JPH0379423U - - Google Patents

Info

Publication number
JPH0379423U
JPH0379423U JP14088789U JP14088789U JPH0379423U JP H0379423 U JPH0379423 U JP H0379423U JP 14088789 U JP14088789 U JP 14088789U JP 14088789 U JP14088789 U JP 14088789U JP H0379423 U JPH0379423 U JP H0379423U
Authority
JP
Japan
Prior art keywords
chamber
rotating
closed
openable
rotating shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14088789U
Other languages
English (en)
Other versions
JPH0744014Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14088789U priority Critical patent/JPH0744014Y2/ja
Publication of JPH0379423U publication Critical patent/JPH0379423U/ja
Application granted granted Critical
Publication of JPH0744014Y2 publication Critical patent/JPH0744014Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Cleaning Or Drying Semiconductors (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Description

【図面の簡単な説明】
第１図１〜３は本考案の一実施例を説明する断
面図、第２図は従来例を説明する断面図である。 図において、１……チヤンバ、２……回転クレ
ードル、３……開閉扉式の蓋、４……ノズル付の
配管、５……モータ、６……回転軸、７……軸受
、８……回転軸受、９……排出口、９Ａ……新設
排出口、１０……キヤリア、１１……ウエハ、で
ある。

Claims (1)

  1. 【実用新案登録請求の範囲】 内部にノズルを持つた配管４が設けられ一端が
    閉止され他端が開放可能なチヤンバ１と、 該チヤンバ１の開放可能な端部に設けられた蓋
    ３と、 該チヤンバ１の内部に設けられ一端が閉止され
    他端が開放可能な回転クレードル２と、 該回転クレードル２の閉止端に固定された回転
    軸６と、 該チヤンバ１の閉止端に設けられ該回転軸６を
    支持する軸受７と、 該回転軸６を回転させる手段５と、 該チヤンバ１に設けられた排出口９と、 該蓋３の内面に取りつけられ該蓋を閉じたとき
    に該回転クレードル２の開放可能な端部に嵌合す
    る回転軸受８を有することを特徴とする半導体製
    造装置。
JP14088789U 1989-12-05 1989-12-05 半導体製造装置 Expired - Fee Related JPH0744014Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14088789U JPH0744014Y2 (ja) 1989-12-05 1989-12-05 半導体製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14088789U JPH0744014Y2 (ja) 1989-12-05 1989-12-05 半導体製造装置

Publications (2)

Publication Number Publication Date
JPH0379423U true JPH0379423U (ja) 1991-08-13
JPH0744014Y2 JPH0744014Y2 (ja) 1995-10-09

Family

ID=31687828

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14088789U Expired - Fee Related JPH0744014Y2 (ja) 1989-12-05 1989-12-05 半導体製造装置

Country Status (1)

Country Link
JP (1) JPH0744014Y2 (ja)

Also Published As

Publication number Publication date
JPH0744014Y2 (ja) 1995-10-09

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees