JPH039623B2 - - Google Patents

Info

Publication number
JPH039623B2
JPH039623B2 JP60178226A JP17822685A JPH039623B2 JP H039623 B2 JPH039623 B2 JP H039623B2 JP 60178226 A JP60178226 A JP 60178226A JP 17822685 A JP17822685 A JP 17822685A JP H039623 B2 JPH039623 B2 JP H039623B2
Authority
JP
Japan
Prior art keywords
probe card
probe
light
printed wiring
card body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60178226A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6237940A (ja
Inventor
Masao Ookubo
Yasuyoshi Yoshimitsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Electronic Materials Corp
Original Assignee
Japan Electronic Materials Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Electronic Materials Corp filed Critical Japan Electronic Materials Corp
Priority to JP60178226A priority Critical patent/JPS6237940A/ja
Publication of JPS6237940A publication Critical patent/JPS6237940A/ja
Publication of JPH039623B2 publication Critical patent/JPH039623B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
JP60178226A 1985-08-12 1985-08-12 プロ−ブカ−ド Granted JPS6237940A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60178226A JPS6237940A (ja) 1985-08-12 1985-08-12 プロ−ブカ−ド

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60178226A JPS6237940A (ja) 1985-08-12 1985-08-12 プロ−ブカ−ド

Publications (2)

Publication Number Publication Date
JPS6237940A JPS6237940A (ja) 1987-02-18
JPH039623B2 true JPH039623B2 (de) 1991-02-08

Family

ID=16044795

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60178226A Granted JPS6237940A (ja) 1985-08-12 1985-08-12 プロ−ブカ−ド

Country Status (1)

Country Link
JP (1) JPS6237940A (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999040449A1 (fr) * 1998-02-05 1999-08-12 Advantest Corporation Circuit d'attaque excite optiquement, detecteur de tension de type a sortie optique et materiel de test de circuits integres utilisant ces dispositifs
GB2340233A (en) * 1998-02-05 2000-02-16 Advantest Corp Current measuring method,current sensor,and IC tester using the same current sensor
JP5230280B2 (ja) * 2008-06-16 2013-07-10 新光電気工業株式会社 プローブカード及び回路試験装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5149688A (de) * 1974-10-25 1976-04-30 Seiko Instr & Electronics
JPS5340192A (en) * 1976-09-24 1978-04-12 Toshiba Corp Separate type protection device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5149688A (de) * 1974-10-25 1976-04-30 Seiko Instr & Electronics
JPS5340192A (en) * 1976-09-24 1978-04-12 Toshiba Corp Separate type protection device

Also Published As

Publication number Publication date
JPS6237940A (ja) 1987-02-18

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees