JPH038424U - - Google Patents

Info

Publication number
JPH038424U
JPH038424U JP1989067814U JP6781489U JPH038424U JP H038424 U JPH038424 U JP H038424U JP 1989067814 U JP1989067814 U JP 1989067814U JP 6781489 U JP6781489 U JP 6781489U JP H038424 U JPH038424 U JP H038424U
Authority
JP
Japan
Prior art keywords
heat treatment
heat
section
treatment section
buffer storage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1989067814U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0536269Y2 (OSRAM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989067814U priority Critical patent/JPH0536269Y2/ja
Priority to KR1019900008438A priority patent/KR930010971B1/ko
Publication of JPH038424U publication Critical patent/JPH038424U/ja
Application granted granted Critical
Publication of JPH0536269Y2 publication Critical patent/JPH0536269Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H10P72/0431—
    • H10P72/7612—
JP1989067814U 1989-06-09 1989-06-09 Expired - Lifetime JPH0536269Y2 (OSRAM)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP1989067814U JPH0536269Y2 (OSRAM) 1989-06-09 1989-06-09
KR1019900008438A KR930010971B1 (ko) 1989-06-09 1990-06-08 기판을 열처리하기 위한 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989067814U JPH0536269Y2 (OSRAM) 1989-06-09 1989-06-09

Publications (2)

Publication Number Publication Date
JPH038424U true JPH038424U (OSRAM) 1991-01-28
JPH0536269Y2 JPH0536269Y2 (OSRAM) 1993-09-14

Family

ID=13355791

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989067814U Expired - Lifetime JPH0536269Y2 (OSRAM) 1989-06-09 1989-06-09

Country Status (2)

Country Link
JP (1) JPH0536269Y2 (OSRAM)
KR (1) KR930010971B1 (OSRAM)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59211243A (ja) * 1983-05-17 1984-11-30 Toshiba Corp 半導体基板処理装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59211243A (ja) * 1983-05-17 1984-11-30 Toshiba Corp 半導体基板処理装置

Also Published As

Publication number Publication date
JPH0536269Y2 (OSRAM) 1993-09-14
KR930010971B1 (ko) 1993-11-18
KR910001897A (ko) 1991-01-31

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