JPH03965B2 - - Google Patents

Info

Publication number
JPH03965B2
JPH03965B2 JP5012883A JP5012883A JPH03965B2 JP H03965 B2 JPH03965 B2 JP H03965B2 JP 5012883 A JP5012883 A JP 5012883A JP 5012883 A JP5012883 A JP 5012883A JP H03965 B2 JPH03965 B2 JP H03965B2
Authority
JP
Japan
Prior art keywords
chamber
vacuum
vacuum source
pilot valve
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5012883A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59175832A (ja
Inventor
Tooru Takeuchi
Junichi Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Orion Machinery Co Ltd
Original Assignee
Orion Machinery Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Orion Machinery Co Ltd filed Critical Orion Machinery Co Ltd
Priority to JP5012883A priority Critical patent/JPS59175832A/ja
Publication of JPS59175832A publication Critical patent/JPS59175832A/ja
Publication of JPH03965B2 publication Critical patent/JPH03965B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Control Of Fluid Pressure (AREA)
  • Compression-Type Refrigeration Machines With Reversible Cycles (AREA)
JP5012883A 1983-03-24 1983-03-24 真空調整器 Granted JPS59175832A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5012883A JPS59175832A (ja) 1983-03-24 1983-03-24 真空調整器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5012883A JPS59175832A (ja) 1983-03-24 1983-03-24 真空調整器

Publications (2)

Publication Number Publication Date
JPS59175832A JPS59175832A (ja) 1984-10-04
JPH03965B2 true JPH03965B2 (enExample) 1991-01-09

Family

ID=12850491

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5012883A Granted JPS59175832A (ja) 1983-03-24 1983-03-24 真空調整器

Country Status (1)

Country Link
JP (1) JPS59175832A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5747375B2 (ja) * 2010-09-08 2015-07-15 オリオン機械株式会社 真空調整器

Also Published As

Publication number Publication date
JPS59175832A (ja) 1984-10-04

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