JPH0383937U - - Google Patents
Info
- Publication number
- JPH0383937U JPH0383937U JP14555789U JP14555789U JPH0383937U JP H0383937 U JPH0383937 U JP H0383937U JP 14555789 U JP14555789 U JP 14555789U JP 14555789 U JP14555789 U JP 14555789U JP H0383937 U JPH0383937 U JP H0383937U
- Authority
- JP
- Japan
- Prior art keywords
- triangular wave
- current
- wave current
- wave oscillator
- oscillator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14555789U JPH0383937U (en:Method) | 1989-12-18 | 1989-12-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14555789U JPH0383937U (en:Method) | 1989-12-18 | 1989-12-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0383937U true JPH0383937U (en:Method) | 1991-08-26 |
Family
ID=31692186
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14555789U Pending JPH0383937U (en:Method) | 1989-12-18 | 1989-12-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0383937U (en:Method) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1183706A1 (en) * | 2000-04-13 | 2002-03-06 | Ebara Corporation | Method and apparatus for electron beam irradiation |
-
1989
- 1989-12-18 JP JP14555789U patent/JPH0383937U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1183706A1 (en) * | 2000-04-13 | 2002-03-06 | Ebara Corporation | Method and apparatus for electron beam irradiation |