JPS6384932U - - Google Patents
Info
- Publication number
- JPS6384932U JPS6384932U JP18072486U JP18072486U JPS6384932U JP S6384932 U JPS6384932 U JP S6384932U JP 18072486 U JP18072486 U JP 18072486U JP 18072486 U JP18072486 U JP 18072486U JP S6384932 U JPS6384932 U JP S6384932U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- recess
- quartz plate
- semiconductor substrate
- claw
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 7
- 239000010453 quartz Substances 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 3
- 210000000078 claw Anatomy 0.000 claims description 2
- 238000001947 vapour-phase growth Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986180724U JPH0635465Y2 (ja) | 1986-11-25 | 1986-11-25 | 気相成長用基板固定治具 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986180724U JPH0635465Y2 (ja) | 1986-11-25 | 1986-11-25 | 気相成長用基板固定治具 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6384932U true JPS6384932U (enExample) | 1988-06-03 |
| JPH0635465Y2 JPH0635465Y2 (ja) | 1994-09-14 |
Family
ID=31124940
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986180724U Expired - Lifetime JPH0635465Y2 (ja) | 1986-11-25 | 1986-11-25 | 気相成長用基板固定治具 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0635465Y2 (enExample) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60234314A (ja) * | 1984-05-07 | 1985-11-21 | Agency Of Ind Science & Technol | ウエハ保持構造 |
-
1986
- 1986-11-25 JP JP1986180724U patent/JPH0635465Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60234314A (ja) * | 1984-05-07 | 1985-11-21 | Agency Of Ind Science & Technol | ウエハ保持構造 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0635465Y2 (ja) | 1994-09-14 |