JPH039824Y2 - - Google Patents
Info
- Publication number
- JPH039824Y2 JPH039824Y2 JP8908386U JP8908386U JPH039824Y2 JP H039824 Y2 JPH039824 Y2 JP H039824Y2 JP 8908386 U JP8908386 U JP 8908386U JP 8908386 U JP8908386 U JP 8908386U JP H039824 Y2 JPH039824 Y2 JP H039824Y2
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- mounting table
- air cylinder
- cleaned
- counter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004140 cleaning Methods 0.000 claims description 94
- 239000007788 liquid Substances 0.000 claims description 33
- 238000001514 detection method Methods 0.000 claims description 32
- 230000000694 effects Effects 0.000 description 7
- 239000000428 dust Substances 0.000 description 4
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 4
- 239000012530 fluid Substances 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8908386U JPH039824Y2 (enExample) | 1986-06-10 | 1986-06-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8908386U JPH039824Y2 (enExample) | 1986-06-10 | 1986-06-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62199188U JPS62199188U (enExample) | 1987-12-18 |
| JPH039824Y2 true JPH039824Y2 (enExample) | 1991-03-12 |
Family
ID=30947745
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8908386U Expired JPH039824Y2 (enExample) | 1986-06-10 | 1986-06-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH039824Y2 (enExample) |
-
1986
- 1986-06-10 JP JP8908386U patent/JPH039824Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62199188U (enExample) | 1987-12-18 |
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