JPH01135731U - - Google Patents
Info
- Publication number
- JPH01135731U JPH01135731U JP3075088U JP3075088U JPH01135731U JP H01135731 U JPH01135731 U JP H01135731U JP 3075088 U JP3075088 U JP 3075088U JP 3075088 U JP3075088 U JP 3075088U JP H01135731 U JPH01135731 U JP H01135731U
- Authority
- JP
- Japan
- Prior art keywords
- motherboard
- lid
- accommodates
- covered
- open end
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 2
- 239000000428 dust Substances 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Packaging Frangible Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3075088U JPH01135731U (enExample) | 1988-03-08 | 1988-03-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3075088U JPH01135731U (enExample) | 1988-03-08 | 1988-03-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01135731U true JPH01135731U (enExample) | 1989-09-18 |
Family
ID=31256089
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3075088U Pending JPH01135731U (enExample) | 1988-03-08 | 1988-03-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01135731U (enExample) |
-
1988
- 1988-03-08 JP JP3075088U patent/JPH01135731U/ja active Pending