JPH038424U - - Google Patents
Info
- Publication number
- JPH038424U JPH038424U JP1989067814U JP6781489U JPH038424U JP H038424 U JPH038424 U JP H038424U JP 1989067814 U JP1989067814 U JP 1989067814U JP 6781489 U JP6781489 U JP 6781489U JP H038424 U JPH038424 U JP H038424U
- Authority
- JP
- Japan
- Prior art keywords
- heat treatment
- heat
- section
- treatment section
- buffer storage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 5
- 238000007599 discharging Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68742—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a lifting arrangement, e.g. lift pins
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989067814U JPH0536269Y2 (en, 2012) | 1989-06-09 | 1989-06-09 | |
| KR1019900008438A KR930010971B1 (ko) | 1989-06-09 | 1990-06-08 | 기판을 열처리하기 위한 장치 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989067814U JPH0536269Y2 (en, 2012) | 1989-06-09 | 1989-06-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH038424U true JPH038424U (en, 2012) | 1991-01-28 |
| JPH0536269Y2 JPH0536269Y2 (en, 2012) | 1993-09-14 |
Family
ID=13355791
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989067814U Expired - Lifetime JPH0536269Y2 (en, 2012) | 1989-06-09 | 1989-06-09 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPH0536269Y2 (en, 2012) |
| KR (1) | KR930010971B1 (en, 2012) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59211243A (ja) * | 1983-05-17 | 1984-11-30 | Toshiba Corp | 半導体基板処理装置 |
-
1989
- 1989-06-09 JP JP1989067814U patent/JPH0536269Y2/ja not_active Expired - Lifetime
-
1990
- 1990-06-08 KR KR1019900008438A patent/KR930010971B1/ko not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59211243A (ja) * | 1983-05-17 | 1984-11-30 | Toshiba Corp | 半導体基板処理装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| KR910001897A (ko) | 1991-01-31 |
| JPH0536269Y2 (en, 2012) | 1993-09-14 |
| KR930010971B1 (ko) | 1993-11-18 |