JPH0393189A - Manufacture of thin film el element - Google Patents

Manufacture of thin film el element

Info

Publication number
JPH0393189A
JPH0393189A JP22855289A JP22855289A JPH0393189A JP H0393189 A JPH0393189 A JP H0393189A JP 22855289 A JP22855289 A JP 22855289A JP 22855289 A JP22855289 A JP 22855289A JP H0393189 A JPH0393189 A JP H0393189A
Authority
JP
Japan
Prior art keywords
formed
emitter layer
el emitter
made
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP22855289A
Inventor
Shinichiro Hayashi
Koji Senda
Atsuya Yamamoto
Original Assignee
Matsushita Electron Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electron Corp filed Critical Matsushita Electron Corp
Priority to JP22855289A priority Critical patent/JPH0393189A/en
Publication of JPH0393189A publication Critical patent/JPH0393189A/en
Application status is Pending legal-status Critical

Links

Abstract

PURPOSE: To obtain a high-intensity thin film EL element by forming an EL emitter layer, then heat-treating the EL emitter layer.
CONSTITUTION: Stripe-shaped transparent electrodes 12 are formed on a translucent substrate 11, the first dielectric layer 13 made of Ta2O5 is formed on them, then an EL emitter layer 14 made of SrS:Ce and Sm is formed on it. A substrate is continuously heated without breaking vacuum after the EL emitter layer 14 is formed, then the EL emitter layer 14 is heat-treated for two hr or below at the substrate temperature 400-600°C to improve the crystallization of the EL emitter layer 14. The second dielectric layer 15 made of Al2O3 is formed, finally a metal conducting layer made of Al-Si or the like is formed, and stripe-shaped back electrodes 16 are formed so as to intersect with transparent electrodes 12. A high-intensity thin film EL element is obtained.
COPYRIGHT: (C)1991,JPO&Japio
JP22855289A 1989-09-04 1989-09-04 Manufacture of thin film el element Pending JPH0393189A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22855289A JPH0393189A (en) 1989-09-04 1989-09-04 Manufacture of thin film el element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22855289A JPH0393189A (en) 1989-09-04 1989-09-04 Manufacture of thin film el element

Publications (1)

Publication Number Publication Date
JPH0393189A true JPH0393189A (en) 1991-04-18

Family

ID=16878162

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22855289A Pending JPH0393189A (en) 1989-09-04 1989-09-04 Manufacture of thin film el element

Country Status (1)

Country Link
JP (1) JPH0393189A (en)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5667607A (en) * 1994-08-02 1997-09-16 Nippondenso Co., Ltd. Process for fabricating electroluminescent device
US8919605B2 (en) 2009-11-30 2014-12-30 Intuity Medical, Inc. Calibration material delivery devices and methods
US8969097B2 (en) 2005-06-13 2015-03-03 Intuity Medical, Inc. Analyte detection devices and methods with hematocrit-volume correction and feedback control
US9060723B2 (en) 2005-09-30 2015-06-23 Intuity Medical, Inc. Body fluid sampling arrangements
US9095292B2 (en) 2003-03-24 2015-08-04 Intuity Medical, Inc. Analyte concentration detection devices and methods
US9636051B2 (en) 2008-06-06 2017-05-02 Intuity Medical, Inc. Detection meter and mode of operation
US9782114B2 (en) 2011-08-03 2017-10-10 Intuity Medical, Inc. Devices and methods for body fluid sampling and analysis
US9833183B2 (en) 2008-05-30 2017-12-05 Intuity Medical, Inc. Body fluid sampling device—sampling site interface
US10330667B2 (en) 2010-06-25 2019-06-25 Intuity Medical, Inc. Analyte monitoring methods and systems
US10383556B2 (en) 2009-06-08 2019-08-20 Intuity Medical, Inc. Medical diagnostic devices and methods

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5667607A (en) * 1994-08-02 1997-09-16 Nippondenso Co., Ltd. Process for fabricating electroluminescent device
US9095292B2 (en) 2003-03-24 2015-08-04 Intuity Medical, Inc. Analyte concentration detection devices and methods
US8969097B2 (en) 2005-06-13 2015-03-03 Intuity Medical, Inc. Analyte detection devices and methods with hematocrit-volume correction and feedback control
US9366636B2 (en) 2005-06-13 2016-06-14 Intuity Medical, Inc. Analyte detection devices and methods with hematocrit/volume correction and feedback control
US10226208B2 (en) 2005-06-13 2019-03-12 Intuity Medical, Inc. Analyte detection devices and methods with hematocrit/volume correction and feedback control
US9380974B2 (en) 2005-09-30 2016-07-05 Intuity Medical, Inc. Multi-site body fluid sampling and analysis cartridge
US9060723B2 (en) 2005-09-30 2015-06-23 Intuity Medical, Inc. Body fluid sampling arrangements
US9839384B2 (en) 2005-09-30 2017-12-12 Intuity Medical, Inc. Body fluid sampling arrangements
US9833183B2 (en) 2008-05-30 2017-12-05 Intuity Medical, Inc. Body fluid sampling device—sampling site interface
US9636051B2 (en) 2008-06-06 2017-05-02 Intuity Medical, Inc. Detection meter and mode of operation
US10383556B2 (en) 2009-06-08 2019-08-20 Intuity Medical, Inc. Medical diagnostic devices and methods
US9897610B2 (en) 2009-11-30 2018-02-20 Intuity Medical, Inc. Calibration material delivery devices and methods
US8919605B2 (en) 2009-11-30 2014-12-30 Intuity Medical, Inc. Calibration material delivery devices and methods
US10330667B2 (en) 2010-06-25 2019-06-25 Intuity Medical, Inc. Analyte monitoring methods and systems
US9782114B2 (en) 2011-08-03 2017-10-10 Intuity Medical, Inc. Devices and methods for body fluid sampling and analysis

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