JPH0378060U - - Google Patents
Info
- Publication number
- JPH0378060U JPH0378060U JP14010489U JP14010489U JPH0378060U JP H0378060 U JPH0378060 U JP H0378060U JP 14010489 U JP14010489 U JP 14010489U JP 14010489 U JP14010489 U JP 14010489U JP H0378060 U JPH0378060 U JP H0378060U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- vacuum chamber
- rotary table
- mounting
- board
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 8
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図は、本考案の搬出入処理装置を示す構成
概略図、第２図乃至第５図は、その処理工程を説
明する図、第６図は、本装置による処理のフロー
、第７図は、従来の基板の処理装置を示す図、第
８図及び第９図は、従来の処理工程を説明する図
、第１０図は、従来の処理フローである。
尚、図中１……真空チヤンバ、１１……扉、１
２……軌道、２……回転テーブル、２１，２２，
２３……搬出入軌道、４……基板取付専用ロボツ
ト、５……基板取出専用ロボツト、Ｏ……テーブ
ル回転軸である。
Fig. 1 is a schematic configuration diagram showing the loading/unloading processing device of the present invention, Figs. 2 to 5 are diagrams explaining the processing steps, Fig. 6 is the flow of processing by this device, and Fig. 7 1 is a diagram showing a conventional substrate processing apparatus, FIGS. 8 and 9 are diagrams explaining conventional processing steps, and FIG. 10 is a conventional processing flow. In addition, in the figure 1...vacuum chamber, 11...door, 1
2...orbit, 2...rotary table, 21, 22,
23... Loading/unloading track, 4... Robot dedicated to mounting the board, 5... Robot dedicated to taking out the board, O... Table rotation axis.
Claims (1)
バと、 搬出入軌道を介して該真空チヤンバへ基板取付
台車を搬入し、同軌道を介して搬出した基板取付
台車を載置する回転テーブルと、 該回転テーブル上の基板取付台車に対して基板
を取付ける取付専用ロボツトと、真空チヤンバか
ら搬出した基板取付台車から基板を取出す取出専
用ロボツトとを前記回転テーブルの周囲で且つ該
真空チヤンバに対して夫々略１２０°の位置に配
置したものから成り、 前記回転テーブル上にはテーブル回転軸を中心
にして均等間隔に配置された三つの搬出入軌道を
設けたことを特徴とする基板の搬出入処理装置。[Scope of Claim for Utility Model Registration] A vacuum chamber in which a board mounting trolley is formed to be able to move in and out; the board mounting trolley is carried into the vacuum chamber via a carry-in/out track, and the board mounting trolley is carried out via the track. A rotary table for placing the substrate, a robot dedicated for mounting to attach the substrate to the substrate mounting cart on the rotary table, and a robot dedicated for taking out the substrate to take out the substrate from the substrate mounting cart carried out from the vacuum chamber, around the rotary table and on the substrate. The rotary table is provided with three loading/unloading tracks arranged at equal intervals around the table rotation axis, each of which is positioned at approximately 120 degrees with respect to the vacuum chamber. Board loading/unloading processing equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14010489U JPH0627650Y2 (en) | 1989-12-01 | 1989-12-01 | Substrate loading / unloading equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14010489U JPH0627650Y2 (en) | 1989-12-01 | 1989-12-01 | Substrate loading / unloading equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0378060U true JPH0378060U (en) | 1991-08-07 |
| JPH0627650Y2 JPH0627650Y2 (en) | 1994-07-27 |
Family
ID=31687102
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14010489U Expired - Lifetime JPH0627650Y2 (en) | 1989-12-01 | 1989-12-01 | Substrate loading / unloading equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0627650Y2 (en) |
-
1989
- 1989-12-01 JP JP14010489U patent/JPH0627650Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0627650Y2 (en) | 1994-07-27 |
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