JPH0387359A - Metal evaporating device - Google Patents
Metal evaporating deviceInfo
- Publication number
- JPH0387359A JPH0387359A JP22147089A JP22147089A JPH0387359A JP H0387359 A JPH0387359 A JP H0387359A JP 22147089 A JP22147089 A JP 22147089A JP 22147089 A JP22147089 A JP 22147089A JP H0387359 A JPH0387359 A JP H0387359A
- Authority
- JP
- Japan
- Prior art keywords
- metal
- molten metal
- crucible
- melting
- floats
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 title claims abstract description 115
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 115
- 238000001704 evaporation Methods 0.000 title claims abstract description 7
- 238000002844 melting Methods 0.000 claims abstract description 21
- 230000008018 melting Effects 0.000 claims abstract description 20
- 239000007788 liquid Substances 0.000 claims abstract description 18
- 239000000956 alloy Substances 0.000 claims abstract description 7
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 7
- 230000008020 evaporation Effects 0.000 claims description 5
- 239000000203 mixture Substances 0.000 claims description 2
- 238000001883 metal evaporation Methods 0.000 claims 9
- 238000010438 heat treatment Methods 0.000 claims 3
- 150000001875 compounds Chemical class 0.000 claims 2
- 244000000626 Daucus carota Species 0.000 claims 1
- 235000005770 birds nest Nutrition 0.000 claims 1
- 235000005765 wild carrot Nutrition 0.000 claims 1
- 230000000694 effects Effects 0.000 abstract description 9
- 230000002401 inhibitory effect Effects 0.000 abstract 1
- 230000001629 suppression Effects 0.000 description 15
- 239000011159 matrix material Substances 0.000 description 14
- 238000010894 electron beam technology Methods 0.000 description 7
- 239000007790 solid phase Substances 0.000 description 7
- 230000005484 gravity Effects 0.000 description 6
- 239000000155 melt Substances 0.000 description 6
- 239000007791 liquid phase Substances 0.000 description 5
- 230000005855 radiation Effects 0.000 description 5
- 238000001816 cooling Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 230000017525 heat dissipation Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 241000255925 Diptera Species 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Crucibles And Fluidized-Bed Furnaces (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は高融点金属を溶融蒸発させる蒸気発生装置に用
いる、るつぼの構造、特にるつぼ内の対流を抑制する方
法に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to the structure of a crucible used in a steam generator for melting and vaporizing high-melting point metals, and particularly to a method for suppressing convection within the crucible.
本発明の公知例を第２図〜第４図に示す。 Known examples of the present invention are shown in FIGS. 2 to 4.
第２図はるつぼ内の溶融金属の対流抑制方法を講じない
場合を示す、溶融金属５は電子ビーム３で加熱されるが
るっぽｌは冷却配管２により冷却されているため電子ビ
ーム３の入射部との温度差により溶融金属内部には矢印
で示すような対流４が発生する、このため電子ビーム３
の入射部の高温に加熱された溶融金属が対流により移動
してるつぼのＡ部を加熱することになる。したがってる
つぼＡ部は溶融金属の熱と対流により攻撃されることに
なりこの部分が最も損傷を受けやすい部位であった。Figure 2 shows the case where no convection suppression method of the molten metal in the crucible is taken.The molten metal 5 is heated by the electron beam 3, but is cooled by the cooling pipe 2, so the electron beam 3 Convection 4 as shown by the arrow occurs inside the molten metal due to the temperature difference between the electron beam 3 and the incident part.
The molten metal heated to a high temperature at the entrance part moves by convection and heats part A of the crucible. Therefore, part A of the crucible was attacked by the heat and convection of the molten metal, and this part was most susceptible to damage.
第３図はるつぼの寿命を延ばすために対流を抑制してＡ
部に対する攻撃を弱めるよう溶融金属中に浮ぶ円環状な
いしは蚊取線香状の形状をした対流抑制マトリクス７を
溶融金属中に浮かせたものである。Figure 3 shows A by suppressing convection to extend the life of the crucible.
A convection suppression matrix 7 in the shape of an annular or mosquito coil floating in the molten metal is floated in the molten metal to weaken attacks on the parts.
第３図には更に効果的に対流を抑制するために溶融金属
１１の上方より対流抑制板９を溶融金属中へ差し入れた
ものである。In FIG. 3, a convection suppressing plate 9 is inserted into the molten metal from above the molten metal 11 in order to suppress convection more effectively.
第３図に示すような従来技術による実施例の場合は次の
ような問題点が有った。The prior art embodiment shown in FIG. 3 has the following problems.
１、対流抑制マトリクス７により対流は抑制されるが極
めて腐蝕性の強い金属を溶融する場合には対流抑制マト
リクス７が腐蝕性金属により腐蝕されて次第に効果が無
くなる、また腐蝕性の強い金属の他にも溶融金属と合金
を作り易い材料で対流抑制マトリクス７を作ると対流抑
制マトリクス７は溶融金属と合金を作りやはり同様に次
第に効果がなくなる。1. Convection is suppressed by the convection suppression matrix 7, but when melting extremely corrosive metals, the convection suppression matrix 7 will be corroded by the corrosive metal and gradually become ineffective. However, if the convection suppressing matrix 7 is made of a material that easily forms an alloy with the molten metal, the convection suppressing matrix 7 will form an alloy with the molten metal and similarly gradually become ineffective.
２、このような形状の対流抑制マトリクス７は対流は抑
制出来るが溶融金属８の液面を覆う面積が小さいため溶
融金属８表面からの輻射放熱を抑制することは出来ない
。2. Although the convection suppression matrix 7 having such a shape can suppress convection, it cannot suppress radiant heat dissipation from the surface of the molten metal 8 because its area covering the liquid surface of the molten metal 8 is small.
３、対流抑制マトリクス７はるつぼ中に入れて対流を抑
制する必要上相当の大きさをしており腐蝕したり、溶融
したりした場合も外部から簡単に補給することが出来な
い、またるつぼの形状により対流抑制マトリクス７の形
状は異なった物にする必要があり全てのるつぼ形状に対
し同じ形状の対流抑制マトリクス７を用いる訳にはいか
ない。3. The convection suppression matrix 7 needs to be placed in the crucible to suppress convection, so it has a considerable size, so even if it corrodes or melts, it cannot be easily replenished from the outside. The shape of the convection suppression matrix 7 needs to be different depending on the shape, and it is not possible to use the same shape of the convection suppression matrix 7 for all crucible shapes.
４、るつぼ中の金属が全て溶融していれば問題は無いが
対流抑制マトリクス７に触れている金属の内一部でも溶
融せず固相となった場合対流抑制マトリクス７は自由に
溶融金属中に浮くことが出来ず一部が過大に溶融金属液
面から突出したり、るつぼ底面の固相金属によりるつぼ
底面に拘束されたりして十分な対流抑制効果を発揮出来
ない場合がある。4. There is no problem if all the metal in the crucible is melted, but if any part of the metal touching the convection suppression matrix 7 does not melt and becomes a solid phase, the convection suppression matrix 7 freely melts into the molten metal. The molten metal may not be able to float, and a portion of the molten metal may excessively protrude from the surface of the molten metal, or may be restrained by the solid phase metal at the bottom of the crucible, resulting in a failure to exert a sufficient convection suppressing effect.
という問題点があった。There was a problem.
第４図に示す実施例の場合は対流抑制板９は溶融金属に
上方より差し込まれているので対流抑制板が消耗した場
合は上方より新しい対流抑制板を次々送り込めば容易に
補給出来るがその他の問題点は全て第３図に示す公知例
と同一である。In the case of the embodiment shown in Fig. 4, the convection suppressing plate 9 is inserted into the molten metal from above, so if the convection suppressing plate becomes worn out, it can be easily replenished by sending in new convection suppressing plates from above one after another. All problems are the same as those of the known example shown in FIG.
これら問題点を解決するため本発明においては従来のよ
うな大型の対流抑制マトリクスやるつぼ上部に固定され
た対流抑制板の代わりに溶融金属またはその合金などで
出来た互いに独立した任意形状の浮き子をるつぼ中の溶
融金属に浮かして対流抑制板、対流抑制マトリクスなど
の代わりとした物であり溶融金属の液面がいかに変動し
てもその効果が変わらず、部分溶融にも適用でき、消耗
した場合の補給も容易でありしかも輻射放熱を抑制する
ため熱効率が良いという特徴を有する。In order to solve these problems, in the present invention, instead of the conventional large convection suppressing matrix or convection suppressing plate fixed to the top of the crucible, mutually independent floats of arbitrary shapes made of molten metal or its alloy are used. It floats on molten metal in a crucible to replace convection suppression plates, convection suppression matrices, etc. No matter how much the liquid level of molten metal fluctuates, its effect remains the same, and it can also be applied to partial melting, and it can be used as a convection suppression plate or convection suppression matrix. It is easy to replenish when needed, and has good thermal efficiency because it suppresses radiant heat dissipation.
すなわち浮き子は溶融金属と同等かそれより高い融点を
有する材料で構成されまた比重を軽くするかあるいは浮
き子を中空にしたりスポンジ状にしたりして溶融金属の
液面に互いに独立にその一部を液面上に出して浮くよう
に構成されている、そうすれば浮き子は溶融金属の対流
により自然にるつぼの縁すなわち溶融金属液面の周辺部
に寄せられ浮き子の溶融液面下に沈んだ部分は対流が直
接るつぼに当るのを防ぐように働く。In other words, the float is made of a material with a melting point equal to or higher than that of the molten metal, and its specific gravity is reduced, or the float is made hollow or sponge-like so that parts of it can be placed independently on the surface of the molten metal. The float is constructed so that it floats on the surface of the liquid, and then the float is naturally brought to the edge of the crucible, that is, the periphery of the molten metal surface, by the convection of the molten metal, and the float is placed below the surface of the molten metal. The sunken part acts to prevent convection currents from directly hitting the crucible.
また浮き子は溶融金属の表面を広くおおうため溶融金属
表面からの輻射放熱が抑制され放熱率が向上する。Furthermore, since the float widely covers the surface of the molten metal, radiant heat radiation from the molten metal surface is suppressed and the heat radiation rate is improved.
本発明の実施例を第１図に示す。冷却管３４を有するる
つぼ３３には蒸発させるための溶融金属３９が貯えられ
リニア型電子銃３１より発生するリニア電子ビーム３２
がるつぼ中央部に着点し極めて高温の蒸発部３５を形威
しこの部分より金属蒸気が上方に向かって発生する、溶
融金属３９の液面は蒸発部３５の付近を除きそのほとん
どを浮き子３６により覆われている、本実施例では浮き
子３６は蒸発金属と同じ成分のものを用いており蒸発に
より失われた溶融金属は補給用浮き子３８として浮き子
供給樋３７を通って供給される、すなわち本実施例の場
合浮き子３６はスポンジ状浮き子であり溶融した金属よ
りもそのかさ比重が小さいため溶融するまでの間は溶融
金属表面に浮いておりその間るつぼ中の対流を抑制した
り溶融表面からの放熱を抑制する役割を果す。An embodiment of the invention is shown in FIG. A crucible 33 having a cooling pipe 34 stores molten metal 39 to be evaporated, and a linear electron beam 32 is generated from a linear electron gun 31.
The melt reaches the center of the crucible and forms an extremely high-temperature evaporator 35, from which metal vapor is generated upwards.Most of the liquid surface of the molten metal 39, except near the evaporator 35, is floating In this embodiment, the float 36 is made of the same composition as the evaporated metal, and the molten metal lost due to evaporation is supplied as a replenishment float 38 through the float supply trough 37. That is, in the case of this embodiment, the float 36 is a sponge-like float and has a bulk specific gravity smaller than that of the molten metal, so it floats on the surface of the molten metal until it melts, suppressing convection in the crucible during that time. It also plays a role in suppressing heat radiation from the molten surface.
本発明の他の実施例を第５図に示す、るつぼには従来の
るつぼと同じ構造の物を用い溶融金属１４の中に溶融金
属１４よりも融点が高くまた比重も軽い金属で出来互い
に独立な浮き子１２が浮いている、具体的には例えば銅
（比重８．９３゜融点１０８３℃）を溶融する場合は浮
き子として鉄（比重７．８６．融点１５３６℃）を用い
る。溶融金属１４は電子ビーム３により液面中央を加熱
され対流１３が溶融金属（液相’）１４−１の中に起キ
る、浮き子１２は最初溶融金属中にまんべんなくばらま
かれているが対流１３により運ばれて次第にるつぼに近
い方に吹き寄せられる、第４図はこの吹き寄せられた状
態を示す、浮き子１２は溶融金属（液相）１４−１より
少しだけ比重が軽い金属を使用しているため溶融金属１
４−１の液面上に少しだけ頭を出して残りの部分はほと
んど溶融金属中に沈み込んでいる、したがって対流１３
の中で最も温度の高い溶融金属の液面のすぐ下をるつぼ
壁面方向に流れる対流はるつぼ壁面に到達する前に浮き
子１２にぶつかり下方に向きを変えてしまうためるつぼ
壁面の温度は十分に低くたもたれる。Another embodiment of the present invention is shown in FIG. 5. The crucible has the same structure as the conventional crucible, and the molten metal 14 is made of a metal having a higher melting point and lighter specific gravity than the molten metal 14. Specifically, when melting copper (specific gravity 8.93°, melting point 1083°C), for example, iron (specific gravity 7.86, melting point 1536°C) is used as the float. The center of the liquid surface of the molten metal 14 is heated by the electron beam 3, and convection 13 occurs in the molten metal (liquid phase') 14-1.The floats 12 are initially scattered evenly in the molten metal, but convection occurs. The float 12 is carried by the molten metal (liquid phase) 14-1 and is gradually blown closer to the crucible. Molten metal 1
The head of 4-1 is slightly above the liquid level, and the rest is almost submerged in the molten metal, so convection 13
The convection current flowing toward the crucible wall just below the surface of the molten metal, which has the highest temperature, hits the float 12 and changes its direction downward before reaching the crucible wall, so the temperature of the crucible wall is sufficient. Lean low.
また本発明によればるつぼ壁面には浮き子１２が付着す
るように浮いておりもし溶融金属中に摩耗性の強い粉体
または固体などが混入していて対流速度も速くるつぼ壁
面のアブレジツブ摩耗が問題となる場合はその対策とし
ても効果的である。Further, according to the present invention, the float 12 floats so as to adhere to the wall surface of the crucible, and if highly abrasive powder or solids are mixed in the molten metal, the convection speed is high and abrasive wear on the wall surface of the crucible occurs. It is also effective as a countermeasure if it becomes a problem.
また溶融金属の１部が凝固し固相↓４−２となった場合
でも固相１４−２に囲まれた浮き子１２は対流により動
くことはなくなるが液相中の浮き子は自由に移動しその
効果を失うことはない。Furthermore, even if part of the molten metal solidifies and becomes a solid phase ↓4-2, the float 12 surrounded by the solid phase 14-2 will not move due to convection, but the float in the liquid phase will move freely. It never loses its effectiveness.
旦固相中に取り込まれた浮き子も再び同相が液相に変わ
ればその効果を復活させることができる。The effect of floats once incorporated into the solid phase can be restored if the same phase changes to the liquid phase again.
第６図には本発明を適用した浮き子の種々の構造を示す
。FIG. 6 shows various structures of floats to which the present invention is applied.
球状浮き子１５は最も単純な形状の物であり溶融金属よ
りも融点が高く、比重も少しだけ軽い金属、セラミック
それぞれ単独またはそれらの混成体として製作される、
また溶融金属と同じ金属で構成されることもある（凝固
に際し体積が膨張するような金属の場合は溶融金属と同
じ金属で構成しても溶融液面に浮く）。The spherical float 15 has the simplest shape, and is made of metal or ceramic, which has a higher melting point than molten metal and has a slightly lighter specific gravity, or a combination of both.
It may also be made of the same metal as the molten metal (if the metal expands in volume during solidification, it will float on the surface of the molten liquid even if it is made of the same metal as the molten metal).
長球状浮き子１６２円筒状浮き子１７は丸棒から製作す
るのが容易な形状である。The long spherical float 162 and the cylindrical float 17 have a shape that can be easily manufactured from a round bar.
円筒状浮き子１８はパイプから製作するのが容易な形状
であるまた浮き子を入れることによりるつぼ中の溶融金
属の量が相対的に少なくなることが少ない形状である。The cylindrical float 18 has a shape that is easy to manufacture from a pipe, and also has a shape that prevents the amount of molten metal in the crucible from becoming relatively small by inserting the float.
スポンジ状浮き子は浮き子の材料として溶融金属と同じ
金属を使用する場合に用いる、すなわち溶融金属のるつ
ぼへの供給はこの浮き子をるつぼ内へ入れることにより
行なわれるるつぼ内へ入れられたスポンジ状浮き子１９
をしばらくの間は表面張力の働きにより溶融金属が内部
にしみ込まないため溶融金属の液面に浮いて浮き子とし
てるつぼ壁面が高温になることを防ぐがそのうち次第に
溶融して行く、完全に溶融してしまえば浮き子としての
効果がなくなるのでスポンジ状浮き子は常に少しずつ新
しい物が補給されるようになっている。Sponge-like floats are used when the same metal as the molten metal is used as the material for the float; in other words, molten metal is supplied to the crucible by placing the float into the crucible. shape float 19
For a while, the molten metal does not seep into the interior due to the action of surface tension, so it floats on the surface of the molten metal and acts as a float, preventing the crucible wall from getting too hot, but it gradually melts, until it completely melts. Once this happens, the sponge-like float loses its effectiveness as a float, so the sponge-like float is constantly replenished with new material little by little.
中空浮き子２０．鳥の巣状浮き子２３も同様にして使用
される。Hollow float 20. The bird's nest-shaped float 23 is also used in the same manner.
角柱状浮き子２４金平糖状浮き子２５は製作はむつかし
いが円筒状浮き子１８と同じような効果がある。Although the prismatic float 24 and the spinous float 25 are difficult to manufacture, they have the same effect as the cylindrical float 18.
これら浮き子は溶融金属の性質やその他の条件により最
適なものが選択される、またここに示した各種浮き子を
適宜組み合わせたものも本発明の実施例に含まれること
は言うまでもない。The most suitable floats are selected depending on the properties of the molten metal and other conditions, and it goes without saying that suitable combinations of the various floats shown here are also included in the embodiments of the present invention.
本発明の適用により下記の効果がある。 Application of the present invention has the following effects.
１、溶融金属の対流によるるつぼ壁面の温度上昇を溶融
金属の液位が変わっても有効に防ぐことが出来る。1. Temperature rise on the crucible wall surface due to convection of molten metal can be effectively prevented even if the liquid level of molten metal changes.
２、溶融金属の対流によるるつぼ壁面のアブレツシブ摩
耗を溶融金属の液位が変わっても有効に防ぐことが出来
る。2. Abrasive wear of the crucible wall due to convection of molten metal can be effectively prevented even if the liquid level of molten metal changes.
３、上記１，２によりるつぼの寿命が延び信頼性が向上
する。3. According to 1 and 2 above, the life of the crucible is extended and reliability is improved.
４、浮き子は全て消耗品であり古い浮き子を取外したり
する手間が不用であるまた浮き子は互いに独立した小形
の粒状でありその供給は容易である。4. All the floats are consumables, so there is no need to remove old floats.Furthermore, the floats are small, independent particles, and are easy to supply.
５、浮き子を用いて溶融金属の補給が出来るため別途溶
融金属補給のための予備溶融るつぼを設ける必要がない
。5. Molten metal can be replenished using a float, so there is no need to separately provide a preliminary melting crucible for replenishing molten metal.
６、溶融金属液面からの放熱とるつぼ内の対流を抑制す
るので対流による放熱が減少しるつぼの熱効率が向上す
る。6. Heat radiation from the molten metal liquid surface and convection within the crucible are suppressed, so heat radiation due to convection is reduced and the thermal efficiency of the crucible is improved.
７、部分的に固相が混在するるつぼにも使用できその効
果は変らない。7. It can be used even in crucibles where solid phase is partially present, and the effect remains the same.
第１図は本発明の実施例、第２図は従来技術の実施例、
第３図は従来技術の実施例、第４図は従来技術の実施例
、第５図は本発明の実施例、第６図は本発明の実施例で
ある。
１・・・るつぼ、２・・・冷却管、３・・・電子ビーム
、４・・・対流、５・・・溶融金属、６・・・対流、７
・・・対流抑制マトリクス、８・・・溶融金属、９・・
・対流抑制板、１０・・・対流、１１・・・溶融金属、
１２・・・浮き子、１３・・・対流、１４−１・・・溶
融金属（液相）、１４−２・・・溶融金属（固相）、１
５・・・球状浮き子、工６・・・長球状浮き子、１７・
・・円柱状浮き子、１８・・・円筒状浮き子、１９・・
・スポンジ状浮き子、２０・・・中空浮き子、２１・・
・中空部、２３・・・鳥の巣状浮き子、２４・・・角柱
状浮き子、２５・・・金平糖状浮き子、３１・・・リニ
ア型電子銃、３２・・・リニア電子ビーム、３３・・・
るつぼ、３４・・・冷却管、３５・・・蒸発部。
３６・・・浮き子、３７・・・浮き子供給トイ、３８・
・・補諮４−図
為Ｓ図
４−２FIG. 1 is an embodiment of the present invention, FIG. 2 is an embodiment of the prior art,
FIG. 3 shows an embodiment of the prior art, FIG. 4 shows an embodiment of the prior art, FIG. 5 shows an embodiment of the present invention, and FIG. 6 shows an embodiment of the present invention. 1... Crucible, 2... Cooling tube, 3... Electron beam, 4... Convection, 5... Molten metal, 6... Convection, 7
... Convection suppression matrix, 8... Molten metal, 9...
・Convection suppressing plate, 10... Convection, 11... Molten metal,
12... Float, 13... Convection, 14-1... Molten metal (liquid phase), 14-2... Molten metal (solid phase), 1
5... Spherical float, work 6... Long spherical float, 17.
...Cylindrical float, 18...Cylindrical float, 19...
・Sponge-like float, 20...Hollow float, 21...
- Hollow part, 23... Bird's nest-shaped float, 24... Prismatic float, 25... Confetti-shaped float, 31... Linear type electron gun, 32... Linear electron beam, 33...
Crucible, 34... Cooling pipe, 35... Evaporation section. 36... Floating child, 37... Floating child feeding toy, 38.
・Supplementary Consultation 4-Intact S Figure 4-2
Claims (7)
融金属中に該溶融金属とその他の金属で該溶融金属より
融点の高い合金を作の該合金で溶融金属液面を被覆可能
な互いに独立した任意形状の浮き子を構成しるつぼ中の
溶融金属液面上に多数配置したことを特徴とする金属蒸
発装置。1. In a metal evaporation apparatus having a crucible for melting metal, an alloy having a higher melting point than the molten metal is prepared by combining the molten metal and another metal in the molten metal. A metal evaporation device characterized in that a large number of shaped floats are arranged on the molten metal liquid surface in a crucible.
融金属中に該溶融金属の化合物、酸化物などの単体また
は該溶融金属と該化合物、酸化物などの混合物を用いて
溶融金属液面を破覆可能な互いに独立した任意形状の浮
き子を構成しるつぼ中の溶融金属液面上に多数配置した
ことを特徴とする金属蒸発装置。2. In a metal evaporation device having a metal melting crucible, the liquid level of the molten metal is broken using a compound, oxide, etc. of the molten metal alone or a mixture of the molten metal and the compound, oxide, etc. A metal evaporation device characterized in that a large number of mutually independent floats of arbitrary shapes are arranged on the molten metal liquid surface in a crucible.
融金属中に該溶融金属を用いて構成したスポンジ状，鳥
の巣状，中空体状，または任意形状の互いに独立した浮
き子をるつぼ中の溶融金属液面上に多数配置したことを
特徴とする金属蒸発装置。3. In a metal evaporation device having a metal melting crucible, a sponge-like, bird's nest-like, hollow body-like, or arbitrary-shaped mutually independent float made of the molten metal is placed in the melting metal in the crucible. A metal evaporator characterized in that a large number of metal evaporators are arranged above the metal liquid surface.
構成したスポンジ状，鳥の巣状，中空体状、または任意
形状の互いに独立した浮き子をるつぼ中に供給すること
によりるつぼ中の溶融金属の補給を行なうと共に合わせ
てそれら浮き子の供給機構を有することを特徴とする金
属蒸発装置。4. According to claim 3, the molten metal can be used to melt the molten metal in a crucible by supplying mutually independent floats in the shape of a sponge, a bird's nest, a hollow body, or any other shape into the crucible. A metal evaporation device characterized by having a mechanism for replenishing molten metal and supplying floats.
蒸発のための加熱源として電子銃を有しまた蒸発した金
属蒸気を封じ込めるための封入器をあわせ有することを
特徴とする金属蒸発装置。5. In claim 3, melting of the molten metal,
A metal evaporation device characterized in that it has an electron gun as a heating source for evaporation, and also has an enclosure for containing evaporated metal vapor.
蒸発のための加熱源としてリニア型電子銃と一辺が他辺
より長い長方形るつぼを合わせ有することを特徴とする
金属蒸発装置。6. In claim 3, melting of the molten metal,
A metal evaporation device characterized by having a linear electron gun and a rectangular crucible with one side longer than the other side as a heating source for evaporation.
蒸発のための加熱源として電子銃と任意形状のるつぼを
合わせ有することを特徴とする金属蒸発装置。7. In claim 3, melting of the molten metal,
A metal evaporation device characterized by having an electron gun and an arbitrarily shaped crucible as a heating source for evaporation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22147089A JPH0387359A (en) | 1989-08-30 | 1989-08-30 | Metal evaporating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22147089A JPH0387359A (en) | 1989-08-30 | 1989-08-30 | Metal evaporating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0387359A true JPH0387359A (en) | 1991-04-12 |
Family
ID=16767220
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22147089A Pending JPH0387359A (en) | 1989-08-30 | 1989-08-30 | Metal evaporating device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0387359A (en) |
-
1989
- 1989-08-30 JP JP22147089A patent/JPH0387359A/en active Pending
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