JPH0396034U - - Google Patents

Info

Publication number
JPH0396034U
JPH0396034U JP555090U JP555090U JPH0396034U JP H0396034 U JPH0396034 U JP H0396034U JP 555090 U JP555090 U JP 555090U JP 555090 U JP555090 U JP 555090U JP H0396034 U JPH0396034 U JP H0396034U
Authority
JP
Japan
Prior art keywords
spin chuck
substrate
developer
section
developing device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP555090U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP555090U priority Critical patent/JPH0396034U/ja
Publication of JPH0396034U publication Critical patent/JPH0396034U/ja
Pending legal-status Critical Current

Links

JP555090U 1990-01-23 1990-01-23 Pending JPH0396034U (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP555090U JPH0396034U (enrdf_load_html_response) 1990-01-23 1990-01-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP555090U JPH0396034U (enrdf_load_html_response) 1990-01-23 1990-01-23

Publications (1)

Publication Number Publication Date
JPH0396034U true JPH0396034U (enrdf_load_html_response) 1991-10-01

Family

ID=31509251

Family Applications (1)

Application Number Title Priority Date Filing Date
JP555090U Pending JPH0396034U (enrdf_load_html_response) 1990-01-23 1990-01-23

Country Status (1)

Country Link
JP (1) JPH0396034U (enrdf_load_html_response)

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