JPH01184269A - Molten metal holder for generating metal vapor - Google Patents

Molten metal holder for generating metal vapor

Info

Publication number
JPH01184269A
JPH01184269A JP487588A JP487588A JPH01184269A JP H01184269 A JPH01184269 A JP H01184269A JP 487588 A JP487588 A JP 487588A JP 487588 A JP487588 A JP 487588A JP H01184269 A JPH01184269 A JP H01184269A
Authority
JP
Japan
Prior art keywords
molten metal
natural convection
inside vessel
vessel
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP487588A
Other languages
Japanese (ja)
Inventor
Arata Ito
新 伊藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP487588A priority Critical patent/JPH01184269A/en
Publication of JPH01184269A publication Critical patent/JPH01184269A/en
Pending legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/243Crucibles for source material

Abstract

PURPOSE:To prevent corrosion of the inner side face of an inside vessel which comes into contact with a molten metal without affecting thermal efficiency, etc., by providing projections which project in an aperture direction from the bottom to the inside vessel and providing a thermal resistance layer between an outside vessel and the bottom of the inside vessel. CONSTITUTION:The molten metal 2 in the inside vessel 3a is heated by an electron beam 1 in the central part 9 of the liquid surface thereof and is cooled in the part in contact with the inside vessel 3a, by which natural convection 7 is generated. The molten metal 2 flowing to the outside collides partly against the projections 11 and falls to generate the natural convection 7a. The other part advances and falls down to the side face of the inside vessel 3a and generates the natural convection 7b. Since the thermal resistor layer 12 is inserted between the inside vessel 3a and the outside vessel 3, the cooling in the bottom of the inside vessel 3a weakens and the circulation of the natural convection 7b on the outside of the projection 11 strengthens. The inflow of the high-temp. molten metal 2 from the natural convection 7a to the natural convection 7b, therefore, decreases. The progression of the corrosion of the inner side face of the inside vessel 3a is, therefore, prevented.

Description

【発明の詳細な説明】 〔発明の目的〕 (産業上の利用分野) 本発明は、同位元素の原子法レーザー濃縮装置における
金属蒸気発生用溶融金属保持装置に関する。
DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial Application Field) The present invention relates to a molten metal holding device for metal vapor generation in an isotope atomic laser concentrator.

(従来の技術) 同位元素の原子法レーザー濃縮装置には、金属蒸気流束
を作るために、金属に電子ビーム、レーザー光等を照射
して加熱し、その金属を融解、蒸発させる金属蒸気発生
装置が設けられている。この金属蒸気発生装置に備えら
れた溶融金属保持装置の従来例を第3図によって説明す
る。すなわち、この溶融金属保持装置10は熱伝導性に
優れた外部容器4と、この外部容器4の内側に密着して
設けられた熱伝導性に劣る内部容器3とで形成され、内
部容器3の内壁面には高温の溶融金属に対する耐腐食性
を有するコーティング層6が備えられている。また、外
部容器4の壁材内部には冷却機構としての管状の冷却材
流路5が外部容器4の側面及び底面に沿って設けられて
いる。
(Prior technology) Isotope atomic laser concentrators require metal vapor generation by heating the metal by irradiating it with an electron beam, laser light, etc. to melt and evaporate the metal in order to create a metal vapor flux. equipment is provided. A conventional example of a molten metal holding device provided in this metal vapor generator will be explained with reference to FIG. That is, this molten metal holding device 10 is formed of an outer container 4 with excellent thermal conductivity and an inner container 3 with poor thermal conductivity that is provided in close contact with the inside of this outer container 4. The inner wall surface is provided with a coating layer 6 having corrosion resistance against high temperature molten metal. Further, inside the wall material of the external container 4, a tubular coolant channel 5 as a cooling mechanism is provided along the side and bottom surfaces of the external container 4.

この溶融金属保持装置10の内部容器3内に目的の金属
を収納して電子ビーム1を照射すると、金属は融解して
溶融金属2となり、さらに電子ビーム1を照射して力り
熱を続けると金属蒸気流束(図示せず)が発生する。な
お、以上の加熱操作中には冷却材流路5に水等の冷却材
後流し、外部容器4及び内部容器3が溶融しないように
冷却してい前記溶融金属保持装置10において、溶融金
属2は、その液面中央部9が電子ビーム1により加熱さ
れる一方内部容器3の側面及び底面に接する部分は冷却
材により冷却されるため、第3図に示すような液面中央
部9から内部容器3の側面、底面に沿って流れ液面中央
部9へ戻る一対の自然対流7を生じる。この自然対流7
が生じると、内部容器3の側面の液面近傍部8は、液面
中央部9からの高温の溶融金属2を直接受けて局部的に
高温となり、腐食あるいは損傷が進行しやすくなる問題
点がある。そこで、溶融金属2の液面近傍部8の腐食の
進行を防止するために溶融金属2の加熱を抑えると、十
分な金属蒸気流束を得ることができなくなる。また、同
じ目的で内部容器3の熱伝導性を良くして冷却効率を上
げることにより内部容器4の冷却を強めると、溶融金属
2からの熱量損失が大きくなり、金属蒸気流束発生のた
めの熱効率が低下するなどの問題点がある。
When a target metal is stored in the internal container 3 of this molten metal holding device 10 and irradiated with the electron beam 1, the metal melts into molten metal 2, and when the electron beam 1 is further irradiated and heating continues. A metal vapor flux (not shown) is generated. Note that during the above heating operation, a coolant such as water is flowed into the coolant channel 5 to cool the outer container 4 and the inner container 3 so that they do not melt.In the molten metal holding device 10, the molten metal 2 is , the central part 9 of the liquid surface is heated by the electron beam 1, while the parts in contact with the side and bottom surfaces of the inner container 3 are cooled by the coolant. A pair of natural convection flows 7 that flow along the side and bottom surfaces of the liquid and return to the central portion 9 of the liquid surface. This natural convection 7
When this occurs, the area 8 near the liquid surface on the side surface of the inner container 3 directly receives the high temperature molten metal 2 from the central area 9 of the liquid surface, resulting in a locally high temperature, which causes corrosion or damage to progress easily. be. Therefore, if the heating of the molten metal 2 is suppressed in order to prevent the progress of corrosion in the portion 8 near the liquid surface of the molten metal 2, a sufficient metal vapor flux cannot be obtained. Furthermore, if the cooling of the internal container 4 is strengthened by improving the thermal conductivity of the internal container 3 and increasing the cooling efficiency for the same purpose, the loss of heat from the molten metal 2 will increase, and the There are problems such as a decrease in thermal efficiency.

本発明は、以上のような問題点を解決するためになされ
たもので、金属蒸気流束の発生量や発生のための熱効率
等に影響することなく、自然対流による溶融金属と接す
る内部容器の内側面の腐食を防止する機能を備えた金属
蒸気発生用溶融金属保持装置を提供することを目的とす
る。
The present invention has been made in order to solve the above-mentioned problems.The present invention has been made in order to solve the above-mentioned problems. It is an object of the present invention to provide a molten metal holding device for generating metal vapor that has a function of preventing corrosion of the inner surface.

本発明に係る金属蒸気発生用溶融金属保持装置は、該装
置の内部容器にその底部から開口部方向に突出した突起
と、該装置の外部容器と内部容器の底部の間に熱抵抗体
層とを設けたことを特徴とする。
The molten metal holding device for generating metal vapor according to the present invention includes a projection protruding from the bottom of the inner container toward the opening of the device, and a heat resistor layer between the outer container and the bottom of the inner container of the device. It is characterized by having the following.

(作 用) 金属蒸気発生用溶融金属保持装置の内部容器内に収納さ
れた金属は、電子ビームにより加熱されて溶融金属とな
る。この際、該内部容器に設けられた突起により、自然
対流は該突起の内側と外側に分割されて生じる。さらに
、熱抵抗体層を設けたことにより、内部容器の底面部の
冷却効率が下がり、相対的に側面部が最も冷却されるの
で、該外側の自然対流の循環力が強まり、突起の内側か
らの高温溶融金i+の液面近傍部への直接の影響がなく
なると同時に、突起の外側には内側のそれよりも低温の
自然対流が形成されるので、該装置側面の腐食の進行を
防止することができる。
(Function) The metal stored in the internal container of the molten metal holding device for generating metal vapor is heated by the electron beam and becomes molten metal. At this time, natural convection is generated by being divided into an inner side and an outer side of the protrusion due to the protrusion provided on the inner container. Furthermore, by providing a heat resistor layer, the cooling efficiency of the bottom part of the inner container is reduced, and the side parts are relatively cooled the most, so the circulation force of the natural convection on the outside is strengthened, and the cooling efficiency from the inside of the protrusion is increased. At the same time, the direct influence of the high temperature molten gold i+ on the area near the liquid surface is eliminated, and at the same time, natural convection is formed on the outside of the protrusion at a temperature lower than that on the inside, which prevents the progress of corrosion on the side of the device. be able to.

(実施例) 以下、図面を参照して本発明の詳細な説明する。なお、
既に説明した従来の金属蒸気発生用溶融金属保持装置と
同一部分には同一符号を付しである。
(Example) Hereinafter, the present invention will be described in detail with reference to the drawings. In addition,
The same parts as those of the conventional molten metal holding device for generating metal vapor described above are given the same reference numerals.

第1図は本発明の一実施例を示す金属蒸気発生用溶融金
属保持装置2〜面図である。図中10Aで示される溶融
金属保持装置は、熱伝導性の高い外部容器4と、これに
密着して設けられた突起11を持つ内部容器3aと、外
部容器4と内部容器3aの底=4− 部の間に挿入された熱抵抗体層12とから形成され、外
部容器4の内部には内部容器31冷却するための管状の
冷却材流路5が設けられたものからなっている。
FIG. 1 is a side view of a molten metal holding device 2 for generating metal vapor, showing an embodiment of the present invention. The molten metal holding device indicated by 10A in the figure includes an outer container 4 having high thermal conductivity, an inner container 3a having a protrusion 11 provided in close contact with the outer container 4, and a bottom of the outer container 4 and the inner container 3a = 4. - a heat resistor layer 12 inserted between the outer container 4 and the inner container 31;

この内部容器3a内に金属を収納し、冷却材流路5に冷
却材を流して内部容器3aを冷却しながら図示してない
電子銃から電子ビーム1を照射して加熱すると、金属は
融解し溶融金属2の状態となる。
A metal is stored in this internal container 3a, and when the internal container 3a is cooled by flowing a coolant through the coolant channel 5 and heated by irradiating an electron beam 1 from an electron gun (not shown), the metal melts. The state becomes molten metal 2.

溶融金属2はその液面中央部9が電子ビーム1で加熱さ
れる一方、内部容器3aに接する部分は冷却されるので
、温度差により自然対流7を生じる。
The central part 9 of the liquid surface of the molten metal 2 is heated by the electron beam 1, while the part in contact with the inner container 3a is cooled, so that a natural convection 7 is generated due to the temperature difference.

液面中央部9から外側へ流れる溶融金属2の一部は、突
起11に衝突してこれに沿って下降し底面部を通って再
び液面中央部9へ戻る自然対流7aを生じる。また他の
一部は、突起11には衝突することなく内部容器3aの
側面まで進みこれに沿って下降し底面部を通って突起1
1に沿って上昇する自然対流7bを生じる。内部容器△
外部容器4の間に熱抵抗体層12が挿入されていること
により内部容器3aの底部の冷却はある程度しゃ断され
て弱まり、相対的に側面部の冷却が最も強くなり、突起
11の外側の自然対流7bの循環が強くなる。このため
、突起11の上方における自然対流7aから自然対流7
bへの高温の溶融金属2の流入が減り、自然対流7bは
自然対流7aよりも低温となる。従って、内部容器3a
の側面においては、直接の高温溶融金属2の影響が穏和
されるので、内側面の腐食の進行を防第1図と同一部分
には同一符号で示し、重複する性容器13を着脱自在に
設けたものである。この耐食性容器13の底面には開口
部へ沿った突起14が設けられている。この溶融金属保
持装置10Bでは、突起14及び液面近傍部8等に腐食
が発生した段階で内部容器3の耐食性容器13を交換す
ることができるので、より確実しこ溶融金属保持装置1
0Bの腐食防止をすることができる。
A part of the molten metal 2 flowing outward from the central part 9 of the liquid surface collides with the protrusion 11, descends along it, passes through the bottom part, and returns to the central part 9 of the liquid surface, creating a natural convection 7a. The other part advances to the side surface of the inner container 3a without colliding with the protrusion 11, descends along this and passes through the bottom part to the protrusion 11.
1, a natural convection 7b is generated that rises along the line 1. Inner container△
Because the heat resistor layer 12 is inserted between the outer containers 4, the cooling of the bottom of the inner container 3a is cut off and weakened to some extent, and the cooling of the side surfaces is relatively strongest, and the natural outside of the protrusion 11 is The circulation of convection 7b becomes stronger. Therefore, from the natural convection 7a above the protrusion 11, the natural convection 7a
The flow of high temperature molten metal 2 into b is reduced, and the temperature of natural convection 7b becomes lower than that of natural convection 7a. Therefore, the inner container 3a
Since the direct influence of the high-temperature molten metal 2 is moderated on the side surface, the progress of corrosion on the inner surface is prevented.The same parts as in FIG. It is something that A protrusion 14 is provided on the bottom surface of the corrosion-resistant container 13 along the opening. In this molten metal holding device 10B, the corrosion-resistant container 13 of the internal container 3 can be replaced when corrosion occurs in the protrusion 14, the portion 8 near the liquid surface, etc., so that the molten metal holding device 1
Can prevent 0B corrosion.

〔発明の効果〕〔Effect of the invention〕

本発明によれば内部容器内の溶融金属の自然対流を分割
して該容器の内側面部への高温溶融金属の影響を軽減し
、金属蒸気流束の発生量や発生のための熱効率等に影響
することなく、自然対流による該容器の内側面の腐食進
行を防止することが可能となる。
According to the present invention, the natural convection of the molten metal in the inner container is divided to reduce the influence of the high temperature molten metal on the inner surface of the container, which affects the amount of metal vapor flux generated and the thermal efficiency for generation. It becomes possible to prevent the progress of corrosion on the inner surface of the container due to natural convection.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図および第2図は本発明に係るそれぞれの実施例を
示す縦断面図、第3図は従来例を示す縦断面図である。 1・・・電子ビーム、   2・・・溶融金属、茫ギ肯
部容ヤ、     4−%お、あ、  ・5・・・冷却
材流路、    6・・・コーティング層、7.7a、
7b・・・自然対流、8・・・流面近傍部、9・・液面
中央部、 10、 IOA、 IOB・・・溶融金属保持装置、1
1、14・・・突起、    12・・・熱抵抗体層、
13・・・耐食性容器 代理人 弁理士  則 近 憲 佑 同     第子丸   健
FIGS. 1 and 2 are longitudinal sectional views showing respective embodiments of the present invention, and FIG. 3 is a longitudinal sectional view showing a conventional example. DESCRIPTION OF SYMBOLS 1... Electron beam, 2... Molten metal, cylindrical part capacity, 4-% o, a, 5... Coolant channel, 6... Coating layer, 7.7a,
7b... natural convection, 8... near flow surface, 9... center of liquid surface, 10, IOA, IOB... molten metal holding device, 1
1, 14...Protrusion, 12...Heat resistor layer,
13...Corrosion-resistant container agent Patent attorney Nori Chika Ken Yudo Ken Daishimaru

Claims (1)

【特許請求の範囲】[Claims] 内部容器内に金属を収納し、該内部容器の外面に冷却機
構を有する外部容器を密接配置してなり、前記金属を加
熱溶融して該溶融金属から金属蒸気を発生させる金属蒸
気発生用溶融金属保持装置において、前記内部容器にそ
の底部から開口部方向へ突出した突起と、前記外部容器
と内部容器の底部の間に熱抵抗体層とを設けたことを特
徴とする金属蒸気発生用溶融金属保持装置。
A molten metal for generating metal vapor, in which a metal is stored in an inner container, and an outer container having a cooling mechanism is closely arranged on the outer surface of the inner container, and the metal is heated and melted to generate metal vapor from the molten metal. A molten metal for metal vapor generation in the holding device, characterized in that the inner container is provided with a protrusion projecting from the bottom toward the opening, and a heat resistor layer is provided between the outer container and the bottom of the inner container. holding device.
JP487588A 1988-01-14 1988-01-14 Molten metal holder for generating metal vapor Pending JPH01184269A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP487588A JPH01184269A (en) 1988-01-14 1988-01-14 Molten metal holder for generating metal vapor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP487588A JPH01184269A (en) 1988-01-14 1988-01-14 Molten metal holder for generating metal vapor

Publications (1)

Publication Number Publication Date
JPH01184269A true JPH01184269A (en) 1989-07-21

Family

ID=11595844

Family Applications (1)

Application Number Title Priority Date Filing Date
JP487588A Pending JPH01184269A (en) 1988-01-14 1988-01-14 Molten metal holder for generating metal vapor

Country Status (1)

Country Link
JP (1) JPH01184269A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1108893A3 (en) * 1999-12-17 2002-05-02 The BOC Group plc Temperature control system for vacuum pumps
JP2005029895A (en) * 2003-07-04 2005-02-03 Agfa Gevaert Nv Vapor deposition apparatus
WO2007046623A1 (en) * 2005-10-19 2007-04-26 Doosan Mecatec Co., Ltd. Apparatus for continuous metal deposition for mass production

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1108893A3 (en) * 1999-12-17 2002-05-02 The BOC Group plc Temperature control system for vacuum pumps
JP2005029895A (en) * 2003-07-04 2005-02-03 Agfa Gevaert Nv Vapor deposition apparatus
WO2007046623A1 (en) * 2005-10-19 2007-04-26 Doosan Mecatec Co., Ltd. Apparatus for continuous metal deposition for mass production

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