JPH0389167U - - Google Patents
Info
- Publication number
- JPH0389167U JPH0389167U JP14839589U JP14839589U JPH0389167U JP H0389167 U JPH0389167 U JP H0389167U JP 14839589 U JP14839589 U JP 14839589U JP 14839589 U JP14839589 U JP 14839589U JP H0389167 U JPH0389167 U JP H0389167U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- plated
- holder
- plating liquid
- jet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007747 plating Methods 0.000 claims description 10
- 235000012431 wafers Nutrition 0.000 claims description 10
- 239000004065 semiconductor Substances 0.000 claims description 8
- 239000007788 liquid Substances 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 4
- 230000008878 coupling Effects 0.000 claims description 3
- 238000010168 coupling process Methods 0.000 claims description 3
- 238000005859 coupling reaction Methods 0.000 claims description 3
- 238000009713 electroplating Methods 0.000 claims description 2
- 230000005611 electricity Effects 0.000 claims 1
- 238000005507 spraying Methods 0.000 claims 1
Landscapes
- Electroplating Methods And Accessories (AREA)
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14839589U JPH0389167U (enExample) | 1989-12-22 | 1989-12-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14839589U JPH0389167U (enExample) | 1989-12-22 | 1989-12-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0389167U true JPH0389167U (enExample) | 1991-09-11 |
Family
ID=31694847
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14839589U Pending JPH0389167U (enExample) | 1989-12-22 | 1989-12-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0389167U (enExample) |
-
1989
- 1989-12-22 JP JP14839589U patent/JPH0389167U/ja active Pending
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