JPH0410902A - Production of green sheet - Google Patents
Production of green sheetInfo
- Publication number
- JPH0410902A JPH0410902A JP11413990A JP11413990A JPH0410902A JP H0410902 A JPH0410902 A JP H0410902A JP 11413990 A JP11413990 A JP 11413990A JP 11413990 A JP11413990 A JP 11413990A JP H0410902 A JPH0410902 A JP H0410902A
- Authority
- JP
- Japan
- Prior art keywords
- green sheet
- sheet
- undried
- carrier sheet
- solvent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 11
- 239000002904 solvent Substances 0.000 claims abstract description 10
- 239000003960 organic solvent Substances 0.000 claims abstract description 7
- 239000002002 slurry Substances 0.000 claims abstract description 5
- 238000000034 method Methods 0.000 claims description 11
- 239000000919 ceramic Substances 0.000 claims description 5
- 239000011230 binding agent Substances 0.000 claims description 4
- 230000001678 irradiating effect Effects 0.000 claims description 4
- 239000004014 plasticizer Substances 0.000 claims description 4
- 239000000843 powder Substances 0.000 claims description 4
- 238000004898 kneading Methods 0.000 claims description 2
- 238000009499 grossing Methods 0.000 abstract description 3
- 238000009751 slip forming Methods 0.000 abstract description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 2
- 238000007602 hot air drying Methods 0.000 abstract 1
- 238000007603 infrared drying Methods 0.000 abstract 1
- 230000000644 propagated effect Effects 0.000 abstract 1
- 238000001035 drying Methods 0.000 description 6
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 4
- 238000004804 winding Methods 0.000 description 3
- 239000004372 Polyvinyl alcohol Substances 0.000 description 2
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 2
- 229910002113 barium titanate Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 235000019441 ethanol Nutrition 0.000 description 2
- 229920002451 polyvinyl alcohol Polymers 0.000 description 2
- MQIUGAXCHLFZKX-UHFFFAOYSA-N Di-n-octyl phthalate Natural products CCCCCCCCOC(=O)C1=CC=CC=C1C(=O)OCCCCCCCC MQIUGAXCHLFZKX-UHFFFAOYSA-N 0.000 description 1
- GXCLVBGFBYZDAG-UHFFFAOYSA-N N-[2-(1H-indol-3-yl)ethyl]-N-methylprop-2-en-1-amine Chemical compound CN(CCC1=CNC2=C1C=CC=C2)CC=C GXCLVBGFBYZDAG-UHFFFAOYSA-N 0.000 description 1
- BJQHLKABXJIVAM-UHFFFAOYSA-N bis(2-ethylhexyl) phthalate Chemical compound CCCCC(CC)COC(=O)C1=CC=CC=C1C(=O)OCC(CC)CCCC BJQHLKABXJIVAM-UHFFFAOYSA-N 0.000 description 1
- 239000003985 ceramic capacitor Substances 0.000 description 1
- XNGIFLGASWRNHJ-UHFFFAOYSA-L phthalate(2-) Chemical compound [O-]C(=O)C1=CC=CC=C1C([O-])=O XNGIFLGASWRNHJ-UHFFFAOYSA-L 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Producing Shaped Articles From Materials (AREA)
- Ceramic Capacitors (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
Abstract
Description
【発明の詳細な説明】
産皇」ｊｌＵ止止旺
本発明は、グリーンシートの製造方法に関し、特にグリ
ーンシート表面を平滑にする製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method of manufacturing a green sheet, and more particularly to a method of manufacturing a green sheet with a smooth surface.
従監Δ皮直
一般に多層セラミック基板、積層セラミックコンデンサ
等に使用されるグリーンシートは、例えば次のように形
成されている。Green sheets generally used for multilayer ceramic substrates, multilayer ceramic capacitors, etc. are formed as follows, for example.
第２図の略示断面図を用いて従来の製造方法の一例であ
るコンマコタ法による形成方法を説明する。A forming method using the comma-cota method, which is an example of a conventional manufacturing method, will be explained using the schematic cross-sectional view of FIG.
まず、コンマータ１の中にチタン酸バリウム等のセラミ
ック粉末、エチルアルコール等の有機溶剤、フタル酸ジ
オクチル等の可塑剤、ポリビニルアルコール等のバイン
ダを含む泥しょう２を所要量注入する。次に、キャリア
シート供給部３よりキャリアシート４を図面矢印で示す
ように左方向から右方向へ移動させると、キャリアシー
ト４上にはコンマータ１とキャリアシート４との隙間間
隔にほぼ対応する厚さの未乾燥のグリーンシートが連続
的に形成される。次に、熱風または赤外線等を用いた乾
燥炉５にてグリーンシート中の有機溶剤を乾燥させ、キ
ャリアシート巻取部６にてグリーンシートを表面に形成
したキャリアシート４を巻き取る。First, a required amount of slurry 2 containing a ceramic powder such as barium titanate, an organic solvent such as ethyl alcohol, a plasticizer such as dioctyl phthalate, and a binder such as polyvinyl alcohol is poured into commata 1. Next, when the carrier sheet 4 is moved from the left direction to the right direction as shown by the arrow in the drawing from the carrier sheet supply section 3, a thickness approximately corresponding to the gap between the commata 1 and the carrier sheet 4 is formed on the carrier sheet 4. Undried green sheets are continuously formed. Next, the organic solvent in the green sheet is dried in a drying oven 5 using hot air or infrared rays, and the carrier sheet 4 having the green sheet formed on its surface is wound up in a carrier sheet winding section 6.
ところで、上述した従来手段では、コンマータ１から出
た未乾燥のグリーンシートは直ちに乾燥炉５へ入るため
、その表面にスジ等が発生していた場合、そのまま乾燥
されたグリーンシートの膜表面には凹凸ができる。By the way, in the above-mentioned conventional means, the undried green sheet coming out of the commatar 1 is immediately entered into the drying oven 5. Therefore, if there are streaks or the like on the surface of the undried green sheet, the film surface of the green sheet that has been dried as it is will be It creates unevenness.
特に、乾燥後の膜厚が３０μｍ以下のものになると、膜
表面のスジ等による凹凸は、製品の信頼性を著しく悪く
するという欠点がある。In particular, when the film thickness after drying is 30 μm or less, irregularities such as streaks on the film surface have the drawback of significantly impairing the reliability of the product.
上述した従来のグリーンシートの製造方法に対し、本発
明はコンマータから出た直後の未乾燥の薄いグリーンシ
ートに溶媒を介して超音波を照射するという相違点を有
する。The present invention differs from the above-described conventional green sheet manufacturing method in that an undried thin green sheet immediately after leaving the commatar is irradiated with ultrasonic waves via a solvent.
、の
本発明の目的は、かかる従来欠点を解決したグリーンシ
ートの製造方法を提供することにある。An object of the present invention is to provide a method for manufacturing a green sheet that solves the conventional drawbacks.
本発明によれば、セラミック粉末、有機溶剤。According to the invention, ceramic powder, organic solvent.
可塑剤、バインダを混練してなる泥しようをコンマータ
法にて成膜する工程において、コンマータから出た直後
の未乾燥の薄いグリーンシートに溶媒を介して超音波を
照射することを特徴とするグリーンシートの製造方法が
得られる。A green product characterized by irradiating ultrasonic waves through a solvent to an undried thin green sheet immediately after coming out of the commata method in the process of forming a film using the commata method using a slurry made by kneading a plasticizer and a binder. A method for manufacturing a sheet is obtained.
１且
上記方法によれば、超音波を、溶媒を介して未乾燥の薄
いグリーンシートに照射することにより、その表面の凹
凸に溶媒の振動が加わり、凹凸が平滑化する作用をする
ため、乾燥後のグリーンシートの表面を平滑にすること
ができる。1. According to the above method, by irradiating ultrasonic waves to an undried thin green sheet through a solvent, vibrations of the solvent are applied to the unevenness of the surface, which has the effect of smoothing the unevenness. The surface of the subsequent green sheet can be made smooth.
災胤阻 以下、本発明について図面を参照して説明する。disaster prevention Hereinafter, the present invention will be explained with reference to the drawings.
第１図は、本発明の一実施例であるグリーンシートの製
造方法を示す略示断面図である。FIG. 1 is a schematic cross-sectional view showing a method for manufacturing a green sheet according to an embodiment of the present invention.
まず、コンマータ１の中にチタン酸バリウム等のセラミ
ック粉末、エチルアルコール等の有機溶剤、フタル酸ジ
オフチル等の可塑剤、ポリビニルアルコール等のバイン
ダを含む泥しょう２を所要量注入する。次に、キャリア
シート供給部３よりキャリアシート４を図面矢印で示す
ように、左方向から右方向へ移動させると、キャリアシ
ート４上にはコンマータ１の出口下端とキャリアシート
４との隙間間隔に対応する厚さの未乾燥のグリーンシー
トが連続的に形成される。次に、超音波発振器７にて超
音波振動子８を振動させ、ポーン９より容器１０．水等
の溶媒１１を伝幡した超音波を未乾燥のグリーンシート
上に照射する。照射された超音波は、未乾燥のグリーン
シートを振動させ、表面の凹凸をなくし平滑化させる。First, a required amount of slurry 2 containing a ceramic powder such as barium titanate, an organic solvent such as ethyl alcohol, a plasticizer such as diophthyl phthalate, and a binder such as polyvinyl alcohol is poured into the commata 1. Next, when the carrier sheet 4 is moved from the left direction to the right direction from the carrier sheet supply section 3 as shown by the arrow in the drawing, the gap between the lower end of the outlet of the commata 1 and the carrier sheet 4 is displayed on the carrier sheet 4. A wet green sheet of corresponding thickness is formed continuously. Next, the ultrasonic vibrator 8 is vibrated by the ultrasonic oscillator 7, and the container 10 is moved from the pawn 9. Ultrasonic waves transmitted through a solvent 11 such as water are irradiated onto the undried green sheet. The irradiated ultrasonic waves vibrate the undried green sheet, eliminating surface irregularities and smoothing it.
その後、熱風または赤外線等を用いた乾燥炉５にてグリ
ーンシート中の有機溶剤を乾燥させ、キャリアシート巻
取部６にてグリーンシートを表面に形成したキャリアシ
ート４を巻き取る。Thereafter, the organic solvent in the green sheet is dried in a drying oven 5 using hot air or infrared rays, and the carrier sheet 4 having the green sheet formed on its surface is wound up in a carrier sheet winding section 6.
欠晩囚麹果 以上、本発明により次の効果がある。Absentee prisoner malt As described above, the present invention has the following effects.
（１）超音波を、溶媒を介して未乾燥の薄いグリーンシ
ートに照射することにより、その表面の凹凸をな（シ、
乾燥後のグリーンシートの表面を平滑にできる。(1) By irradiating an undried thin green sheet with ultrasonic waves through a solvent, the unevenness of the surface is smoothed out.
The surface of the green sheet can be made smooth after drying.
（Ｉｆ）膜表面の凹凸がなくなり、製品の信頼性が向上
する。(If) The unevenness of the film surface is eliminated, and the reliability of the product is improved.
第１図は、本発明のグリーンシートの製造方法を説明す
るための略示断面図、第２図は製造方法を説明するため
の略示断面図である。FIG. 1 is a schematic sectional view for explaining the method of manufacturing a green sheet of the present invention, and FIG. 2 is a schematic sectional view for explaining the manufacturing method.
１・・・・・・コンマータ、
２・・・・・・泥しよう、
３・・・・・・キャリアシート供給部、４・・・・・・
キャリアシート、
５・・・・・・乾燥炉、
６・・・・・・キャリアシート巻取部、７・・・・・・
超音波発振器、
８・・・・・・超音波振動子、
９・・・・・・ホーン、
１０・・・・・・容器、
１１・・・・・・溶媒。1...Commerter, 2...Mud drain, 3...Carrier sheet supply section, 4...
Carrier sheet, 5...Drying oven, 6...Carrier sheet winding section, 7...
Ultrasonic oscillator, 8... Ultrasonic vibrator, 9... Horn, 10... Container, 11... Solvent.
Claims (1)
てなる泥しょうをコンマコータ法にて成膜する工程にお
いて、 コンマコータから出た直後の未乾燥の薄いグリーンシー
トに溶媒を介して超音波を照射することを特徴とするグ
リーンシートの製造方法。[Claims] In the process of forming a film using a comma coater method using a slurry made by kneading ceramic powder, an organic solvent, a plasticizer, and a binder, a solvent is applied to an undried thin green sheet immediately after coming out of the comma coater. A method for producing a green sheet, characterized by irradiating it with ultrasonic waves.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11413990A JPH0410902A (en) | 1990-04-27 | 1990-04-27 | Production of green sheet |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11413990A JPH0410902A (en) | 1990-04-27 | 1990-04-27 | Production of green sheet |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0410902A true JPH0410902A (en) | 1992-01-16 |
Family
ID=14630117
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11413990A Pending JPH0410902A (en) | 1990-04-27 | 1990-04-27 | Production of green sheet |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0410902A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5262193A (en) * | 1991-10-15 | 1993-11-16 | Minnesota Mining And Manufacturing Company | Ultrasonically assisted coating method |
| AU663116B2 (en) * | 1991-10-15 | 1995-09-28 | Minnesota Mining And Manufacturing Company | Ultrasonically assisted coating apparatus and method |
| JP2001118743A (en) * | 1999-10-18 | 2001-04-27 | Murata Mfg Co Ltd | Device for manufacturing ceramic green sheet |
| US6692598B1 (en) * | 1999-10-18 | 2004-02-17 | Murata Manufacturing Co. Ltd | Method of producing ceramic green sheet and method of manufacturing multilayer ceramic electronic part |
-
1990
- 1990-04-27 JP JP11413990A patent/JPH0410902A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5262193A (en) * | 1991-10-15 | 1993-11-16 | Minnesota Mining And Manufacturing Company | Ultrasonically assisted coating method |
| US5376402A (en) * | 1991-10-15 | 1994-12-27 | Minnesota Mining And Manufacturing Company | Ultrasonically assisted coating method |
| AU663116B2 (en) * | 1991-10-15 | 1995-09-28 | Minnesota Mining And Manufacturing Company | Ultrasonically assisted coating apparatus and method |
| JP2001118743A (en) * | 1999-10-18 | 2001-04-27 | Murata Mfg Co Ltd | Device for manufacturing ceramic green sheet |
| US6692598B1 (en) * | 1999-10-18 | 2004-02-17 | Murata Manufacturing Co. Ltd | Method of producing ceramic green sheet and method of manufacturing multilayer ceramic electronic part |
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