JPH0388255U - - Google Patents

Info

Publication number
JPH0388255U
JPH0388255U JP14981189U JP14981189U JPH0388255U JP H0388255 U JPH0388255 U JP H0388255U JP 14981189 U JP14981189 U JP 14981189U JP 14981189 U JP14981189 U JP 14981189U JP H0388255 U JPH0388255 U JP H0388255U
Authority
JP
Japan
Prior art keywords
clamper
semiconductor wafer
wafer
wafer holder
disk
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14981189U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14981189U priority Critical patent/JPH0388255U/ja
Publication of JPH0388255U publication Critical patent/JPH0388255U/ja
Pending legal-status Critical Current

Links

JP14981189U 1989-12-25 1989-12-25 Pending JPH0388255U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14981189U JPH0388255U (enrdf_load_stackoverflow) 1989-12-25 1989-12-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14981189U JPH0388255U (enrdf_load_stackoverflow) 1989-12-25 1989-12-25

Publications (1)

Publication Number Publication Date
JPH0388255U true JPH0388255U (enrdf_load_stackoverflow) 1991-09-10

Family

ID=31696186

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14981189U Pending JPH0388255U (enrdf_load_stackoverflow) 1989-12-25 1989-12-25

Country Status (1)

Country Link
JP (1) JPH0388255U (enrdf_load_stackoverflow)

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