JPH01158606A - Magnetic head and its manufacture - Google Patents
Magnetic head and its manufactureInfo
- Publication number
- JPH01158606A JPH01158606A JP62316621A JP31662187A JPH01158606A JP H01158606 A JPH01158606 A JP H01158606A JP 62316621 A JP62316621 A JP 62316621A JP 31662187 A JP31662187 A JP 31662187A JP H01158606 A JPH01158606 A JP H01158606A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- magnetic head
- head
- amorphous
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 5
- 238000010438 heat treatment Methods 0.000 claims abstract description 16
- 239000000758 substrate Substances 0.000 claims abstract description 9
- 239000000463 material Substances 0.000 claims abstract description 5
- 238000000034 method Methods 0.000 claims description 6
- 238000002425 crystallisation Methods 0.000 claims description 3
- 230000008025 crystallization Effects 0.000 claims description 3
- 238000000151 deposition Methods 0.000 claims 1
- 230000035699 permeability Effects 0.000 abstract description 12
- 230000004907 flux Effects 0.000 abstract description 3
- 230000001939 inductive effect Effects 0.000 abstract description 2
- 230000015556 catabolic process Effects 0.000 abstract 1
- 238000006731 degradation reaction Methods 0.000 abstract 1
- 239000000696 magnetic material Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 239000002184 metal Substances 0.000 description 3
- 238000004804 winding Methods 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 235000007173 Abies balsamea Nutrition 0.000 description 1
- 241000218685 Tsuga Species 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Magnetic Heads (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は非晶質軟磁性材料を用いた高密度磁気記録用磁
気ヘッドに関するものである。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a magnetic head for high-density magnetic recording using an amorphous soft magnetic material.
従来の技術
高記録密度を目ざした金属磁気記録媒体に対応した飽和
磁束密度B、の大きな非晶質軟磁性膜を用いた磁気ヘッ
ドは、磁性基板上に非晶質膜を形成し、これにコイル巻
線用窓やヘッドコアをガラス接合させる部分へのトラッ
ク加工等を行った後非磁性材料を介して、1対のコアを
接合することによって、作成してゆくことを、ヘッドの
基本構成としている。Conventional technology A magnetic head using an amorphous soft magnetic film with a large saturation magnetic flux density B, which is compatible with metal magnetic recording media aiming at high recording density, is made by forming an amorphous film on a magnetic substrate. The basic structure of the head is to create a pair of cores by joining a pair of cores through a non-magnetic material after performing track processing on the coil winding window and the part where the head core is joined to the glass. There is.
ここで、各種蒸着法で作成した非晶質膜については、そ
の透磁率を上げるための熱処理が必要であるが、この方
法としては、非晶質磁性材料のキュリー温度Tcと結晶
化温度Txとの関係が、Tc < Txの場合、無磁界
の通常の熱処理方法によって、Tc≦’rm(TX
なる温度Tmにおいて、熱処理を行うことで、透磁率の
向上が図れた。Here, amorphous films created by various vapor deposition methods require heat treatment to increase their magnetic permeability, but this method requires the Curie temperature Tc and crystallization temperature Tx of the amorphous magnetic material to be When the relationship Tc < Tx, Tc≦'rm(TX
By performing the heat treatment at the temperature Tm, the magnetic permeability was improved.
発明が解決しようとする問題点
しかし、さらに高密度記録化の要求から、さらに抗磁力
の大きな金属磁性媒体に対応させたより大きなりS値を
もつ非晶質材料の場合、Bs値の増加とともに、通常T
c値も犬きくなシ、例えば従来のFe−5ニ一人e合金
コア材料に匹敵するBs= 10 Gauss を有
するほとんどの非晶質膜については、TO”:) TX
なる関係に反転するため、上記のようなTo以上の熱処
理は非晶質膜の結晶化をともなうため、不可能である。Problems to be Solved by the Invention However, due to the demand for higher density recording, in the case of an amorphous material with a larger S value that corresponds to a metal magnetic medium with a higher coercive force, as the Bs value increases, Normal T
For most amorphous films with c-values that are too small, e.g.
Therefore, the above-mentioned heat treatment at a temperature higher than To is impossible because it involves crystallization of the amorphous film.
この場合、非晶質膜のTx以下の温度Tム(Tム< T
x )において、回転磁界中、熱処理により膜の透磁率
の向上を図るのが一般的であった。In this case, the temperature Tm below Tx of the amorphous film (Tm<T
x), it was common to improve the magnetic permeability of the film by heat treatment in a rotating magnetic field.
しかしながら、磁気へラドチップの構成において、磁気
へラドギャップ付近のような微細な形状をもった部分に
おいては、反磁界効果のだめ外部印加磁界が有効にはた
らかず、この部分に十分な回転磁界を作用させるには、
極めて大きな外部磁界が必要であるという不都合を生じ
るため、通常の磁界の大きさ(〜1KOθまで)の外部
磁界中での熱処理では、特にこの部分でのヘッド中の非
晶質の透磁率の向上が困難で、実際、このような高Bs
でTo ) TXの非晶質膜を用いて、回転磁界中で熱
処理をしながら作製した磁気へソドコアは、そのヘッド
出力が、不十分なものが多かった。However, in the structure of the magnetic herad chip, in areas with minute shapes such as near the magnetic herad gap, the externally applied magnetic field does not work effectively due to the demagnetizing field effect, and a sufficient rotating magnetic field is applied to this area. To let
Due to the disadvantage of requiring an extremely large external magnetic field, heat treatment in an external magnetic field of normal magnetic field magnitude (up to ~1 KOθ) will not improve the permeability of the amorphous material in the head, especially in this region. In fact, such high Bs
Many of the magnetic hemlock cores fabricated using an amorphous TX film while undergoing heat treatment in a rotating magnetic field had insufficient head output.
本発明は、上記のような高Bs値を有し、TO’) T
Xな関係にある非晶質を有する磁気ヘッドの作製の際、
該非晶質膜の透磁率向上を図る回転磁界中熱処理による
工法の欠点を改善し、通常の磁界の大きさ(〜1KOe
まで)の外部磁界によって、十分な特性を得られるため
の磁気ヘッド、及びその製造方法を提供するものである
。The present invention has a high Bs value as described above, and TO') T
When producing a magnetic head having an amorphous substance having an X relationship,
We improved the drawbacks of the method of heat treatment in a rotating magnetic field to improve the magnetic permeability of the amorphous film, and we
The present invention provides a magnetic head capable of obtaining sufficient characteristics by an external magnetic field (up to 1), and a method for manufacturing the same.
問題点を解決するだめの手段
この目的を達成するため、磁気ヘッドのギャップデプス
方向に相当する非晶質膜面内へ、固定磁界中熱処理によ
って一軸異方性を誘導させるものである。Means to Solve the Problem In order to achieve this objective, uniaxial anisotropy is induced in the amorphous film plane corresponding to the gap depth direction of the magnetic head by heat treatment in a fixed magnetic field.
作用
非晶質膜面内の磁気ヘッドのギャップデプスに相当する
方向へ一軸異方性を誘導することで、少なくとも該非晶
質膜に対して垂直方向の透磁率の向上を図ることができ
、従来の回転磁界中熱処理による工法のへラドギャップ
付近の透磁率の低下を防ぐことができ、その結果として
磁性基板を含めた磁気ヘッドコア全体の効率を改善でき
る。By inducing uniaxial anisotropy in the direction corresponding to the gap depth of the magnetic head in the plane of the working amorphous film, it is possible to improve the magnetic permeability at least in the direction perpendicular to the amorphous film. It is possible to prevent a decrease in magnetic permeability near the herad gap in the method using heat treatment in a rotating magnetic field, and as a result, the efficiency of the entire magnetic head core including the magnetic substrate can be improved.
実施例
以下、本発明の一実施例における磁気ヘッドについて図
面を参照して説明する。Embodiment A magnetic head according to an embodiment of the present invention will be described below with reference to the drawings.
第1図aは本発明の一実施例における磁気ヘッドの製造
方法を示す図、同図すは同磁気ヘッドの斜視図である。FIG. 1a is a diagram showing a method of manufacturing a magnetic head according to an embodiment of the present invention, and is a perspective view of the same magnetic head.
高記録密度を目ざした金属磁気記録媒体に対応した飽和
磁束密度BSの大きな非晶質軟磁性膜を用いた磁気ヘッ
ドは例えば第1図へに示しだように磁性基板1上に非晶
質磁性膜2を形成し、コイル巻線用窓3やヘッドコアを
ガラス接合させる部分4へのトラック加工等を行った後
、コア7の非晶質膜2の上に形成された非磁性材料6を
形成し、コア6、了を接合し、所定の箇所で切断し、1
個の磁気ヘッドを得るものである。For example, as shown in FIG. 1, a magnetic head using an amorphous soft magnetic film with a large saturation magnetic flux density BS, which is compatible with metal magnetic recording media aiming at high recording density, has an amorphous magnetic film on a magnetic substrate 1. After forming the film 2 and performing track processing on the coil winding window 3 and the portion 4 where the head core is glass-bonded, a non-magnetic material 6 is formed on the amorphous film 2 of the core 7. Then, join the core 6 and the end, cut it at the predetermined place, and
magnetic heads.
第1図すはその斜視図である。FIG. 1 is a perspective view thereof.
本発明においては、非晶質膜2を磁性基板1に形成後、
予め磁気ヘッドの完成時のギャップデプス方向に相当す
る方向へ、固定磁界中熱処理を行いその後のヘッド加工
熱処理(コア接合、ガラスモールド、ヘッドギャップ接
着等)についても上記と同方向の処理を行うものである
。In the present invention, after forming the amorphous film 2 on the magnetic substrate 1,
Heat treatment is performed in a fixed magnetic field in advance in a direction corresponding to the gap depth direction when the magnetic head is completed, and subsequent head processing heat treatment (core bonding, glass molding, head gap adhesion, etc.) is performed in the same direction as above. It is.
第2図の曲線aは本発明に従って、デジタルオーディオ
用テープレコーダとして、C066T亀8Hf4非晶質
膜(TQ)T)(:525°C)を用イテ磁気ヘッドの
ギャップデプス方向に一軸異方性を誘導して得られた磁
気ヘッド特性を示したものである(固定磁界、 Heχ
〜f KOθ)。なお、第2図の曲線すは従来の回転磁
界中熱処理による方法を用いて作成した同型、同材料の
磁気ヘッド特性図である。Curve a in FIG. 2 shows uniaxial anisotropy in the gap depth direction of a magnetic head using a C066TK8Hf4 amorphous film (TQ) (: 525°C) as a digital audio tape recorder according to the present invention. (fixed magnetic field, Heχ
~fKOθ). The curved line in FIG. 2 is a characteristic diagram of a magnetic head of the same type and material prepared using a conventional method of heat treatment in a rotating magnetic field.
第2図かられかるように従来のものについては、ギャッ
プ付近の透磁率の劣化と思われる原因で、ヘッド特性と
して不十分でちるが、本発明の磁気ヘッドについては低
域、高域ともより良好なヘッド出力が得られた。As can be seen from Figure 2, the conventional magnetic head has insufficient head characteristics due to what appears to be deterioration of magnetic permeability near the gap, but the magnetic head of the present invention has better performance in both low and high frequencies. Good head output was obtained.
発明の効果
以上のように本発明によれば、高BsでTc>Tzの関
係にある軟磁性非晶質膜を含む磁気ヘッドであっても、
ヘッドギャップ付近の透磁率の劣化の少ない十分なヘッ
ド出力を得ることができる。Effects of the Invention As described above, according to the present invention, even in a magnetic head including a soft magnetic amorphous film with a high Bs and a relationship of Tc>Tz,
Sufficient head output can be obtained with less deterioration of magnetic permeability near the head gap.
第1図aは本発明の一実施例における磁気ヘッドの製造
方法を示す図、同図すは同磁気ヘッドの斜視図、第2図
は本発明の磁気ヘッドと従来の磁気ヘッドの周波数特性
図である。
1・・・・・・磁性基板、2・・・・・・非晶質膜、3
・・・・・・コイル巻線用窓、6・・・・・・非磁性材
料。
代理人の氏名 弁理士 中 尾 敏 男 ほか1名第1
図
1−磁+■FIG. 1a is a diagram showing a method of manufacturing a magnetic head according to an embodiment of the present invention, the same figure is a perspective view of the same magnetic head, and FIG. 2 is a frequency characteristic diagram of the magnetic head of the present invention and a conventional magnetic head. It is. 1...Magnetic substrate, 2...Amorphous film, 3
... Window for coil winding, 6 ... Non-magnetic material. Name of agent: Patent attorney Toshio Nakao and 1 other person No. 1
Figure 1 - Magnetic +■
Claims (3)
板表面を磁気ギャップとなる非磁性層を介して接合する
磁気ヘッドコアであって、前記非晶質面内に磁気ヘッド
コアの磁気ギャップ前面に対して、ギャップデプス方向
に一軸異方性を誘導したことを特徴とする磁気ヘッド。(1) A magnetic head core in which the surfaces of two substrates each having an amorphous soft magnetic film deposited on the magnetic substrate are joined via a non-magnetic layer serving as a magnetic gap, wherein the magnetic head core has a magnetic field within the amorphous surface. A magnetic head characterized in that uniaxial anisotropy is induced in the gap depth direction with respect to the front surface of the gap.
料であることを特徴とする特許請求の範囲第1項記載の
磁気ヘッド。(2) The magnetic head according to claim 1, wherein the amorphous film is made of a material whose Curie temperature is higher than the crystallization temperature.
ド完成時のギャップデプス方向に相当する方向へ固定磁
界中熱処理を行うとともに、その後のヘッド加工熱処理
も、同方向への磁界中熱処理により作成することを特徴
とする磁気ヘッドの製造方法。(3) After depositing the amorphous film on the magnetic substrate, heat treatment is performed in advance in a fixed magnetic field in a direction corresponding to the gap depth direction when the magnetic head is completed, and the subsequent head processing heat treatment is also performed in a magnetic field in the same direction. A method for manufacturing a magnetic head, characterized in that the magnetic head is manufactured by medium heat treatment.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62316621A JP2529313B2 (en) | 1987-12-15 | 1987-12-15 | Magnetic head |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62316621A JP2529313B2 (en) | 1987-12-15 | 1987-12-15 | Magnetic head |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01158606A true JPH01158606A (en) | 1989-06-21 |
JP2529313B2 JP2529313B2 (en) | 1996-08-28 |
Family
ID=18079095
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62316621A Expired - Fee Related JP2529313B2 (en) | 1987-12-15 | 1987-12-15 | Magnetic head |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2529313B2 (en) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62209702A (en) * | 1986-03-10 | 1987-09-14 | Canon Electronics Inc | Manufacture of magnetic head |
JPS62266709A (en) * | 1986-05-13 | 1987-11-19 | Sanyo Electric Co Ltd | Production of magnetic head |
-
1987
- 1987-12-15 JP JP62316621A patent/JP2529313B2/en not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62209702A (en) * | 1986-03-10 | 1987-09-14 | Canon Electronics Inc | Manufacture of magnetic head |
JPS62266709A (en) * | 1986-05-13 | 1987-11-19 | Sanyo Electric Co Ltd | Production of magnetic head |
Also Published As
Publication number | Publication date |
---|---|
JP2529313B2 (en) | 1996-08-28 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |