JPH0273728U - - Google Patents
Info
- Publication number
- JPH0273728U JPH0273728U JP15329988U JP15329988U JPH0273728U JP H0273728 U JPH0273728 U JP H0273728U JP 15329988 U JP15329988 U JP 15329988U JP 15329988 U JP15329988 U JP 15329988U JP H0273728 U JPH0273728 U JP H0273728U
- Authority
- JP
- Japan
- Prior art keywords
- resist
- resist coating
- supplying
- solvent
- supply means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 claims description 7
- 238000000576 coating method Methods 0.000 claims description 7
- 239000002904 solvent Substances 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15329988U JPH0273728U (ro) | 1988-11-25 | 1988-11-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15329988U JPH0273728U (ro) | 1988-11-25 | 1988-11-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0273728U true JPH0273728U (ro) | 1990-06-05 |
Family
ID=31429012
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15329988U Pending JPH0273728U (ro) | 1988-11-25 | 1988-11-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0273728U (ro) |
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1988
- 1988-11-25 JP JP15329988U patent/JPH0273728U/ja active Pending