JPH0396356U - - Google Patents

Info

Publication number
JPH0396356U
JPH0396356U JP340190U JP340190U JPH0396356U JP H0396356 U JPH0396356 U JP H0396356U JP 340190 U JP340190 U JP 340190U JP 340190 U JP340190 U JP 340190U JP H0396356 U JPH0396356 U JP H0396356U
Authority
JP
Japan
Prior art keywords
melt surface
telescope
silicon
height
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP340190U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP340190U priority Critical patent/JPH0396356U/ja
Publication of JPH0396356U publication Critical patent/JPH0396356U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP340190U 1990-01-18 1990-01-18 Pending JPH0396356U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP340190U JPH0396356U (enExample) 1990-01-18 1990-01-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP340190U JPH0396356U (enExample) 1990-01-18 1990-01-18

Publications (1)

Publication Number Publication Date
JPH0396356U true JPH0396356U (enExample) 1991-10-02

Family

ID=31507223

Family Applications (1)

Application Number Title Priority Date Filing Date
JP340190U Pending JPH0396356U (enExample) 1990-01-18 1990-01-18

Country Status (1)

Country Link
JP (1) JPH0396356U (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008096518A1 (ja) * 2007-02-08 2008-08-14 Shin-Etsu Handotai Co., Ltd. 遮熱部材下端面と原料融液面との間の距離の測定方法、及びその距離の制御方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008096518A1 (ja) * 2007-02-08 2008-08-14 Shin-Etsu Handotai Co., Ltd. 遮熱部材下端面と原料融液面との間の距離の測定方法、及びその距離の制御方法
JP2008195545A (ja) * 2007-02-08 2008-08-28 Shin Etsu Handotai Co Ltd 遮熱部材下端面と原料融液面との間の距離の測定方法、及びその距離の制御方法
US9260796B2 (en) 2007-02-08 2016-02-16 Shin-Etsu Handotai Co., Ltd. Method for measuring distance between lower end surface of heat insulating member and surface of raw material melt and method for controlling thereof

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