material 4 and forms a dense film.

0004 Conventionally, the rotary table 3 is composed of a rotating table 7 and the like, as shown in FIGS. A plurality of revolving tables 8 are arranged around the periphery of the rotating table 8. The coating 4 is uniformly exposed to the metal ion stream and Bias voltage is now applied to object 4 while insulated from vacuum vessel 1, etc. ing.

[0005] That is, in FIGS. 5 and 6, 9 is a hollow central shaft, and a bearing 10 is attached to this central shaft 9. The planetary frame 11 is rotatably supported via. A bearing 12 is installed at the periphery of the planetary frame 11. Rotating shafts 13 are arranged at equal intervals through the rotating shafts 13, and a rotating table 14 and a rotating table 14 are arranged above and below each rotating shaft 13. , a planetary gear 17 that meshes with a fixed internal gear 16 is provided on the frame 15. . Then, a revolution table 8 is attached to each rotation table 14 via an insulating insulator 18. ing.

[0006] A fixing base 20 is mounted on the center shaft 9 via an insulating insulator 19, and an insulating insulator is mounted on the planetary frame 11. Intermediate stands 22 are respectively installed through the intermediate stands 21, and an insulating insulator 23 is mounted on the intermediate stands 22. A rotating table 7 is attached through the frame. The bias power cable is attached to the fixed base 20. from this fixed base 20 via the first brush 24, intermediate base 22, and second brush 25. It is configured to apply a bias voltage to each revolution table 8. 1st bra The brush 24 is mounted on the fixed base 20 as shown in FIG. 7, and the second brush 25 is mounted on the intermediate stage 22 as shown in FIG. are provided in each.

[0007] In this rotary table 3, when the planet frame 11 rotates around the intermediate shaft 9, this The rotating table 7 rotates together with the rotating table 7. On the other hand, the planetary gear 17 of the rotating shaft 13 is an internal gear. -16, so as the planetary frame 11 rotates, the table 8 revolves around the rotation axis 13. revolves. Also, at this time, the bias voltage is fixed base 20, brush 24, intermediate base 22, It is applied to the revolution table 8 via the brush 25.

[0008]

[Problem that the idea aims to solve]

In the conventional rotary table 7, the planetary gear 17 at the lower end of each rotating shaft 13 is replaced by an internal gear 16. and rotate each revolution table 8 in conjunction with the rotation of the rotation table 7. Therefore, all the revolution tables 8 rotate in the same direction. Therefore, fig. As shown by the imaginary line in Figure 5, there is a cover on the revolution table 8 that is larger than that. When the coating material 4 is placed, when each revolution table 8 rotates around the rotation axis 13, Adjacent objects 4 to be coated come into contact with each other. Therefore, the revolution table 8 There is a limit to the length of the object to be coated 4 that can be placed on it, and the diameter of the revolving table 8 If the object to be coated 4 is longer than that, there is a disadvantage that it cannot be used.

[0009] In view of this, the present invention has been developed to coat objects that are longer than the diameter of the revolving table. However, the purpose is to provide a rotary table that can be placed on the table without touching it while rotating. do.

0010

[Means to solve the problem]

In the present invention, a plurality of public A rotating table 53 is provided, and the object to be coated 61 is placed on the rotating table 53. On the rotary table of arc ion plating equipment, each adjacent public Interlocking with the rotation of the rotating table 50 so that the rotating tables 53 rotate in opposite directions A driving means for rotating each revolution table 53 is provided.

[0011]

[Effect]

When the rotating table 50 rotates around the central axis 32, the driving means rotates the rotating table 50. In conjunction with the rotation, each revolution table 53 is rotated around its axis. At this time, each revolution The table 53 rotates so that adjacent revolution tables 53 are in opposite directions. Therefore , when placing an object 61 to be coated that is longer than the diameter of the revolution table 53, Avoid contact or collision with the object to be coated 61 by placing the objects out of phase. This allows the object 61 to be coated to be placed for a longer period of time.

0012

【Example】

Hereinafter, embodiments of the present invention will be described in detail based on the drawings. In Figures 1 and 2, 30 is a fixed frame, and a hollow central shaft 32 is mounted on this fixed frame 30 through an insulating material 31. is attached with bolts. 33 is a rotating frame with a central boss part 34 and a bearing 35. The input sprocket is rotatably supported on the center shaft 32 through the input sprocket at the lower end of the boss portion 34. ket 36 is fixed. 37 is a drive shaft, which rotates to the fixed frame 30 via a bearing 38. It is rotatably supported. Additionally, an insulating material 40 is placed on the flange portion 39 at the upper end of the drive shaft 37. A drive sprocket 41 is fixed through the sprocket, and a transmission sprocket 42 is fixed to the lower end. Ru. The drive sprocket 41 connects to the input sprocket 36 via the chain 43, and the transmission sprocket Rocket 42 includes chain 44, intermediate sprocket 45, intermediate shaft 46, bevel gear 47, etc. They are each successively connected to a drive motor (not shown) via the drive motor. Intermediate sprocket 45, bebe The gears 47 are located above and below the intermediate shaft 46, and the intermediate shaft 46 is rotatable on the lower frame 48. is supported by 49 is the tension sprocket.

[0013] 50 is a rotating table, which is fixed on the rotating frame 33 via a spacer 51. . Eight round holes 52 are formed at equal intervals in the circumferential direction on the peripheral edge of the rotating table 50. A revolution table 53 is arranged in each hole 52. Each revolution table 53 is for placing the object to be coated 61 on its upper surface. A hollow fixed shaft 54 fixed to the rotating frame 33 is rotatably supported via a bearing 55. held. An interlocking sprocket 56 is fixed at the bottom end of each revolution table 53. In addition, one revolution table 53 has a rotating sprocket 57 fixedly installed in the upper and lower intermediate parts. It is. Each interlocking sprocket 56 has two revolution tables 53 adjacent to each other in the circumferential direction. A conductive chain 58 is wound in a zigzag pattern so that the chain rotates in the opposite direction. Ru. The rotating sprocket 57 also has a fixed sprocket fixed to the upper end of the center shaft 32. A conductive chain 60 is wound between the gate 59 and the conductive chain 60.

[0014] The central axis 32 is attached to the fixed frame 30 by an insulating material 31 interposed between the fixed frame 30 and the fixed frame 30. The drive sprocket 41 is electrically insulated from the drive shaft 37 by the insulating material 40. It is electrically insulated from the fixed frame 30 and the like. Therefore, the central axis 32, the rotation frame 33, and the The rotation table 50 and the revolution table 53 are completely electrically isolated from the fixed frame 30 side. The bias power cable is connected to the lower end of the central axis 32. .

[0015] In the above configuration, when the drive motor is started, the bevel gear 47, intermediate shaft 46, Drive shaft 37 rotates via intermediate sprocket 45, chain 44, transmission sprocket 42, etc. do. From the drive sprocket 41 of this drive shaft 37 to the chain 43, the input sprocket The rotating frame 33 rotates around the central axis 32 via the bracket 36, and the rotating table 50 rotates around the rotating frame 33. It rotates as one.

[0016] At this time, each revolution table 53 rotates around the central axis 32 together with the rotating frame 33 and the rotating table 50. The rotating sprocket 57 provided on one of the revolving tables 53 rotates and revolves. A chain 60 is wound between the fixed sprocket 59 and each revolving table 53. Since the chain 58 is wrapped around the interlocking sprocket 56 in a zigzag pattern, the As the table 50 rotates, each revolving table 53 moves around the fixed axis 54 in the direction of the arrow in Figure 1. Each rotates. Therefore, each revolution table 53 is a pair of adjacent revolution tables 53. The object to be coated 61 revolves around the fixed shaft 54 so that the Even if the diameter of the object 61 is larger than that of the table 53, It is possible to eliminate contact and collision between them.

[0017] That is, when first placing the object 61 on each revolution table 53, The phases of the objects 61 to be coated on the revolving table 53 are shifted to prevent them from coming into contact with each other. If it is placed in such a position, each revolving table 53 will then rotate around the fixed axis 54. Also, it is possible to prevent the objects 61 to be coated from coming into contact with each other or colliding with each other. Therefore, the same dimensions Even with a revolving table 53, a longer object 61 to be coated can be placed. Ru.

[0018] On the other hand, a bias voltage is applied to the lower part of the center axis 32 from the bias power supply via the cable. be done. The voltage of this central shaft 32 is determined by the fixed sprocket 59, chain 60, The voltage is applied to one revolution table 53 via the dynamic sprocket 57, and this one From the revolution table 53 to each other revolution table via the interlocking sprocket 56 and chain 58 53.

[0019] In this way, voltage is applied from the central axis 32 to each revolving table 53 via the chains 58, 60. In addition, there is always a metal contact between chain 58, 60 and sprocket 56, 57, 59. Therefore, voltage can be applied to each revolution table 53 without generating sparks. FIG. 3 shows another embodiment of the invention. That is, in the embodiments of FIGS. 1 and 2, the rotating The driving means for rotating each revolution table 53 in conjunction with the rotation of the table 50 is a sprocket. Consisting of parts 56, 57, 59 and chains 58, 60, especially chain 58 is connected to each interlocking sprocket. 56 in a zigzag pattern to rotate each adjacent revolving table 53 in the opposite direction. I'm doing it. However, the driving means is not limited to this, and is shown in FIG. An interlocking gear 62 is provided at the lower end of the boss portion of each revolution table 53 so that each The interlocking gears 62 of the revolution table 53 may be engaged with each other. In addition, in this case In this case, a bias voltage is applied to each revolution table 53 via the interlocking gear 62. Become.

[0020]

[Effect of the idea]

According to the present invention, each adjacent revolving table 53 is automatically rotated in opposite directions. Driving means for rotating each revolution table 53 in conjunction with the rotation of the rotation table 50 is provided. Therefore, even if the object to be coated 61 is longer than the diameter of the revolving table 53, it can be rotated. It is possible to place them on each revolution table 53 so that they do not come into contact with each other during rotation. Therefore, there is an advantage that a long object to be coated 61 can be placed on the same revolving table 53. .

[Brief explanation of drawings]

FIG. 1 is a plan view of a rotary table showing an embodiment of the present invention.

FIG. 2 is a sectional view of a rotary table showing an embodiment of the present invention.

FIG. 3 is a plan view of a rotary table showing another embodiment of the present invention.

FIG. 4 is a cross-sectional view of the arc ion plating apparatus.

FIG. 5 is a plan view of a conventional rotary table.

FIG. 6 is a sectional view of a conventional rotary table.

FIG. 7 is a plan view of a conventional first brush portion.

FIG. 8 is a plan view of a conventional second brush portion. 31 Insulating material 32 Center axis 33 Rotating frame 50 Rotating table 53 Revolution table 54 Fixed axis 56 Interlocking sprocket 57 Rotating sprocket 58 chain 59 Fixed sprocket 60 chain 61 Object to be coated

Claims (1)

[Scope of utility model registration request] Claim 1: A rotating table (50) rotatably supported by a central axis (32) is provided with a plurality of revolving tables (53),
In the rotary table of an arc ion plating apparatus in which the object to be coated (61) is placed on the revolving table (53), the rotary table (50) is arranged so that the adjacent revolving tables (53) rotate in opposite directions. ) A rotary table for an arc ion plating apparatus, characterized in that it is provided with a driving means for rotating each revolution table (53) in conjunction with the rotation of the rotary table (53).