JPH0399432U - - Google Patents
Info
- Publication number
- JPH0399432U JPH0399432U JP705390U JP705390U JPH0399432U JP H0399432 U JPH0399432 U JP H0399432U JP 705390 U JP705390 U JP 705390U JP 705390 U JP705390 U JP 705390U JP H0399432 U JPH0399432 U JP H0399432U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- fork
- prevention plate
- entrainment prevention
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 claims description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 8
- 239000007789 gas Substances 0.000 claims description 7
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 6
- 239000001301 oxygen Substances 0.000 claims description 6
- 229910052760 oxygen Inorganic materials 0.000 claims description 6
- 230000002265 prevention Effects 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP705390U JPH0399432U (enExample) | 1990-01-30 | 1990-01-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP705390U JPH0399432U (enExample) | 1990-01-30 | 1990-01-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0399432U true JPH0399432U (enExample) | 1991-10-17 |
Family
ID=31510715
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP705390U Pending JPH0399432U (enExample) | 1990-01-30 | 1990-01-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0399432U (enExample) |
-
1990
- 1990-01-30 JP JP705390U patent/JPH0399432U/ja active Pending