JPH0399431U - - Google Patents

Info

Publication number
JPH0399431U
JPH0399431U JP765690U JP765690U JPH0399431U JP H0399431 U JPH0399431 U JP H0399431U JP 765690 U JP765690 U JP 765690U JP 765690 U JP765690 U JP 765690U JP H0399431 U JPH0399431 U JP H0399431U
Authority
JP
Japan
Prior art keywords
wafer
cover
spinner head
showing
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP765690U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP765690U priority Critical patent/JPH0399431U/ja
Publication of JPH0399431U publication Critical patent/JPH0399431U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP765690U 1990-01-30 1990-01-30 Pending JPH0399431U (US20110009641A1-20110113-C00185.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP765690U JPH0399431U (US20110009641A1-20110113-C00185.png) 1990-01-30 1990-01-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP765690U JPH0399431U (US20110009641A1-20110113-C00185.png) 1990-01-30 1990-01-30

Publications (1)

Publication Number Publication Date
JPH0399431U true JPH0399431U (US20110009641A1-20110113-C00185.png) 1991-10-17

Family

ID=31511311

Family Applications (1)

Application Number Title Priority Date Filing Date
JP765690U Pending JPH0399431U (US20110009641A1-20110113-C00185.png) 1990-01-30 1990-01-30

Country Status (1)

Country Link
JP (1) JPH0399431U (US20110009641A1-20110113-C00185.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007016439A (ja) * 2005-07-06 2007-01-25 Aiko Kk 誘導標識

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS544936A (en) * 1977-06-14 1979-01-16 Nat Jutaku Kenzai Rotary coating method of viscous material and apparatus therefor
JPS5412670A (en) * 1977-06-30 1979-01-30 Matsushita Electric Ind Co Ltd Viscous agnent coating device
JPS60143871A (ja) * 1983-12-28 1985-07-30 Toshiba Corp レジスト塗布装置
JPH01264223A (ja) * 1988-04-15 1989-10-20 Hitachi Ltd レジスト塗布装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS544936A (en) * 1977-06-14 1979-01-16 Nat Jutaku Kenzai Rotary coating method of viscous material and apparatus therefor
JPS5412670A (en) * 1977-06-30 1979-01-30 Matsushita Electric Ind Co Ltd Viscous agnent coating device
JPS60143871A (ja) * 1983-12-28 1985-07-30 Toshiba Corp レジスト塗布装置
JPH01264223A (ja) * 1988-04-15 1989-10-20 Hitachi Ltd レジスト塗布装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007016439A (ja) * 2005-07-06 2007-01-25 Aiko Kk 誘導標識

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