JPH0381296B2 - - Google Patents

Info

Publication number
JPH0381296B2
JPH0381296B2 JP12356187A JP12356187A JPH0381296B2 JP H0381296 B2 JPH0381296 B2 JP H0381296B2 JP 12356187 A JP12356187 A JP 12356187A JP 12356187 A JP12356187 A JP 12356187A JP H0381296 B2 JPH0381296 B2 JP H0381296B2
Authority
JP
Japan
Prior art keywords
sif
gas
sih
mixed gas
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12356187A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63126214A (ja
Inventor
Shigeru Iijima
Kazunobu Tanaka
Hideyo Oogushi
Akihisa Matsuda
Mitsuo Matsumura
Hideo Yamamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tonen General Sekiyu KK
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Tonen Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology, Tonen Corp filed Critical Agency of Industrial Science and Technology
Priority to JP12356187A priority Critical patent/JPS63126214A/ja
Publication of JPS63126214A publication Critical patent/JPS63126214A/ja
Publication of JPH0381296B2 publication Critical patent/JPH0381296B2/ja
Granted legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Photovoltaic Devices (AREA)
JP12356187A 1987-05-20 1987-05-20 シリコン薄膜の製造法 Granted JPS63126214A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12356187A JPS63126214A (ja) 1987-05-20 1987-05-20 シリコン薄膜の製造法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12356187A JPS63126214A (ja) 1987-05-20 1987-05-20 シリコン薄膜の製造法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP10111580A Division JPS5727015A (en) 1980-07-25 1980-07-25 Manufacture of silicon thin film

Publications (2)

Publication Number Publication Date
JPS63126214A JPS63126214A (ja) 1988-05-30
JPH0381296B2 true JPH0381296B2 (enExample) 1991-12-27

Family

ID=14863634

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12356187A Granted JPS63126214A (ja) 1987-05-20 1987-05-20 シリコン薄膜の製造法

Country Status (1)

Country Link
JP (1) JPS63126214A (enExample)

Also Published As

Publication number Publication date
JPS63126214A (ja) 1988-05-30

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