JPH037873Y2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a lamp that is particularly suitable for use in the production process of semiconductor devices.

In the production process of semiconductor devices, it is necessary to keep the work room dust-free to prevent contamination of semiconductor elements, and to ensure that not only workers but also equipment used in production do not become a source of dust. is required.

Incidentally, as a light source used in the production process of semiconductor devices, for example, as an exposure light source in photoetching of semiconductor wafers, for example, an ultra-high pressure mercury lamp shown in FIG. 1 is used. This lamp has an end 111 of the sealing part 11 of the lamp body 1.
A cylindrical cap 2 having an inner diameter slightly larger than the outer diameter of the sealing part 11 is mounted on the cap 2, and the cap 2 is fixed to the sealing part 11 with the adhesive 3 filled inside the cap 2. , an internal lead 12 and a metal foil 1 are connected to a terminal 4 formed on the outer end surface 21 of the cap 2 and an electrode (not shown) inside the lamp body 1.
The external lead 14 is electrically connected to the external lead 14 via the external lead 3 .

However, in a lamp having such a structure, since the adhesive 3 is exposed at the open end 22 of the cap 2, fine powder of the adhesive 3 scatters from this exposed portion 31 and has the disadvantage that it contaminates the inside of the working room. . In other words, since the adhesive 3 is required to have heat resistance, cement-based adhesives are generally used, but cement-based adhesives are brittle after solidifying.
Its surface tends to be gradually weathered. Since the adhesive 3 is heated by the lighting of the lamp and is also irradiated with ultraviolet rays or other light from the exposed portion 31, a phenomenon similar to weathering progresses significantly, causing fine particles of the adhesive 3 to form from the exposed portion 31. This creates dust consisting of missing pieces, which causes problems in the production process of semiconductor devices.

The present invention was developed against this background, and aims to provide a lamp that does not scatter fine powder of adhesive, does not contaminate the inside of the work room, and has excellent durability. Its purpose and characteristics are that at the end of the sealing part of the lamp body,
In a lamp constructed of a cap filled with an adhesive, the surface of the exposed part of the adhesive at the open end of the cap is coated with a film made of heat-resistant paint.

Hereinafter, one embodiment of the present invention will be described in detail with reference to the drawings.

FIG. 2 is an enlarged longitudinal sectional plan view showing the main parts of an embodiment of the present invention. Note that the same parts as in FIG. 1 are denoted by the same reference numerals, and the explanation thereof will be omitted.

In this embodiment, the sealing part 1 of the lamp body 1 is
A coating 6 made of heat-resistant paint is formed on the entire surface of the exposed portion 31 of the adhesive 3 at the open end 22 of the cap 2 attached to the end 111 of the cap 1 .

Here, the coating 6 has (a) high heat resistance and can withstand high temperatures of 300°C or more, and (b) little deterioration over time.
Conditions include: no generation of dust due to deterioration, and (c) strong adhesive strength with cement-based adhesives and caps (generally made of metal).

The heat-resistant paint constituting this coating 6 is not particularly limited as long as it satisfies each of the above conditions, but an inorganic paint containing sodium silicate as a main component is suitable. For example, the commercial product "OKITSUMO" (manufactured by Mie Yushi Kako Co., Ltd.),
Preferred examples include "SUNTOMO" (manufactured by Mitsui Bussan Kakoki Sales Co., Ltd.).

The thickness of the coating 6 is preferably about 30 to 40 μm in consideration of coatability, mechanical strength, and the like.

The present invention has the above-described configuration, and since the exposed surface of the adhesive 3 is covered with the coating 6, the fine powder of the adhesive 3 is not scattered into the atmosphere, and the coating 6 is It has high heat resistance, is not easily deteriorated by external factors such as high heat or ultraviolet rays, and does not become a source of dust, so it does not contaminate the inside of the work room. In addition, light rays such as ultraviolet rays generated by lighting the lamp are blocked by the coating 6 and are not directly irradiated onto the adhesive 3, so deterioration of the adhesive 3 due to these rays is suppressed. Improves durability. Further, since the adhesive 3 is not exposed due to the coating 6, the lamp structure is good.

Examples of the lamp according to the present invention include various semiconductor exposure light sources including a high-pressure mercury lamp or an ultra-high-pressure mercury lamp.

As described above, the lamp according to the present invention is a lamp configured by attaching a cap filled with an adhesive to the end of the sealing part of the lamp body, in which the adhesive is applied to the open end of the cap. The structure is characterized in that the surface of the exposed part is coated with a film made of heat-resistant paint, so fine powder of the adhesive does not scatter and contaminate the work room, and it has excellent durability. have

[Brief explanation of drawings]

FIG. 1 is an illustrative partial longitudinal sectional plan view showing an example of a conventional lamp, and FIG. 2 is an illustrative enlarged longitudinal sectional plan view showing a main part of an embodiment of the present invention. DESCRIPTION OF SYMBOLS 1... Lamp body, 11... Sealing part, 111...
... end, 12 ... internal lead, 13 ... metal foil,
14...External lead, 2...Cap, 21...
Outer end surface, 22...opening end, 3...adhesive, 31...
...Exposed part, 4...Terminal, 6...Coating.

Claims (1)

[Claims for Utility Model Registration] In a lamp constructed by attaching a cap filled with an adhesive to the end of a sealed portion of a lamp body, an exposed portion of the adhesive at an open end of the cap. A lamp characterized in that the surface of the lamp is coated with a film made of heat-resistant paint.