JPH0379296B2 - - Google Patents

Info

Publication number
JPH0379296B2
JPH0379296B2 JP62247452A JP24745287A JPH0379296B2 JP H0379296 B2 JPH0379296 B2 JP H0379296B2 JP 62247452 A JP62247452 A JP 62247452A JP 24745287 A JP24745287 A JP 24745287A JP H0379296 B2 JPH0379296 B2 JP H0379296B2
Authority
JP
Japan
Prior art keywords
substrate
film
optical
target
oxygen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62247452A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0193426A (ja
Inventor
Takashi Okuda
Naoki Koshihara
Kunihiko Hayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP62247452A priority Critical patent/JPH0193426A/ja
Publication of JPH0193426A publication Critical patent/JPH0193426A/ja
Publication of JPH0379296B2 publication Critical patent/JPH0379296B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/46—Sputtering by ion beam produced by an external ion source

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Soft Magnetic Materials (AREA)
  • Compounds Of Iron (AREA)
JP62247452A 1987-09-30 1987-09-30 強磁性化合物およびその薄膜製造方法 Granted JPH0193426A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62247452A JPH0193426A (ja) 1987-09-30 1987-09-30 強磁性化合物およびその薄膜製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62247452A JPH0193426A (ja) 1987-09-30 1987-09-30 強磁性化合物およびその薄膜製造方法

Publications (2)

Publication Number Publication Date
JPH0193426A JPH0193426A (ja) 1989-04-12
JPH0379296B2 true JPH0379296B2 (enExample) 1991-12-18

Family

ID=17163655

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62247452A Granted JPH0193426A (ja) 1987-09-30 1987-09-30 強磁性化合物およびその薄膜製造方法

Country Status (1)

Country Link
JP (1) JPH0193426A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110556225B (zh) * 2018-06-04 2021-01-26 清华大学 铁磁绝缘材料、制备方法及应用

Also Published As

Publication number Publication date
JPH0193426A (ja) 1989-04-12

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term