JPH0377433U - - Google Patents
Info
- Publication number
- JPH0377433U JPH0377433U JP13907089U JP13907089U JPH0377433U JP H0377433 U JPH0377433 U JP H0377433U JP 13907089 U JP13907089 U JP 13907089U JP 13907089 U JP13907089 U JP 13907089U JP H0377433 U JPH0377433 U JP H0377433U
- Authority
- JP
- Japan
- Prior art keywords
- developing device
- substrate
- solution
- spin
- supply pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 239000007788 liquid Substances 0.000 claims description 2
- 239000000243 solution Substances 0.000 claims 3
- 239000011259 mixed solution Substances 0.000 claims 2
- 238000009987 spinning Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 239000003085 diluting agent Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Description
第１図…本考案の実施例にかかわるスピン現像
装置、第２図…従来のスピン現像装置、第３図…
本考案を用いた場合の現像過程を説明する図。
図において、１……基板、２……スピンチヤツ
ク、３……回転軸、４……現像液供給パイプ、５
……希釈液供給パイプ、４−１，５−１……ノズ
ル、６，７……往復回転軸、８……混合液供給パ
イプ、８−１……ノズル、９……往復回転軸であ
る。
Fig. 1...A spin developing device according to an embodiment of the present invention, Fig. 2...A conventional spin developing device, Fig. 3...
FIG. 3 is a diagram illustrating a developing process when using the present invention. In the figure, 1...Substrate, 2...Spin chuck, 3...Rotating shaft, 4...Developer supply pipe, 5
... Diluent supply pipe, 4-1, 5-1 ... Nozzle, 6, 7 ... Reciprocating rotating shaft, 8 ... Mixed liquid supply pipe, 8-1 ... Nozzle, 9 ... Reciprocating rotating shaft .
Claims (1)
を注いで現像するスピン現像装置において、先端
が前記基板の表面方向に揺動され、且つ任意の混
合割合にされた現像液と希釈液との混合液を供給
する混合液供給パイプを設けたことを特徴とする
スピン現像装置。 (2) 前記混合液供給パイプのノズルの形状を、
前記基板の表面方向に偏平な扇形としたことを特
徴とする請求項１記載のスピン現像装置。[Claims for Utility Model Registration] (1) A spin developing device that pours a developing solution and a diluted solution onto a spinning substrate for development, the tip of which is swung toward the surface of the substrate, and the mixing ratio is arbitrary. 1. A spin developing device comprising a mixed solution supply pipe for supplying a mixed solution of a developer and a diluted solution. (2) The shape of the nozzle of the mixed liquid supply pipe is
2. The spin developing device according to claim 1, wherein the spin developing device has a fan shape that is flat in the direction of the surface of the substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13907089U JPH0377433U (en) | 1989-11-30 | 1989-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13907089U JPH0377433U (en) | 1989-11-30 | 1989-11-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0377433U true JPH0377433U (en) | 1991-08-05 |
Family
ID=31686138
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13907089U Pending JPH0377433U (en) | 1989-11-30 | 1989-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0377433U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57192955A (en) * | 1981-05-25 | 1982-11-27 | Toppan Printing Co Ltd | Developing method |
-
1989
- 1989-11-30 JP JP13907089U patent/JPH0377433U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57192955A (en) * | 1981-05-25 | 1982-11-27 | Toppan Printing Co Ltd | Developing method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0377433U (en) | ||
| JPS61188351U (en) | ||
| JPH02125327U (en) | ||
| JPH03102235U (en) | ||
| JPH02132934U (en) | ||
| JPH02142620U (en) | ||
| JPS6230336U (en) | ||
| JPS62115140U (en) | ||
| JPH0215864U (en) | ||
| JPS6444632U (en) | ||
| JPH0344917A (en) | Resist coating spinner | |
| JPS63164216U (en) | ||
| JPH0465122U (en) | ||
| JPS6022528U (en) | Soft ground stirrer | |
| JPS61106329U (en) | ||
| JPS62199127U (en) | ||
| JPS6242963U (en) | ||
| JPS6024338U (en) | liquid stirring device | |
| JPH0430028U (en) | ||
| JPS61195334U (en) | ||
| JPS6386654U (en) | ||
| JPS63162528U (en) | ||
| JPS60114608U (en) | Seed mixer | |
| JPS62140725U (en) | ||
| JPS62199179U (en) |