JPH0380305B2 - - Google Patents

Info

Publication number
JPH0380305B2
JPH0380305B2 JP56119603A JP11960381A JPH0380305B2 JP H0380305 B2 JPH0380305 B2 JP H0380305B2 JP 56119603 A JP56119603 A JP 56119603A JP 11960381 A JP11960381 A JP 11960381A JP H0380305 B2 JPH0380305 B2 JP H0380305B2
Authority
JP
Japan
Prior art keywords
temperature
amorphous silicon
substrate
glow discharge
silicon layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP56119603A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5821257A (ja
Inventor
Tetsuyoshi Takeshita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP56119603A priority Critical patent/JPS5821257A/ja
Publication of JPS5821257A publication Critical patent/JPS5821257A/ja
Publication of JPH0380305B2 publication Critical patent/JPH0380305B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
    • G03G5/00—Recording members for original recording by exposure, e.g. to light, to heat, to electrons; Manufacture thereof; Selection of materials therefor
    • G03G5/02—Charge-receiving layers
    • G03G5/04—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor
    • G03G5/08—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic
    • G03G5/082—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic and not being incorporated in a bonding material, e.g. vacuum deposited
    • G03G5/08214—Silicon-based

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Light Receiving Elements (AREA)
  • Photoreceptors In Electrophotography (AREA)
JP56119603A 1981-07-30 1981-07-30 電子写真感光体の製造方法 Granted JPS5821257A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56119603A JPS5821257A (ja) 1981-07-30 1981-07-30 電子写真感光体の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56119603A JPS5821257A (ja) 1981-07-30 1981-07-30 電子写真感光体の製造方法

Publications (2)

Publication Number Publication Date
JPS5821257A JPS5821257A (ja) 1983-02-08
JPH0380305B2 true JPH0380305B2 (enrdf_load_html_response) 1991-12-24

Family

ID=14765475

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56119603A Granted JPS5821257A (ja) 1981-07-30 1981-07-30 電子写真感光体の製造方法

Country Status (1)

Country Link
JP (1) JPS5821257A (enrdf_load_html_response)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS616654A (ja) * 1984-06-21 1986-01-13 Stanley Electric Co Ltd 電子写真感光体及びその製造方法
JPS6123158A (ja) * 1984-07-11 1986-01-31 Stanley Electric Co Ltd 電子写真用感光体
JP3368109B2 (ja) * 1995-08-23 2003-01-20 キヤノン株式会社 電子写真用光受容部材
JP3754751B2 (ja) * 1996-05-23 2006-03-15 キヤノン株式会社 光受容部材
JP3559655B2 (ja) * 1996-08-29 2004-09-02 キヤノン株式会社 電子写真用光受容部材
JPH1090929A (ja) 1996-09-11 1998-04-10 Canon Inc 電子写真用光受容部材

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56146142A (en) * 1980-04-16 1981-11-13 Hitachi Ltd Electrophotographic sensitive film

Also Published As

Publication number Publication date
JPS5821257A (ja) 1983-02-08

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