JPH0379157U - - Google Patents

Info

Publication number
JPH0379157U
JPH0379157U JP13979289U JP13979289U JPH0379157U JP H0379157 U JPH0379157 U JP H0379157U JP 13979289 U JP13979289 U JP 13979289U JP 13979289 U JP13979289 U JP 13979289U JP H0379157 U JPH0379157 U JP H0379157U
Authority
JP
Japan
Prior art keywords
electrode
section
draw
downstream
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13979289U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13979289U priority Critical patent/JPH0379157U/ja
Publication of JPH0379157U publication Critical patent/JPH0379157U/ja
Pending legal-status Critical Current

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  • Electron Sources, Ion Sources (AREA)

Description

【図面の簡単な説明】
第１図は、この考案の一実施例に係る荷電粒子
源を示す概略図であり、Ａは荷電粒子引出し時を
、Ｂは荷電粒子遮断時をそれぞれ示す。第２図は
、従来の荷電粒子源の一例を示す概略図である。 ２……プラズマソース部、８……プラズマ、１
０……引出し部、１２，１４……電極、１６……
荷電粒子、１８……制御電極、２０……スイツチ
手段。

Claims (1)

    【実用新案登録請求の範囲】
  1. プラズマを作るプラズマソース部と、複数枚の
    電極から成り、このプラズマソース部から荷電粒
    子を選択的に引き出す引出し部とを備える荷電粒
    子源において、前記引出し部を構成する電極の内
    の最下流側の電極のすぐ下流側に、荷電粒子の流
    れを制御する制御電極を設け、かつこの制御電極
    と前記最下流側の電極との間を、スイツチ手段を
    介して電気的に接続していることを特徴とする荷
    電粒子源。
JP13979289U 1989-11-30 1989-11-30 Pending JPH0379157U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13979289U JPH0379157U (ja) 1989-11-30 1989-11-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13979289U JPH0379157U (ja) 1989-11-30 1989-11-30

Publications (1)

Publication Number Publication Date
JPH0379157U true JPH0379157U (ja) 1991-08-12

Family

ID=31686817

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13979289U Pending JPH0379157U (ja) 1989-11-30 1989-11-30

Country Status (1)

Country Link
JP (1) JPH0379157U (ja)

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