JPH04102206A - Magnetic head - Google Patents
Magnetic headInfo
- Publication number
- JPH04102206A JPH04102206A JP21692190A JP21692190A JPH04102206A JP H04102206 A JPH04102206 A JP H04102206A JP 21692190 A JP21692190 A JP 21692190A JP 21692190 A JP21692190 A JP 21692190A JP H04102206 A JPH04102206 A JP H04102206A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- track width
- axis
- head
- width direction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 108
- 230000005415 magnetization Effects 0.000 claims abstract description 13
- 230000004907 flux Effects 0.000 claims abstract description 9
- 239000002184 metal Substances 0.000 claims description 17
- 239000010409 thin film Substances 0.000 abstract description 8
- 238000000137 annealing Methods 0.000 abstract description 5
- 239000010408 film Substances 0.000 description 17
- 230000000052 comparative effect Effects 0.000 description 4
- 230000035699 permeability Effects 0.000 description 4
- 238000004804 winding Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 230000001939 inductive effect Effects 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 229910000859 α-Fe Inorganic materials 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005294 ferromagnetic effect Effects 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、磁気ヘッド特に磁気コアの磁気ギャップ形成
面に高飽和磁束密度の軟磁性金属膜が被着形成されて成
るいわゆるM I G(Metal in Gap)型
磁気ヘッドに係わる。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a magnetic head, especially a so-called M It relates to a metal in gap (metal in gap) type magnetic head.
口発明の概要〕
本発明は磁気ギャップ形成面に、高飽和磁束密度の軟磁
性金属磁性膜が被着形成されて成る磁気ヘッドにおいて
、金属磁性膜にトラック幅方向に磁化容易軸を誘導して
記録及び再生出力特性の向上をはかる。Summary of the Invention The present invention provides a magnetic head in which a soft magnetic metal film with a high saturation magnetic flux density is adhered to a magnetic gap forming surface, in which an axis of easy magnetization is induced in the metal magnetic film in the track width direction. Aim to improve recording and playback output characteristics.
磁気ヘッドに用いられる磁性材には、高透磁率を有する
ことが要求される。そして、この高透磁率はMHz帯以
上の高周波において、磁化困難軸方向に磁路を形成する
ことによって得られることができることが知られている
。Magnetic materials used in magnetic heads are required to have high magnetic permeability. It is known that this high magnetic permeability can be obtained by forming a magnetic path in the direction of the hard magnetization axis at high frequencies of the MHz band or higher.
したがって、この磁性材の磁気異方性の大きさや、方向
を制御することで磁気ヘッドの電磁変換特性が大きく左
右される。Therefore, controlling the magnitude and direction of the magnetic anisotropy of this magnetic material greatly influences the electromagnetic conversion characteristics of the magnetic head.
例えば、特開昭62−139114号公開公報(資料1
)には、基板上に磁気抵抗効果(MR)型磁気ヘッドと
誘導型磁気ヘッドとが積層されたすなわち薄膜型の磁気
ヘッドにおいて両ヘッドのトラック幅方向、すなわち、
誘導型磁気ヘッドの薄膜ヨークについてもその膜面方向
に一軸異方性が発生するようにしてこれとほぼ直交する
膜面方向の磁束が通る方向を磁化困難軸方向として、高
周波帯域で高い透磁率を示すようにしてヘッドの記録効
率の向上をはかるものである。For example, JP-A-62-139114 (Document 1)
), in a thin film type magnetic head in which a magnetoresistive (MR) type magnetic head and an inductive type magnetic head are laminated on a substrate, the track width direction of both heads, that is,
The thin film yoke of the induction type magnetic head also has uniaxial anisotropy in the film surface direction, and the direction in which the magnetic flux passes in the film surface direction, which is almost orthogonal to this, is defined as the difficult magnetization axis direction, resulting in high magnetic permeability in the high frequency band. In this way, the recording efficiency of the head is improved.
更に、特開昭63−304414号公報(資料2)には
、強磁性薄膜と絶縁薄膜とを交互に積層した多層膜構造
のへラドコアによる磁気ヘッドにおいて、ヘッドコアの
磁化容易軸の方向をトラック幅方向と平行にして特性の
向上をはかるに、形状による反磁界係数が大なることに
よるトラック幅方向を磁化容易軸とすることの困難性を
、多層膜の積層面をテープ摺動面に対してトラック幅方
向に傾斜させることによって補償することの記載がある
。Furthermore, in JP-A-63-304414 (Document 2), in a magnetic head using a Herad core having a multilayer structure in which ferromagnetic thin films and insulating thin films are alternately laminated, the direction of the axis of easy magnetization of the head core is defined as the track width. In order to improve the characteristics by paralleling the direction, the difficulty of making the track width direction the axis of easy magnetization due to the large demagnetizing field coefficient due to the shape is to be avoided. There is a description of compensation by tilting in the track width direction.
しかしながら第2図に示すように、例えば高周波特性に
すぐれた磁性フェライト等より成る対の磁気コア(IA
)及び(IB)を互いに対向させ、これらの前方端面間
に形成される磁気ギャップgの形成面すなわちその前方
対向端面に高飽和磁束密度Bsを有する軟磁性金属磁性
膜(2)が形成されてなる磁気ヘッドいわゆるMIG磁
気ヘッドにおいては、その軟磁性金属磁性膜(2)に対
する磁路の方向が、前述した資料1及び2における薄膜
の磁気コアとは異なる態様を採ることから、例えば特開
平1−158606号公開公報(資料3)に示されるよ
うに、ギャップデプス方向に一軸異方性を誘導すること
で少くともその軟磁性金属磁性膜(2)に対して垂直方
向の透磁率の向上をはかるようにしたMIG型の磁気ヘ
ッドの提案がなされている。However, as shown in Figure 2, a pair of magnetic cores (IA
) and (IB) are opposed to each other, and a soft magnetic metal magnetic film (2) having a high saturation magnetic flux density Bs is formed on the surface where the magnetic gap g is formed between these front end surfaces, that is, on the front opposing end surfaces thereof. In the so-called MIG magnetic head, the direction of the magnetic path with respect to the soft magnetic metal magnetic film (2) is different from that of the thin film magnetic core in Documents 1 and 2 mentioned above. As shown in Publication No. 158606 (Document 3), by inducing uniaxial anisotropy in the gap depth direction, at least the magnetic permeability in the perpendicular direction to the soft magnetic metal magnetic film (2) can be improved. Proposals have been made for MIG-type magnetic heads that are capable of measuring magnetic fields.
しかしながら、この種磁気ヘッドにおいて必ずしも充分
その記録及び再生特性において周波数特性の改善がはか
るれなし)ことが究明された。However, it has been found that this type of magnetic head does not necessarily improve the frequency characteristics sufficiently in its recording and reproducing characteristics.
二発明が解決しようとする課題〕
本発明においては、上述したMIG型磁気ヘッドにおい
てその記録及び再生特性が安定して低域及び高域におい
て優れた特性を有するようにした磁気ヘッドを提供する
。2. Problems to be Solved by the Invention The present invention provides a magnetic head of the above-mentioned MIG type which has stable recording and reproducing characteristics and excellent characteristics in the low and high frequencies.
二課題を解決するための手段:
本発明においては、第1図にその路線的拡大斜視図を示
すように、磁気コア(1人)及び(IB)の磁気ギャッ
プgの形成面に高飽和磁束密度Bsを有する軟磁性金属
磁性膜(2)が被着形成されてなる磁気ヘッドにおいて
、その金属磁性膜(2)にトラック輻Tw方向に磁化容
易軸を誘導する。Means for Solving Two Problems: In the present invention, as shown in an enlarged perspective view of the line in FIG. In a magnetic head formed by adhering a soft magnetic metal magnetic film (2) having a density Bs, an axis of easy magnetization is induced in the metal magnetic film (2) in the track radiation Tw direction.
上述の本発明構成によれば、低域及び高域において優れ
た記録及び再生特性が得られることが確認された。According to the above-described configuration of the present invention, it has been confirmed that excellent recording and reproducing characteristics can be obtained in the low and high frequencies.
さらに、第1図を参照して本発明による磁気ヘッドの一
例を詳細に説明する。Further, an example of the magnetic head according to the present invention will be explained in detail with reference to FIG.
実施例1
例えば周波数特性の高いMn2nフェライトよりなり主
たる磁気コア(IA)及び(IB)の磁気ギャップgの
形成面に高飽和磁束密度Bsを有する例えばCo2r系
アモルファスのスパッタ膜による軟磁性金属磁性膜が被
着された構成を有する。このようにして磁気コア(IA
)及び(IB)が対向合体されて形成された磁気へラド
チップに対してこれを所要の磁界例えば4 kOe中で
そのギャップ長方向く磁気コア(IA)及び(IB)の
ギャップ形成面と直交する方向)に沿うチップの中央部
の第1図鎖線aで示す軸を中心として350℃の加熱下
で10分間回転させる方法による回転磁界中加熱アニー
ルいわゆるRFAによってまず磁気異方性を排除する。Example 1 A soft magnetic metal magnetic film made of, for example, a Co2r-based amorphous sputtered film and having a high saturation magnetic flux density Bs on the forming surface of the magnetic gap g of the main magnetic cores (IA) and (IB) made of Mn2n ferrite with high frequency characteristics. It has a structure in which it is coated with. In this way, the magnetic core (IA
) and (IB) are combined facing each other to form a magnetic herad tip, and this is applied in a required magnetic field, for example, 4 kOe, so that the gap length direction is orthogonal to the gap forming plane of the magnetic cores (IA) and (IB). First, magnetic anisotropy is eliminated by heating annealing in a rotating magnetic field, so-called RFA, by rotating the chip at 350° C. for 10 minutes around the axis indicated by the chain line a in FIG.
その後、トラック幅Tr方向に外部磁界を一致させた状
態で停止した静止磁界加熱アニールいわゆるSFAを2
10℃で30分間行ってトラック幅方向Tiv に磁化
容易軸を誘導する。After that, static magnetic field heating annealing (so-called SFA) is carried out for 2 times with the external magnetic field aligned in the direction of the track width Tr.
This is carried out at 10° C. for 30 minutes to induce an axis of easy magnetization in the track width direction Tiv.
このヘッドチップの両磁気コア(IA)及び(IB)に
はヘッド巻線(3)を巻装する。A head winding (3) is wound around both magnetic cores (IA) and (IB) of this head chip.
比較例1
実施例1と同様にRFA及びSFAによるものの、ギャ
ップデプス方向にSFAを行ってギャップデプス方向に
磁化容易軸を誘導した磁気ヘッドを構成した。Comparative Example 1 A magnetic head was constructed using RFA and SFA in the same manner as in Example 1, but SFA was performed in the gap depth direction to induce an axis of easy magnetization in the gap depth direction.
上述の実施例1及び比較例1による各ヘッドの記録及び
再生の出力特性を測定した。この場合、各磁気ヘッドは
、その磁気コア(IA)及び(IB)の高さすなわちヘ
ッドチップの高さlをl、 9mmとし、幅Wを2.0
mmとし、厚さtを200μmとし、トラック幅Twを
85μmとし、ギャップ長を0.257μmとし、ギャ
ップデプスを20μmとし、軟磁性金属磁性膜(2)の
厚さ(ギャップ長方向の厚さ)を8μmとした。そして
、これら磁気ヘッドを、金属薄膜型磁気テープを走行速
度6.9m/secをもって各実施例1及び比較例1の
ヘッドについてその記録及び再生出力特性の各周波数に
対して行った測定結果を表1に示す。この場合、アニー
ル処理をRFAのみを行ったものについての特性をO[
]Bとした。The recording and reproducing output characteristics of each head according to Example 1 and Comparative Example 1 described above were measured. In this case, each magnetic head has a height of its magnetic cores (IA) and (IB), that is, a head chip height l of 9 mm, and a width W of 2.0 mm.
mm, the thickness t is 200 μm, the track width Tw is 85 μm, the gap length is 0.257 μm, the gap depth is 20 μm, and the thickness of the soft magnetic metal magnetic film (2) (thickness in the gap length direction). was set to 8 μm. The results of measuring the recording and reproducing output characteristics of the heads of Example 1 and Comparative Example 1 at each frequency with a metal thin film magnetic tape running at a running speed of 6.9 m/sec are shown below. Shown in 1. In this case, the characteristics of the annealing treatment performed only by RFA are O[
] B.
これより明らかなように、ギャップデプス方向に磁化容
易軸を誘導した比較例1の磁気ヘッドに比し本発明によ
る磁気ヘッドは、その周波数特性が低域及び高域におい
て改善されていることがわかる。As is clear from this, the frequency characteristics of the magnetic head according to the present invention are improved in the low and high frequencies compared to the magnetic head of Comparative Example 1 in which the axis of easy magnetization was induced in the gap depth direction. .
本発明による磁気ヘッドは、複数個のへラドチップの磁
気コア(IA)及び(IB)を形成する対の例えばフェ
ライトよりなる磁性ブロックを設け、これらを互いに対
向合体し、この合体ブロックから複数のヘッドチップを
切り出して形成し得る。The magnetic head according to the present invention is provided with a pair of magnetic blocks made of ferrite, for example, which form the magnetic cores (IA) and (IB) of a plurality of Herad chips, and these blocks are combined to face each other, and a plurality of heads are formed from this combined block. Chips can be cut and formed.
各磁性ブロックの互いの対向面には予め各巻線溝(4)
を掘り込み更にその互し)の対向面にそれぞれ高飽和磁
束密度Bsの軟磁性金属磁性膜(2)例えばCoXr系
アモルファスを例えばスパッタによって被着形成しおく
。Each magnetic block has a winding groove (4) in advance on its opposing surface.
Further, a soft magnetic metal magnetic film (2) such as a CoXr-based amorphous film having a high saturation magnetic flux density Bs is deposited on the opposing surfaces of the two layers by sputtering, for example.
各磁性膜(2)は、これらを各ブロックに被着した状態
で前述したRFA及びS F Aを行うか、あるいは両
ブロックを合体して合体ブロックを形成して後に上述の
RFA及びSFAを行うか、更にまたはこの合体ブロッ
ク切断して各磁気へラドチップを形成して後に上述した
RFA及びSFAを行うか、いずれかの方法をも採り得
る。Each magnetic film (2) can be subjected to the above-mentioned RFA and SFA while being adhered to each block, or both blocks can be combined to form a combined block and then the above-mentioned RFA and SFA can be performed. Alternatively, the combined block may be cut to form each magnetic RAD tip, and then the above-mentioned RFA and SFA may be performed.
また第1図に示した例では、磁気記録媒体との対向面の
中央部にトラック幅Tw を規制する凸部を形成するよ
うにその創外側に切込み(21)を形成したものである
が、このような形状に限らず、種々の構成によることが
できる。Further, in the example shown in FIG. 1, a notch (21) is formed on the outside of the wound so as to form a convex portion regulating the track width Tw at the center of the surface facing the magnetic recording medium. The shape is not limited to this, and various configurations can be used.
上述したように本発明によれば、MIG型磁気ヘッドに
おいて、その高飽和磁束密度Bsを有する軟磁性金属磁
性膜(2)の特にトラック幅方向に磁化容易軸を誘導す
るようにしたことによって低域及び高域に対して再生記
録特性の向上がはかられる。As described above, according to the present invention, in the MIG type magnetic head, the axis of easy magnetization is induced particularly in the track width direction of the soft magnetic metal magnetic film (2) having a high saturation magnetic flux density Bs, thereby reducing the The playback/recording characteristics can be improved in the low and high ranges.
第1図は本発明による磁気ヘッドの一例の路線的拡大斜
視図、第2図は従来の磁気ヘッドの説明に供する斜視図
である。
(IA)及び(IB)は磁気コア、(2)は軟磁性金属
磁性膜、(3)はヘッド巻線、gは磁気ギャップである
。
石蘇1了 4着4鬼jJk木発8
月1=よる石鼓叡ヘットの−Rりの梁叫ネ見ロ第1図
代 理 人 松 隈 秀 盛第2図FIG. 1 is an enlarged perspective view of an example of a magnetic head according to the present invention, and FIG. 2 is a perspective view illustrating a conventional magnetic head. (IA) and (IB) are magnetic cores, (2) is a soft magnetic metal magnetic film, (3) is a head winding, and g is a magnetic gap. Sekiso 1 finish 4th place 4th Oni jJk Kiba 8th place
Month 1 = Yoru Ishizumi Ehet's - R's Liang Scream Nemiro Figure 1 Representative Rihito Matsu Kuma Hide Mori Figure 2
Claims (1)
磁性金属磁性膜が被着形成されて成る磁気ヘッドにおい
て、 上記金属磁性膜に、トラック幅方向に磁化容易軸を誘導
して成ることを特徴とする磁気ヘッド。[Claims] A magnetic head comprising a soft magnetic metal film with a high saturation magnetic flux density adhered to a magnetic gap forming surface of a magnetic core, wherein an axis of easy magnetization is induced in the metal magnetic film in the track width direction. A magnetic head characterized by comprising:
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2216921A JP3036020B2 (en) | 1990-08-17 | 1990-08-17 | Manufacturing method of magnetic head |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2216921A JP3036020B2 (en) | 1990-08-17 | 1990-08-17 | Manufacturing method of magnetic head |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH04102206A true JPH04102206A (en) | 1992-04-03 |
JP3036020B2 JP3036020B2 (en) | 2000-04-24 |
Family
ID=16696016
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2216921A Expired - Fee Related JP3036020B2 (en) | 1990-08-17 | 1990-08-17 | Manufacturing method of magnetic head |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3036020B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112048704A (en) * | 2020-08-13 | 2020-12-08 | 北京航空航天大学合肥创新研究院 | Integrated processing equipment for ultrathin multilayer film and application method |
-
1990
- 1990-08-17 JP JP2216921A patent/JP3036020B2/en not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112048704A (en) * | 2020-08-13 | 2020-12-08 | 北京航空航天大学合肥创新研究院 | Integrated processing equipment for ultrathin multilayer film and application method |
Also Published As
Publication number | Publication date |
---|---|
JP3036020B2 (en) | 2000-04-24 |
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---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |