JPH0380992B2 - - Google Patents

Info

Publication number
JPH0380992B2
JPH0380992B2 JP58111847A JP11184783A JPH0380992B2 JP H0380992 B2 JPH0380992 B2 JP H0380992B2 JP 58111847 A JP58111847 A JP 58111847A JP 11184783 A JP11184783 A JP 11184783A JP H0380992 B2 JPH0380992 B2 JP H0380992B2
Authority
JP
Japan
Prior art keywords
stage cylinder
pump case
shield
pump
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58111847A
Other languages
English (en)
Japanese (ja)
Other versions
JPS606086A (ja
Inventor
Hidetoshi Morimoto
Katsumi Morizumi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Cryogenics Inc
Original Assignee
Ulvac Cryogenics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Cryogenics Inc filed Critical Ulvac Cryogenics Inc
Priority to JP11184783A priority Critical patent/JPS606086A/ja
Publication of JPS606086A publication Critical patent/JPS606086A/ja
Publication of JPH0380992B2 publication Critical patent/JPH0380992B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP11184783A 1983-06-23 1983-06-23 クライオポンプ装置 Granted JPS606086A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11184783A JPS606086A (ja) 1983-06-23 1983-06-23 クライオポンプ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11184783A JPS606086A (ja) 1983-06-23 1983-06-23 クライオポンプ装置

Publications (2)

Publication Number Publication Date
JPS606086A JPS606086A (ja) 1985-01-12
JPH0380992B2 true JPH0380992B2 (enrdf_load_stackoverflow) 1991-12-26

Family

ID=14571654

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11184783A Granted JPS606086A (ja) 1983-06-23 1983-06-23 クライオポンプ装置

Country Status (1)

Country Link
JP (1) JPS606086A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0718409B2 (ja) * 1985-12-20 1995-03-06 日電アネルバ株式会社 クライオポンプ
US5156007A (en) * 1991-01-30 1992-10-20 Helix Technology Corporation Cryopump with improved second stage passageway
US6187864B1 (en) * 1997-03-13 2001-02-13 Acushnet Company Golf balls comprising blends of polyamides and ionomers
JP2011153629A (ja) * 2011-05-17 2011-08-11 Sumitomo Heavy Ind Ltd クライオポンプ

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4514204A (en) * 1983-03-21 1985-04-30 Air Products And Chemicals, Inc. Bakeable cryopump

Also Published As

Publication number Publication date
JPS606086A (ja) 1985-01-12

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