JPH0388329U - - Google Patents
Info
- Publication number
- JPH0388329U JPH0388329U JP14981089U JP14981089U JPH0388329U JP H0388329 U JPH0388329 U JP H0388329U JP 14981089 U JP14981089 U JP 14981089U JP 14981089 U JP14981089 U JP 14981089U JP H0388329 U JPH0388329 U JP H0388329U
- Authority
- JP
- Japan
- Prior art keywords
- nozzle
- wafer
- rinsing mechanism
- resist film
- edge rinsing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002904 solvent Substances 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14981089U JPH0388329U (ro) | 1989-12-25 | 1989-12-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14981089U JPH0388329U (ro) | 1989-12-25 | 1989-12-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0388329U true JPH0388329U (ro) | 1991-09-10 |
Family
ID=31696185
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14981089U Pending JPH0388329U (ro) | 1989-12-25 | 1989-12-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0388329U (ro) |
-
1989
- 1989-12-25 JP JP14981089U patent/JPH0388329U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0388329U (ro) | ||
| JP2537611B2 (ja) | 塗布材料の塗布装置 | |
| KR950025907A (ko) | 반도체소자의 감광막 형성방법 | |
| JPS63159823U (ro) | ||
| JPS61188934A (ja) | レジスト除去装置 | |
| JPS6155336U (ro) | ||
| JPH01160831U (ro) | ||
| JPH0390431U (ro) | ||
| JPH0459938U (ro) | ||
| JPS61149331U (ro) | ||
| JPS62180947U (ro) | ||
| JPH0395633U (ro) | ||
| JPH0178025U (ro) | ||
| JPS59104533U (ja) | レジスト処理装置 | |
| JPS6351435U (ro) | ||
| JPH0575110B2 (ro) | ||
| JPH0273728U (ro) | ||
| JPS6236531U (ro) | ||
| KR950027996A (ko) | 웨이퍼 에지부의 감광막 제거방법 | |
| JPS636726U (ro) | ||
| JPH0328721U (ro) | ||
| JPS62132169U (ro) | ||
| JPH0270429U (ro) | ||
| JPH02146837U (ro) | ||
| JPH01164035A (ja) | 半導体製造装置 |