JPH0377847B2 - - Google Patents
Info
- Publication number
- JPH0377847B2 JPH0377847B2 JP9069886A JP9069886A JPH0377847B2 JP H0377847 B2 JPH0377847 B2 JP H0377847B2 JP 9069886 A JP9069886 A JP 9069886A JP 9069886 A JP9069886 A JP 9069886A JP H0377847 B2 JPH0377847 B2 JP H0377847B2
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- heater
- furnace
- heat treatment
- fluidized bed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010438 heat treatment Methods 0.000 claims description 57
- 239000002184 metal Substances 0.000 claims description 8
- 238000000034 method Methods 0.000 claims description 7
- 238000012545 processing Methods 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 29
- 238000001514 detection method Methods 0.000 description 12
- 239000002245 particle Substances 0.000 description 12
- 230000015572 biosynthetic process Effects 0.000 description 6
- 238000005255 carburizing Methods 0.000 description 4
- 238000011282 treatment Methods 0.000 description 4
- 238000012360 testing method Methods 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 239000004576 sand Substances 0.000 description 2
- 229910052845 zircon Inorganic materials 0.000 description 2
- GFQYVLUOOAAOGM-UHFFFAOYSA-N zirconium(iv) silicate Chemical compound [Zr+4].[O-][Si]([O-])([O-])[O-] GFQYVLUOOAAOGM-UHFFFAOYSA-N 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000005121 nitriding Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Landscapes
- Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9069886A JPS62247020A (ja) | 1986-04-18 | 1986-04-18 | 流動層炉による金属熱処理方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9069886A JPS62247020A (ja) | 1986-04-18 | 1986-04-18 | 流動層炉による金属熱処理方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62247020A JPS62247020A (ja) | 1987-10-28 |
| JPH0377847B2 true JPH0377847B2 (enrdf_load_stackoverflow) | 1991-12-11 |
Family
ID=14005746
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9069886A Granted JPS62247020A (ja) | 1986-04-18 | 1986-04-18 | 流動層炉による金属熱処理方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62247020A (enrdf_load_stackoverflow) |
-
1986
- 1986-04-18 JP JP9069886A patent/JPS62247020A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62247020A (ja) | 1987-10-28 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5903711A (en) | Heat treatment apparatus and heat treatment method | |
| JP3839615B2 (ja) | 真空浸炭方法 | |
| JPH0377847B2 (enrdf_load_stackoverflow) | ||
| RU2456370C2 (ru) | Способ паротермического оксидирования стальных изделий и печь для его осуществления | |
| JP2691907B2 (ja) | 加熱方法及び処理装置及び処理方法 | |
| JP5582792B2 (ja) | 加熱装置 | |
| JPS63100124A (ja) | 熱処理装置 | |
| JP4544537B2 (ja) | 浸炭装置および浸炭方法 | |
| JPS6043410B2 (ja) | 流動層炉による金属熱処理方法 | |
| JPS642645B2 (enrdf_load_stackoverflow) | ||
| JPH0468384B2 (enrdf_load_stackoverflow) | ||
| JPH11310819A (ja) | 真空油焼入方法 | |
| JPH03291368A (ja) | 真空浸炭方法及び真空浸炭炉 | |
| JP3103905B2 (ja) | バッチ型雰囲気炉の炉圧調整方法 | |
| JPH05121344A (ja) | 縦型炉及び温度制御方法 | |
| JPH043915A (ja) | 熱処理方法および装置 | |
| JPS61517A (ja) | 流動層冷却装置を用いた真空熱処理装置 | |
| JP2548095B2 (ja) | 流動層炉を用いた金属材料の熱処理方法 | |
| JPH02156525A (ja) | 半導体ウェハー熱処理炉 | |
| JPH0256587B2 (enrdf_load_stackoverflow) | ||
| JPH05251456A (ja) | 枚葉式半導体基板熱処理装置 | |
| JPS63282486A (ja) | 自動温度調節流動層装置 | |
| JPH04337630A (ja) | 半導体ウェハーの熱処理炉 | |
| JPH09289176A (ja) | 基板の熱処理方法及び装置 | |
| JPS63202924A (ja) | 半導体装置製造用の急速加熱装置 |