JPH037899B2 - - Google Patents
Info
- Publication number
- JPH037899B2 JPH037899B2 JP59079307A JP7930784A JPH037899B2 JP H037899 B2 JPH037899 B2 JP H037899B2 JP 59079307 A JP59079307 A JP 59079307A JP 7930784 A JP7930784 A JP 7930784A JP H037899 B2 JPH037899 B2 JP H037899B2
- Authority
- JP
- Japan
- Prior art keywords
- crater
- measured values
- sputter
- summed
- ion beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000034 method Methods 0.000 claims abstract description 34
- 238000010884 ion-beam technique Methods 0.000 claims abstract description 20
- 238000005259 measurement Methods 0.000 claims description 43
- 150000002500 ions Chemical group 0.000 claims description 16
- 238000002203 pretreatment Methods 0.000 claims description 2
- 230000006870 function Effects 0.000 claims 1
- 238000013500 data storage Methods 0.000 abstract description 4
- 238000004458 analytical method Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- 229910052729 chemical element Inorganic materials 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000004949 mass spectrometry Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000001004 secondary ion mass spectrometry Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
- H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
- H01J49/142—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using a solid target which is not previously vapourised
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
- H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/0004—Imaging particle spectrometry
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/0027—Methods for using particle spectrometers
- H01J49/0036—Step by step routines describing the handling of the data generated during a measurement
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE3335625.4 | 1983-09-30 | ||
DE19833335625 DE3335625A1 (de) | 1983-09-30 | 1983-09-30 | Verfahren und vorrichtung zur speicherung der messdaten aus teilbereichen eines sputterkraters, der in einem sekundaerionen-massenspektrometer erzeugt und analysiert wird |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6079253A JPS6079253A (ja) | 1985-05-07 |
JPH037899B2 true JPH037899B2 (fr) | 1991-02-04 |
Family
ID=6210644
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP59079307A Granted JPS6079253A (ja) | 1983-09-30 | 1984-04-19 | スパツタ・クレ−タからの測定デ−タの記憶方法および装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US4860225A (fr) |
EP (1) | EP0143146B1 (fr) |
JP (1) | JPS6079253A (fr) |
AT (1) | ATE61156T1 (fr) |
DE (2) | DE3335625A1 (fr) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3636506A1 (de) * | 1986-10-27 | 1988-04-28 | Atomika Tech Physik Gmbh | Spiralabtastverfahren |
ES2060620T3 (es) * | 1987-06-04 | 1994-12-01 | Ciba Geigy Ag | Microparticulas de polimero estrella estables a la luz. |
EP0350815B1 (fr) * | 1988-07-14 | 1993-10-20 | Siemens Aktiengesellschaft | Procédé pour opérer un spectromètre de masse à ions secondaires |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54143290A (en) * | 1978-04-28 | 1979-11-08 | Toshiba Corp | Soldered part inspecting device |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5034439B1 (fr) * | 1969-05-16 | 1975-11-08 | ||
DE1952283C3 (de) * | 1969-10-17 | 1974-01-03 | Siemens Ag, 1000 Berlin U. 8000 Muenchen | Einrichtung zur Bestimmung und Registrierung des Anteils und der Verteilung von digital anfallenden Meßwerten |
JPS5221909B2 (fr) * | 1972-03-17 | 1977-06-14 | ||
JPS532599B2 (fr) * | 1972-10-30 | 1978-01-30 | ||
US3916191A (en) * | 1974-03-01 | 1975-10-28 | Minnesota Mining & Mfg | Imaging apparatus and method for use with ion scattering spectrometer |
US4147928A (en) * | 1977-05-02 | 1979-04-03 | Xerox Corporation | Scanning array configuration |
DE2731129C3 (de) * | 1977-07-09 | 1982-08-12 | Finnigan MAT GmbH, 2800 Bremen | Verfahren zum Betrieb eines der Registrierung eines Licht-, Ionen- oder Elektronenspektrums dienenden Spektrometers |
US4132898A (en) * | 1977-11-01 | 1979-01-02 | Fujitsu Limited | Overlapping boundary electron exposure system method and apparatus |
JPS55146931A (en) * | 1979-05-04 | 1980-11-15 | Hitachi Ltd | Depicting method by electronic beam |
DE3041219C2 (de) * | 1980-11-03 | 1983-11-03 | Bruker Analytische Meßtechnik GmbH, 7512 Rheinstetten | Vorrichtung zur Speicherung von Meßdaten |
JPS57179728A (en) * | 1981-04-30 | 1982-11-05 | Toa Medical Electronics Co Ltd | Apparatus for analyzing particle |
US4540884A (en) * | 1982-12-29 | 1985-09-10 | Finnigan Corporation | Method of mass analyzing a sample by use of a quadrupole ion trap |
-
1983
- 1983-09-30 DE DE19833335625 patent/DE3335625A1/de not_active Withdrawn
-
1984
- 1984-03-27 EP EP84103386A patent/EP0143146B1/fr not_active Expired - Lifetime
- 1984-03-27 AT AT84103386T patent/ATE61156T1/de not_active IP Right Cessation
- 1984-03-27 DE DE8484103386T patent/DE3484172D1/de not_active Expired - Fee Related
- 1984-04-19 JP JP59079307A patent/JPS6079253A/ja active Granted
-
1988
- 1988-04-07 US US07/183,336 patent/US4860225A/en not_active Expired - Fee Related
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54143290A (en) * | 1978-04-28 | 1979-11-08 | Toshiba Corp | Soldered part inspecting device |
Also Published As
Publication number | Publication date |
---|---|
EP0143146B1 (fr) | 1991-02-27 |
ATE61156T1 (de) | 1991-03-15 |
EP0143146A1 (fr) | 1985-06-05 |
JPS6079253A (ja) | 1985-05-07 |
DE3335625A1 (de) | 1985-04-11 |
US4860225A (en) | 1989-08-22 |
DE3484172D1 (de) | 1991-04-04 |
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